Principles of lithography:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Bellingham
SPIE
2010
|
| Ausgabe: | 3. ed |
| Schlagworte: | |
| Online-Zugang: | FHD01 Volltext |
| Beschreibung: | 1 Online-Ressource (525 S.) |
| ISBN: | 9780819483256 |
| DOI: | 10.1117/3.865363 |
Internformat
MARC
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| 024 | 7 | |a 10.1117/3.865363 |2 doi | |
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| 100 | 1 | |a Levinson, Harry J. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Principles of lithography |c Harry J. Levinson |
| 250 | |a 3. ed | ||
| 264 | 1 | |a Bellingham |b SPIE |c 2010 | |
| 300 | |a 1 Online-Ressource (525 S.) | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 650 | 0 | 7 | |a Lithografie |g Halbleitertechnologie |0 (DE-588)4191584-7 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Lithografie |g Halbleitertechnologie |0 (DE-588)4191584-7 |D s |
| 689 | 0 | |5 DE-604 | |
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| 856 | 4 | 0 | |u https://doi.org/10.1117/3.865363 |x Verlag |3 Volltext |
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Datensatz im Suchindex
| _version_ | 1804143693839466496 |
|---|---|
| any_adam_object | |
| author | Levinson, Harry J. |
| author_facet | Levinson, Harry J. |
| author_role | aut |
| author_sort | Levinson, Harry J. |
| author_variant | h j l hj hjl |
| building | Verbundindex |
| bvnumber | BV036966639 |
| classification_rvk | ZN 4170 |
| collection | ZDB-50-SPI ebook |
| ctrlnum | (OCoLC)706978885 (DE-599)BVBBV036966639 |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| doi_str_mv | 10.1117/3.865363 |
| edition | 3. ed |
| format | Electronic eBook |
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| id | DE-604.BV036966639 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-09T22:51:43Z |
| institution | BVB |
| isbn | 9780819483256 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-020881429 |
| oclc_num | 706978885 |
| open_access_boolean | |
| owner | DE-1050 |
| owner_facet | DE-1050 |
| physical | 1 Online-Ressource (525 S.) |
| psigel | ZDB-50-SPI ebook |
| publishDate | 2010 |
| publishDateSearch | 2010 |
| publishDateSort | 2010 |
| publisher | SPIE |
| record_format | marc |
| spelling | Levinson, Harry J. Verfasser aut Principles of lithography Harry J. Levinson 3. ed Bellingham SPIE 2010 1 Online-Ressource (525 S.) txt rdacontent c rdamedia cr rdacarrier Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf Lithografie Halbleitertechnologie (DE-588)4191584-7 s DE-604 Erscheint auch als Druckausgabe 978-0-8194-8324-9 https://doi.org/10.1117/3.865363 Verlag Volltext |
| spellingShingle | Levinson, Harry J. Principles of lithography Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| subject_GND | (DE-588)4191584-7 |
| title | Principles of lithography |
| title_auth | Principles of lithography |
| title_exact_search | Principles of lithography |
| title_full | Principles of lithography Harry J. Levinson |
| title_fullStr | Principles of lithography Harry J. Levinson |
| title_full_unstemmed | Principles of lithography Harry J. Levinson |
| title_short | Principles of lithography |
| title_sort | principles of lithography |
| topic | Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| topic_facet | Lithografie Halbleitertechnologie |
| url | https://doi.org/10.1117/3.865363 |
| work_keys_str_mv | AT levinsonharryj principlesoflithography |