Wafer fabrication :: automated material handling systems /
This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research c...
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Berlin ; Boston :
Walter de Gruyter GmbH,
[2018]
|
| Schlagworte: | |
| Online-Zugang: | DE-862 DE-863 |
| Zusammenfassung: | This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management. |
| Beschreibung: | 1 online resource (xi, 272 pages) |
| Bibliographie: | Includes bibliographical references and index. |
| ISBN: | 9783110487237 3110487233 9783110487473 3110487470 |
Internformat
MARC
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| 100 | 1 | |a Zhang, Jie, |d 1963 September 21- |e author. |1 https://id.oclc.org/worldcat/entity/E39PCjDTGRxDPm6fJ3y3B9tD4q |0 http://id.loc.gov/authorities/names/n2017002520 | |
| 245 | 1 | 0 | |a Wafer fabrication : |b automated material handling systems / |c Jie Zhang, Wei Qin, Lihui Wu, Junliang Wang, Youlong Lv, Xiaoxi Wang. |
| 264 | 1 | |a Berlin ; |a Boston : |b Walter de Gruyter GmbH, |c [2018] | |
| 300 | |a 1 online resource (xi, 272 pages) | ||
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| 505 | 0 | 0 | |t Frontmatter -- |t Preface -- |t Contents -- |t 1 Semiconductor wafer fabrication system -- |t 2 Automated material handling systems in SWFSs -- |t 3 Modeling methods of automated material handling systems in SWFSs -- |t 4 Analysis of automated material handling systems in SWFSs -- |t 5 Scheduling methods of automated material handling systems in SWFSs -- |t 6 Scheduling in Interbay automated material handling systems -- |t 7 Scheduling in Intrabay automatic material handling systems -- |t 8 Integrated scheduling in AMHSs -- |t 9 Scheduling Performance Evaluation of Automated Material Handling Systems in SWFSs -- |t Index |
| 546 | |a In English. | ||
| 588 | 0 | |a Online resource; title from digital title page (viewed on December 11, 2018). | |
| 520 | |a This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management. | ||
| 650 | 0 | |a Semiconductor wafers |x Automatic control. | |
| 650 | 0 | |a Manufacturing processes |x Automatic control. | |
| 650 | 6 | |a Plaquettes à gravure en semi-conducteurs |x Commande automatique. | |
| 650 | 6 | |a Fabrication |x Commande automatique. | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING |x Mechanical. |2 bisacsh | |
| 650 | 7 | |a Manufacturing processes |x Automatic control |2 fast | |
| 655 | 4 | |a Electronic book. | |
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Datensatz im Suchindex
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| author | Zhang, Jie, 1963 September 21- |
| author_GND | http://id.loc.gov/authorities/names/n2017002520 |
| author_facet | Zhang, Jie, 1963 September 21- |
| author_role | aut |
| author_sort | Zhang, Jie, 1963 September 21- |
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| contents | Frontmatter -- Preface -- Contents -- 1 Semiconductor wafer fabrication system -- 2 Automated material handling systems in SWFSs -- 3 Modeling methods of automated material handling systems in SWFSs -- 4 Analysis of automated material handling systems in SWFSs -- 5 Scheduling methods of automated material handling systems in SWFSs -- 6 Scheduling in Interbay automated material handling systems -- 7 Scheduling in Intrabay automatic material handling systems -- 8 Integrated scheduling in AMHSs -- 9 Scheduling Performance Evaluation of Automated Material Handling Systems in SWFSs -- Index |
| ctrlnum | (OCoLC)1076270650 |
| dewey-full | 621.39/5 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.39/5 |
| dewey-search | 621.39/5 |
| dewey-sort | 3621.39 15 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
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| genre | Electronic book. |
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| id | ZDB-4-EBA-on1076270650 |
| illustrated | Illustrated |
| indexdate | 2025-03-18T14:25:25Z |
| institution | BVB |
| isbn | 9783110487237 3110487233 9783110487473 3110487470 |
| language | English |
| oclc_num | 1076270650 |
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| physical | 1 online resource (xi, 272 pages) |
