MEMS and NEMS: systems, devices and structures
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Boca Raton u.a.
CRC Pr.
2002
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| Schriftenreihe: | Nano- and microscience, engineering, technology and medicine series
|
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | [8], 461 S. Ill., graph. Darst. |
| ISBN: | 0849312620 |
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Datensatz im Suchindex
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|---|---|
| adam_text | IMAGE 1
SYSTEMS,
DEVICES, AND STRUCTURES
SERGEI] EDUIARD LQSHEVSHI DEPARTMENT OF ELECTRICAL AND COMPUTER
ENGINEERING PURDUE UNIVERSITY AT INDIANAPOLIS
CRC P R E SS
BOCA RATON LONDON NEW YORK WASHINGTON, D.C.
IMAGE 2
CONTENTS
1 OVERVIEW AND INTRODUCTION 1
2 NEW TRENDS IN ENGINEERING AND SCIENCE: MICRO- AND NANOSCALE SYSTEMS 11
2.1 INTRODUCTION TO DESIGN OF MEMS AND NEMS 11
2.2 BIOLOGICAL AND BIOSYSTEMS ANALOGIES 15
2.3 OVERVIEW OF NANO- AND MICROELECTROMECHANICAL SYSTEMS 18
2.4 APPLICATIONS OF MICRO- AND NANOELECTROMECHANICAL SYSTEMS 25 2.5
MICRO-AND NANOELECTROMECHANICAL SYSTEMS 32
2.5.1 MICROELECTROMECHANICAL SYSTEMS, DEVICES, AND STRUCTURES
DEFINITIONS 34
2.5.2 MICROFABRICATION: INTRODUCTION 35
2.6 SYNERGETIC PARADIGMS IN MEMS 42
2.7 MEMS AND NEMS ARCHITECTURES 45
REFERENCES 56
3 FUNDAMENTALS OF MEMS FABRICATION 57
3.1 INTRODUCTION AND DESCRIPTION OF BASIC PROCESSES 57
3.2 MICROFABRICATION AND MICROMACHINING OF ICS, MICROSTRUCTURES, AND
MICRODEVICES 68
3.3 MEMS FABRICATION TECHNOLOGIES 78
3.3.1 BULK MICROMACHINING 84
3.3.2 SURFACE MICROMACHINING 89
3.3.3 HIGH-ASPECT-RATIO (LIGA AND LIGA-LIKE) TECHNOLOGY ... 102
REFERENCES 106
4 DEVISING AND SYNTHESIS OFMEMS AND NEMS 109
4.1 MEMS MOTION MICRODEVICES CLASSIFIER AND SYNTHESIS 109
4.1.1 MICROELECTROMECHANICAL MICRODEVICES 121
4.1.2 SYNTHESIS AND CLASSIFICATION SOLVER 128
4.2 NANOELECTROMECHANICAL SYSTEMS 131
REFERENCES 136
5 MODELING OF MICRO- AND NANOSCALE ELECTROMECHANICAL SYSTEMS, DEVICES,
AND STRUCTURES 137
5.1 INTRODUCTION TO MODELING, ANALYSIS, AND SIMULATION 137
5.2 ELECTROMAGNETICS AND ITS APPLICATION FOR MEMS AND NEMS 140 5.2.1
BASIC FOUNDATIONS IN MODEL DEVELOPMENTS OF MICRO- AND NANOACTUATORS IN
ELECTROMAGNETIC FIELDS 156
5.2.2 LUMPED-PARAMETER MATHEMATICAL MODELS OFMEMS 161 5.2.3
DIRECT-CURRENT MICROTRANSDUCERS 172
IMAGE 3
5.3 INDUCTION MICROMACHINES 179
5.3.1 TWO-PHASE INDUCTION MICROMOTORS 180
5.3.2 THREE-PHASE INDUCTION MICROMOTORS 192
5.4 SYNCHRONOUS MICROTRANSDUCERS 213
5.4.1 SINGLE-PHASE RELUCTANCE MICROMOTORS 214
5.4.2 PERMANENT-MAGNET SYNCHRONOUS MICROTRANSDUCERS 216 5.5 MICROSCALE
PERMANENT-MAGNET STEPPER MICROMOTORS 241
5.5.1 MATHEMATICAL MODEL IN THE MACHINE VARIABLES 242
5.5.2 MATHEMATICAL MODELS OF PERMANENT-MAGNET STEPPER MICRO MOTORS IN
THE ROTOR AND SYNCHRONOUS REFERENCE FRAMES ... 245 5.6 PIEZOTRANSDUCERS
250
5.6.1 PIEZOTRANSDUCERS: STEADY-STATE MODELS AND CHARACTERISTICS 253
5.6.2 MATHEMATICAL MODELS OF PIEZOACTUATORS: DYNAMICS AND NONLINEAR
EQUATIONS OF MOTION 260
5.7 FUNDAMENTALS OF MODELING OF ELECTROMAGNETIC RADIATING ENERGY
MICRODEVICES 263
5.8 CLASSICAL MECHANICS AND ITS APPLICATION 276
5.8.1 NEWTONIAN MECHANICS 278
5.8.2 LAGRANGE EQUATIONS OFMOTION 292
5.8.3 HAMILTON EQUATIONS OFMOTION 309
5.9 THERMOANALYSIS AND HEAT EQUATION 311
6 NANOSYSTEMS, QUANTUM MECHANICS, AND MATHEMATICAL MODELS 313 6.1 ATOMIC
STRUCTURES AND QUANTUM MECHANICS 313
6.2 MOLECULAR AND NANOSTRACTURE DYNAMICS 323
6.2.1 SCHROEDINGER EQUATION AND WAVEFUNCTION THEORY 324
6.2.2 DENSITY FUNCTIONAL THEORY 330
6.2.3 NANOSTRUCTURES AND MOLECULAR DYNAMICS 334
6.2.4 ELECTROMAGNETIC FIELDS AND THEIR QUANTIZATION 335
6.3 MOLECULAR WIRES AND MOLECULAR CIRCUITS 342
REFERENCES 344
7 CONTROL OF MICROELECTROMECHANICAL SYSTEMS 345
