Ultra Clean Processing of Semiconductor Surfaces XIII.:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Weitere Verfasser: | , |
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Zurich :
Trans Tech Publications,
2016.
|
| Schriftenreihe: | Solid State Phenomena Vol. 255.
|
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Beschreibung: | 1 online resource (395 pages) |
| Bibliographie: | Includes bibliographical references at the end of each chapters and index. |
| ISBN: | 9783035730845 3035730849 |
Internformat
MARC
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| id | ZDB-4-EBA-ocn988871957 |
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| indexdate | 2024-11-27T13:27:52Z |
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| isbn | 9783035730845 3035730849 |
| language | English |
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| series | Solid State Phenomena Vol. 255. |
| series2 | Solid State Phenomena Vol. 255 |
| spelling | Mertens, Paul W. Ultra Clean Processing of Semiconductor Surfaces XIII. Zurich : Trans Tech Publications, 2016. 1 online resource (395 pages) text txt rdacontent computer c rdamedia online resource cr rdacarrier data file rda Solid State Phenomena Vol. 255 Print version record. Includes bibliographical references at the end of each chapters and index. Semiconductors Surfaces Congresses. Semiconductors Congresses. Semi-conducteurs Surfaces Congrès. Semi-conducteurs Congrès. SCIENCE Physics Electricity. bisacsh SCIENCE Physics Electromagnetism. bisacsh Semiconductors fast Semiconductors Surfaces fast Conference papers and proceedings fast Meuris, Marc. Heyns, Marc. has work: Ultra Clean Processing of Semiconductor Surfaces XIII (Text) https://id.oclc.org/worldcat/entity/E39PD37KXWC99BFmYb4TcqXhMd https://id.oclc.org/worldcat/ontology/hasWork Print version: Mertens, Paul W. Ultra Clean Processing of Semiconductor Surfaces XIII. Zurich : Trans Tech Publications, ©2016 9783035710847 Solid State Phenomena Vol. 255. FWS01 ZDB-4-EBA FWS_PDA_EBA https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=1355752 Volltext |
| spellingShingle | Mertens, Paul W. Ultra Clean Processing of Semiconductor Surfaces XIII. Solid State Phenomena Vol. 255. Semiconductors Surfaces Congresses. Semiconductors Congresses. Semi-conducteurs Surfaces Congrès. Semi-conducteurs Congrès. SCIENCE Physics Electricity. bisacsh SCIENCE Physics Electromagnetism. bisacsh Semiconductors fast Semiconductors Surfaces fast |
| title | Ultra Clean Processing of Semiconductor Surfaces XIII. |
| title_auth | Ultra Clean Processing of Semiconductor Surfaces XIII. |
| title_exact_search | Ultra Clean Processing of Semiconductor Surfaces XIII. |
| title_full | Ultra Clean Processing of Semiconductor Surfaces XIII. |
| title_fullStr | Ultra Clean Processing of Semiconductor Surfaces XIII. |
| title_full_unstemmed | Ultra Clean Processing of Semiconductor Surfaces XIII. |
| title_short | Ultra Clean Processing of Semiconductor Surfaces XIII. |
| title_sort | ultra clean processing of semiconductor surfaces xiii |
| topic | Semiconductors Surfaces Congresses. Semiconductors Congresses. Semi-conducteurs Surfaces Congrès. Semi-conducteurs Congrès. SCIENCE Physics Electricity. bisacsh SCIENCE Physics Electromagnetism. bisacsh Semiconductors fast Semiconductors Surfaces fast |
| topic_facet | Semiconductors Surfaces Congresses. Semiconductors Congresses. Semi-conducteurs Surfaces Congrès. Semi-conducteurs Congrès. SCIENCE Physics Electricity. SCIENCE Physics Electromagnetism. Semiconductors Semiconductors Surfaces Conference papers and proceedings |
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