Introduction to spectroscopic ellipsometry of thin film materials: instrumentation, data analysis, and applications
Saved in:
| Main Authors: | , , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Weinheim, Germany
Wiley-VCH
[2022]
|
| Subjects: | |
| Online Access: | http://www.wiley-vch.de/publish/dt/books/ISBN978-3-527-34951-7/ Inhaltsverzeichnis |
| Physical Description: | x, 187 Seiten Illustrationen, Diagramme 24.4 cm x 17 cm |
| ISBN: | 3527349510 9783527349517 |
Staff View
MARC
| LEADER | 00000nam a22000008c 4500 | ||
|---|---|---|---|
| 001 | BV047943743 | ||
| 003 | DE-604 | ||
| 005 | 20240703 | ||
| 007 | t | ||
| 008 | 220414s2022 gw a||| |||| 00||| eng d | ||
| 015 | |a 21,N45 |2 dnb | ||
| 016 | 7 | |a 1245235397 |2 DE-101 | |
| 020 | |a 3527349510 |9 3-527-34951-0 | ||
| 020 | |a 9783527349517 |c pbk: circa EUR 89.90 (DE) (freier Preis) |9 978-3-527-34951-7 | ||
| 024 | 3 | |a 9783527349517 | |
| 028 | 5 | 2 | |a Bestellnummer: 1134951 000 |
| 035 | |a (OCoLC)1319627971 | ||
| 035 | |a (DE-599)DNB1245235397 | ||
| 040 | |a DE-604 |b ger |e rda | ||
| 041 | 0 | |a eng | |
| 044 | |a gw |c XA-DE-BW | ||
| 049 | |a DE-29T |a DE-20 | ||
| 084 | |a UP 8000 |0 (DE-625)146448: |2 rvk | ||
| 084 | |8 1\p |a 540 |2 23sdnb | ||
| 100 | 1 | |a Wee, Andrew T. S. |e Verfasser |0 (DE-588)138993882 |4 aut | |
| 245 | 1 | 0 | |a Introduction to spectroscopic ellipsometry of thin film materials |b instrumentation, data analysis, and applications |c Andrew T.S. Wee, Xinmao Yin, Chi Sin Tang |
| 264 | 1 | |a Weinheim, Germany |b Wiley-VCH |c [2022] | |
| 300 | |a x, 187 Seiten |b Illustrationen, Diagramme |c 24.4 cm x 17 cm | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 0 | 7 | |a Dünne Schicht |0 (DE-588)4136925-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Ellipsometrie |0 (DE-588)4152025-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Spektroskopie |0 (DE-588)4056138-0 |2 gnd |9 rswk-swf |
| 653 | |a CH15: Spektroskopie | ||
| 653 | |a Chemie | ||
| 653 | |a Chemistry | ||
| 653 | |a MSA0: Werkstoffprüfung | ||
| 653 | |a Materials Characterization | ||
| 653 | |a Materials Science | ||
| 653 | |a Materialwissenschaften | ||
| 653 | |a PHF0: Polymerphysik | ||
| 653 | |a Physics | ||
| 653 | |a Physik | ||
| 653 | |a Polymer Physics | ||
| 653 | |a Polymerphysik | ||
| 653 | |a Spectroscopy | ||
| 653 | |a Spektroskopie | ||
| 653 | |a Werkstoffprüfung | ||
| 689 | 0 | 0 | |a Dünne Schicht |0 (DE-588)4136925-7 |D s |
| 689 | 0 | 1 | |a Ellipsometrie |0 (DE-588)4152025-7 |D s |
| 689 | 0 | 2 | |a Spektroskopie |0 (DE-588)4056138-0 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Yin, Xinmao |0 (DE-588)1263061060 |4 aut | |
| 700 | 1 | |a Tang, Chi Sin |0 (DE-588)1263061850 |4 aut | |
| 710 | 2 | |a Wiley-VCH |0 (DE-588)16179388-5 |4 pbl | |
| 776 | 0 | 8 | |i Erscheint auch als |n Online-Ausgabe, EPUB |z 978-3-527-83395-5 |
| 776 | 0 | 8 | |i Erscheint auch als |n Online-Ausgabe, PDF |z 978-3-527-83394-8 |
| 856 | 4 | 2 | |m X:MVB |u http://www.wiley-vch.de/publish/dt/books/ISBN978-3-527-34951-7/ |
| 856 | 4 | 2 | |m HEBIS Datenaustausch |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=033325189&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 883 | 1 | |8 1\p |a vlb |d 20211106 |q DE-101 |u https://d-nb.info/provenance/plan#vlb | |
Record in the Search Index
| _version_ | 1805083207034470400 |
|---|---|
| adam_text |
LL
L7
Contents
Preface ix
Spectroscopic Ellipsometry: Basic Principles
