Holdings: Nanotechnology :: THWS Bibkatalog

Nanotechnology: an introduction to nanostructuring techniques

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Bibliographic Details
Main Authors:	Köhler, Michael (Author), Fritzsche, Wolfgang (Author)
Format:	Book
Language:	English
Published:	Weinheim Wiley-VCH 2007
Edition:	2., compl. rev. ed.
Subjects:	Nanotechnologie Einführung
Online Access:	Beschreibung für Leser Inhaltsverzeichnis Inhaltsverzeichnis
Physical Description:	XII, 321 S. Ill., graph. Darst.
ISBN:	9783527318711

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Record in the Search Index

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adam_text	Contents 1 Introduction 1 1.1 The Way into the Nanoworld 1 1.1.1 From Micro- to Nanotechniques 1 1.1.2 Definition of Nanostructures 2 1.1.3 Insight into the Nanoworld 3 1.1.4 Intervention into the Nanoworld 4 1.2 Building Blocks in Nanotechnology 5 1.3 Interactions and Topology 7 1.4 The Microscopic Environment of the Nanoworld 9 2 Molecular Basics 13 2.1 Particles and Bonds 13 2.1.1 Chemical Bonds in Nanotechnology 13 2.1.2 Van der Waals Interactions 14 2.1.3 Dipole-Dipole Interactions 14 2.1.4 Ionic Interactions 16 2.1.5 Metal Bonds 16 2.1.6 Covalent Bonds 17 2.1.7 Coordinative Bonds 19 2.1.8 Hydrogen Bridge Bonds 20 2.1.9 Polyvalent Bonds 20 2.2 Chemical Structure 23 2.2.1 Binding Topologies 23 2.2.2 Building Blocks of Covalent Architecture 24 2.2.3 Units for a Coordinative Architecture 27 2.2.4 Building Blocks for Weakly Bound Aggregates 27 2.2.5 Assembly of Complex Structures through the Internal Hierarchy of Binding Strengths 28 2.2.6 Reaction Probability and Reaction Equilibrium 29 3 Microtechnological Foundations 33 3.1 Planar Technology 33 3.2 Preparation of Thin Layers 37 VI Contents 3.2.1 Condition and Preprocessing of the Substrate Surface 37 3.2.2 Layer Deposition from the Gas Phase 39 3.2.3 Evaporation 42 3.2.4 Sputtering 43 3.2.5 Chemical Vapor Deposition 46 3.2.6 Galvanic Deposition 48 3.2.7 Deposition by Spinning (Spin Coating) 50 3.2.8 Shadow-mask Deposition Techniques S3 3.3 Preparation of Ultrathin Inorganic Layers and Surface-bound Nanoparticles 54 3.3.1 Ultrathin Layers by Vacuum Deposition Processes 54 3.3.2 Deposition of Ultrathin Films from the Liquid Phase 55 3.3.3 In Situ Generation of Ultrathin Inorganic Films by Chemical Surface Modification 56 3.3.4 In Situ Formation of Ultrathin Inorganic Layers on Heteroorganic Materials 57 3.3.5 Immobilization of Nanoparticles 58 3.3.6 In Situ Formation of Inorganic Nanoparticles 59 3.4 Structure Generation and Fabrication of Lithographic Masks 59 3.4.1 Adhesive Mask Technique 59 3.4.2 Role of Resist in Photolithography 63 3.4.3 Serial Pattern Transfer 64 3.4.4 Group Transfer Processes 67 3.4.5 Maskless Structure Generation 68 3.4.6 Soft Lithography 68 3.5 Etching Processes 70 3.5.1 Etching Rate and Selectivity 70 3.5.2 Isotropie and Anisotropie Etching Processes 71 3.5.3 Lithographic Resolution in Etching Processes 72 3.5.4 Wet Etching Processes 73 3.5.5 Dry Etching Processes 76 3.5.6 High-resolution Dry Etching Techniques 78 3.5.7 Choice of Mask for Nanolithographic Etching Processes 80 3.6 Packaging 80 3.7 Biogenic and