Nanoscaled semiconductor-on-insulator materials, sensors and devices :: selected, peer reviewed papers from the 6th International Workshop on Semiconductor-on-Insulator Materials and Devices, 24-28 October, 2010 Kyiv, Ukraine /
This special collection covers: 1. the technology of semiconductor-on-insulator structures and devices; 2. the physics of new SOI devices; 3. SOI sensors and MEMS; 4. nanodots, nanowires and nanofilms. The first part covers a wide variety of SemOI-based structures such as ZnO-on-Insulators, a-SiC-on...
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| Format: | Elektronisch Tagungsbericht E-Book |
| Sprache: | English |
| Veröffentlicht: |
Durnten-Zurich, Switzerland :
Trans Tech Publications,
[2011]
|
| Schriftenreihe: | Advanced materials research ;
276. |
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Zusammenfassung: | This special collection covers: 1. the technology of semiconductor-on-insulator structures and devices; 2. the physics of new SOI devices; 3. SOI sensors and MEMS; 4. nanodots, nanowires and nanofilms. The first part covers a wide variety of SemOI-based structures such as ZnO-on-Insulators, a-SiC-on-Si oxide, graphite inner films fabricated by ion implantation, and others. The second part presents new devices based upon impact ionization near to the source junction, the modeling of charge transport in nano-scale SOI MOSFETs, the electrical properties of SOI MOSFETs with LaLuO3 high-k gate dielectric and the study of neutron effects upon the behavior of nanometer-scale SOI devices. The third part considers various types of SOI sensors and MEMS, together with their characteristics and applications. The fourth part describes the fabrication and properties of quantum-dimensional structures such as nanowires and nanodots. This book will therefore be useful to a wide readership. |
| Beschreibung: | 1 online resource (199 pages) : illustrations |
| Bibliographie: | Includes bibliographical references and indexes. |
| ISBN: | 9783038136156 3038136158 |
| ISSN: | 1022-6680 ; 1022-6680 |
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| 111 | 2 | |a International Workshop on Semiconductor-on-Insulator Materials and Devices |n (6th : |d 2010 : |c Kiev, Ukraine) |j issuing body. | |
| 245 | 1 | 0 | |a Nanoscaled semiconductor-on-insulator materials, sensors and devices : |b selected, peer reviewed papers from the 6th International Workshop on Semiconductor-on-Insulator Materials and Devices, 24-28 October, 2010 Kyiv, Ukraine / |c edited by Alexei N. Nazarov and Jean-Pierre Raskin. |
| 264 | 1 | |a Durnten-Zurich, Switzerland : |b Trans Tech Publications, |c [2011] | |
| 264 | 2 | |a Enfield, N.H. : |b Distributed in the Americas by Trans Tech Publications, |c [date of distribution not identified] | |
| 264 | 4 | |c ©2011 | |
| 300 | |a 1 online resource (199 pages) : |b illustrations | ||
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| 338 | |a online resource |b cr |2 rdacarrier | ||
| 490 | 1 | |a Advanced materials research, |x 1022-6680 ; |v volume 276 | |
| 504 | |a Includes bibliographical references and indexes. | ||
| 588 | 0 | |a Print version record. | |
