Lasers in microlithography: 2 - 3 March, 1987, Santa Clara, California
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Bellingham, Washington
SPIE
1987
|
| Schriftenreihe: | Proceedings of SPIE
774 |
| Schlagworte: | |
| Beschreibung: | Literaturangaben |
| Beschreibung: | V, 192 S. Ill., graph. Darst. |
| ISBN: | 0892528095 |
Internformat
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV002214188 | ||
| 003 | DE-604 | ||
| 005 | 20160524 | ||
| 007 | t | ||
| 008 | 890928s1987 ad|| |||| 10||| eng d | ||
| 020 | |a 0892528095 |9 0-89252-809-5 | ||
| 035 | |a (OCoLC)16880907 | ||
| 035 | |a (DE-599)BVBBV002214188 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-91 |a DE-83 | ||
| 050 | 0 | |a TA1673 | |
| 082 | 0 | |a 621.381/531 |2 20 | |
| 084 | |a ELT 285f |2 stub | ||
| 245 | 1 | 0 | |a Lasers in microlithography |b 2 - 3 March, 1987, Santa Clara, California |c Daniel J. Ehrlich ... Chair/ed. |
| 264 | 1 | |a Bellingham, Washington |b SPIE |c 1987 | |
| 300 | |a V, 192 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Proceedings of SPIE |v 774 | |
| 500 | |a Literaturangaben | ||
| 650 | 4 | |a Lasers |x Industrial applications |v Congresses | |
| 650 | 4 | |a Microlithography |v Congresses | |
| 650 | 0 | 7 | |a Laser |0 (DE-588)4034610-9 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Fotolithografie |g Halbleitertechnologie |0 (DE-588)4174516-4 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1987 |z Santa Clara Calif. |2 gnd-content | |
| 689 | 0 | 0 | |a Laser |0 (DE-588)4034610-9 |D s |
| 689 | 0 | 1 | |a Fotolithografie |g Halbleitertechnologie |0 (DE-588)4174516-4 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Ehrlich, Daniel J. |e Sonstige |4 oth | |
| 830 | 0 | |a Proceedings of SPIE |v 774 |w (DE-604)BV000010887 |9 774 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-001454317 | ||
Datensatz im Suchindex
| _version_ | 1804116668656386048 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV002214188 |
| callnumber-first | T - Technology |
| callnumber-label | TA1673 |
| callnumber-raw | TA1673 |
| callnumber-search | TA1673 |
| callnumber-sort | TA 41673 |
| callnumber-subject | TA - General and Civil Engineering |
| classification_tum | ELT 285f |
| ctrlnum | (OCoLC)16880907 (DE-599)BVBBV002214188 |
| dewey-full | 621.381/531 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381/531 |
| dewey-search | 621.381/531 |
| dewey-sort | 3621.381 3531 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01488nam a2200421 cb4500</leader><controlfield tag="001">BV002214188</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20160524 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">890928s1987 ad|| |||| 10||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0892528095</subfield><subfield code="9">0-89252-809-5</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)16880907</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV002214188</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-91</subfield><subfield code="a">DE-83</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TA1673</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.381/531</subfield><subfield code="2">20</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ELT 285f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Lasers in microlithography</subfield><subfield code="b">2 - 3 March, 1987, Santa Clara, California</subfield><subfield code="c">Daniel J. Ehrlich ... Chair/ed.</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Bellingham, Washington</subfield><subfield code="b">SPIE</subfield><subfield code="c">1987</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">V, 192 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Proceedings of SPIE</subfield><subfield code="v">774</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Literaturangaben</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Lasers</subfield><subfield code="x">Industrial applications</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microlithography</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Laser</subfield><subfield code="0">(DE-588)4034610-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Fotolithografie</subfield><subfield code="g">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4174516-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">1987</subfield><subfield code="z">Santa Clara Calif.</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Laser</subfield><subfield code="0">(DE-588)4034610-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Fotolithografie</subfield><subfield code="g">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4174516-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Ehrlich, Daniel J.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Proceedings of SPIE</subfield><subfield code="v">774</subfield><subfield code="w">(DE-604)BV000010887</subfield><subfield code="9">774</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-001454317</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift 1987 Santa Clara Calif. gnd-content |
| genre_facet | Konferenzschrift 1987 Santa Clara Calif. |
| id | DE-604.BV002214188 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:42:10Z |
| institution | BVB |
| isbn | 0892528095 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001454317 |
| oclc_num | 16880907 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-83 |
| owner_facet | DE-91 DE-BY-TUM DE-83 |
| physical | V, 192 S. Ill., graph. Darst. |
| publishDate | 1987 |
| publishDateSearch | 1987 |
| publishDateSort | 1987 |
| publisher | SPIE |
| record_format | marc |
| series | Proceedings of SPIE |
| series2 | Proceedings of SPIE |
| spelling | Lasers in microlithography 2 - 3 March, 1987, Santa Clara, California Daniel J. Ehrlich ... Chair/ed. Bellingham, Washington SPIE 1987 V, 192 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Proceedings of SPIE 774 Literaturangaben Lasers Industrial applications Congresses Microlithography Congresses Laser (DE-588)4034610-9 gnd rswk-swf Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1987 Santa Clara Calif. gnd-content Laser (DE-588)4034610-9 s Fotolithografie Halbleitertechnologie (DE-588)4174516-4 s DE-604 Ehrlich, Daniel J. Sonstige oth Proceedings of SPIE 774 (DE-604)BV000010887 774 |
| spellingShingle | Lasers in microlithography 2 - 3 March, 1987, Santa Clara, California Proceedings of SPIE Lasers Industrial applications Congresses Microlithography Congresses Laser (DE-588)4034610-9 gnd Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd |
| subject_GND | (DE-588)4034610-9 (DE-588)4174516-4 (DE-588)1071861417 |
| title | Lasers in microlithography 2 - 3 March, 1987, Santa Clara, California |
| title_auth | Lasers in microlithography 2 - 3 March, 1987, Santa Clara, California |
| title_exact_search | Lasers in microlithography 2 - 3 March, 1987, Santa Clara, California |
| title_full | Lasers in microlithography 2 - 3 March, 1987, Santa Clara, California Daniel J. Ehrlich ... Chair/ed. |
| title_fullStr | Lasers in microlithography 2 - 3 March, 1987, Santa Clara, California Daniel J. Ehrlich ... Chair/ed. |
| title_full_unstemmed | Lasers in microlithography 2 - 3 March, 1987, Santa Clara, California Daniel J. Ehrlich ... Chair/ed. |
| title_short | Lasers in microlithography |
| title_sort | lasers in microlithography 2 3 march 1987 santa clara california |
| title_sub | 2 - 3 March, 1987, Santa Clara, California |
| topic | Lasers Industrial applications Congresses Microlithography Congresses Laser (DE-588)4034610-9 gnd Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd |
| topic_facet | Lasers Industrial applications Congresses Microlithography Congresses Laser Fotolithografie Halbleitertechnologie Konferenzschrift 1987 Santa Clara Calif. |
| volume_link | (DE-604)BV000010887 |
| work_keys_str_mv | AT ehrlichdanielj lasersinmicrolithography23march1987santaclaracalifornia |