Bioanalogue Molecules in Technical Microstructures 84 4 Preparation of Nanostructures 87 4.1 Principles of Fabrication 87 4.1.1 Subtractive and Additive Creation of Nanostructures 87 4.1.2 Nanostructure Generation by Lift-off Processes 89 4.1.3 Principles of Nanotechnical Shape-definition and Construction 91 4.2 Nanomechanical Structure Generation 96 4.2.1 Scaling Down of Mechanical Processing Techniques 96 4.2.2 Local Mechanical Cutting Processes 97 4.2.3 Surface Transport Methods 97 Contents VII 4.2.4 Reshaping Processes 98 4.2.5 Soft Lithography for Nanopatterning and Nanoimprinting 202 4.3 Nanolithography 105 4.3.1 Structure Transfer by Electromagnetic Radiation 10S 4.3.2 DUV- and Vacuum-UV Lithography 208 4.3.3 EUV and X-ray Lithography 110 4.3.4 Multilayer Resist Techniques with Optical Pattern Transfer 113 4.3.5 Near-field Optical Micropatterning Techniques 224 4.3.6 Energetic Particles in Nanolithographic Structure Transfer 226 4.3.7 Electron Beam Lithography 227 4.3.8 Ion Beam Lithography 224 4.3.9 Atomic Beam Lithography 126 4.3.10 Molecular and Nanopartíde Beam Lithography 226 4.3.11 Direct Writing of Structures by a Particle Beam 227 4.3.12 Nanostructure Generation by Accelerated Single Particles 230 4.3.13 Patterning by Local Chemical Conversion 232 4.3.14 Nanofabrication by Self-structuring Masks 232 4.4 Nanofabrication by Scanning Probe Techniques 233 4.4.1 Mechanical Surface Modifications based on Scanning Force Microscopy (SFM) 134 4.4.2 Manipulation by a Scanning Tunneling Microscopy (STM) 235 4.4.3 Thermo-mechanical Writing of Nanostructures 237 4.4.4 Electrically Induced Structure Generation by Scanning Probe Techni¬ ques 238 4.4.5 Chemical Induced Scanning Probe Structure Generation 243 4.4.6 Nanostructure Generation by Optical Near-field Probes 145 4.4.7 Scanning Probe Methods for Nanoscale Transfer 246 4.5 Reduction of Feature Sizes by Post-lithographic Processing 146 4.5.1 Narrowing of Nanogaps by Material Deposition 246 4.5.2 Size Reduction by Thermally Induced Reshaping 247 4.5.3 Size Reduction by Sidewall Transfer 248 4.5.4 Formation of Nanodots by Dewetting 248 S Nanotechnical Structures 249 5.1 Nanostructures and Nanomaterials 149 5.2 Inorganic Solids 250 5.2.1 Influence of Material Morphology on Nanoscale Pattern Processes 250 5.2.2 Inorganic Dielectrics 250 5.2.3 Metals 252 5.2.4 Semiconductors 254 5.3 Carbon Nanostructures 256 5.4 Organic Solids and Layer Structures 258 5.4.1 Solids Composed of Smaller Molecules 258 5.4.2 Organic Monolayer and Multilayer Stacks 258 5.4.3 Synthetic Organic Polymers 260 Vili Contents 5.4.4 Biopolymers 262 5.5 Molecular Monolayer and Layer Architectures 162 5.5.1 Langmuir-Blodgett Films 262 5.5.2 Self-assembled Surface Films 264 5.5.3 Binding of Molecules on Solid Substrate Surfaces 265 5.5.4 Secondary Coupling of Molecular Monolayers 267 5.5.5 Categories of Molecular Layers 268 5.5.6 Molecular Coupling Components (Linkers) and Distance Components (Spacers) 272 5.5.7 Definition of Binding Spots on Solid Substrates 272 5.6 Molecular Architectures 274 5.6.1 Single Molecules as Nanostructures 174 5.6.2 Strategies of Molecular Construction 278 5.6.3 Biogenic and Bio-analogous Nanoarchitectures 282 5.6.4 DNA