| 520 | |a This special collection covers: 1. the technology of semiconductor-on-insulator structures and devices; 2. the physics of new SOI devices; 3. SOI sensors and MEMS; 4. nanodots, nanowires and nanofilms. The first part covers a wide variety of SemOI-based structures such as ZnO-on-Insulators, a-SiC-on-Si oxide, graphite inner films fabricated by ion implantation, and others. The second part presents new devices based upon impact ionization near to the source junction, the modeling of charge transport in nano-scale SOI MOSFETs, the electrical properties of SOI MOSFETs with LaLuO3 high-k gate dielectric and the study of neutron effects upon the behavior of nanometer-scale SOI devices. The third part considers various types of SOI sensors and MEMS, together with their characteristics and applications. The fourth part describes the fabrication and properties of quantum-dimensional structures such as nanowires and nanodots. This book will therefore be useful to a wide readership. | ||
| 505 | 0 | |a Nanoscaled Semiconductor-on-Insulator Materials, Sensors and Devices; Preface and Committee Members; Table of Contents; I. Technology of Semiconductor-On-Insulator Structures and Devices; ZnO Films and Crystals on Bulk Silicon and SOI Wafers: Formation, Properties and Applications; Influence of Hydrogen Plasma Treatment on a-SiC Resistivity of the SiC/SiO2/Si Structures; Diamond -- Graphite Heterostructures Formed by Nitrogen and Hydrogen Implantation and Annealing; Hydrogen Gettering within Processed Oxygen-Implanted Silicon; II. Physics of New SOI Devices | |
| 505 | 8 | |a Gate Control of Junction Impact Ionization Avalanche in SOI MISFETs: Theoretical ModelSemi-Analytical Models of Field-Effect Transistors with Low-Dimensional Channels; Model of Nonuniform Channel for the Charge Carrier Transport in Nanoscale FETs; High Temperature Effects on Harmonic Distortion in Submicron SOI Graded-Channel MOSFETs; Some Issues of Modeling the Double Barrier Metal-Oxide-Semiconductor Tunnel Structures; Electrical Properties of High-K LaLuO3 Gate Oxide for SOI MOSFETs; Effects of High-Energy Neutrons on Advanced SOI MOSFETs; III. SOI Sensors and MEMS | |
| 505 | 8 | |a Polysilicon on Insulator Structures for Sensor Application at Electron Irradiation & Magnetic FieldsOn-Chip Tensile Testing of the Mechanical and Electro-Mechanical Properties of Nano-Scale Silicon Free-Standing Beams; Non-Standard FinFET Devices for Small Volume Sample Sensors; 3D SOI Elements for System-on-Chip Applications; Routes towards Novel Active Pressure Sensors in SOI Technology; IV. Nanodots, Nanowires and Nanofilms; Photovoltage Performance of Ge/Si Nanostructures Grown on Intermediate Ultrathin SiOX Layers | |
| 505 | 8 | |a Interface and Bulk Properties of High-K Gadolinium and Neodymium Oxides on SiliconEffect of Ge Nanoislands on Lateral Photoconductivity of Ge-SiOX-Si Structures; A Model of the Evolution of the Au/Si Droplet Ensembles during Rapid Thermal Annealing at High Temperatures; The Nanometer Scaled Defects Induces with the Dislocation Motion in II-VI Insulated Semiconductors; Keywords Index; Authors Index | |
| 546 | |a English. | ||
| 650 | 0 | |a Semiconductors |v Congresses. | |
| 650 | 0 | |a Silicon-on-insulator technology |v Congresses. | |
| 650 | 0 | |a Nanoelectromechanical systems |v Congresses. | |
| 650 | 0 | |a Nanotechnology |v Congresses. | |
| 650 | 6 | |a Semi-conducteurs |v Congrès. | |
| 650 | 6 | |a Silicium sur isolant |v Congrès. | |
| 650 | 6 | |a Nanosystèmes électromécaniques |v Congrès. | |
| 650 | 6 | |a Nanotechnologie |v Congrès. | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING |x Electronics |x Semiconductors. |2 bisacsh | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING |x Electronics |x Solid State. |2 bisacsh | |
| 650 | 7 | |a Nanoelectromechanical systems |2 fast | |
| 650 | 7 | |a Nanotechnology |2 fast | |
| 650 | 7 | |a Semiconductors |2 fast | |
| 650 | 7 | |a Silicon-on-insulator technology |2 fast | |
| 653 | 1 | |a Nanoscaled | |
