Micromechanics: special double issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the Eleventh IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-98 ) ; Heidelberg, Germany, 25 - 29 January 1998
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| Format: | Conference Proceeding Book |
|---|---|
| Language: | English |
| Published: |
Elsevier
1999
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| Subjects: | |
| Item Description: | Literaturangaben. - In: Sensors and actuators / A ; 73 (1999),1/2 |
| Physical Description: | 191 S. Ill., graph. Darst. |
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| spelling | Micromechanics special double issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the Eleventh IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-98 ) ; Heidelberg, Germany, 25 - 29 January 1998 Elsevier 1999 191 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben. - In: Sensors and actuators / A ; 73 (1999),1/2 Mikromechanik (DE-588)4205811-9 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Mikroschaltung (DE-588)4169849-6 gnd rswk-swf Mikrosensor (DE-588)4561097-6 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Mikroelektronik (DE-588)4039207-7 s DE-604 Mikroschaltung (DE-588)4169849-6 s Mikromechanik (DE-588)4205811-9 s Mikrosensor (DE-588)4561097-6 s International Workshop on Micro-Electro-Mechanical Systems 11 1998 Heidelberg Sonstige (DE-588)5295670-2 oth |
| spellingShingle | Micromechanics special double issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the Eleventh IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-98 ) ; Heidelberg, Germany, 25 - 29 January 1998 Mikromechanik (DE-588)4205811-9 gnd Mikroelektronik (DE-588)4039207-7 gnd Mikroschaltung (DE-588)4169849-6 gnd Mikrosensor (DE-588)4561097-6 gnd |
| subject_GND | (DE-588)4205811-9 (DE-588)4039207-7 (DE-588)4169849-6 (DE-588)4561097-6 (DE-588)1071861417 |
| title | Micromechanics special double issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the Eleventh IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-98 ) ; Heidelberg, Germany, 25 - 29 January 1998 |
| title_auth | Micromechanics special double issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the Eleventh IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-98 ) ; Heidelberg, Germany, 25 - 29 January 1998 |
| title_exact_search | Micromechanics special double issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the Eleventh IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-98 ) ; Heidelberg, Germany, 25 - 29 January 1998 |
| title_exact_search_txtP | Micromechanics special double issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the Eleventh IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-98 ) ; Heidelberg, Germany, 25 - 29 January 1998 |
| title_full | Micromechanics special double issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the Eleventh IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-98 ) ; Heidelberg, Germany, 25 - 29 January 1998 |
| title_fullStr | Micromechanics special double issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the Eleventh IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-98 ) ; Heidelberg, Germany, 25 - 29 January 1998 |
| title_full_unstemmed | Micromechanics special double issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the Eleventh IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-98 ) ; Heidelberg, Germany, 25 - 29 January 1998 |
| title_short | Micromechanics |
| title_sort | micromechanics special double issue of the micromechanics section of sensors and actuators based on contributions revised from the technical digest of the eleventh ieee international workshop on micro electro mechanical systems mems 98 heidelberg germany 25 29 january 1998 |
| title_sub | special double issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the Eleventh IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-98 ) ; Heidelberg, Germany, 25 - 29 January 1998 |
| topic | Mikromechanik (DE-588)4205811-9 gnd Mikroelektronik (DE-588)4039207-7 gnd Mikroschaltung (DE-588)4169849-6 gnd Mikrosensor (DE-588)4561097-6 gnd |
| topic_facet | Mikromechanik Mikroelektronik Mikroschaltung Mikrosensor Konferenzschrift |
| work_keys_str_mv | AT internationalworkshoponmicroelectromechanicalsystemsheidelberg micromechanicsspecialdoubleissueofthemicromechanicssectionofsensorsandactuatorsbasedoncontributionsrevisedfromthetechnicaldigestoftheeleventhieeeinternationalworkshoponmicroelectromechanicalsystemsmems98heidelberggermany2529january1998 |