Micromechanics: special issue of the micromechanics section of sensors and actuators, based on contributions revised from the technical digest of the fifteenth IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-2002) ; 20 - 24 January 2002, Las Vegas, NV, USA
Gespeichert in:
| Format: | Tagungsbericht Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Amsterdam [u.a.]
Elsevier
2003
|
| Schlagworte: | |
| Beschreibung: | Literaturangaben. - In: Sensors and actuators : A, Physical ; 103 (2003),1/2 |
| Beschreibung: | 290 S. Ill., graph. Darst. |
Internformat
MARC
| LEADER | 00000nam a2200000zc 4500 | ||
|---|---|---|---|
| 001 | BV021977691 | ||
| 003 | DE-604 | ||
| 005 | 20200805 | ||
| 007 | t | ||
| 008 | 040607s2003 ad|| |||| 10||| eng d | ||
| 035 | |a (OCoLC)634359398 | ||
| 035 | |a (DE-599)BVBBV021977691 | ||
| 040 | |a DE-604 |b ger | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-706 | ||
| 245 | 1 | 0 | |a Micromechanics |b special issue of the micromechanics section of sensors and actuators, based on contributions revised from the technical digest of the fifteenth IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-2002) ; 20 - 24 January 2002, Las Vegas, NV, USA |
| 264 | 1 | |a Amsterdam [u.a.] |b Elsevier |c 2003 | |
| 300 | |a 290 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 500 | |a Literaturangaben. - In: Sensors and actuators : A, Physical ; 103 (2003),1/2 | ||
| 650 | 0 | 7 | |a Mikrosensor |0 (DE-588)4561097-6 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Mikroschaltung |0 (DE-588)4169849-6 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Mikroelektronik |0 (DE-588)4039207-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Mikromechanik |0 (DE-588)4205811-9 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Mikroelektronik |0 (DE-588)4039207-7 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Mikroschaltung |0 (DE-588)4169849-6 |D s |
| 689 | 1 | |5 DE-604 | |
| 689 | 2 | 0 | |a Mikromechanik |0 (DE-588)4205811-9 |D s |
| 689 | 2 | |5 DE-604 | |
| 689 | 3 | 0 | |a Mikrosensor |0 (DE-588)4561097-6 |D s |
| 689 | 3 | |5 DE-604 | |
| 710 | 2 | |a Institute of Electrical and Electronics Engineers |e Sonstige |0 (DE-588)1692-5 |4 oth | |
| 711 | 2 | |a International Conference on Micro-Electro-Mechanical Systems |n 15 |d 2002 |c Las Vegas, Nev. |j Sonstige |0 (DE-588)10040615-4 |4 oth | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-015192821 | ||
Datensatz im Suchindex
| _version_ | 1804135950409793536 |
|---|---|
| adam_txt | |
| any_adam_object | |
| any_adam_object_boolean | |
| building | Verbundindex |
| bvnumber | BV021977691 |
| ctrlnum | (OCoLC)634359398 (DE-599)BVBBV021977691 |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01793nam a2200421zc 4500</leader><controlfield tag="001">BV021977691</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20200805 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">040607s2003 ad|| |||| 10||| eng d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)634359398</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV021977691</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-706</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Micromechanics</subfield><subfield code="b">special issue of the micromechanics section of sensors and actuators, based on contributions revised from the technical digest of the fifteenth IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-2002) ; 20 - 24 January 2002, Las Vegas, NV, USA</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Amsterdam [u.a.]</subfield><subfield code="b">Elsevier</subfield><subfield code="c">2003</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">290 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Literaturangaben. - In: Sensors and actuators : A, Physical ; 103 (2003),1/2</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikrosensor</subfield><subfield code="0">(DE-588)4561097-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikroschaltung</subfield><subfield code="0">(DE-588)4169849-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikroelektronik</subfield><subfield code="0">(DE-588)4039207-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikromechanik</subfield><subfield code="0">(DE-588)4205811-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Mikroelektronik</subfield><subfield code="0">(DE-588)4039207-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Mikroschaltung</subfield><subfield code="0">(DE-588)4169849-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="2" ind2="0"><subfield code="a">Mikromechanik</subfield><subfield code="0">(DE-588)4205811-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="2" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="3" ind2="0"><subfield code="a">Mikrosensor</subfield><subfield code="0">(DE-588)4561097-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="3" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="710" ind1="2" ind2=" "><subfield code="a">Institute of Electrical and Electronics Engineers</subfield><subfield code="e">Sonstige</subfield><subfield code="0">(DE-588)1692-5</subfield><subfield code="4">oth</subfield></datafield><datafield tag="711" ind1="2" ind2=" "><subfield code="a">International Conference on Micro-Electro-Mechanical Systems</subfield><subfield code="n">15</subfield><subfield code="d">2002</subfield><subfield code="c">Las Vegas, Nev.</subfield><subfield code="j">Sonstige</subfield><subfield code="0">(DE-588)10040615-4</subfield><subfield code="4">oth</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-015192821</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift gnd-content |
