Holdings: MEMS and NEMS :: THWS Bibkatalog

MEMS and NEMS: systems, devices and structures

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Bibliographic Details
Main Author:	Lyshevski, Sergey Edward (Author)
Format:	Book
Language:	English
Published:	Boca Raton u.a. CRC Pr. 2002
Series:	Nano- and microscience, engineering, technology and medicine series
Subjects:	Microelectromechanical systems Mikroelektronik Mikromechanik Nanotechnologie
Online Access:	Inhaltsverzeichnis
Physical Description:	[8], 461 S. Ill., graph. Darst.
ISBN:	0849312620

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MARC


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adam_text	IMAGE 1 SYSTEMS, DEVICES, AND STRUCTURES SERGEI] EDUIARD LQSHEVSHI DEPARTMENT OF ELECTRICAL AND COMPUTER ENGINEERING PURDUE UNIVERSITY AT INDIANAPOLIS CRC P R E SS BOCA RATON LONDON NEW YORK WASHINGTON, D.C. IMAGE 2 CONTENTS 1 OVERVIEW AND INTRODUCTION 1 2 NEW TRENDS IN ENGINEERING AND SCIENCE: MICRO- AND NANOSCALE SYSTEMS 11 2.1 INTRODUCTION TO DESIGN OF MEMS AND NEMS 11 2.2 BIOLOGICAL AND BIOSYSTEMS ANALOGIES 15 2.3 OVERVIEW OF NANO- AND MICROELECTROMECHANICAL SYSTEMS 18 2.4 APPLICATIONS OF MICRO- AND NANOELECTROMECHANICAL SYSTEMS 25 2.5 MICRO-AND NANOELECTROMECHANICAL SYSTEMS 32 2.5.1 MICROELECTROMECHANICAL SYSTEMS, DEVICES, AND STRUCTURES DEFINITIONS 34 2.5.2 MICROFABRICATION: INTRODUCTION 35 2.6 SYNERGETIC PARADIGMS IN MEMS 42 2.7 MEMS AND NEMS ARCHITECTURES 45 REFERENCES 56 3 FUNDAMENTALS OF MEMS FABRICATION 57 3.1 INTRODUCTION AND DESCRIPTION OF BASIC PROCESSES 57 3.2 MICROFABRICATION AND MICROMACHINING OF ICS, MICROSTRUCTURES, AND MICRODEVICES 68 3.3 MEMS FABRICATION TECHNOLOGIES 78 3.3.1 BULK MICROMACHINING 84 3.3.2 SURFACE MICROMACHINING 89 3.3.3 HIGH-ASPECT-RATIO (LIGA AND LIGA-LIKE) TECHNOLOGY ... 102 REFERENCES 106 4 DEVISING AND SYNTHESIS OFMEMS AND NEMS 109 4.1 MEMS MOTION MICRODEVICES CLASSIFIER AND SYNTHESIS 109 4.1.1 MICROELECTROMECHANICAL MICRODEVICES 121 4.1.2 SYNTHESIS AND CLASSIFICATION SOLVER 128 4.2 NANOELECTROMECHANICAL SYSTEMS 131 REFERENCES 136 5 MODELING OF MICRO- AND NANOSCALE ELECTROMECHANICAL SYSTEMS, DEVICES, AND STRUCTURES 137 5.1 INTRODUCTION TO MODELING, ANALYSIS, AND SIMULATION 137 5.2 ELECTROMAGNETICS AND ITS APPLICATION FOR MEMS AND NEMS 140 5.2.1 BASIC FOUNDATIONS IN MODEL DEVELOPMENTS OF MICRO- AND NANOACTUATORS IN ELECTROMAGNETIC FIELDS 156 5.2.2 LUMPED-PARAMETER MATHEMATICAL MODELS OFMEMS 161 5.2.3 DIRECT-CURRENT MICROTRANSDUCERS 172 IMAGE 3 5.3 INDUCTION MICROMACHINES 179 5.3.1 TWO-PHASE INDUCTION MICROMOTORS 180 5.3.2 THREE-PHASE INDUCTION MICROMOTORS 192 5.4 SYNCHRONOUS MICROTRANSDUCERS 213 5.4.1 SINGLE-PHASE RELUCTANCE MICROMOTORS 214 5.4.2 PERMANENT-MAGNET SYNCHRONOUS MICROTRANSDUCERS 216 5.5 MICROSCALE PERMANENT-MAGNET STEPPER MICROMOTORS 241 5.5.1 MATHEMATICAL MODEL IN THE MACHINE VARIABLES 242 5.5.2 MATHEMATICAL MODELS OF PERMANENT-MAGNET STEPPER MICRO MOTORS IN THE ROTOR AND SYNCHRONOUS REFERENCE FRAMES ... 245 5.6 PIEZOTRANSDUCERS 250 5.6.1 PIEZOTRANSDUCERS: STEADY-STATE MODELS AND CHARACTERISTICS 253 5.6.2 MATHEMATICAL MODELS OF PIEZOACTUATORS: DYNAMICS AND NONLINEAR EQUATIONS OF MOTION 260 5.7 FUNDAMENTALS OF MODELING OF ELECTROMAGNETIC RADIATING ENERGY MICRODEVICES 263 5.8 CLASSICAL MECHANICS AND ITS APPLICATION 276 5.8.1 NEWTONIAN MECHANICS 278 5.8.2 LAGRANGE EQUATIONS OFMOTION 292 5.8.3 HAMILTON EQUATIONS OFMOTION 309 5.9 THERMOANALYSIS AND HEAT EQUATION 311 6 NANOSYSTEMS, QUANTUM MECHANICS, AND MATHEMATICAL MODELS 313 6.1 ATOMIC STRUCTURES AND QUANTUM MECHANICS 313 6.2 MOLECULAR AND NANOSTRACTURE DYNAMICS 323 6.2.1 SCHROEDINGER EQUATION AND WAVEFUNCTION THEORY 324 6.2.2 DENSITY FUNCTIONAL THEORY 330 6.2.3 NANOSTRUCTURES AND MOLECULAR DYNAMICS 334 6.2.4 ELECTROMAGNETIC FIELDS AND THEIR QUANTIZATION 335 6.3 MOLECULAR WIRES AND MOLECULAR CIRCUITS 342 REFERENCES 344 7 CONTROL OF MICROELECTROMECHANICAL