7.1 INTRODUCTION TO MICROELECTROMECHANICAL SYSTEMS CONTROL 345
7.2 LYAPUNOV STABILITY THEORY 346
7.3 CONTROL OF MICROELECTROMECHANICAL SYSTEMS 361
7.3.1 PROPORTIONAL-INTEGRAL-DERIVATIVE CONTROLLERS 361
7.3.2 TRACKING CONTROL 362
7.3.3 TIME-OPTIMAL CONTROL 368
7.3.4 SLIDING MODE CONTROL 369
7.3.5 CONSTRAINED CONTROL OF NONLINEAR MEMS: HAMILTON-JACOBI METHOD 369
7.3.6 CONSTRAINED CONTROL OF NONLINEAR UNCERTAIN MEMS: LYAPUNOV METHOD
373
IMAGE 4
7.4 INTELLIGENT CONTROL OF MEMS 375
7.5 HAMILTON-JACOBI THEORY AND QUANTUM MECHANICS 388
REFERENCES 391
8 CASE STUDIES: SYNTHESIS, ANALYSIS, FABRICATION, AND
COMPUTER-AIDED-DESIGN OF MEMS 393
8.1 INTRODUCTION 393
8.2 DESIGN AND FABRICATION 394
8.3 ANALYSIS OF TRANSLATIONAL MICROTRANSDUCERS 400
8.4 SINGLE-PHASE RELUCTANCE MICROMOTORS: MODELING, ANALYSIS, AND CONTROL
403
8.5 THREE-PHASE SYNCHRONOUS RELUCTANCE MICROMOTORS 405
8.6 MICROFABRICATION 410
8.6.1 MICROCOILS/MICROWINDINGS FABRICATION THROUGH THE COPPER, NICKEL
AND ALUMINUM ELECTRODEPOSITION 410
8.6.2 NI X %FEMO-X% THIN FILMS ELECTRODEPOSITION 421
8.6.3 NIFEMO AND NICO THIN FILMS ELECTRODEPOSITION 424
8.6.4 MICROMACHINED POLYMER MAGNETS 425
8.6.5 PLANARIZATION 426
8.7 MAGNETIZATION DYNAMICS OF THIN FILMS 426
8.8 MICROSTRACTURES AND MICROTRANSDUCERS WITH PERMANENT MAGNETS:
MICROMIRROR ACTUATORS 428
8.9 RELUCTANCE ELECTROMAGNETIC MICROMOTORS 443
8.10 MICROMACHINED POLYCRYSTALLINE SILICON CARBIDE MICROMOTORS 448 8.11
AXIAL ELECTROMAGNETIC MICROMOTORS 451
8.12 SYNERGETIC COMPUTER-AIDED DESIGN OF MEMS 452
REFERENCES 456
INDEX 459
|
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| isbn | 0849312620 |
| language | English |
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| publisher | CRC Pr. |
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| series2 | Nano- and microscience, engineering, technology and medicine series |
| spelling | Lyshevski, Sergey Edward Verfasser (DE-588)123119359 aut MEMS and NEMS systems, devices and structures Sergey Edward Lyshewski Boca Raton u.a. CRC Pr. 2002 [8], 461 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Nano- and microscience, engineering, technology and medicine series Microelectromechanical systems Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Mikromechanik (DE-588)4205811-9 gnd rswk-swf Nanotechnologie (DE-588)4327470-5 gnd rswk-swf Nanotechnologie (DE-588)4327470-5 s DE-604 Mikromechanik (DE-588)4205811-9 s Mikroelektronik (DE-588)4039207-7 s GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009695706&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Lyshevski, Sergey Edward MEMS and NEMS systems, devices and structures Microelectromechanical systems Mikroelektronik (DE-588)4039207-7 gnd Mikromechanik (DE-588)4205811-9 gnd Nanotechnologie (DE-588)4327470-5 gnd |
| subject_GND | (DE-588)4039207-7 (DE-588)4205811-9 (DE-588)4327470-5 |
| title | MEMS and NEMS systems, devices and structures |
| title_auth | MEMS and NEMS systems, devices and structures |
| title_exact_search | MEMS and NEMS systems, devices and structures |
| title_full | MEMS and NEMS systems, devices and structures Sergey Edward Lyshewski |
| title_fullStr | MEMS and NEMS systems, devices and structures Sergey Edward Lyshewski |
| title_full_unstemmed | MEMS and NEMS systems, devices and structures Sergey Edward Lyshewski |
| title_short | MEMS and NEMS |
| title_sort | mems and nems systems devices and structures |
| title_sub | systems, devices and structures |
| topic | Microelectromechanical systems Mikroelektronik (DE-588)4039207-7 gnd Mikromechanik (DE-588)4205811-9 gnd Nanotechnologie (DE-588)4327470-5 gnd |
| topic_facet | Microelectromechanical systems Mikroelektronik Mikromechanik Nanotechnologie |
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