| 653 | 1 | |a Semiconductor-on-insulator | |
| 653 | 1 | |a Sensors | |
| 653 | 1 | |a Insulator | |
| 655 | 7 | |a Conference papers and proceedings |2 fast | |
| 700 | 1 | |a Nazarov, A. N. |q (Alexei N.) | |
| 700 | 1 | |a Raskin, J.-P. |q (Jean-Pierre), |d 1971- | |
| 776 | 0 | 8 | |i Print version: |a International Workshop on Semiconductor-on-Insulator Materials and Devices. |t Nanoscaled semiconductor-on-insulator materials, sensors and devices : selected, peer reviewed papers from the 6th International Workshop on Semiconductor-on-Insulator Materials and Devices, 24-28 October, 2010 Kyiv, Ukraine. |d Durnten-Zurich, Switzerland : Trans Tech Publications, [2011] |h 206 pages ; 25 cm. |k Advanced materials research ; volume 276 |x 1022-6680 |z 9783037851784 |w (DLC) 10817963 |w (OCoLC)752070105 |
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| author2 | Nazarov, A. N. (Alexei N.) Raskin, J.-P. (Jean-Pierre), 1971- |
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| author_corporate | International Workshop on Semiconductor-on-Insulator Materials and Devices Kiev, Ukraine |
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| author_facet | Nazarov, A. N. (Alexei N.) Raskin, J.-P. (Jean-Pierre), 1971- International Workshop on Semiconductor-on-Insulator Materials and Devices Kiev, Ukraine |
| author_sort | International Workshop on Semiconductor-on-Insulator Materials and Devices Kiev, Ukraine |
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| contents | Nanoscaled Semiconductor-on-Insulator Materials, Sensors and Devices; Preface and Committee Members; Table of Contents; I. Technology of Semiconductor-On-Insulator Structures and Devices; ZnO Films and Crystals on Bulk Silicon and SOI Wafers: Formation, Properties and Applications; Influence of Hydrogen Plasma Treatment on a-SiC Resistivity of the SiC/SiO2/Si Structures; Diamond -- Graphite Heterostructures Formed by Nitrogen and Hydrogen Implantation and Annealing; Hydrogen Gettering within Processed Oxygen-Implanted Silicon; II. Physics of New SOI Devices Gate Control of Junction Impact Ionization Avalanche in SOI MISFETs: Theoretical ModelSemi-Analytical Models of Field-Effect Transistors with Low-Dimensional Channels; Model of Nonuniform Channel for the Charge Carrier Transport in Nanoscale FETs; High Temperature Effects on Harmonic Distortion in Submicron SOI Graded-Channel MOSFETs; Some Issues of Modeling the Double Barrier Metal-Oxide-Semiconductor Tunnel Structures; Electrical Properties of High-K LaLuO3 Gate Oxide for SOI MOSFETs; Effects of High-Energy Neutrons on Advanced SOI MOSFETs; III. SOI Sensors and MEMS Polysilicon on Insulator Structures for Sensor Application at Electron Irradiation & Magnetic FieldsOn-Chip Tensile Testing of the Mechanical and Electro-Mechanical Properties of Nano-Scale Silicon Free-Standing Beams; Non-Standard FinFET Devices for Small Volume Sample Sensors; 3D SOI Elements for System-on-Chip Applications; Routes towards Novel Active Pressure Sensors in SOI Technology; IV. Nanodots, Nanowires and Nanofilms; Photovoltage Performance of Ge/Si Nanostructures Grown on Intermediate Ultrathin SiOX Layers Interface and Bulk Properties of High-K Gadolinium and Neodymium Oxides on SiliconEffect of Ge Nanoislands on Lateral Photoconductivity of Ge-SiOX-Si Structures; A Model of the Evolution of the Au/Si Droplet Ensembles during Rapid Thermal Annealing at High Temperatures; The Nanometer Scaled Defects Induces with the Dislocation Motion in II-VI Insulated Semiconductors; Keywords Index; Authors Index |
| ctrlnum | (OCoLC)874968182 |
