Micromechanics: special double issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the Eleventh IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-98 ) ; Heidelberg, Germany, 25 - 29 January 1998
Gespeichert in:
| Format: | Tagungsbericht Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Elsevier
1999
|
| Schlagworte: | |
| Beschreibung: | Literaturangaben. - In: Sensors and actuators / A ; 73 (1999),1/2 |
| Beschreibung: | 191 S. Ill., graph. Darst. |
Internformat
MARC
| LEADER | 00000nam a2200000zc 4500 | ||
|---|---|---|---|
| 001 | BV021949329 | ||
| 003 | DE-604 | ||
| 005 | 20040302000000.0 | ||
| 007 | t | ||
| 008 | 991012s1999 ad|| |||| 10||| eng d | ||
| 035 | |a (OCoLC)246202472 | ||
| 035 | |a (DE-599)BVBBV021949329 | ||
| 040 | |a DE-604 |b ger | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-706 | ||
| 245 | 1 | 0 | |a Micromechanics |b special double issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the Eleventh IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-98 ) ; Heidelberg, Germany, 25 - 29 January 1998 |
| 264 | 1 | |b Elsevier |c 1999 | |
| 300 | |a 191 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 500 | |a Literaturangaben. - In: Sensors and actuators / A ; 73 (1999),1/2 | ||
| 650 | 0 | 7 | |a Mikromechanik |0 (DE-588)4205811-9 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Mikroelektronik |0 (DE-588)4039207-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Mikroschaltung |0 (DE-588)4169849-6 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Mikrosensor |0 (DE-588)4561097-6 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Mikroelektronik |0 (DE-588)4039207-7 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Mikroschaltung |0 (DE-588)4169849-6 |D s |
| 689 | 1 | |5 DE-604 | |
| 689 | 2 | 0 | |a Mikromechanik |0 (DE-588)4205811-9 |D s |
| 689 | 2 | |5 DE-604 | |
| 689 | 3 | 0 | |a Mikrosensor |0 (DE-588)4561097-6 |D s |
| 689 | 3 | |5 DE-604 | |
| 711 | 2 | |a International Workshop on Micro-Electro-Mechanical Systems |n 11 |d 1998 |c Heidelberg |j Sonstige |0 (DE-588)5295670-2 |4 oth | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-015164479 | ||
Datensatz im Suchindex
| _version_ | 1804135913270280192 |
|---|---|
| adam_txt | |
| any_adam_object | |
| any_adam_object_boolean | |
| building | Verbundindex |
| bvnumber | BV021949329 |
| ctrlnum | (OCoLC)246202472 (DE-599)BVBBV021949329 |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01666nam a2200409zc 4500</leader><controlfield tag="001">BV021949329</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20040302000000.0</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">991012s1999 ad|| |||| 10||| eng d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)246202472</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV021949329</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-706</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Micromechanics</subfield><subfield code="b">special double issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the Eleventh IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-98 ) ; Heidelberg, Germany, 25 - 29 January 1998</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="b">Elsevier</subfield><subfield code="c">1999</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">191 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Literaturangaben. - In: Sensors and actuators / A ; 73 (1999),1/2</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikromechanik</subfield><subfield code="0">(DE-588)4205811-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikroelektronik</subfield><subfield code="0">(DE-588)4039207-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikroschaltung</subfield><subfield code="0">(DE-588)4169849-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikrosensor</subfield><subfield code="0">(DE-588)4561097-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Mikroelektronik</subfield><subfield code="0">(DE-588)4039207-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Mikroschaltung</subfield><subfield code="0">(DE-588)4169849-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="2" ind2="0"><subfield code="a">Mikromechanik</subfield><subfield code="0">(DE-588)4205811-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="2" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="3" ind2="0"><subfield code="a">Mikrosensor</subfield><subfield code="0">(DE-588)4561097-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="3" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="711" ind1="2" ind2=" "><subfield code="a">International Workshop on Micro-Electro-Mechanical Systems</subfield><subfield code="n">11</subfield><subfield code="d">1998</subfield><subfield code="c">Heidelberg</subfield><subfield code="j">Sonstige</subfield><subfield code="0">(DE-588)5295670-2</subfield><subfield code="4">oth</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-015164479</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift gnd-content |