Spectroscopic Ellipsometry 1
p- and s-Polarized Lights and Fresnel Coefficients 2
Representation of Polarized Lights 3
Principles of Ellipsometric Measurements 5
Rotating-Analyzer Ellipsometer 6
Experimental Setup 7
VASE Spectroscopic Ellipsometer 8
IR-VASE Spectroscopic Ellipsometer 9
Spectroscopic Ellipsometry: General Profiles 10
Ellipsometric Data for Multilayered System 11
Dielectric Models 12
Drude Model 13
Lorentz Model 14
Drude-Lorentz Model 16
Sellmeier and Cauchy Models 17
ChapterSummary 18
References 18
Strongly Correlated Systems: Cuprates and Manganites 19
Introduction 19
High-Transition-Temperature Superconducting Cuprates 19
The Crystalline Structure of Cuprates 20
The Structure of La,_,Sr,CuO, 20
The Structure of YBa,Cu,0,_, 20
The Structure of Nd,_,Ce,CuO, 21
The Electronic Structure of Cuprates 22
Colossal Magnetoresistance Manganites 26
Crystal Structure of La,_,Sr,MnO, 26
The Electronic Structure and Magnetism of LSMO 26
vi] Contents
Strong and Weak Correlations in Ambipolar Cuprate Thin-Film
Systems 28
Samples 29
Spectroscopic Ellipsometry 31
Charge Localization in Cuprate Thin Film on Oxide Substrate 37
Plasmon and High-Energy Exciton Excitations in Cuprate Thin
Films 40
Observation of the Low- and High-Energy Plasmons in LSCO/STO
Film 40
Observation of the High-Energy Excitons in the LSCO/STO Film 43
Jahn-Teller Splitting Energy Controls the Phase Transition in Manganite
Thin-Film Systems 45
References 49
Two-Dimensional Transition Metal Dichalcogenides 59
Introduction 59
Crystal Structures of 2D-TMDs 59
1H-Phase 60
1Tand IT’-Phase 61
1H-1T’-Phase Energetics 61
Arising Electronic Structures 61
Indirect-to-Direct Bandgap Transition 61
Spin-Orbit Splitting 62
1T’-Phase Electronic Band Structure 63
2D-TMD: Excitons 64
Excitons in 2D-TMDs 65
Excitons and Trions 67
Investigative Objectives for 2D-TMDs 67
Ellipsometry in Probing Structural Phase Transition and Electronic
Structures Monolayer-MoS, 68
Experimental Results 70
Sample Preparation 70
Optical Features of Monolayer-MoS, 70
Inverted and Fundamental Gaps of 1T’-Phase 2D-TMDs 71
Dynamics of 1H-1T’-Phase Transition 72
First-Principle Study: Role of Substrates 72
Analyzing the 1H-1T’-Phase Transition of MoS,/Cu 75
Optical Characterization of MoS,/Cu 75
Raman and PL Characterization 76
Photoemission Spectroscopic Characterization 77
1H-1T’-Phase Transition of WSe,/Au 79
Optical Characterization of WSe,/Au 80
Photoluminescence and Photoemission Characterization of
WSe,/Au 81
Phase Transition Yield of 2D-TMDs 84
3 3 5
Contents } vii
Section Conclusion 85
Three-Dimensional Resonant Exciton in Monolayer-WSe, 87
Materials, Methods, and Results 88
Sample Growth 88
Optical Characterization of Monolayer-WSe, 89
Exciton Peaks: Temperature Dependence 92
Fitting Parameters of c, Spectra 94
Effects of Temperature on SOC in2D TMDs 95
High-Energy Photoluminescence Characterization 97
Power-Dependent Photoluminescence Spectroscopic Study 99
Computational Studies 99
High-Energy Resonant Exciton Demonstrated via GW-BSE
Calculations 99
Comparison Between Wannier-Mott and Resonant Excitons 100
Origin of Resonant Exciton: Band Structure Calculations Analysis 101
3D-Features of Resonant Exciton in Monolayer-WSe, and Thickness
Dependence 103
Estimating Exciton Binding Energy 105
Section Summary 105
Anisotropic Plasmon Excitations in Quasi-Metallic 2D-TMDs 106
Anisotropic Plasmons in 1T’-Phase 2D-TMDs 107
Sample Preparation 107
Detection of Plasmon in 1T’-Phase WSe,/Au 108