Nanoarchitectures 285 5.6.5 Synthetic Supramolecules 292 5.6.6 Nanoparticles and Nanocompartments 200 5.7 Combination of Molecular Architectures and Nanoparticles With Planar Technical Structures 202 6 Characterization of Nanostructures 221 6.1 Geometrical Characterization 211 6.1.1 Layer Thickness and Vertical Structure Dimensions 211 6.1.2 Lateral Dimensions 225 6.1.3 Structures that Assist Measurement 226 6.2 Characterization of Composition of Layers and Surfaces 227 6.2.1 Atomic Composition 227 6.2.2 Characterization of the Chemical Surface State 220 6.3 Functional Characterization of Nanostructures 223 7 Nanotransducers 225 7.1 Design of Nanotransducers 225 7.2 Nanomechanical Elements 227 7.2.1 Nanomechanical Sensors 227 7.2.2 Nanometer-precision Position Measurements with Conventional Techniques 228 7.2.3 Electrically Controlled Nanoactuators 228 7.2.4 Chemically Driven Nanoactuators 230 7.2.5 Rigidity of Nanoactuators 234 7.3 Nanoelectronic Devices 235 7.3.1 Electrical Contacts and Nanowires235 7.3.2 Nanostructured Tunneling Barriers 240 7.3.3 Quantum Dots and Localization of Elementary Particles 242 7.3.4 Nanodiodes 243 7.3.5 Electron Islands and Nanotransistors 244 Contents IX 7.3.6 Nanoswitches, Molecular Switches and Logic Elements 251 7.3.7 Particle-Emitting Nanotransducers 253 7.4 Nanooptical Devices 254 7.4.1 Nanostractures as Optical Sensors 254 7.4.2 Nanostructured Optical Actuators 255 7.4.3 Nanooptical Switching and Conversion Elements 257 7.5 Magnetic Nanotransducers 258 7.6 Chemical Nanoscale Sensors and Actuators 260 7.8 Nanochannels and Nanofluidic Devices 265 7.8.1 Nanochannel Arrays 267 7.8.2 Nanofluidic Electrospraying 269 7.8.3 Liquid Transport in Nanotubes 269 7.8.4 Nanofluidic Actuators for Optical Application 269 7.8.5 Functional Molecular Devices for Nanofluidics 269 8 Technical Nanosystems 27Î 8.1 What are Nanosystems? 271 8.2 Systems with Nanocomponents 272 8.3 Entire Systems with Nanometer Dimensions 273 Table of Examples 279 References 283 Index 307
adam_txt	Contents 1 Introduction 1 1.1 The Way into the Nanoworld 1 1.1.1 From Micro- to Nanotechniques 1 1.1.2 Definition of Nanostructures 2 1.1.3 Insight into the Nanoworld 3 1.1.4 Intervention into the Nanoworld 4 1.2 Building Blocks in Nanotechnology 5 1.3 Interactions and Topology 7 1.4 The Microscopic Environment of the Nanoworld 9 2 Molecular Basics 13 2.1 Particles and Bonds 13 2.1.1 Chemical Bonds in Nanotechnology 13 2.1.2 Van der Waals Interactions 14 2.1.3 Dipole-Dipole Interactions 14 2.1.4 Ionic Interactions 16 2.1.5 Metal Bonds 16 2.1.6 Covalent Bonds 17 2.1.7 Coordinative Bonds 19 2.1.8 Hydrogen Bridge Bonds 20 2.1.9 Polyvalent Bonds 20 2.2 Chemical Structure 23 2.2.1 Binding Topologies 23 2.2.2 Building Blocks of Covalent Architecture 24 2.2.3 Units for a Coordinative Architecture 27 2.2.4 Building Blocks for Weakly Bound Aggregates 27 2.2.5 Assembly of Complex Structures through the Internal Hierarchy of Binding Strengths 28 2.2.6 Reaction Probability and Reaction Equilibrium 29 3 Microtechnological Foundations 33 3.1 Planar Technology 33 3.2 Preparation of Thin Layers 37 VI Contents 3.2.1 Condition and Preprocessing of the Substrate Surface 37 3.2.2 Layer