Micromechanics: special issue of the micromechanics section of sensors and actuators, based on contributions revised from the technical digest of the fifteenth IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-2002) ; 20 - 24 January 2002, Las Vegas, NV, USA
Saved in:
| Format: | Conference Proceeding Book |
|---|---|
| Language: | English |
| Published: |
Amsterdam [u.a.]
Elsevier
2003
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| Subjects: | |
| Item Description: | Literaturangaben. - In: Sensors and actuators : A, Physical ; 103 (2003),1/2 |
| Physical Description: | 290 S. Ill., graph. Darst. |
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| index_date | 2024-07-02T16:09:48Z |
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| physical | 290 S. Ill., graph. Darst. |
| publishDate | 2003 |
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| spelling | Micromechanics special issue of the micromechanics section of sensors and actuators, based on contributions revised from the technical digest of the fifteenth IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-2002) ; 20 - 24 January 2002, Las Vegas, NV, USA Amsterdam [u.a.] Elsevier 2003 290 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben. - In: Sensors and actuators : A, Physical ; 103 (2003),1/2 Mikrosensor (DE-588)4561097-6 gnd rswk-swf Mikroschaltung (DE-588)4169849-6 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Mikromechanik (DE-588)4205811-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Mikroelektronik (DE-588)4039207-7 s DE-604 Mikroschaltung (DE-588)4169849-6 s Mikromechanik (DE-588)4205811-9 s Mikrosensor (DE-588)4561097-6 s Institute of Electrical and Electronics Engineers Sonstige (DE-588)1692-5 oth International Conference on Micro-Electro-Mechanical Systems 15 2002 Las Vegas, Nev. Sonstige (DE-588)10040615-4 oth |
| spellingShingle | Micromechanics special issue of the micromechanics section of sensors and actuators, based on contributions revised from the technical digest of the fifteenth IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-2002) ; 20 - 24 January 2002, Las Vegas, NV, USA Mikrosensor (DE-588)4561097-6 gnd Mikroschaltung (DE-588)4169849-6 gnd Mikroelektronik (DE-588)4039207-7 gnd Mikromechanik (DE-588)4205811-9 gnd |
| subject_GND | (DE-588)4561097-6 (DE-588)4169849-6 (DE-588)4039207-7 (DE-588)4205811-9 (DE-588)1071861417 |
| title | Micromechanics special issue of the micromechanics section of sensors and actuators, based on contributions revised from the technical digest of the fifteenth IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-2002) ; 20 - 24 January 2002, Las Vegas, NV, USA |
| title_auth | Micromechanics special issue of the micromechanics section of sensors and actuators, based on contributions revised from the technical digest of the fifteenth IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-2002) ; 20 - 24 January 2002, Las Vegas, NV, USA |
| title_exact_search | Micromechanics special issue of the micromechanics section of sensors and actuators, based on contributions revised from the technical digest of the fifteenth IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-2002) ; 20 - 24 January 2002, Las Vegas, NV, USA |
| title_exact_search_txtP | Micromechanics special issue of the micromechanics section of sensors and actuators, based on contributions revised from the technical digest of the fifteenth IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-2002) ; 20 - 24 January 2002, Las Vegas, NV, USA |
| title_full | Micromechanics special issue of the micromechanics section of sensors and actuators, based on contributions revised from the technical digest of the fifteenth IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-2002) ; 20 - 24 January 2002, Las Vegas, NV, USA |
| title_fullStr | Micromechanics special issue of the micromechanics section of sensors and actuators, based on contributions revised from the technical digest of the fifteenth IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-2002) ; 20 - 24 January 2002, Las Vegas, NV, USA |
| title_full_unstemmed | Micromechanics special issue of the micromechanics section of sensors and actuators, based on contributions revised from the technical digest of the fifteenth IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-2002) ; 20 - 24 January 2002, Las Vegas, NV, USA |
| title_short | Micromechanics |
| title_sort | micromechanics special issue of the micromechanics section of sensors and actuators based on contributions revised from the technical digest of the fifteenth ieee international workshop on micro electro mechanical systems mems 2002 20 24 january 2002 las vegas nv usa |
| title_sub | special issue of the micromechanics section of sensors and actuators, based on contributions revised from the technical digest of the fifteenth IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-2002) ; 20 - 24 January 2002, Las Vegas, NV, USA |
| topic | Mikrosensor (DE-588)4561097-6 gnd Mikroschaltung (DE-588)4169849-6 gnd Mikroelektronik (DE-588)4039207-7 gnd Mikromechanik (DE-588)4205811-9 gnd |
| topic_facet | Mikrosensor Mikroschaltung Mikroelektronik Mikromechanik Konferenzschrift |
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