Nanotechnology: an introduction to nanostructuring techniques
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Weinheim
Wiley-VCH
2007
|
| Ausgabe: | 2., compl. rev. ed. |
| Schlagworte: | |
| Online-Zugang: | Beschreibung für Leser Inhaltsverzeichnis Inhaltsverzeichnis |
| Beschreibung: | XII, 321 S. Ill., graph. Darst. |
| ISBN: | 9783527318711 |
Internformat
MARC
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| 100 | 1 | |a Köhler, Michael |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Nanotechnology |b an introduction to nanostructuring techniques |c Michael Köhler and Wolfgang Fritzsche |
| 250 | |a 2., compl. rev. ed. | ||
| 264 | 1 | |a Weinheim |b Wiley-VCH |c 2007 | |
| 300 | |a XII, 321 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
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| 700 | 1 | |a Fritzsche, Wolfgang |e Verfasser |4 aut | |
| 856 | 4 | |u http://deposit.dnb.de/cgi-bin/dokserv?id=2930823&prov=M&dok_var=1&dok_ext=htm |3 Beschreibung für Leser | |
| 856 | 4 | |u http://www.gbv.de/dms/ilmenau/toc/526803479.PDF |3 Inhaltsverzeichnis | |
| 856 | 4 | 2 | |m Digitalisierung UB Regensburg |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=015614996&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
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Datensatz im Suchindex
| _version_ | 1805088931013722112 |
|---|---|
| adam_text |
Contents
1
Introduction
1
1.1
The Way into the Nanoworld
1
1.1.1
From Micro- to Nanotechniques
1
1.1.2
Definition of Nanostructures
2
1.1.3
Insight into the Nanoworld
3
1.1.4
Intervention into the Nanoworld
4
1.2
Building Blocks in Nanotechnology
5
1.3
Interactions and Topology
7
1.4
The Microscopic Environment of the Nanoworld
9
2
Molecular Basics
13
2.1
Particles and Bonds
13
2.1.1
Chemical Bonds in Nanotechnology
13
2.1.2
Van
der Waals
Interactions
14
2.1.3 Dipole-Dipole
Interactions
14
2.1.4
Ionic Interactions
16
2.1.5
Metal Bonds
16
2.1.6
Covalent Bonds
17
2.1.7
Coordinative
Bonds
19
2.1.8
Hydrogen Bridge Bonds
20
2.1.9
Polyvalent Bonds
20
2.2
Chemical Structure
23
2.2.1
Binding Topologies
23
2.2.2
Building Blocks of Covalent Architecture
24
2.2.3
Units for
a Coordinative
Architecture
27
2.2.4
Building Blocks for Weakly Bound Aggregates
27
2.2.5
Assembly of Complex Structures through the Internal Hierarchy of
Binding Strengths
28
2.2.6
Reaction Probability and Reaction Equilibrium
29
3
Microtechnological Foundations
33
3.1
Planar Technology
33
3.2
Preparation of Thin Layers
37
VI
Contents
3.2.1
Condition
and Preprocessing of the Substrate Surface
37
3.2.2
Layer Deposition from the Gas Phase
39
3.2.3
Evaporation
42
3.2.4
Sputtering
43
3.2.5
Chemical Vapor Deposition
46
3.2.6
Galvanic Deposition
48
3.2.7
Deposition by Spinning (Spin Coating)
50
3.2.8
Shadow-mask Deposition Techniques
S3
3.3
Preparation of Ultrathin Inorganic Layers and Surface-bound
Nanoparticles
54
3.3.1
Ultrathin Layers by Vacuum Deposition Processes
54
3.3.2
Deposition of Ultrathin Films from the Liquid Phase
55
3.3.3
In Situ Generation of Ultrathin Inorganic Films by Chemical Surface
Modification
56
3.3.4
In Situ Formation of Ultrathin Inorganic Layers on Heteroorganic
Materials
57
3.3.5
Immobilization of Nanoparticles
58
3.3.6
In Situ Formation of Inorganic Nanoparticles
59
3.4
Structure Generation and Fabrication of Lithographic Masks
59
3.4.1