One-Dimensional Plasmon in 1T’-Phase WSe, 110
Detecting Plasmons in 1T’-Phase MoS,/Au Monolayer 112
Analyzing One-Dimensional Plasmon in 1T’-Phase 2D-TMDs 115
1H-1T’-Phase Transition 116
Section Conclusion 117
References 118
Single-Layer Graphene Systems 131
Introduction 131
Crystal and Electronic Structure ofGraphene 131
Electronic Band Structure ofGraphene 132
Optoelectronic Properties of Graphene 134
Spectroscopic Ellipsometry Study of Graphene 135
Measurement and Data Analysis of Graphene 135
Resonant Excitonsin Graphene 137
Substrate-Induced Manipulation of Many-Body Effects 138
Conclusion and Outlook 141
References 142
Nickelate Systems 149
Introduction 149
Crystal Structure 149
viti
Contents
Electronic Structures and Ni3d-Orbital Physics 150
Phase Diagram and Metal-Insulator Transitions of RNiO, Systems 151
Magnetic Phases in RNiO, Systems 152
Optical Characterization via Spectroscopic Ellipsometry 153
Effects of Epitaxial Effects on the Electronic Correlations of Nickelate
Thin Films 154
Long-Range Spin Ordering in Nickelate Thin Films 155
Conclusion and Outlook 159
References 161
Future Development and Applications of Spectroscopic
Ellipsometry 167
Development of Mueller Matrix Imaging Techniques in Spectroscopic
Ellipsometry 167
In Situ Analysis of Langmuir Monolayers 169
Emergent Properties at Two-Dimensional Interfaces 170
Micro Devices and Integrated Circuits 171
Metamaterial Research 172
Organic Electronics 172
Biological Materials and Medicines 173
Anisotropic Materials 173
Process Control Analysis 173
References 174
Index 181 |
| adam_txt |
LL
L7
Contents
Preface ix
Spectroscopic Ellipsometry: Basic Principles
Spectroscopic Ellipsometry 1
p- and s-Polarized Lights and Fresnel Coefficients 2
Representation of Polarized Lights 3
Principles of Ellipsometric Measurements 5
Rotating-Analyzer Ellipsometer 6
Experimental Setup 7
VASE Spectroscopic Ellipsometer 8
IR-VASE Spectroscopic Ellipsometer 9
Spectroscopic Ellipsometry: General Profiles 10
Ellipsometric Data for Multilayered System 11
Dielectric Models 12
Drude Model 13
Lorentz Model 14
Drude-Lorentz Model 16
Sellmeier and Cauchy Models 17
ChapterSummary 18
References 18
Strongly Correlated Systems: Cuprates and Manganites 19
Introduction 19
High-Transition-Temperature Superconducting Cuprates 19
The Crystalline Structure of Cuprates 20
The Structure of La,_,Sr,CuO, 20
The Structure of YBa,Cu,0,_, 20
The Structure of Nd,_,Ce,CuO, 21
The Electronic Structure of Cuprates 22
Colossal Magnetoresistance Manganites 26
Crystal Structure of La,_,Sr,MnO, 26
The Electronic Structure and Magnetism of LSMO 26
vi] Contents
Strong and Weak Correlations in Ambipolar Cuprate Thin-Film
Systems 28
Samples 29
Spectroscopic Ellipsometry 31
Charge Localization in Cuprate Thin Film on Oxide Substrate 37
Plasmon and High-Energy Exciton Excitations in Cuprate Thin
Films 40
Observation of the Low- and High-Energy Plasmons in LSCO/STO
Film 40
Observation of the High-Energy Excitons in the LSCO/STO Film 43
Jahn-Teller Splitting Energy Controls the Phase Transition in Manganite
Thin-Film Systems 45
References 49
Two-Dimensional Transition Metal Dichalcogenides 59
Introduction 59
Crystal Structures of 2D-TMDs 59
1H-Phase 60
1Tand IT’-Phase 61
1H-1T’-Phase Energetics 61
Arising Electronic Structures 61
Indirect-to-Direct Bandgap Transition 61
Spin-Orbit Splitting 62
1T’-Phase Electronic Band Structure 63
2D-TMD: Excitons 64
Excitons in 2D-TMDs 65
Excitons and Trions 67
