Gettering and defect engineering in semiconductor technology XV :: selected papers from the 15th Gettering and Defect Engineering in Semiconductor Technology Conference, September 22-27, 2013, Oxford, UK /
Gespeichert in:
| Körperschaft: | |
|---|---|
| Weitere Verfasser: | |
| Format: | Elektronisch Tagungsbericht E-Book |
| Sprache: | English |
| Veröffentlicht: |
Durnten-Zurich :
Trans Tech publications Ltd,
[2014]
|
| Schriftenreihe: | Diffusion and defect data. Solid state phenomena ;
v. 205/206. |
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Beschreibung: | 1 online resource (xiv, 516 pages) : illustrations (black and white |
| Bibliographie: | Includes bibliographical references and index. |
| ISBN: | 3038262056 9783038262053 |
| ISSN: | 1012-0394 ; |
Internformat
MARC
| LEADER | 00000cam a22000003a 4500 | ||
|---|---|---|---|
| 001 | ZDB-4-EBA-ocn870663323 | ||
| 003 | OCoLC | ||
| 005 | 20241004212047.0 | ||
| 006 | m o d | ||
| 007 | cr |n||||||||| | ||
| 008 | 140217s2014 sz a ob 101 0 eng d | ||
| 040 | |a YDXCP |b eng |e pn |c YDXCP |d N$T |d OCLCQ |d OCLCO |d OCLCF |d OCLCQ |d OCL |d OCLCO |d OCLCQ |d AGLDB |d MERUC |d OCLCQ |d VTS |d STF |d M8D |d OCLCO |d OCLCQ |d OCLCO |d OCLCL | ||
| 020 | |a 3038262056 |q (electronic bk.) | ||
| 020 | |a 9783038262053 |q (electronic bk.) | ||
| 020 | |z 9783037858240 |q (paperback) | ||
| 020 | |z 3037858249 |q (paperback) | ||
| 035 | |a (OCoLC)870663323 | ||
| 050 | 4 | |a TK7871.85 |b .G426 2013 | |
| 072 | 7 | |a TEC |x 009070 |2 bisacsh | |
| 082 | 7 | |a 621.3815/2 |2 23 | |
| 049 | |a MAIN | ||
| 111 | 2 | |a Gettering and Defect Engineering in Semiconductor Technology Conference |n (15th : |d 2013 : |c Oxford, Great Britain) | |
| 245 | 1 | 0 | |a Gettering and defect engineering in semiconductor technology XV : |b selected papers from the 15th Gettering and Defect Engineering in Semiconductor Technology Conference, September 22-27, 2013, Oxford, UK / |c edited by J.D. Murphy. |
| 246 | 3 | |a Gettering and defect engineering in semiconductor technology 15 | |
| 264 | 1 | |a Durnten-Zurich : |b Trans Tech publications Ltd, |c [2014] | |
| 300 | |a 1 online resource (xiv, 516 pages) : |b illustrations (black and white | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 490 | 1 | |a Diffusion and defect data. Pt. B, Solid state phenomena, |x 1012-0394 ; |v volumes 205/206 | |
| 504 | |a Includes bibliographical references and index. | ||
| 588 | 0 | |a Print version record. | |
| 650 | 0 | |a Semiconductors |x Defects |v Congresses. | |
| 650 | 0 | |a Getters |v Congresses. | |
| 650 | 6 | |a Semi-conducteurs |x Défauts |v Congrès. | |
| 650 | 6 | |a Getters |v Congrès. | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING |x Mechanical. |2 bisacsh | |
| 650 | 7 | |a Getters |2 fast | |
| 650 | 7 | |a Semiconductors |x Defects |2 fast | |
| 655 | 7 | |a Conference papers and proceedings |2 fast | |
| 700 | 1 | |a Murphy, J. D., |e editor. | |
| 758 | |i has work: |a Gettering and Defect Engineering in Semiconductor Technology XV (Text) |1 https://id.oclc.org/worldcat/entity/E39PCYPPdq4KgGKvhktK3bwCjP |4 https://id.oclc.org/worldcat/ontology/hasWork | ||
| 776 | 0 | 8 | |i Print version: |z 9783037858240 |z 3037858249 |
| 830 | 0 | |a Diffusion and defect data. |n Pt. B, |p Solid state phenomena ; |v v. 205/206. |0 http://id.loc.gov/authorities/names/no00104273 | |
| 856 | 4 | 0 | |l FWS01 |p ZDB-4-EBA |q FWS_PDA_EBA |u https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=663767 |3 Volltext |
| 938 | |a EBSCOhost |b EBSC |n 663767 | ||
| 938 | |a YBP Library Services |b YANK |n 11355454 | ||
| 994 | |a 92 |b GEBAY | ||
| 912 | |a ZDB-4-EBA | ||
| 049 | |a DE-863 | ||
Datensatz im Suchindex
| DE-BY-FWS_katkey | ZDB-4-EBA-ocn870663323 |
|---|---|
| _version_ | 1816882261288550400 |
| adam_text | |
| any_adam_object | |
| author2 | Murphy, J. D. |
| author2_role | edt |
| author2_variant | j d m jd jdm |
| author_corporate | Gettering and Defect Engineering in Semiconductor Technology Conference Oxford, Great Britain |
| author_corporate_role | |
| author_facet | Murphy, J. D. Gettering and Defect Engineering in Semiconductor Technology Conference Oxford, Great Britain |
| author_sort | Gettering and Defect Engineering in Semiconductor Technology Conference Oxford, Great Britain |
| building | Verbundindex |