Adhesive Mask Technique
59
3.4.2
Role of Resist in Photolithography
63
3.4.3
Serial Pattern Transfer
64
3.4.4
Group Transfer Processes
67
3.4.5
Maskless Structure Generation
68
3.4.6
Soft Lithography
68
3.5
Etching Processes
70
3.5.1
Etching Rate and Selectivity
70
3.5.2 Isotropie
and
Anisotropie
Etching Processes
71
3.5.3
Lithographic Resolution in Etching Processes
72
3.5.4
Wet Etching Processes
73
3.5.5
Dry Etching Processes
76
3.5.6
High-resolution Dry Etching Techniques
78
3.5.7
Choice of Mask for Nanolithographic Etching Processes
80
3.6
Packaging
80
3.7
Biogenic and
Bioanalogue
Molecules in Technical
Microstructures
84
4
Preparation of Nanostructures
87
4.1
Principles of Fabrication
87
4.1.1
Subtractive and Additive Creation of Nanostructures
87
4.1.2
Nanostructure Generation by Lift-off Processes
89
4.1.3
Principles of Nanotechnical Shape-definition and Construction
91
4.2
Nanomechanical Structure Generation
96
4.2.1
Scaling Down of Mechanical Processing Techniques
96
4.2.2
Local Mechanical Cutting Processes
97
4.2.3
Surface Transport Methods
97
Contents
VII
4.2.4
Reshaping Processes
98
4.2.5
Soft Lithography for Nanopatterning and Nanoimprinting
202
4.3
Nanolithography
105
4.3.1
Structure Transfer by Electromagnetic Radiation 10S
4.3.2
DUV- and Vacuum-UV Lithography
208
4.3.3
EUV and X-ray Lithography
110
4.3.4
Multilayer Resist Techniques with Optical Pattern Transfer
113
4.3.5
Near-field Optical Micropatterning Techniques
224
4.3.6
Energetic Particles in Nanolithographic Structure Transfer
226
4.3.7
Electron Beam Lithography
227
4.3.8
Ion Beam Lithography
224
4.3.9
Atomic Beam Lithography
126
4.3.10
Molecular and
Nanopartíde
Beam Lithography
226
4.3.11
Direct Writing of Structures by a Particle Beam
227
4.3.12
Nanostructure Generation by Accelerated Single Particles
230
4.3.13
Patterning by Local Chemical Conversion
232
4.3.14
Nanofabrication by Self-structuring Masks
232
4.4
Nanofabrication by Scanning Probe Techniques
233
4.4.1
Mechanical Surface Modifications based on Scanning Force Microscopy
(SFM)
134
4.4.2
Manipulation by a Scanning Tunneling Microscopy (STM)
235
4.4.3
Thermo-mechanical Writing of Nanostructures
237
4.4.4
Electrically Induced Structure Generation by Scanning Probe Techni¬
ques
238
4.4.5
Chemical Induced Scanning Probe Structure Generation
243
4.4.6
Nanostructure Generation by Optical Near-field Probes
145
4.4.7
Scanning Probe Methods for Nanoscale Transfer
246
4.5
Reduction of Feature Sizes by Post-lithographic Processing
146
4.5.1
Narrowing of Nanogaps by Material Deposition
246
4.5.2
Size Reduction by Thermally Induced Reshaping
247
4.5.3
Size Reduction by Sidewall Transfer
248
4.5.4
Formation of Nanodots by Dewetting
248
S Nanotechnical
Structures
249
5.1
Nanostructures and Nanomaterials
149
5.2
Inorganic Solids
250
5.2.1
Influence of Material Morphology on Nanoscale Pattern Processes
250
5.2.2
Inorganic Dielectrics
250
5.2.3
Metals
252
5.2.4
Semiconductors
254
5.3
Carbon Nanostructures
256
5.4
Organic Solids and Layer Structures
258
5.4.1
Solids Composed of Smaller Molecules
258
5.4.2
Organic Monolayer and Multilayer Stacks
258
5.4.3
Synthetic Organic Polymers
260
Vili
Contents
5.4.4 Biopolymers 262
5.5
Molecular Monolayer and Layer Architectures
162
5.5.1
Langmuir-Blodgett Films
262
5.5.2
Self-assembled Surface Films
264
5.5.3
Binding of Molecules on Solid Substrate Surfaces