SYSTEMS 345 7.1 INTRODUCTION TO MICROELECTROMECHANICAL SYSTEMS CONTROL 345 7.2 LYAPUNOV STABILITY THEORY 346 7.3 CONTROL OF MICROELECTROMECHANICAL SYSTEMS 361 7.3.1 PROPORTIONAL-INTEGRAL-DERIVATIVE CONTROLLERS 361 7.3.2 TRACKING CONTROL 362 7.3.3 TIME-OPTIMAL CONTROL 368 7.3.4 SLIDING MODE CONTROL 369 7.3.5 CONSTRAINED CONTROL OF NONLINEAR MEMS: HAMILTON-JACOBI METHOD 369 7.3.6 CONSTRAINED CONTROL OF NONLINEAR UNCERTAIN MEMS: LYAPUNOV METHOD 373 IMAGE 4 7.4 INTELLIGENT CONTROL OF MEMS 375 7.5 HAMILTON-JACOBI THEORY AND QUANTUM MECHANICS 388 REFERENCES 391 8 CASE STUDIES: SYNTHESIS, ANALYSIS, FABRICATION, AND COMPUTER-AIDED-DESIGN OF MEMS 393 8.1 INTRODUCTION 393 8.2 DESIGN AND FABRICATION 394 8.3 ANALYSIS OF TRANSLATIONAL MICROTRANSDUCERS 400 8.4 SINGLE-PHASE RELUCTANCE MICROMOTORS: MODELING, ANALYSIS, AND CONTROL 403 8.5 THREE-PHASE SYNCHRONOUS RELUCTANCE MICROMOTORS 405 8.6 MICROFABRICATION 410 8.6.1 MICROCOILS/MICROWINDINGS FABRICATION THROUGH THE COPPER, NICKEL AND ALUMINUM ELECTRODEPOSITION 410 8.6.2 NI X %FEMO-X% THIN FILMS ELECTRODEPOSITION 421 8.6.3 NIFEMO AND NICO THIN FILMS ELECTRODEPOSITION 424 8.6.4 MICROMACHINED POLYMER MAGNETS 425 8.6.5 PLANARIZATION 426 8.7 MAGNETIZATION DYNAMICS OF THIN FILMS 426 8.8 MICROSTRACTURES AND MICROTRANSDUCERS WITH PERMANENT MAGNETS: MICROMIRROR ACTUATORS 428 8.9 RELUCTANCE ELECTROMAGNETIC MICROMOTORS 443 8.10 MICROMACHINED POLYCRYSTALLINE SILICON CARBIDE MICROMOTORS 448 8.11 AXIAL ELECTROMAGNETIC MICROMOTORS 451 8.12 SYNERGETIC COMPUTER-AIDED DESIGN OF MEMS 452 REFERENCES 456 INDEX 459
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author	Lyshevski, Sergey Edward
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dewey-tens	620 - Engineering and allied operations
discipline	Elektrotechnik Fertigungstechnik Elektrotechnik / Elektronik / Nachrichtentechnik Maschinenbau
format	Book
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spelling	Lyshevski, Sergey Edward Verfasser (DE-588)123119359 aut MEMS and NEMS systems, devices and structures Sergey Edward Lyshewski Boca Raton u.a. CRC Pr. 2002 [8], 461 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Nano- and microscience, engineering, technology and medicine series Microelectromechanical systems Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Mikromechanik (DE-588)4205811-9 gnd rswk-swf Nanotechnologie (DE-588)4327470-5 gnd rswk-swf Nanotechnologie (DE-588)4327470-5 s DE-604 Mikromechanik (DE-588)4205811-9 s Mikroelektronik (DE-588)4039207-7 s GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009695706&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis
spellingShingle	Lyshevski, Sergey Edward MEMS and NEMS systems, devices and structures Microelectromechanical systems Mikroelektronik (DE-588)4039207-7 gnd Mikromechanik (DE-588)4205811-9 gnd Nanotechnologie (DE-588)4327470-5 gnd
subject_GND	(DE-588)4039207-7 (DE-588)4205811-9 (DE-588)4327470-5
title	MEMS and NEMS systems, devices and structures
title_auth	MEMS and NEMS systems, devices and structures
title_exact_search	MEMS and NEMS systems, devices and structures
title_full	MEMS and NEMS systems, devices and structures Sergey Edward Lyshewski
title_fullStr	MEMS and NEMS systems, devices and structures Sergey Edward Lyshewski
title_full_unstemmed	MEMS and NEMS systems, devices and structures Sergey Edward Lyshewski
title_short	MEMS and NEMS
title_sort	mems and nems systems devices and structures
title_sub	systems, devices and structures
topic	Microelectromechanical systems Mikroelektronik (DE-588)4039207-7 gnd Mikromechanik (DE-588)4205811-9 gnd Nanotechnologie (DE-588)4327470-5 gnd
topic_facet	Microelectromechanical systems Mikroelektronik Mikromechanik Nanotechnologie
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work_keys_str_mv	AT lyshevskisergeyedward memsandnemssystemsdevicesandstructures

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