APA (7th ed.) Citation

Levinson, H. J. (2010). Principles of lithography (3. ed.). SPIE. https://doi.org/10.1117/3.865363

Chicago Style (17th ed.) Citation

Levinson, Harry J. Principles of Lithography. 3. ed. Bellingham: SPIE, 2010. https://doi.org/10.1117/3.865363.

MLA (9th ed.) Citation

Levinson, Harry J. Principles of Lithography. 3. ed. SPIE, 2010. https://doi.org/10.1117/3.865363.