265
5.5.4
Secondary Coupling of Molecular Monolayers
267
5.5.5
Categories of Molecular Layers
268
5.5.6
Molecular Coupling Components (Linkers) and Distance Components
(Spacers)
272
5.5.7
Definition of Binding Spots on Solid Substrates
272
5.6
Molecular Architectures
274
5.6.1
Single Molecules as Nanostructures
174
5.6.2
Strategies of Molecular Construction
278
5.6.3
Biogenic and Bio-analogous Nanoarchitectures
282
5.6.4 DNA
Nanoarchitectures
285
5.6.5
Synthetic Supramolecules
292
5.6.6
Nanoparticles and Nanocompartments
200
5.7
Combination of Molecular Architectures and Nanoparticles With Planar
Technical Structures
202
6
Characterization of Nanostructures
221
6.1
Geometrical Characterization
211
6.1.1
Layer Thickness and Vertical Structure Dimensions
211
6.1.2
Lateral Dimensions
225
6.1.3
Structures that Assist Measurement
226
6.2
Characterization of Composition of Layers and Surfaces
227
6.2.1
Atomic Composition
227
6.2.2
Characterization of the Chemical Surface State
220
6.3
Functional Characterization of Nanostructures
223
7
Nanotransducers
225
7.1
Design of Nanotransducers
225
7.2
Nanomechanical Elements
227
7.2.1
Nanomechanical Sensors
227
7.2.2
Nanometer-precision Position Measurements with Conventional
Techniques
228
7.2.3
Electrically Controlled Nanoactuators
228
7.2.4
Chemically Driven Nanoactuators
230
7.2.5
Rigidity of Nanoactuators
234
7.3
Nanoelectronic Devices
235
7.3.1
Electrical Contacts and Nanowires235
7.3.2
Nanostructured Tunneling Barriers
240
7.3.3
Quantum Dots and Localization of Elementary Particles
242
7.3.4
Nanodiodes
243
7.3.5
Electron Islands and Nanotransistors
244
Contents
IX
7.3.6 Nanoswitches,
Molecular
Switches and Logic Elements 251
7.3.7
Particle-Emitting Nanotransducers
253
7.4 Nanooptical Devices 254
7.4.1 Nanostractures
as Optical
Sensors 254
7.4.2
Nanostructured Optical Actuators
255
7.4.3 Nanooptical
Switching and Conversion Elements
257
7.5
Magnetic Nanotransducers
258
7.6
Chemical Nanoscale Sensors and Actuators
260
7.8
Nanochannels and Nanofluidic Devices
265
7.8.1
Nanochannel Arrays
267
7.8.2
Nanofluidic Electrospraying
269
7.8.3
Liquid Transport in Nanotubes
269
7.8.4
Nanofluidic Actuators for Optical Application
269
7.8.5
Functional Molecular Devices for Nanofluidics
269
8
Technical Nanosystems
27Î
8.1
What are Nanosystems?
271
8.2
Systems with Nanocomponents
272
8.3
Entire Systems with Nanometer Dimensions
273
Table of Examples
279
References
283
Index
307 |
| adam_txt |
Contents
1
Introduction
1
1.1
The Way into the Nanoworld
1
1.1.1
From Micro- to Nanotechniques
1
1.1.2
Definition of Nanostructures
2
1.1.3
Insight into the Nanoworld
3
1.1.4
Intervention into the Nanoworld
4
1.2
Building Blocks in Nanotechnology
5
1.3
Interactions and Topology
7
1.4
The Microscopic Environment of the Nanoworld
9
2
Molecular Basics
13
2.1
Particles and Bonds
13
2.1.1
Chemical Bonds in Nanotechnology
13
2.1.2
Van
der Waals
Interactions
14
2.1.3 Dipole-Dipole
Interactions
14
2.1.4
Ionic Interactions
16
2.1.5
Metal Bonds
16
2.1.6
Covalent Bonds
17
2.1.7
Coordinative
Bonds
19
2.1.8
Hydrogen Bridge Bonds
20
2.1.9
Polyvalent Bonds
20
2.2
Chemical Structure
23
2.2.1
Binding Topologies
23
2.2.2
Building Blocks of Covalent Architecture
24
2.2.3
Units for
a Coordinative
Architecture
27
2.2.4
Building Blocks for Weakly Bound Aggregates
27
2.2.5
Assembly of Complex Structures through the Internal Hierarchy of