| genre_facet | Konferenzschrift |
| id | DE-604.BV021977691 |
| illustrated | Illustrated |
| index_date | 2024-07-02T16:09:48Z |
| indexdate | 2024-07-09T20:48:39Z |
| institution | BVB |
| institution_GND | (DE-588)1692-5 (DE-588)10040615-4 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-015192821 |
| oclc_num | 634359398 |
| open_access_boolean | |
| owner | DE-706 |
| owner_facet | DE-706 |
| physical | 290 S. Ill., graph. Darst. |
| publishDate | 2003 |
| publishDateSearch | 2003 |
| publishDateSort | 2003 |
| publisher | Elsevier |
| record_format | marc |
| spelling | Micromechanics special issue of the micromechanics section of sensors and actuators, based on contributions revised from the technical digest of the fifteenth IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-2002) ; 20 - 24 January 2002, Las Vegas, NV, USA Amsterdam [u.a.] Elsevier 2003 290 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben. - In: Sensors and actuators : A, Physical ; 103 (2003),1/2 Mikrosensor (DE-588)4561097-6 gnd rswk-swf Mikroschaltung (DE-588)4169849-6 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Mikromechanik (DE-588)4205811-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Mikroelektronik (DE-588)4039207-7 s DE-604 Mikroschaltung (DE-588)4169849-6 s Mikromechanik (DE-588)4205811-9 s Mikrosensor (DE-588)4561097-6 s Institute of Electrical and Electronics Engineers Sonstige (DE-588)1692-5 oth International Conference on Micro-Electro-Mechanical Systems 15 2002 Las Vegas, Nev. Sonstige (DE-588)10040615-4 oth |
| spellingShingle | Micromechanics special issue of the micromechanics section of sensors and actuators, based on contributions revised from the technical digest of the fifteenth IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-2002) ; 20 - 24 January 2002, Las Vegas, NV, USA Mikrosensor (DE-588)4561097-6 gnd Mikroschaltung (DE-588)4169849-6 gnd Mikroelektronik (DE-588)4039207-7 gnd Mikromechanik (DE-588)4205811-9 gnd |
| subject_GND | (DE-588)4561097-6 (DE-588)4169849-6 (DE-588)4039207-7 (DE-588)4205811-9 (DE-588)1071861417 |
| title | Micromechanics special issue of the micromechanics section of sensors and actuators, based on contributions revised from the technical digest of the fifteenth IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-2002) ; 20 - 24 January 2002, Las Vegas, NV, USA |
| title_auth | Micromechanics special issue of the micromechanics section of sensors and actuators, based on contributions revised from the technical digest of the fifteenth IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-2002) ; 20 - 24 January 2002, Las Vegas, NV, USA |
| title_exact_search | Micromechanics special issue of the micromechanics section of sensors and actuators, based on contributions revised from the technical digest of the fifteenth IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-2002) ; 20 - 24 January 2002, Las Vegas, NV, USA |
| title_exact_search_txtP | Micromechanics special issue of the micromechanics section of sensors and actuators, based on contributions revised from the technical digest of the fifteenth IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-2002) ; 20 - 24 January 2002, Las Vegas, NV, USA |
| title_full | Micromechanics special issue of the micromechanics section of sensors and actuators, based on contributions revised from the technical digest of the fifteenth IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-2002) ; 20 - 24 January 2002, Las Vegas, NV, USA |
| title_fullStr | Micromechanics special issue of the micromechanics section of sensors and actuators, based on contributions revised from the technical digest of the fifteenth IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-2002) ; 20 - 24 January 2002, Las Vegas, NV, USA |
| title_full_unstemmed | Micromechanics special issue of the micromechanics section of sensors and actuators, based on contributions revised from the technical digest of the fifteenth IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-2002) ; 20 - 24 January 2002, Las Vegas, NV, USA |
| title_short | Micromechanics |
| title_sort | micromechanics special issue of the micromechanics section of sensors and actuators based on contributions revised from the technical digest of the fifteenth ieee international workshop on micro electro mechanical systems mems 2002 20 24 january 2002 las vegas nv usa |
| title_sub | special issue of the micromechanics section of sensors and actuators, based on contributions revised from the technical digest of the fifteenth IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-2002) ; 20 - 24 January 2002, Las Vegas, NV, USA |
| topic | Mikrosensor (DE-588)4561097-6 gnd Mikroschaltung (DE-588)4169849-6 gnd Mikroelektronik (DE-588)4039207-7 gnd Mikromechanik (DE-588)4205811-9 gnd |
| topic_facet | Mikrosensor Mikroschaltung Mikroelektronik Mikromechanik Konferenzschrift |
| work_keys_str_mv | AT instituteofelectricalandelectronicsengineers micromechanicsspecialissueofthemicromechanicssectionofsensorsandactuatorsbasedoncontributionsrevisedfromthetechnicaldigestofthefifteenthieeeinternationalworkshoponmicroelectromechanicalsystemsmems20022024january2002lasvegasnvusa AT internationalconferenceonmicroelectromechanicalsystemslasvegasnev micromechanicsspecialissueofthemicromechanicssectionofsensorsandactuatorsbasedoncontributionsrevisedfromthetechnicaldigestofthefifteenthieeeinternationalworkshoponmicroelectromechanicalsystemsmems20022024january2002lasvegasnvusa |