Deposition from the Gas Phase 39 3.2.3 Evaporation 42 3.2.4 Sputtering 43 3.2.5 Chemical Vapor Deposition 46 3.2.6 Galvanic Deposition 48 3.2.7 Deposition by Spinning (Spin Coating) 50 3.2.8 Shadow-mask Deposition Techniques S3 3.3 Preparation of Ultrathin Inorganic Layers and Surface-bound Nanoparticles 54 3.3.1 Ultrathin Layers by Vacuum Deposition Processes 54 3.3.2 Deposition of Ultrathin Films from the Liquid Phase 55 3.3.3 In Situ Generation of Ultrathin Inorganic Films by Chemical Surface Modification 56 3.3.4 In Situ Formation of Ultrathin Inorganic Layers on Heteroorganic Materials 57 3.3.5 Immobilization of Nanoparticles 58 3.3.6 In Situ Formation of Inorganic Nanoparticles 59 3.4 Structure Generation and Fabrication of Lithographic Masks 59 3.4.1 Adhesive Mask Technique 59 3.4.2 Role of Resist in Photolithography 63 3.4.3 Serial Pattern Transfer 64 3.4.4 Group Transfer Processes 67 3.4.5 Maskless Structure Generation 68 3.4.6 Soft Lithography 68 3.5 Etching Processes 70 3.5.1 Etching Rate and Selectivity 70 3.5.2 Isotropie and Anisotropie Etching Processes 71 3.5.3 Lithographic Resolution in Etching Processes 72 3.5.4 Wet Etching Processes 73 3.5.5 Dry Etching Processes 76 3.5.6 High-resolution Dry Etching Techniques 78 3.5.7 Choice of Mask for Nanolithographic Etching Processes 80 3.6 Packaging 80 3.7 Biogenic and Bioanalogue Molecules in Technical Microstructures 84 4 Preparation of Nanostructures 87 4.1 Principles of Fabrication 87 4.1.1 Subtractive and Additive Creation of Nanostructures 87 4.1.2 Nanostructure Generation by Lift-off Processes 89 4.1.3 Principles of Nanotechnical Shape-definition and Construction 91 4.2 Nanomechanical Structure Generation 96 4.2.1 Scaling Down of Mechanical Processing Techniques 96 4.2.2 Local Mechanical Cutting Processes 97 4.2.3 Surface Transport Methods 97 Contents VII 4.2.4 Reshaping Processes 98 4.2.5 Soft Lithography for Nanopatterning and Nanoimprinting 202 4.3 Nanolithography 105 4.3.1 Structure Transfer by Electromagnetic Radiation 10S 4.3.2 DUV- and Vacuum-UV Lithography 208 4.3.3 EUV and X-ray Lithography 110 4.3.4 Multilayer Resist Techniques with Optical Pattern Transfer 113 4.3.5 Near-field Optical Micropatterning Techniques 224 4.3.6 Energetic Particles in Nanolithographic Structure Transfer 226 4.3.7 Electron Beam Lithography 227 4.3.8 Ion Beam Lithography 224 4.3.9 Atomic Beam Lithography 126 4.3.10 Molecular and Nanopartíde Beam Lithography 226 4.3.11 Direct Writing of Structures by a Particle Beam 227 4.3.12 Nanostructure Generation by Accelerated Single Particles 230 4.3.13 Patterning by Local Chemical Conversion 232 4.3.14 Nanofabrication by Self-structuring Masks 232 4.4 Nanofabrication by Scanning Probe Techniques 233 4.4.1 Mechanical Surface Modifications based on Scanning Force Microscopy (SFM) 134 4.4.2 Manipulation by a Scanning Tunneling Microscopy (STM) 235 4.4.3 Thermo-mechanical Writing of Nanostructures 237 4.4.4 Electrically Induced Structure Generation by Scanning Probe Techni¬ ques 238 4.4.5 Chemical Induced Scanning Probe Structure Generation 243 4.4.6 Nanostructure Generation by Optical Near-field Probes 145 4.4.7 Scanning Probe Methods for Nanoscale Transfer 246 4.5 Reduction of