Binding Strengths
28
2.2.6
Reaction Probability and Reaction Equilibrium
29
3
Microtechnological Foundations
33
3.1
Planar Technology
33
3.2
Preparation of Thin Layers
37
VI
Contents
3.2.1
Condition
and Preprocessing of the Substrate Surface
37
3.2.2
Layer Deposition from the Gas Phase
39
3.2.3
Evaporation
42
3.2.4
Sputtering
43
3.2.5
Chemical Vapor Deposition
46
3.2.6
Galvanic Deposition
48
3.2.7
Deposition by Spinning (Spin Coating)
50
3.2.8
Shadow-mask Deposition Techniques
S3
3.3
Preparation of Ultrathin Inorganic Layers and Surface-bound
Nanoparticles
54
3.3.1
Ultrathin Layers by Vacuum Deposition Processes
54
3.3.2
Deposition of Ultrathin Films from the Liquid Phase
55
3.3.3
In Situ Generation of Ultrathin Inorganic Films by Chemical Surface
Modification
56
3.3.4
In Situ Formation of Ultrathin Inorganic Layers on Heteroorganic
Materials
57
3.3.5
Immobilization of Nanoparticles
58
3.3.6
In Situ Formation of Inorganic Nanoparticles
59
3.4
Structure Generation and Fabrication of Lithographic Masks
59
3.4.1
Adhesive Mask Technique
59
3.4.2
Role of Resist in Photolithography
63
3.4.3
Serial Pattern Transfer
64
3.4.4
Group Transfer Processes
67
3.4.5
Maskless Structure Generation
68
3.4.6
Soft Lithography
68
3.5
Etching Processes
70
3.5.1
Etching Rate and Selectivity
70
3.5.2 Isotropie
and
Anisotropie
Etching Processes
71
3.5.3
Lithographic Resolution in Etching Processes
72
3.5.4
Wet Etching Processes
73
3.5.5
Dry Etching Processes
76
3.5.6
High-resolution Dry Etching Techniques
78
3.5.7
Choice of Mask for Nanolithographic Etching Processes
80
3.6
Packaging
80
3.7
Biogenic and
Bioanalogue
Molecules in Technical
Microstructures
84
4
Preparation of Nanostructures
87
4.1
Principles of Fabrication
87
4.1.1
Subtractive and Additive Creation of Nanostructures
87
4.1.2
Nanostructure Generation by Lift-off Processes
89
4.1.3
Principles of Nanotechnical Shape-definition and Construction
91
4.2
Nanomechanical Structure Generation
96
4.2.1
Scaling Down of Mechanical Processing Techniques
96
4.2.2
Local Mechanical Cutting Processes
97
4.2.3
Surface Transport Methods
97
Contents
VII
4.2.4
Reshaping Processes
98
4.2.5
Soft Lithography for Nanopatterning and Nanoimprinting
202
4.3
Nanolithography
105
4.3.1
Structure Transfer by Electromagnetic Radiation 10S
4.3.2
DUV- and Vacuum-UV Lithography
208
4.3.3
EUV and X-ray Lithography
110
4.3.4
Multilayer Resist Techniques with Optical Pattern Transfer
113
4.3.5
Near-field Optical Micropatterning Techniques
224
4.3.6
Energetic Particles in Nanolithographic Structure Transfer
226
4.3.7
Electron Beam Lithography
227
4.3.8
Ion Beam Lithography
224
4.3.9
Atomic Beam Lithography
126
4.3.10
Molecular and
Nanopartíde
Beam Lithography
226
4.3.11
Direct Writing of Structures by a Particle Beam
227
4.3.12
Nanostructure Generation by Accelerated Single Particles
230
4.3.13
Patterning by Local Chemical Conversion
232
4.3.14
Nanofabrication by Self-structuring Masks
232
4.4
Nanofabrication by Scanning Probe Techniques
233
4.4.1
Mechanical Surface Modifications based on Scanning Force Microscopy
(SFM)
134
4.4.2
Manipulation by a Scanning Tunneling Microscopy (STM)
235
4.4.3
Thermo-mechanical Writing of Nanostructures
237
4.4.4
Electrically Induced Structure Generation by Scanning Probe Techni¬
ques
238
4.4.5
Chemical Induced Scanning Probe Structure Generation
243