| bvnumber | localFWS |
| callnumber-first | T - Technology |
| callnumber-label | TK7871 |
| callnumber-raw | TK7871.85 .G426 2013 |
| callnumber-search | TK7871.85 .G426 2013 |
| callnumber-sort | TK 47871.85 G426 42013 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| collection | ZDB-4-EBA |
| ctrlnum | (OCoLC)870663323 |
| dewey-full | 621.3815/2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/2 |
| dewey-search | 621.3815/2 |
| dewey-sort | 3621.3815 12 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic Conference Proceeding eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02676cam a22005413a 4500</leader><controlfield tag="001">ZDB-4-EBA-ocn870663323</controlfield><controlfield tag="003">OCoLC</controlfield><controlfield tag="005">20241004212047.0</controlfield><controlfield tag="006">m o d </controlfield><controlfield tag="007">cr |n|||||||||</controlfield><controlfield tag="008">140217s2014 sz a ob 101 0 eng d</controlfield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">YDXCP</subfield><subfield code="b">eng</subfield><subfield code="e">pn</subfield><subfield code="c">YDXCP</subfield><subfield code="d">N$T</subfield><subfield code="d">OCLCQ</subfield><subfield code="d">OCLCO</subfield><subfield code="d">OCLCF</subfield><subfield code="d">OCLCQ</subfield><subfield code="d">OCL</subfield><subfield code="d">OCLCO</subfield><subfield code="d">OCLCQ</subfield><subfield code="d">AGLDB</subfield><subfield code="d">MERUC</subfield><subfield code="d">OCLCQ</subfield><subfield code="d">VTS</subfield><subfield code="d">STF</subfield><subfield code="d">M8D</subfield><subfield code="d">OCLCO</subfield><subfield code="d">OCLCQ</subfield><subfield code="d">OCLCO</subfield><subfield code="d">OCLCL</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">3038262056</subfield><subfield code="q">(electronic bk.)</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783038262053</subfield><subfield code="q">(electronic bk.)</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="z">9783037858240</subfield><subfield code="q">(paperback)</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="z">3037858249</subfield><subfield code="q">(paperback)</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)870663323</subfield></datafield><datafield tag="050" ind1=" " ind2="4"><subfield code="a">TK7871.85</subfield><subfield code="b">.G426 2013</subfield></datafield><datafield tag="072" ind1=" " ind2="7"><subfield code="a">TEC</subfield><subfield code="x">009070</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="082" ind1="7" ind2=" "><subfield code="a">621.3815/2</subfield><subfield code="2">23</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">MAIN</subfield></datafield><datafield tag="111" ind1="2" ind2=" "><subfield code="a">Gettering and Defect Engineering in Semiconductor Technology Conference</subfield><subfield code="n">(15th :</subfield><subfield code="d">2013 :</subfield><subfield code="c">Oxford, Great Britain)</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Gettering and defect engineering in semiconductor technology XV :</subfield><subfield code="b">selected papers from the 15th Gettering and Defect Engineering in Semiconductor Technology Conference, September 22-27, 2013, Oxford, UK /</subfield><subfield code="c">edited by J.D. Murphy.</subfield></datafield><datafield tag="246" ind1="3" ind2=" "><subfield code="a">Gettering and defect engineering in semiconductor technology 15</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Durnten-Zurich :</subfield><subfield code="b">Trans Tech publications Ltd,</subfield><subfield code="c">[2014]</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 online resource (xiv, 516 pages) :</subfield><subfield code="b">illustrations (black and white</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">computer</subfield><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">online resource</subfield><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Diffusion and defect data. Pt. B, Solid state phenomena,</subfield><subfield code="x">1012-0394 ;</subfield><subfield code="v">volumes 205/206</subfield></datafield><datafield tag="504" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references and index.</subfield></datafield><datafield tag="588" ind1="0" ind2=" "><subfield code="a">Print version record.