Investigative Objectives for 2D-TMDs 67
Ellipsometry in Probing Structural Phase Transition and Electronic
Structures Monolayer-MoS, 68
Experimental Results 70
Sample Preparation 70
Optical Features of Monolayer-MoS, 70
Inverted and Fundamental Gaps of 1T’-Phase 2D-TMDs 71
Dynamics of 1H-1T’-Phase Transition 72
First-Principle Study: Role of Substrates 72
Analyzing the 1H-1T’-Phase Transition of MoS,/Cu 75
Optical Characterization of MoS,/Cu 75
Raman and PL Characterization 76
Photoemission Spectroscopic Characterization 77
1H-1T’-Phase Transition of WSe,/Au 79
Optical Characterization of WSe,/Au 80
Photoluminescence and Photoemission Characterization of
WSe,/Au 81
Phase Transition Yield of 2D-TMDs 84
3 3 5
Contents } vii
Section Conclusion 85
Three-Dimensional Resonant Exciton in Monolayer-WSe, 87
Materials, Methods, and Results 88
Sample Growth 88
Optical Characterization of Monolayer-WSe, 89
Exciton Peaks: Temperature Dependence 92
Fitting Parameters of c, Spectra 94
Effects of Temperature on SOC in2D TMDs 95
High-Energy Photoluminescence Characterization 97
Power-Dependent Photoluminescence Spectroscopic Study 99
Computational Studies 99
High-Energy Resonant Exciton Demonstrated via GW-BSE
Calculations 99
Comparison Between Wannier-Mott and Resonant Excitons 100
Origin of Resonant Exciton: Band Structure Calculations Analysis 101
3D-Features of Resonant Exciton in Monolayer-WSe, and Thickness
Dependence 103
Estimating Exciton Binding Energy 105
Section Summary 105
Anisotropic Plasmon Excitations in Quasi-Metallic 2D-TMDs 106
Anisotropic Plasmons in 1T’-Phase 2D-TMDs 107
Sample Preparation 107
Detection of Plasmon in 1T’-Phase WSe,/Au 108
One-Dimensional Plasmon in 1T’-Phase WSe, 110
Detecting Plasmons in 1T’-Phase MoS,/Au Monolayer 112
Analyzing One-Dimensional Plasmon in 1T’-Phase 2D-TMDs 115
1H-1T’-Phase Transition 116
Section Conclusion 117
References 118
Single-Layer Graphene Systems 131
Introduction 131
Crystal and Electronic Structure ofGraphene 131
Electronic Band Structure ofGraphene 132
Optoelectronic Properties of Graphene 134
Spectroscopic Ellipsometry Study of Graphene 135
Measurement and Data Analysis of Graphene 135
Resonant Excitonsin Graphene 137
Substrate-Induced Manipulation of Many-Body Effects 138
Conclusion and Outlook 141
References 142
Nickelate Systems 149
Introduction 149
Crystal Structure 149
viti
Contents
Electronic Structures and Ni3d-Orbital Physics 150
Phase Diagram and Metal-Insulator Transitions of RNiO, Systems 151
Magnetic Phases in RNiO, Systems 152
Optical Characterization via Spectroscopic Ellipsometry 153
Effects of Epitaxial Effects on the Electronic Correlations of Nickelate
Thin Films 154
Long-Range Spin Ordering in Nickelate Thin Films 155
Conclusion and Outlook 159
References 161
Future Development and Applications of Spectroscopic
Ellipsometry 167
Development of Mueller Matrix Imaging Techniques in Spectroscopic
Ellipsometry 167
In Situ Analysis of Langmuir Monolayers 169
Emergent Properties at Two-Dimensional Interfaces 170
Micro Devices and Integrated Circuits 171
Metamaterial Research 172
Organic Electronics 172
Biological Materials and Medicines 173
Anisotropic Materials 173
Process Control Analysis 173
References 174
Index 181 |
| any_adam_object | 1 |
| any_adam_object_boolean | 1 |
| author | Wee, Andrew T. S. Yin, Xinmao Tang, Chi Sin |
| author_GND | (DE-588)138993882 (DE-588)1263061060 (DE-588)1263061850 |
| author_facet | Wee, Andrew T. S. Yin, Xinmao Tang, Chi Sin |