4.4.6
Nanostructure Generation by Optical Near-field Probes
145
4.4.7
Scanning Probe Methods for Nanoscale Transfer
246
4.5
Reduction of Feature Sizes by Post-lithographic Processing
146
4.5.1
Narrowing of Nanogaps by Material Deposition
246
4.5.2
Size Reduction by Thermally Induced Reshaping
247
4.5.3
Size Reduction by Sidewall Transfer
248
4.5.4
Formation of Nanodots by Dewetting
248
S Nanotechnical
Structures
249
5.1
Nanostructures and Nanomaterials
149
5.2
Inorganic Solids
250
5.2.1
Influence of Material Morphology on Nanoscale Pattern Processes
250
5.2.2
Inorganic Dielectrics
250
5.2.3
Metals
252
5.2.4
Semiconductors
254
5.3
Carbon Nanostructures
256
5.4
Organic Solids and Layer Structures
258
5.4.1
Solids Composed of Smaller Molecules
258
5.4.2
Organic Monolayer and Multilayer Stacks
258
5.4.3
Synthetic Organic Polymers
260
Vili
Contents
5.4.4 Biopolymers 262
5.5
Molecular Monolayer and Layer Architectures
162
5.5.1
Langmuir-Blodgett Films
262
5.5.2
Self-assembled Surface Films
264
5.5.3
Binding of Molecules on Solid Substrate Surfaces
265
5.5.4
Secondary Coupling of Molecular Monolayers
267
5.5.5
Categories of Molecular Layers
268
5.5.6
Molecular Coupling Components (Linkers) and Distance Components
(Spacers)
272
5.5.7
Definition of Binding Spots on Solid Substrates
272
5.6
Molecular Architectures
274
5.6.1
Single Molecules as Nanostructures
174
5.6.2
Strategies of Molecular Construction
278
5.6.3
Biogenic and Bio-analogous Nanoarchitectures
282
5.6.4 DNA
Nanoarchitectures
285
5.6.5
Synthetic Supramolecules
292
5.6.6
Nanoparticles and Nanocompartments
200
5.7
Combination of Molecular Architectures and Nanoparticles With Planar
Technical Structures
202
6
Characterization of Nanostructures
221
6.1
Geometrical Characterization
211
6.1.1
Layer Thickness and Vertical Structure Dimensions
211
6.1.2
Lateral Dimensions
225
6.1.3
Structures that Assist Measurement
226
6.2
Characterization of Composition of Layers and Surfaces
227
6.2.1
Atomic Composition
227
6.2.2
Characterization of the Chemical Surface State
220
6.3
Functional Characterization of Nanostructures
223
7
Nanotransducers
225
7.1
Design of Nanotransducers
225
7.2
Nanomechanical Elements
227
7.2.1
Nanomechanical Sensors
227
7.2.2
Nanometer-precision Position Measurements with Conventional
Techniques
228
7.2.3
Electrically Controlled Nanoactuators
228
7.2.4
Chemically Driven Nanoactuators
230
7.2.5
Rigidity of Nanoactuators
234
7.3
Nanoelectronic Devices
235
7.3.1
Electrical Contacts and Nanowires235
7.3.2
Nanostructured Tunneling Barriers
240
7.3.3
Quantum Dots and Localization of Elementary Particles
242
7.3.4
Nanodiodes
243
7.3.5
Electron Islands and Nanotransistors
244
Contents
IX
7.3.6 Nanoswitches,
Molecular
Switches and Logic Elements 251
7.3.7
Particle-Emitting Nanotransducers
253
7.4 Nanooptical Devices 254
7.4.1 Nanostractures
as Optical
Sensors 254
7.4.2
Nanostructured Optical Actuators
255
7.4.3 Nanooptical
Switching and Conversion Elements
257
7.5
Magnetic Nanotransducers
258
7.6
Chemical Nanoscale Sensors and Actuators
260
7.8
Nanochannels and Nanofluidic Devices
265
7.8.1
Nanochannel Arrays
267
7.8.2
Nanofluidic Electrospraying
269
7.8.3
Liquid Transport in Nanotubes
269
7.8.4
Nanofluidic Actuators for Optical Application
269
7.8.5
Functional Molecular Devices for Nanofluidics
269
8
Technical Nanosystems
27Î
8.1
What are Nanosystems?