| genre_facet | Konferenzschrift |
| id | DE-604.BV021949329 |
| illustrated | Illustrated |
| index_date | 2024-07-02T16:07:36Z |
| indexdate | 2024-07-09T20:48:03Z |
| institution | BVB |
| institution_GND | (DE-588)5295670-2 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-015164479 |
| oclc_num | 246202472 |
| open_access_boolean | |
| owner | DE-706 |
| owner_facet | DE-706 |
| physical | 191 S. Ill., graph. Darst. |
| publishDate | 1999 |
| publishDateSearch | 1999 |
| publishDateSort | 1999 |
| publisher | Elsevier |
| record_format | marc |
| spelling | Micromechanics special double issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the Eleventh IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-98 ) ; Heidelberg, Germany, 25 - 29 January 1998 Elsevier 1999 191 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben. - In: Sensors and actuators / A ; 73 (1999),1/2 Mikromechanik (DE-588)4205811-9 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Mikroschaltung (DE-588)4169849-6 gnd rswk-swf Mikrosensor (DE-588)4561097-6 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Mikroelektronik (DE-588)4039207-7 s DE-604 Mikroschaltung (DE-588)4169849-6 s Mikromechanik (DE-588)4205811-9 s Mikrosensor (DE-588)4561097-6 s International Workshop on Micro-Electro-Mechanical Systems 11 1998 Heidelberg Sonstige (DE-588)5295670-2 oth |
| spellingShingle | Micromechanics special double issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the Eleventh IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-98 ) ; Heidelberg, Germany, 25 - 29 January 1998 Mikromechanik (DE-588)4205811-9 gnd Mikroelektronik (DE-588)4039207-7 gnd Mikroschaltung (DE-588)4169849-6 gnd Mikrosensor (DE-588)4561097-6 gnd |
| subject_GND | (DE-588)4205811-9 (DE-588)4039207-7 (DE-588)4169849-6 (DE-588)4561097-6 (DE-588)1071861417 |
| title | Micromechanics special double issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the Eleventh IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-98 ) ; Heidelberg, Germany, 25 - 29 January 1998 |
| title_auth | Micromechanics special double issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the Eleventh IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-98 ) ; Heidelberg, Germany, 25 - 29 January 1998 |
| title_exact_search | Micromechanics special double issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the Eleventh IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-98 ) ; Heidelberg, Germany, 25 - 29 January 1998 |
| title_exact_search_txtP | Micromechanics special double issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the Eleventh IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-98 ) ; Heidelberg, Germany, 25 - 29 January 1998 |
| title_full | Micromechanics special double issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the Eleventh IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-98 ) ; Heidelberg, Germany, 25 - 29 January 1998 |
| title_fullStr | Micromechanics special double issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the Eleventh IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-98 ) ; Heidelberg, Germany, 25 - 29 January 1998 |
| title_full_unstemmed | Micromechanics special double issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the Eleventh IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-98 ) ; Heidelberg, Germany, 25 - 29 January 1998 |
| title_short | Micromechanics |
| title_sort | micromechanics special double issue of the micromechanics section of sensors and actuators based on contributions revised from the technical digest of the eleventh ieee international workshop on micro electro mechanical systems mems 98 heidelberg germany 25 29 january 1998 |
| title_sub | special double issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the Eleventh IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-98 ) ; Heidelberg, Germany, 25 - 29 January 1998 |
| topic | Mikromechanik (DE-588)4205811-9 gnd Mikroelektronik (DE-588)4039207-7 gnd Mikroschaltung (DE-588)4169849-6 gnd Mikrosensor (DE-588)4561097-6 gnd |
| topic_facet | Mikromechanik Mikroelektronik Mikroschaltung Mikrosensor Konferenzschrift |
| work_keys_str_mv | AT internationalworkshoponmicroelectromechanicalsystemsheidelberg micromechanicsspecialdoubleissueofthemicromechanicssectionofsensorsandactuatorsbasedoncontributionsrevisedfromthetechnicaldigestoftheeleventhieeeinternationalworkshoponmicroelectromechanicalsystemsmems98heidelberggermany2529january1998 |