Feature Sizes by Post-lithographic Processing 146 4.5.1 Narrowing of Nanogaps by Material Deposition 246 4.5.2 Size Reduction by Thermally Induced Reshaping 247 4.5.3 Size Reduction by Sidewall Transfer 248 4.5.4 Formation of Nanodots by Dewetting 248 S Nanotechnical Structures 249 5.1 Nanostructures and Nanomaterials 149 5.2 Inorganic Solids 250 5.2.1 Influence of Material Morphology on Nanoscale Pattern Processes 250 5.2.2 Inorganic Dielectrics 250 5.2.3 Metals 252 5.2.4 Semiconductors 254 5.3 Carbon Nanostructures 256 5.4 Organic Solids and Layer Structures 258 5.4.1 Solids Composed of Smaller Molecules 258 5.4.2 Organic Monolayer and Multilayer Stacks 258 5.4.3 Synthetic Organic Polymers 260 Vili Contents 5.4.4 Biopolymers 262 5.5 Molecular Monolayer and Layer Architectures 162 5.5.1 Langmuir-Blodgett Films 262 5.5.2 Self-assembled Surface Films 264 5.5.3 Binding of Molecules on Solid Substrate Surfaces 265 5.5.4 Secondary Coupling of Molecular Monolayers 267 5.5.5 Categories of Molecular Layers 268 5.5.6 Molecular Coupling Components (Linkers) and Distance Components (Spacers) 272 5.5.7 Definition of Binding Spots on Solid Substrates 272 5.6 Molecular Architectures 274 5.6.1 Single Molecules as Nanostructures 174 5.6.2 Strategies of Molecular Construction 278 5.6.3 Biogenic and Bio-analogous Nanoarchitectures 282 5.6.4 DNA Nanoarchitectures 285 5.6.5 Synthetic Supramolecules 292 5.6.6 Nanoparticles and Nanocompartments 200 5.7 Combination of Molecular Architectures and Nanoparticles With Planar Technical Structures 202 6 Characterization of Nanostructures 221 6.1 Geometrical Characterization 211 6.1.1 Layer Thickness and Vertical Structure Dimensions 211 6.1.2 Lateral Dimensions 225 6.1.3 Structures that Assist Measurement 226 6.2 Characterization of Composition of Layers and Surfaces 227 6.2.1 Atomic Composition 227 6.2.2 Characterization of the Chemical Surface State 220 6.3 Functional Characterization of Nanostructures 223 7 Nanotransducers 225 7.1 Design of Nanotransducers 225 7.2 Nanomechanical Elements 227 7.2.1 Nanomechanical Sensors 227 7.2.2 Nanometer-precision Position Measurements with Conventional Techniques 228 7.2.3 Electrically Controlled Nanoactuators 228 7.2.4 Chemically Driven Nanoactuators 230 7.2.5 Rigidity of Nanoactuators 234 7.3 Nanoelectronic Devices 235 7.3.1 Electrical Contacts and Nanowires235 7.3.2 Nanostructured Tunneling Barriers 240 7.3.3 Quantum Dots and Localization of Elementary Particles 242 7.3.4 Nanodiodes 243 7.3.5 Electron Islands and Nanotransistors 244 Contents IX 7.3.6 Nanoswitches, Molecular Switches and Logic Elements 251 7.3.7 Particle-Emitting Nanotransducers 253 7.4 Nanooptical Devices 254 7.4.1 Nanostractures as Optical Sensors 254 7.4.2 Nanostructured Optical Actuators 255 7.4.3 Nanooptical Switching and Conversion Elements 257 7.5 Magnetic Nanotransducers 258 7.6 Chemical Nanoscale Sensors and Actuators 260 7.8 Nanochannels and Nanofluidic Devices 265 7.8.1 Nanochannel Arrays 267 7.8.2 Nanofluidic Electrospraying 269 7.8.3 Liquid Transport in Nanotubes 269 7.8.4 Nanofluidic Actuators for Optical Application 269 7.8.5 Functional Molecular Devices for Nanofluidics 269 8 Technical Nanosystems 27Î 8.1 What are Nanosystems? 271 8.2 Systems with Nanocomponents 272 8.3 Entire Systems with Nanometer Dimensions 273 Table of Examples 279 References 283 Index 307