271
8.2
Systems with Nanocomponents
272
8.3
Entire Systems with Nanometer Dimensions
273
Table of Examples
279
References
283
Index
307 |
| any_adam_object | 1 |
| any_adam_object_boolean | 1 |
| author | Köhler, Michael Fritzsche, Wolfgang |
| author_facet | Köhler, Michael Fritzsche, Wolfgang |
| author_role | aut aut |
| author_sort | Köhler, Michael |
| author_variant | m k mk w f wf |
| building | Verbundindex |
| bvnumber | BV022406437 |
| callnumber-first | T - Technology |
| callnumber-label | T174 |
| callnumber-raw | T174.7 |
| callnumber-search | T174.7 |
| callnumber-sort | T 3174.7 |
| callnumber-subject | T - General Technology |
| classification_rvk | UB 5300 VE 9850 ZN 3700 ZN 4980 |
| classification_tum | TEC 030f |
| ctrlnum | (OCoLC)255964357 (DE-599)BVBBV022406437 |
| dewey-full | 620.5 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 620 - Engineering and allied operations |
| dewey-raw | 620.5 |
| dewey-search | 620.5 |
| dewey-sort | 3620.5 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Chemie / Pharmazie Physik Technik Elektrotechnik / Elektronik / Nachrichtentechnik |
| discipline_str_mv | Chemie / Pharmazie Physik Technik Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | 2., compl. rev. ed. |
| format | Book |
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| genre | 1\p (DE-588)4151278-9 Einführung gnd-content |
| genre_facet | Einführung |
| id | DE-604.BV022406437 |
| illustrated | Illustrated |
| index_date | 2024-07-02T17:20:17Z |
| indexdate | 2024-07-20T09:15:51Z |
| institution | BVB |
| isbn | 9783527318711 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-015614996 |
| oclc_num | 255964357 |
| open_access_boolean | |
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| physical | XII, 321 S. Ill., graph. Darst. |
| publishDate | 2007 |
| publishDateSearch | 2007 |
| publishDateSort | 2007 |
| publisher | Wiley-VCH |
| record_format | marc |
| spelling | Köhler, Michael Verfasser aut Nanotechnology an introduction to nanostructuring techniques Michael Köhler and Wolfgang Fritzsche 2., compl. rev. ed. Weinheim Wiley-VCH 2007 XII, 321 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Nanotechnologie Nanotechnologie (DE-588)4327470-5 gnd rswk-swf 1\p (DE-588)4151278-9 Einführung gnd-content Nanotechnologie (DE-588)4327470-5 s DE-604 Fritzsche, Wolfgang Verfasser aut http://deposit.dnb.de/cgi-bin/dokserv?id=2930823&prov=M&dok_var=1&dok_ext=htm Beschreibung für Leser http://www.gbv.de/dms/ilmenau/toc/526803479.PDF Inhaltsverzeichnis Digitalisierung UB Regensburg application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=015614996&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Köhler, Michael Fritzsche, Wolfgang Nanotechnology an introduction to nanostructuring techniques Nanotechnologie Nanotechnologie (DE-588)4327470-5 gnd |
| subject_GND | (DE-588)4327470-5 (DE-588)4151278-9 |
| title | Nanotechnology an introduction to nanostructuring techniques |
| title_auth | Nanotechnology an introduction to nanostructuring techniques |
| title_exact_search | Nanotechnology an introduction to nanostructuring techniques |
| title_exact_search_txtP | Nanotechnology an introduction to nanostructuring techniques |
| title_full | Nanotechnology an introduction to nanostructuring techniques Michael Köhler and Wolfgang Fritzsche |
| title_fullStr | Nanotechnology an introduction to nanostructuring techniques Michael Köhler and Wolfgang Fritzsche |
| title_full_unstemmed | Nanotechnology an introduction to nanostructuring techniques Michael Köhler and Wolfgang Fritzsche |
| title_short | Nanotechnology |
| title_sort | nanotechnology an introduction to nanostructuring techniques |
| title_sub | an introduction to nanostructuring techniques |
| topic | Nanotechnologie Nanotechnologie (DE-588)4327470-5 gnd |
| topic_facet | Nanotechnologie Einführung |
| url | http://deposit.dnb.de/cgi-bin/dokserv?id=2930823&prov=M&dok_var=1&dok_ext=htm http://www.gbv.de/dms/ilmenau/toc/526803479.PDF http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=015614996&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT kohlermichael nanotechnologyanintroductiontonanostructuringtechniques AT fritzschewolfgang nanotechnologyanintroductiontonanostructuringtechniques |
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