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| spelling | Zhang, Jie, 1963 September 21- author. https://id.oclc.org/worldcat/entity/E39PCjDTGRxDPm6fJ3y3B9tD4q http://id.loc.gov/authorities/names/n2017002520 Wafer fabrication : automated material handling systems / Jie Zhang, Wei Qin, Lihui Wu, Junliang Wang, Youlong Lv, Xiaoxi Wang. Berlin ; Boston : Walter de Gruyter GmbH, [2018] 1 online resource (xi, 272 pages) text txt rdacontent computer c rdamedia online resource cr rdacarrier text file Includes bibliographical references and index. Frontmatter -- Preface -- Contents -- 1 Semiconductor wafer fabrication system -- 2 Automated material handling systems in SWFSs -- 3 Modeling methods of automated material handling systems in SWFSs -- 4 Analysis of automated material handling systems in SWFSs -- 5 Scheduling methods of automated material handling systems in SWFSs -- 6 Scheduling in Interbay automated material handling systems -- 7 Scheduling in Intrabay automatic material handling systems -- 8 Integrated scheduling in AMHSs -- 9 Scheduling Performance Evaluation of Automated Material Handling Systems in SWFSs -- Index In English. Online resource; title from digital title page (viewed on December 11, 2018). This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management. Semiconductor wafers Automatic control. Manufacturing processes Automatic control. Plaquettes à gravure en semi-conducteurs Commande automatique. Fabrication Commande automatique. TECHNOLOGY & ENGINEERING Mechanical. bisacsh Manufacturing processes Automatic control fast Electronic book. has work: Wafer fabrication (Text) https://id.oclc.org/worldcat/entity/E39PCFYB3CBprF46XRt8Q89gPP https://id.oclc.org/worldcat/ontology/hasWork Print version: Zhang, Jie, 1963 September 21- Wafer fabrication. Berlin ; Boston : De Gruyter, [2018] 9783110486902 (DLC) 2018007853 (OCoLC)1024215291 |
| spellingShingle | Zhang, Jie, 1963 September 21- Wafer fabrication : automated material handling systems / Frontmatter -- Preface -- Contents -- 1 Semiconductor wafer fabrication system -- 2 Automated material handling systems in SWFSs -- 3 Modeling methods of automated material handling systems in SWFSs -- 4 Analysis of automated material handling systems in SWFSs -- 5 Scheduling methods of automated material handling systems in SWFSs -- 6 Scheduling in Interbay automated material handling systems -- 7 Scheduling in Intrabay automatic material handling systems -- 8 Integrated scheduling in AMHSs -- 9 Scheduling Performance Evaluation of Automated Material Handling Systems in SWFSs -- Index Semiconductor wafers Automatic control. Manufacturing processes Automatic control. Plaquettes à gravure en semi-conducteurs Commande automatique. Fabrication Commande automatique. TECHNOLOGY & ENGINEERING Mechanical. bisacsh Manufacturing processes Automatic control fast |
| title | Wafer fabrication : automated material handling systems / |
| title_alt | Frontmatter -- Preface -- Contents -- 1 Semiconductor wafer fabrication system -- 2 Automated material handling systems in SWFSs -- 3 Modeling methods of automated material handling systems in SWFSs -- 4 Analysis of automated material handling systems in SWFSs -- 5 Scheduling methods of automated material handling systems in SWFSs -- 6 Scheduling in Interbay automated material handling systems -- 7 Scheduling in Intrabay automatic material handling systems -- 8 Integrated scheduling in AMHSs -- 9 Scheduling Performance Evaluation of Automated Material Handling Systems in SWFSs -- Index |
| title_auth | Wafer fabrication : automated material handling systems / |
| title_exact_search | Wafer fabrication : automated material handling systems / |
| title_full | Wafer fabrication : automated material handling systems / Jie Zhang, Wei Qin, Lihui Wu, Junliang Wang, Youlong Lv, Xiaoxi Wang. |
| title_fullStr | Wafer fabrication : automated material handling systems / Jie Zhang, Wei Qin, Lihui Wu, Junliang Wang, Youlong Lv, Xiaoxi Wang. |
| title_full_unstemmed | Wafer fabrication : automated material handling systems / Jie Zhang, Wei Qin, Lihui Wu, Junliang Wang, Youlong Lv, Xiaoxi Wang. |
| title_short | Wafer fabrication : |
| title_sort | wafer fabrication automated material handling systems |
| title_sub | automated material handling systems / |
| topic | Semiconductor wafers Automatic control. Manufacturing processes Automatic control. Plaquettes à gravure en semi-conducteurs Commande automatique. Fabrication Commande automatique. TECHNOLOGY & ENGINEERING Mechanical. bisacsh Manufacturing processes Automatic control fast |
| topic_facet | Semiconductor wafers Automatic control. Manufacturing processes Automatic control. Plaquettes à gravure en semi-conducteurs Commande automatique. Fabrication Commande automatique. TECHNOLOGY & ENGINEERING Mechanical. Manufacturing processes Automatic control Electronic book. |
| work_keys_str_mv | AT zhangjie waferfabricationautomatedmaterialhandlingsystems |