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genre_facet	Einführung
id	DE-604.BV022406437
illustrated	Illustrated
index_date	2024-07-02T17:20:17Z
indexdate	2024-07-20T09:15:51Z
institution	BVB
isbn	9783527318711
language	English
oai_aleph_id	oai:aleph.bib-bvb.de:BVB01-015614996
oclc_num	255964357
open_access_boolean
owner	DE-20 DE-29T DE-92 DE-703 DE-1051 DE-M49 DE-BY-TUM DE-19 DE-BY-UBM DE-355 DE-BY-UBR DE-526 DE-634 DE-83 DE-11 DE-B768
owner_facet	DE-20 DE-29T DE-92 DE-703 DE-1051 DE-M49 DE-BY-TUM DE-19 DE-BY-UBM DE-355 DE-BY-UBR DE-526 DE-634 DE-83 DE-11 DE-B768
physical	XII, 321 S. Ill., graph. Darst.
publishDate	2007
publishDateSearch	2007
publishDateSort	2007
publisher	Wiley-VCH
record_format	marc
spelling	Köhler, Michael Verfasser aut Nanotechnology an introduction to nanostructuring techniques Michael Köhler and Wolfgang Fritzsche 2., compl. rev. ed. Weinheim Wiley-VCH 2007 XII, 321 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Nanotechnologie Nanotechnologie (DE-588)4327470-5 gnd rswk-swf 1\p (DE-588)4151278-9 Einführung gnd-content Nanotechnologie (DE-588)4327470-5 s DE-604 Fritzsche, Wolfgang Verfasser aut http://deposit.dnb.de/cgi-bin/dokserv?id=2930823&prov=M&dok_var=1&dok_ext=htm Beschreibung für Leser http://www.gbv.de/dms/ilmenau/toc/526803479.PDF Inhaltsverzeichnis Digitalisierung UB Regensburg application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=015614996&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk
spellingShingle	Köhler, Michael Fritzsche, Wolfgang Nanotechnology an introduction to nanostructuring techniques Nanotechnologie Nanotechnologie (DE-588)4327470-5 gnd
subject_GND	(DE-588)4327470-5 (DE-588)4151278-9
title	Nanotechnology an introduction to nanostructuring techniques
title_auth	Nanotechnology an introduction to nanostructuring techniques
title_exact_search	Nanotechnology an introduction to nanostructuring techniques
title_exact_search_txtP	Nanotechnology an introduction to nanostructuring techniques
title_full	Nanotechnology an introduction to nanostructuring techniques Michael Köhler and Wolfgang Fritzsche
title_fullStr	Nanotechnology an introduction to nanostructuring techniques Michael Köhler and Wolfgang Fritzsche
title_full_unstemmed	Nanotechnology an introduction to nanostructuring techniques Michael Köhler and Wolfgang Fritzsche
title_short	Nanotechnology
title_sort	nanotechnology an introduction to nanostructuring techniques
title_sub	an introduction to nanostructuring techniques
topic	Nanotechnologie Nanotechnologie (DE-588)4327470-5 gnd
topic_facet	Nanotechnologie Einführung
url	http://deposit.dnb.de/cgi-bin/dokserv?id=2930823&prov=M&dok_var=1&dok_ext=htm http://www.gbv.de/dms/ilmenau/toc/526803479.PDF http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=015614996&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA
work_keys_str_mv	AT kohlermichael nanotechnologyanintroductiontonanostructuringtechniques AT fritzschewolfgang nanotechnologyanintroductiontonanostructuringtechniques

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