| author_role | aut aut aut |
| author_sort | Wee, Andrew T. S. |
| author_variant | a t s w ats atsw x y xy c s t cs cst |
| building | Verbundindex |
| bvnumber | BV047943743 |
| classification_rvk | UP 8000 |
| ctrlnum | (OCoLC)1319627971 (DE-599)DNB1245235397 |
| discipline | Physik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>00000nam a22000008c 4500</leader><controlfield tag="001">BV047943743</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20240703</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">220414s2022 gw a||| |||| 00||| eng d</controlfield><datafield tag="015" ind1=" " ind2=" "><subfield code="a">21,N45</subfield><subfield code="2">dnb</subfield></datafield><datafield tag="016" ind1="7" ind2=" "><subfield code="a">1245235397</subfield><subfield code="2">DE-101</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">3527349510</subfield><subfield code="9">3-527-34951-0</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783527349517</subfield><subfield code="c">pbk: circa EUR 89.90 (DE) (freier Preis)</subfield><subfield code="9">978-3-527-34951-7</subfield></datafield><datafield tag="024" ind1="3" ind2=" "><subfield code="a">9783527349517</subfield></datafield><datafield tag="028" ind1="5" ind2="2"><subfield code="a">Bestellnummer: 1134951 000</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)1319627971</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)DNB1245235397</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rda</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="a">gw</subfield><subfield code="c">XA-DE-BW</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-29T</subfield><subfield code="a">DE-20</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UP 8000</subfield><subfield code="0">(DE-625)146448:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="8">1\p</subfield><subfield code="a">540</subfield><subfield code="2">23sdnb</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Wee, Andrew T. S.</subfield><subfield code="e">Verfasser</subfield><subfield code="0">(DE-588)138993882</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Introduction to spectroscopic ellipsometry of thin film materials</subfield><subfield code="b">instrumentation, data analysis, and applications</subfield><subfield code="c">Andrew T.S. Wee, Xinmao Yin, Chi Sin Tang</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Weinheim, Germany</subfield><subfield code="b">Wiley-VCH</subfield><subfield code="c">[2022]</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">x, 187 Seiten</subfield><subfield code="b">Illustrationen, Diagramme</subfield><subfield code="c">24.4 cm x 17 cm</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Dünne Schicht</subfield><subfield code="0">(DE-588)4136925-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Ellipsometrie</subfield><subfield code="0">(DE-588)4152025-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Spektroskopie</subfield><subfield code="0">(DE-588)4056138-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="653" ind1=" " ind2=" "><subfield code="a">CH15: Spektroskopie</subfield></datafield><datafield tag="653" ind1=" " ind2=" "><subfield code="a">Chemie</subfield></datafield><datafield tag="653" ind1=" " ind2=" "><subfield code="a">Chemistry</subfield></datafield><datafield tag="653" ind1=" " ind2=" "><subfield code="a">MSA0: Werkstoffprüfung</subfield></datafield><datafield tag="653" ind1=" " ind2=" "><subfield