</subfield></datafield><datafield tag="650" ind1=" " ind2="0"><subfield code="a">Semiconductors</subfield><subfield code="x">Defects</subfield><subfield code="v">Congresses.</subfield></datafield><datafield tag="650" ind1=" " ind2="0"><subfield code="a">Getters</subfield><subfield code="v">Congresses.</subfield></datafield><datafield tag="650" ind1=" " ind2="6"><subfield code="a">Semi-conducteurs</subfield><subfield code="x">Défauts</subfield><subfield code="v">Congrès.</subfield></datafield><datafield tag="650" ind1=" " ind2="6"><subfield code="a">Getters</subfield><subfield code="v">Congrès.</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">TECHNOLOGY & ENGINEERING</subfield><subfield code="x">Mechanical.</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Getters</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Semiconductors</subfield><subfield code="x">Defects</subfield><subfield code="2">fast</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="a">Conference papers and proceedings</subfield><subfield code="2">fast</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Murphy, J. D.,</subfield><subfield code="e">editor.</subfield></datafield><datafield tag="758" ind1=" " ind2=" "><subfield code="i">has work:</subfield><subfield code="a">Gettering and Defect Engineering in Semiconductor Technology XV (Text)</subfield><subfield code="1">https://id.oclc.org/worldcat/entity/E39PCYPPdq4KgGKvhktK3bwCjP</subfield><subfield code="4">https://id.oclc.org/worldcat/ontology/hasWork</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Print version:</subfield><subfield code="z">9783037858240</subfield><subfield code="z">3037858249</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Diffusion and defect data.</subfield><subfield code="n">Pt. B,</subfield><subfield code="p">Solid state phenomena ;</subfield><subfield code="v">v. 205/206.</subfield><subfield code="0">http://id.loc.gov/authorities/names/no00104273</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="l">FWS01</subfield><subfield code="p">ZDB-4-EBA</subfield><subfield code="q">FWS_PDA_EBA</subfield><subfield code="u">https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=663767</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="938" ind1=" " ind2=" "><subfield code="a">EBSCOhost</subfield><subfield code="b">EBSC</subfield><subfield code="n">663767</subfield></datafield><datafield tag="938" ind1=" " ind2=" "><subfield code="a">YBP Library Services</subfield><subfield code="b">YANK</subfield><subfield code="n">11355454</subfield></datafield><datafield tag="994" ind1=" " ind2=" "><subfield code="a">92</subfield><subfield code="b">GEBAY</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-4-EBA</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-863</subfield></datafield></record></collection> |
| genre | Conference papers and proceedings fast |
| genre_facet | Conference papers and proceedings |
| id | ZDB-4-EBA-ocn870663323 |
| illustrated | Illustrated |
| indexdate | 2024-11-27T13:25:48Z |
| institution | BVB |
| isbn | 3038262056 9783038262053 |
| issn | 1012-0394 ; |
| language | English |
| oclc_num | 870663323 |
| open_access_boolean | |
| owner | MAIN DE-863 DE-BY-FWS |
| owner_facet | MAIN DE-863 DE-BY-FWS |
| physical | 1 online resource (xiv, 516 pages) : illustrations (black and white |
| psigel | ZDB-4-EBA |
| publishDate | 2014 |
| publishDateSearch | 2014 |
| publishDateSort | 2014 |
| publisher | Trans Tech publications Ltd, |
| record_format | marc |
| series | Diffusion and defect data. Solid state phenomena ; |
| series2 | Diffusion and defect data. Pt. B, Solid state phenomena, |
| spelling | Gettering and Defect Engineering in Semiconductor Technology Conference (15th : 2013 : Oxford, Great Britain) Gettering and defect engineering in semiconductor technology XV : selected papers from the 15th Gettering and Defect Engineering in Semiconductor Technology Conference, September 22-27, 2013, Oxford, UK / edited by J.D. Murphy. Gettering and defect engineering in semiconductor technology 15 Durnten-Zurich : Trans Tech publications Ltd, [2014] 1 online resource (xiv, 516 pages) : illustrations (black and white text txt rdacontent computer c rdamedia online resource cr rdacarrier Diffusion and defect data. Pt. B, Solid state phenomena, 1012-0394 ; volumes 205/206 Includes