| dewey-full | 621.38152 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.38152 |
| dewey-search | 621.38152 |
| dewey-sort | 3621.38152 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic Conference Proceeding eBook |
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SOI sensors and MEMS; 4. nanodots, nanowires and nanofilms. The first part covers a wide variety of SemOI-based structures such as ZnO-on-Insulators, a-SiC-on-Si oxide, graphite inner films fabricated by ion implantation, and others. The second part presents new devices based upon impact ionization near to the source junction, the modeling of charge transport in nano-scale SOI MOSFETs, the electrical properties of SOI MOSFETs with LaLuO3 high-k gate dielectric and the study of neutron effects upon the behavior of nanometer-scale SOI devices. The third part considers various types of SOI sensors and MEMS, together with their characteristics and applications. The fourth part describes the fabrication and properties of quantum-dimensional structures such as nanowires and nanodots. This book will therefore be useful to a wide readership.</subfield></datafield><datafield tag="505" ind1="0" ind2=" "><subfield code="a">Nanoscaled Semiconductor-on-Insulator Materials, Sensors and Devices; Preface and Committee Members; Table of Contents; I. Technology of Semiconductor-On-Insulator Structures and Devices; ZnO Films and Crystals on Bulk Silicon and SOI Wafers: Formation, Properties and Applications; Influence of Hydrogen Plasma Treatment on a-SiC Resistivity of the SiC/SiO2/Si Structures; Diamond -- Graphite Heterostructures Formed by Nitrogen and Hydrogen Implantation and Annealing; Hydrogen Gettering within Processed Oxygen-Implanted Silicon; II. 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| genre | Conference papers and proceedings fast |
| genre_facet | Conference papers and proceedings |
| id | ZDB-4-EBA-ocn874968182 |
| illustrated | Illustrated |
| indexdate | 2024-11-27T13:25:52Z |
| institution | BVB |
| isbn | 9783038136156 3038136158 |
| issn | 1022-6680 ; 1022-6680 |
| language | English |
| oclc_num | 874968182 |
| open_access_boolean | |
| owner | MAIN DE-863 DE-BY-FWS |
| owner_facet | MAIN DE-863 DE-BY-FWS |
| physical | 1 online resource (199 pages) : illustrations |
| psigel | ZDB-4-EBA |
| publishDate | 2011 |
| publishDateSearch | 2011 |
| publishDateSort | 2011 |
| publisher | Trans Tech Publications, |
| record_format | marc |
| series | Advanced materials research ; |
| series2 | Advanced materials research, |
| spelling | International Workshop on Semiconductor-on-Insulator Materials and Devices (6th : 2010 : Kiev, Ukraine) issuing body. Nanoscaled semiconductor-on-insulator materials, sensors and devices : selected, peer reviewed papers from the 6th International Workshop on Semiconductor-on-Insulator Materials and Devices, 24-28 October, 2010 Kyiv, Ukraine / edited by Alexei N. Nazarov and Jean-Pierre Raskin. Durnten-Zurich, Switzerland : Trans Tech Publications, [2011] Enfield, N.H. : Distributed in the Americas by Trans Tech Publications, [date of distribution not identified] ©2011 1 online resource (199 pages) : illustrations text txt rdacontent computer c rdamedia online resource cr rdacarrier Advanced materials research, 1022-6680 ; volume 276 Includes bibliographical references and indexes. Print version record. This special collection covers: 1. the technology of semiconductor-on-insulator structures and devices; 2. the physics of new SOI devices; 3. SOI sensors and MEMS; 4. nanodots, nanowires and nanofilms. The first part covers a wide variety of SemOI-based