code="a">Materials Characterization</subfield></datafield><datafield tag="653" ind1=" " ind2=" "><subfield code="a">Materials Science</subfield></datafield><datafield tag="653" ind1=" " ind2=" "><subfield code="a">Materialwissenschaften</subfield></datafield><datafield tag="653" ind1=" " ind2=" "><subfield code="a">PHF0: Polymerphysik</subfield></datafield><datafield tag="653" ind1=" " ind2=" "><subfield code="a">Physics</subfield></datafield><datafield tag="653" ind1=" " ind2=" "><subfield code="a">Physik</subfield></datafield><datafield tag="653" ind1=" " ind2=" "><subfield code="a">Polymer Physics</subfield></datafield><datafield tag="653" ind1=" " ind2=" "><subfield code="a">Polymerphysik</subfield></datafield><datafield tag="653" ind1=" " ind2=" "><subfield code="a">Spectroscopy</subfield></datafield><datafield tag="653" ind1=" " ind2=" "><subfield code="a">Spektroskopie</subfield></datafield><datafield tag="653" ind1=" " ind2=" "><subfield code="a">Werkstoffprüfung</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Dünne Schicht</subfield><subfield code="0">(DE-588)4136925-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Ellipsometrie</subfield><subfield code="0">(DE-588)4152025-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Spektroskopie</subfield><subfield code="0">(DE-588)4056138-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Yin, Xinmao</subfield><subfield code="0">(DE-588)1263061060</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Tang, Chi Sin</subfield><subfield code="0">(DE-588)1263061850</subfield><subfield code="4">aut</subfield></datafield><datafield tag="710" ind1="2" ind2=" "><subfield code="a">Wiley-VCH</subfield><subfield code="0">(DE-588)16179388-5</subfield><subfield code="4">pbl</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Online-Ausgabe, EPUB</subfield><subfield code="z">978-3-527-83395-5</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Online-Ausgabe, PDF</subfield><subfield code="z">978-3-527-83394-8</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">X:MVB</subfield><subfield code="u">http://www.wiley-vch.de/publish/dt/books/ISBN978-3-527-34951-7/</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">HEBIS Datenaustausch</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=033325189&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="a">vlb</subfield><subfield code="d">20211106</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#vlb</subfield></datafield></record></collection> |
| id | DE-604.BV047943743 |
| illustrated | Illustrated |
| index_date | 2024-07-03T19:35:49Z |
| indexdate | 2024-07-20T07:44:53Z |
| institution | BVB |
| institution_GND | (DE-588)16179388-5 |
| isbn | 3527349510 9783527349517 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-033325189 |
| oclc_num | 1319627971 |
| open_access_boolean | |
| owner | DE-29T DE-20 |
| owner_facet | DE-29T DE-20 |
| physical | x, 187 Seiten Illustrationen, Diagramme 24.4 cm x 17 cm |
| publishDate | 2022 |
| publishDateSearch | 2022 |
| publishDateSort | 2022 |
| publisher | Wiley-VCH |
| record_format | marc |