bibliographical references and index. Print version record. Semiconductors Defects Congresses. Getters Congresses. Semi-conducteurs Défauts Congrès. Getters Congrès. TECHNOLOGY & ENGINEERING Mechanical. bisacsh Getters fast Semiconductors Defects fast Conference papers and proceedings fast Murphy, J. D., editor. has work: Gettering and Defect Engineering in Semiconductor Technology XV (Text) https://id.oclc.org/worldcat/entity/E39PCYPPdq4KgGKvhktK3bwCjP https://id.oclc.org/worldcat/ontology/hasWork Print version: 9783037858240 3037858249 Diffusion and defect data. Pt. B, Solid state phenomena ; v. 205/206. http://id.loc.gov/authorities/names/no00104273 FWS01 ZDB-4-EBA FWS_PDA_EBA https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=663767 Volltext |
| spellingShingle | Gettering and defect engineering in semiconductor technology XV : selected papers from the 15th Gettering and Defect Engineering in Semiconductor Technology Conference, September 22-27, 2013, Oxford, UK / Diffusion and defect data. Solid state phenomena ; Semiconductors Defects Congresses. Getters Congresses. Semi-conducteurs Défauts Congrès. Getters Congrès. TECHNOLOGY & ENGINEERING Mechanical. bisacsh Getters fast Semiconductors Defects fast |
| title | Gettering and defect engineering in semiconductor technology XV : selected papers from the 15th Gettering and Defect Engineering in Semiconductor Technology Conference, September 22-27, 2013, Oxford, UK / |
| title_alt | Gettering and defect engineering in semiconductor technology 15 |
| title_auth | Gettering and defect engineering in semiconductor technology XV : selected papers from the 15th Gettering and Defect Engineering in Semiconductor Technology Conference, September 22-27, 2013, Oxford, UK / |
| title_exact_search | Gettering and defect engineering in semiconductor technology XV : selected papers from the 15th Gettering and Defect Engineering in Semiconductor Technology Conference, September 22-27, 2013, Oxford, UK / |
| title_full | Gettering and defect engineering in semiconductor technology XV : selected papers from the 15th Gettering and Defect Engineering in Semiconductor Technology Conference, September 22-27, 2013, Oxford, UK / edited by J.D. Murphy. |
| title_fullStr | Gettering and defect engineering in semiconductor technology XV : selected papers from the 15th Gettering and Defect Engineering in Semiconductor Technology Conference, September 22-27, 2013, Oxford, UK / edited by J.D. Murphy. |
| title_full_unstemmed | Gettering and defect engineering in semiconductor technology XV : selected papers from the 15th Gettering and Defect Engineering in Semiconductor Technology Conference, September 22-27, 2013, Oxford, UK / edited by J.D. Murphy. |
| title_short | Gettering and defect engineering in semiconductor technology XV : |
| title_sort | gettering and defect engineering in semiconductor technology xv selected papers from the 15th gettering and defect engineering in semiconductor technology conference september 22 27 2013 oxford uk |
| title_sub | selected papers from the 15th Gettering and Defect Engineering in Semiconductor Technology Conference, September 22-27, 2013, Oxford, UK / |
| topic | Semiconductors Defects Congresses. Getters Congresses. Semi-conducteurs Défauts Congrès. Getters Congrès. TECHNOLOGY & ENGINEERING Mechanical. bisacsh Getters fast Semiconductors Defects fast |
| topic_facet | Semiconductors Defects Congresses. Getters Congresses. Semi-conducteurs Défauts Congrès. Getters Congrès. TECHNOLOGY & ENGINEERING Mechanical. Getters Semiconductors Defects Conference papers and proceedings |
| url | https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=663767 |
| work_keys_str_mv | AT getteringanddefectengineeringinsemiconductortechnologyconferenceoxfordgreatbritain getteringanddefectengineeringinsemiconductortechnologyxvselectedpapersfromthe15thgetteringanddefectengineeringinsemiconductortechnologyconferenceseptember22272013oxforduk AT murphyjd getteringanddefectengineeringinsemiconductortechnologyxvselectedpapersfromthe15thgetteringanddefectengineeringinsemiconductortechnologyconferenceseptember22272013oxforduk AT getteringanddefectengineeringinsemiconductortechnologyconferenceoxfordgreatbritain getteringanddefectengineeringinsemiconductortechnology15 AT murphyjd getteringanddefectengineeringinsemiconductortechnology15 |