Lithography for semiconductor manufacturing: 19 - 21 May 1999, Edinburgh, Scotland
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Bellingham, Wash.
SPIE
1999
|
| Schriftenreihe: | Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers
3741 |
| Schlagworte: | |
| Beschreibung: | VII, 262 S. Ill., graph. Darst. |
| ISBN: | 0819432210 |
Internformat
MARC
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| 245 | 1 | 0 | |a Lithography for semiconductor manufacturing |b 19 - 21 May 1999, Edinburgh, Scotland |c Chris A. Mack ... chairs/eds. |
| 264 | 1 | |a Bellingham, Wash. |b SPIE |c 1999 | |
| 300 | |a VII, 262 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers |v 3741 | |
| 650 | 4 | |a Integrated circuits |x Design and construction |v Congresses | |
| 650 | 4 | |a Microlithography |v Congresses | |
| 650 | 4 | |a Semiconductors |x Etching |v Congresses | |
| 650 | 0 | 7 | |a Lithografie |g Halbleitertechnologie |0 (DE-588)4191584-7 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1999 |z Edinburgh |2 gnd-content | |
| 689 | 0 | 0 | |a Lithografie |g Halbleitertechnologie |0 (DE-588)4191584-7 |D s |
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| 700 | 1 | |a Mack, Chris A. |e Sonstige |4 oth | |
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| 999 | |a oai:aleph.bib-bvb.de:BVB01-009672127 | ||
Datensatz im Suchindex
| _version_ | 1804128985307676672 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV014116485 |
| callnumber-first | T - Technology |
| callnumber-label | TK7874 |
| callnumber-raw | TK7874 TS510 |
| callnumber-search | TK7874 TS510 |
| callnumber-sort | TK 47874 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | ZN 4170 |
| ctrlnum | (OCoLC)41549745 (DE-599)BVBBV014116485 |
| dewey-full | 621.3815/2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/2 |
| dewey-search | 621.3815/2 |
| dewey-sort | 3621.3815 12 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| genre | (DE-588)1071861417 Konferenzschrift 1999 Edinburgh gnd-content |
| genre_facet | Konferenzschrift 1999 Edinburgh |
| id | DE-604.BV014116485 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:57:56Z |
| institution | BVB |
| isbn | 0819432210 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009672127 |
| oclc_num | 41549745 |
| open_access_boolean | |
| owner | DE-703 DE-83 |
| owner_facet | DE-703 DE-83 |
| physical | VII, 262 S. Ill., graph. Darst. |
| publishDate | 1999 |
| publishDateSearch | 1999 |
| publishDateSort | 1999 |
| publisher | SPIE |
| record_format | marc |
| series2 | Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers |
| spelling | Lithography for semiconductor manufacturing 19 - 21 May 1999, Edinburgh, Scotland Chris A. Mack ... chairs/eds. Bellingham, Wash. SPIE 1999 VII, 262 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers 3741 Integrated circuits Design and construction Congresses Microlithography Congresses Semiconductors Etching Congresses Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1999 Edinburgh gnd-content Lithografie Halbleitertechnologie (DE-588)4191584-7 s DE-604 Mack, Chris A. Sonstige oth Society of Photo-Optical Instrumentation Engineers Proceedings of SPIE 3741 (DE-604)BV000010887 3741 |
| spellingShingle | Lithography for semiconductor manufacturing 19 - 21 May 1999, Edinburgh, Scotland Integrated circuits Design and construction Congresses Microlithography Congresses Semiconductors Etching Congresses Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| subject_GND | (DE-588)4191584-7 (DE-588)1071861417 |
| title | Lithography for semiconductor manufacturing 19 - 21 May 1999, Edinburgh, Scotland |
| title_auth | Lithography for semiconductor manufacturing 19 - 21 May 1999, Edinburgh, Scotland |
| title_exact_search | Lithography for semiconductor manufacturing 19 - 21 May 1999, Edinburgh, Scotland |
| title_full | Lithography for semiconductor manufacturing 19 - 21 May 1999, Edinburgh, Scotland Chris A. Mack ... chairs/eds. |
| title_fullStr | Lithography for semiconductor manufacturing 19 - 21 May 1999, Edinburgh, Scotland Chris A. Mack ... chairs/eds. |
| title_full_unstemmed | Lithography for semiconductor manufacturing 19 - 21 May 1999, Edinburgh, Scotland Chris A. Mack ... chairs/eds. |
| title_short | Lithography for semiconductor manufacturing |
| title_sort | lithography for semiconductor manufacturing 19 21 may 1999 edinburgh scotland |
| title_sub | 19 - 21 May 1999, Edinburgh, Scotland |
| topic | Integrated circuits Design and construction Congresses Microlithography Congresses Semiconductors Etching Congresses Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| topic_facet | Integrated circuits Design and construction Congresses Microlithography Congresses Semiconductors Etching Congresses Lithografie Halbleitertechnologie Konferenzschrift 1999 Edinburgh |
| volume_link | (DE-604)BV000010887 |
| work_keys_str_mv | AT mackchrisa lithographyforsemiconductormanufacturing1921may1999edinburghscotland |