| spelling | Wee, Andrew T. S. Verfasser (DE-588)138993882 aut Introduction to spectroscopic ellipsometry of thin film materials instrumentation, data analysis, and applications Andrew T.S. Wee, Xinmao Yin, Chi Sin Tang Weinheim, Germany Wiley-VCH [2022] x, 187 Seiten Illustrationen, Diagramme 24.4 cm x 17 cm txt rdacontent n rdamedia nc rdacarrier Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Ellipsometrie (DE-588)4152025-7 gnd rswk-swf Spektroskopie (DE-588)4056138-0 gnd rswk-swf CH15: Spektroskopie Chemie Chemistry MSA0: Werkstoffprüfung Materials Characterization Materials Science Materialwissenschaften PHF0: Polymerphysik Physics Physik Polymer Physics Polymerphysik Spectroscopy Spektroskopie Werkstoffprüfung Dünne Schicht (DE-588)4136925-7 s Ellipsometrie (DE-588)4152025-7 s Spektroskopie (DE-588)4056138-0 s DE-604 Yin, Xinmao (DE-588)1263061060 aut Tang, Chi Sin (DE-588)1263061850 aut Wiley-VCH (DE-588)16179388-5 pbl Erscheint auch als Online-Ausgabe, EPUB 978-3-527-83395-5 Erscheint auch als Online-Ausgabe, PDF 978-3-527-83394-8 X:MVB http://www.wiley-vch.de/publish/dt/books/ISBN978-3-527-34951-7/ HEBIS Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=033325189&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis 1\p vlb 20211106 DE-101 https://d-nb.info/provenance/plan#vlb |
| spellingShingle | Wee, Andrew T. S. Yin, Xinmao Tang, Chi Sin Introduction to spectroscopic ellipsometry of thin film materials instrumentation, data analysis, and applications Dünne Schicht (DE-588)4136925-7 gnd Ellipsometrie (DE-588)4152025-7 gnd Spektroskopie (DE-588)4056138-0 gnd |
| subject_GND | (DE-588)4136925-7 (DE-588)4152025-7 (DE-588)4056138-0 |
| title | Introduction to spectroscopic ellipsometry of thin film materials instrumentation, data analysis, and applications |
| title_auth | Introduction to spectroscopic ellipsometry of thin film materials instrumentation, data analysis, and applications |
| title_exact_search | Introduction to spectroscopic ellipsometry of thin film materials instrumentation, data analysis, and applications |
| title_exact_search_txtP | Introduction to spectroscopic ellipsometry of thin film materials instrumentation, data analysis and applications |
| title_full | Introduction to spectroscopic ellipsometry of thin film materials instrumentation, data analysis, and applications Andrew T.S. Wee, Xinmao Yin, Chi Sin Tang |
| title_fullStr | Introduction to spectroscopic ellipsometry of thin film materials instrumentation, data analysis, and applications Andrew T.S. Wee, Xinmao Yin, Chi Sin Tang |
| title_full_unstemmed | Introduction to spectroscopic ellipsometry of thin film materials instrumentation, data analysis, and applications Andrew T.S. Wee, Xinmao Yin, Chi Sin Tang |
| title_short | Introduction to spectroscopic ellipsometry of thin film materials |
| title_sort | introduction to spectroscopic ellipsometry of thin film materials instrumentation data analysis and applications |
| title_sub | instrumentation, data analysis, and applications |
| topic | Dünne Schicht (DE-588)4136925-7 gnd Ellipsometrie (DE-588)4152025-7 gnd Spektroskopie (DE-588)4056138-0 gnd |
| topic_facet | Dünne Schicht Ellipsometrie Spektroskopie |
| url | http://www.wiley-vch.de/publish/dt/books/ISBN978-3-527-34951-7/ http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=033325189&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT weeandrewts introductiontospectroscopicellipsometryofthinfilmmaterialsinstrumentationdataanalysisandapplications AT yinxinmao introductiontospectroscopicellipsometryofthinfilmmaterialsinstrumentationdataanalysisandapplications AT tangchisin introductiontospectroscopicellipsometryofthinfilmmaterialsinstrumentationdataanalysisandapplications AT wileyvch introductiontospectroscopicellipsometryofthinfilmmaterialsinstrumentationdataanalysisandapplications |