structures such as ZnO-on-Insulators, a-SiC-on-Si oxide, graphite inner films fabricated by ion implantation, and others. The second part presents new devices based upon impact ionization near to the source junction, the modeling of charge transport in nano-scale SOI MOSFETs, the electrical properties of SOI MOSFETs with LaLuO3 high-k gate dielectric and the study of neutron effects upon the behavior of nanometer-scale SOI devices. The third part considers various types of SOI sensors and MEMS, together with their characteristics and applications. The fourth part describes the fabrication and properties of quantum-dimensional structures such as nanowires and nanodots. This book will therefore be useful to a wide readership. Nanoscaled Semiconductor-on-Insulator Materials, Sensors and Devices; Preface and Committee Members; Table of Contents; I. Technology of Semiconductor-On-Insulator Structures and Devices; ZnO Films and Crystals on Bulk Silicon and SOI Wafers: Formation, Properties and Applications; Influence of Hydrogen Plasma Treatment on a-SiC Resistivity of the SiC/SiO2/Si Structures; Diamond -- Graphite Heterostructures Formed by Nitrogen and Hydrogen Implantation and Annealing; Hydrogen Gettering within Processed Oxygen-Implanted Silicon; II. Physics of New SOI Devices Gate Control of Junction Impact Ionization Avalanche in SOI MISFETs: Theoretical ModelSemi-Analytical Models of Field-Effect Transistors with Low-Dimensional Channels; Model of Nonuniform Channel for the Charge Carrier Transport in Nanoscale FETs; High Temperature Effects on Harmonic Distortion in Submicron SOI Graded-Channel MOSFETs; Some Issues of Modeling the Double Barrier Metal-Oxide-Semiconductor Tunnel Structures; Electrical Properties of High-K LaLuO3 Gate Oxide for SOI MOSFETs; Effects of High-Energy Neutrons on Advanced SOI MOSFETs; III. SOI Sensors and MEMS Polysilicon on Insulator Structures for Sensor Application at Electron Irradiation & Magnetic FieldsOn-Chip Tensile Testing of the Mechanical and Electro-Mechanical Properties of Nano-Scale Silicon Free-Standing Beams; Non-Standard FinFET Devices for Small Volume Sample Sensors; 3D SOI Elements for System-on-Chip Applications; Routes towards Novel Active Pressure Sensors in SOI Technology; IV. Nanodots, Nanowires and Nanofilms; Photovoltage Performance of Ge/Si Nanostructures Grown on Intermediate Ultrathin SiOX Layers Interface and Bulk Properties of High-K Gadolinium and Neodymium Oxides on SiliconEffect of Ge Nanoislands on Lateral Photoconductivity of Ge-SiOX-Si Structures; A Model of the Evolution of the Au/Si Droplet Ensembles during Rapid Thermal Annealing at High Temperatures; The Nanometer Scaled Defects Induces with the Dislocation Motion in II-VI Insulated Semiconductors; Keywords Index; Authors Index English. Semiconductors Congresses. Silicon-on-insulator technology Congresses. Nanoelectromechanical systems Congresses. Nanotechnology Congresses. Semi-conducteurs Congrès. Silicium sur isolant Congrès. Nanosystèmes électromécaniques Congrès. Nanotechnologie Congrès. TECHNOLOGY & ENGINEERING Electronics Semiconductors. bisacsh TECHNOLOGY & ENGINEERING Electronics Solid State. bisacsh Nanoelectromechanical systems fast Nanotechnology fast Semiconductors fast Silicon-on-insulator technology fast Nanoscaled Semiconductor-on-insulator Sensors Insulator Conference papers and proceedings fast Nazarov, A. N. (Alexei N.) Raskin, J.-P. (Jean-Pierre), 1971- Print version: International Workshop on Semiconductor-on-Insulator Materials and Devices. Nanoscaled semiconductor-on-insulator materials, sensors and devices : selected, peer reviewed papers from the 6th International Workshop on Semiconductor-on-Insulator Materials and Devices, 24-28 October, 2010 Kyiv, Ukraine. Durnten-Zurich, Switzerland : Trans Tech Publications, [2011] 206 pages ; 25 cm. Advanced materials research ; volume 276 1022-6680 9783037851784 (DLC) 10817963 (OCoLC)752070105 Advanced materials research ; 276. FWS01 ZDB-4-EBA FWS_PDA_EBA https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=553090 Volltext |
| spellingShingle | Nanoscaled semiconductor-on-insulator materials, sensors and devices : selected, peer reviewed papers from the 6th International Workshop on Semiconductor-on-Insulator Materials and Devices, 24-28 October, 2010 Kyiv, Ukraine / Advanced materials research ; Nanoscaled Semiconductor-on-Insulator Materials, Sensors and Devices; Preface and Committee Members; Table of Contents; I. Technology of Semiconductor-On-Insulator Structures and Devices; ZnO Films and Crystals on Bulk Silicon and SOI Wafers: Formation, Properties and Applications; Influence of Hydrogen Plasma Treatment on a-SiC Resistivity of the SiC/SiO2/Si Structures; Diamond -- Graphite Heterostructures Formed by Nitrogen and Hydrogen Implantation and Annealing; Hydrogen Gettering within Processed Oxygen-Implanted Silicon; II. Physics of New SOI Devices Gate Control of Junction Impact Ionization Avalanche in SOI MISFETs: Theoretical ModelSemi-Analytical Models of Field-Effect Transistors with Low-Dimensional Channels; Model of Nonuniform Channel for the Charge Carrier Transport in Nanoscale FETs; High Temperature Effects on Harmonic Distortion in Submicron SOI Graded-Channel MOSFETs; Some Issues of Modeling the Double Barrier Metal-Oxide-Semiconductor Tunnel Structures; Electrical Properties of High-K LaLuO3 Gate Oxide for SOI MOSFETs; Effects of High-Energy Neutrons on Advanced SOI MOSFETs; III. SOI Sensors and MEMS Polysilicon on Insulator Structures for Sensor Application at Electron Irradiation & Magnetic FieldsOn-Chip Tensile Testing of the Mechanical and Electro-Mechanical Properties of Nano-Scale Silicon Free-Standing Beams; Non-Standard FinFET Devices for Small Volume Sample Sensors; 3D SOI Elements for System-on-Chip Applications; Routes towards Novel Active Pressure Sensors in SOI Technology; IV. Nanodots, Nanowires and Nanofilms; Photovoltage Performance of Ge/Si Nanostructures Grown on Intermediate Ultrathin SiOX Layers Interface and Bulk Properties of High-K Gadolinium and Neodymium Oxides on SiliconEffect of Ge Nanoislands on Lateral Photoconductivity of Ge-SiOX-Si Structures; A Model of the Evolution of the Au/Si Droplet Ensembles during Rapid Thermal Annealing at High Temperatures; The Nanometer Scaled Defects Induces with the Dislocation Motion in II-VI Insulated Semiconductors; Keywords Index; Authors Index Semiconductors Congresses. Silicon-on-insulator technology Congresses. Nanoelectromechanical systems Congresses. Nanotechnology Congresses. Semi-conducteurs Congrès. Silicium sur isolant Congrès. Nanosystèmes électromécaniques Congrès. Nanotechnologie Congrès. TECHNOLOGY & ENGINEERING Electronics Semiconductors. bisacsh TECHNOLOGY & ENGINEERING Electronics Solid State. bisacsh Nanoelectromechanical systems fast Nanotechnology fast Semiconductors fast Silicon-on-insulator technology fast |
| title | Nanoscaled semiconductor-on-insulator materials, sensors and devices : selected, peer reviewed papers from the 6th International Workshop on Semiconductor-on-Insulator Materials and Devices, 24-28 October, 2010 Kyiv, Ukraine / |
| title_auth | Nanoscaled semiconductor-on-insulator materials, sensors and devices : selected, peer reviewed papers from the 6th International Workshop on Semiconductor-on-Insulator Materials and Devices, 24-28 October, 2010 Kyiv, Ukraine / |
| title_exact_search | Nanoscaled semiconductor-on-insulator materials, sensors and devices : selected, peer reviewed papers from the 6th International Workshop on Semiconductor-on-Insulator Materials and Devices, 24-28 October, 2010 Kyiv, Ukraine / |
| title_full | Nanoscaled semiconductor-on-insulator materials, sensors and devices : selected, peer reviewed papers from the 6th International Workshop on Semiconductor-on-Insulator Materials and Devices, 24-28 October, 2010 Kyiv, Ukraine / edited by Alexei N. Nazarov and Jean-Pierre Raskin. |
| title_fullStr | Nanoscaled semiconductor-on-insulator materials, sensors and devices : selected, peer reviewed papers from the 6th International Workshop on Semiconductor-on-Insulator Materials and Devices, 24-28 October, 2010 Kyiv, Ukraine / edited by Alexei N. Nazarov and Jean-Pierre Raskin. |
| title_full_unstemmed | Nanoscaled semiconductor-on-insulator materials, sensors and devices : selected, peer reviewed papers from the 6th International Workshop on Semiconductor-on-Insulator Materials and Devices, 24-28 October, 2010 Kyiv, Ukraine / edited by Alexei N. Nazarov and Jean-Pierre Raskin. |
| title_short | Nanoscaled semiconductor-on-insulator materials, sensors and devices : |
| title_sort | nanoscaled semiconductor on insulator materials sensors and devices selected peer reviewed papers from the 6th international workshop on semiconductor on insulator materials and devices 24 28 october 2010 kyiv ukraine |
| title_sub | selected, peer reviewed papers from the 6th International Workshop on Semiconductor-on-Insulator Materials and Devices, 24-28 October, 2010 Kyiv, Ukraine / |
| topic | Semiconductors Congresses. Silicon-on-insulator technology Congresses. Nanoelectromechanical systems Congresses. Nanotechnology Congresses. Semi-conducteurs Congrès. Silicium sur isolant Congrès. Nanosystèmes électromécaniques Congrès. Nanotechnologie Congrès. TECHNOLOGY & ENGINEERING Electronics Semiconductors. bisacsh TECHNOLOGY & ENGINEERING Electronics Solid State. bisacsh Nanoelectromechanical systems fast Nanotechnology fast Semiconductors fast Silicon-on-insulator technology fast |
| topic_facet | Semiconductors Congresses. Silicon-on-insulator technology Congresses. Nanoelectromechanical systems Congresses. Nanotechnology Congresses. Semi-conducteurs Congrès. Silicium sur isolant Congrès. Nanosystèmes électromécaniques Congrès. Nanotechnologie Congrès. TECHNOLOGY & ENGINEERING Electronics Semiconductors. TECHNOLOGY & ENGINEERING Electronics Solid State. Nanoelectromechanical systems Nanotechnology Semiconductors Silicon-on-insulator technology Conference papers and proceedings |
| url | https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=553090 |
| work_keys_str_mv | AT internationalworkshoponsemiconductoroninsulatormaterialsanddeviceskievukraine nanoscaledsemiconductoroninsulatormaterialssensorsanddevicesselectedpeerreviewedpapersfromthe6thinternationalworkshoponsemiconductoroninsulatormaterialsanddevices2428october2010kyivukraine AT nazarovan nanoscaledsemiconductoroninsulatormaterialssensorsanddevicesselectedpeerreviewedpapersfromthe6thinternationalworkshoponsemiconductoroninsulatormaterialsanddevices2428october2010kyivukraine AT raskinjp nanoscaledsemiconductoroninsulatormaterialssensorsanddevicesselectedpeerreviewedpapersfromthe6thinternationalworkshoponsemiconductoroninsulatormaterialsanddevices2428october2010kyivukraine |