Micro-nano technology XIII :: selected, peer reviewed papers from the13th Annual Conference of Chinese Society of Micro-Nano Technology, September 28-30, 2011, Changchow, China /
These 81 papers, all written by Chinese researchers, are grouped into 8 chapters: Micro/Nano Transducer/Acutar/Robot, Microfluidic Devices and Systems, Micro/ Nano Fabrication and Measurement Technologies, Microfluidics and nano fluids, Nano Material Research/Nanotube/Nanowire Devices, MEMS/NENS and...
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| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Stafa-Zurich ; Enfield, NH :
Trans Tech Publications,
2012.
|
| Schriftenreihe: | Key engineering materials ;
v. 503. |
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Zusammenfassung: | These 81 papers, all written by Chinese researchers, are grouped into 8 chapters: Micro/Nano Transducer/Acutar/Robot, Microfluidic Devices and Systems, Micro/ Nano Fabrication and Measurement Technologies, Microfluidics and nano fluids, Nano Material Research/Nanotube/Nanowire Devices, MEMS/NENS and Applications, Nanometer Biological / Nano Medicine and Packaging Technology. This work offers an excellent overview of current research on MEMS and nano-technology in China. It will be invaluable to researchers, graduate students and engineers who work in the fields of MEMS and nano technology. Re. |
| Beschreibung: | 1 online resource : illustrations |
| Bibliographie: | Includes bibliographical references and indexes. |
| ISBN: | 9783038136897 3038136891 |
| ISSN: | 1013-9826 ; |
Internformat
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| 245 | 1 | 0 | |a Micro-nano technology XIII : |b selected, peer reviewed papers from the13th Annual Conference of Chinese Society of Micro-Nano Technology, September 28-30, 2011, Changchow, China / |c edited by Xiaohao Wang. |
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| 490 | 1 | |a Key engineering materials, |x 1013-9826 ; |v v. 503 | |
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| 505 | 0 | |a Micro-Nano Technology XIII; Preface; Table of Contents; Chapter 1: Micro/Nano Transducer/Actuator/Robot; The Out-Rotator of Spin Traveling Wave Pump on Magnetic Fluid; A Monolithic Integrated Pressure Sensor; A High-Order Curvature-Compensated Bandgap Voltage Reference for Micro-Gyroscope; Pull-In Voltage of Parallel-Plate Capacitor Fixed to Double Elastic Supports; Research on Two-Dimensional Scanning Characteristics of MEMS Resonant Mirror; Design and Fabrication of a MEMS Flexural Plate Wave Device Based on LTO/ZnO/LTO/Si3N4 Multilayered Composite Membrane. | |
| 505 | 8 | |a New Isolation Optimization Method of RF MEMS Capacitive SwitchesDesign, Fabrication and Characterization of a 5x5 Array of Piezoresistive Stress and Temperature Sensors; MEMS Grating with Interdigitated-Comb Structure; Low Temperature Wafer Level Adhesive Bonding Using BCB for Resonant Pressure Sensor; Micro-Machined Electrochemical Seismic Sensors with Interdigital Electrodes; Optimal Design of Micro Plastic Heat Radiator; A Miniaturized Piezoelectric Wind Flutter Generator; Low Frequency Electrochemical Accelerometer with Low Noise Based on MEMS. | |
| 505 | 8 | |a A Flush-Mounted Resonant Ice Detection Sensor with High SensitivitySimulation and Analysis of Cantilever-Membrane Structure for Piezoresistive Micro-Accelerometers; Simulation of Characteristic of a Thermoelectric Power Sensor Based on MEMS Technology; Phase Transition Characterization Dependent on Temperature and DC Electric Field for (Pb, La) (Zr, Ti)O3 Antiferroelectric Thick Films; Heating Carve Technique for Polymer Microfluidic Microchannel; Structure Design of a Novel Micromachinined Tuning Fork Gyroscope with High Robustness; MEMS Bionic Vector Hydrophone. | |
| 505 | 8 | |a Vibration Characteristic Analysis of V-Shaped Electrothermal MicroactuatorDesign and Analysis of a Monolithic 3-Axis Micro-Accelerometer; An Interface for Low-Q Micromachined Gyroscope; A High-Performance Closed-Loop Fourth-Order Sigma-Delta Micro-Machined Accelerometer; Research of Coupling Structure between Photonic Crystal Waveguide and Dielectric Taper Waveguide; A Simple Method for Depositing DNA on the Mica; A Silicon Micro-Accelerometer with Triangle Cross-Section Beam by Anisotropic Wet Etching in TMAH Solution. | |
| 505 | 8 | |a Analysis of Polarization-Maintaining Waveguide Used in Resonance Integrated Optical GyroAnalysis and Improvement of a 3 Axis Accelerometer; A 19 Element Hexagonal Actuator Arrangement Continuous Face-Sheet MEMS Deformable Mirror; Quadrature Error and Offset Error Suppression Methods for Micro-Gyroscopes; Closed-Loop Driving Circuit Based on Frequency Modulation Method for Capacitive Micromachined Gyroscope; Design and Simulation of Multi-Microchannel for Thermal Wind Sensor; Study of High Sensitivity Sensor Based on the Principle of Photoionization. | |
| 520 | |a These 81 papers, all written by Chinese researchers, are grouped into 8 chapters: Micro/Nano Transducer/Acutar/Robot, Microfluidic Devices and Systems, Micro/ Nano Fabrication and Measurement Technologies, Microfluidics and nano fluids, Nano Material Research/Nanotube/Nanowire Devices, MEMS/NENS and Applications, Nanometer Biological / Nano Medicine and Packaging Technology. This work offers an excellent overview of current research on MEMS and nano-technology in China. It will be invaluable to researchers, graduate students and engineers who work in the fields of MEMS and nano technology. Re. | ||
| 650 | 0 | |a Nanotechnology |v Congresses. | |
| 650 | 0 | |a Microtechnology |v Congresses. | |
| 650 | 6 | |a Microtechnologie |v Congrès. | |
| 650 | 6 | |a Nanotechnologie |v Congrès. | |
| 650 | 7 | |a SCIENCE |x Nanoscience. |2 bisacsh | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING |x Nanotechnology & MEMS. |2 bisacsh | |
| 650 | 7 | |a Microtechnology |2 fast | |
| 650 | 7 | |a Nanotechnology |2 fast | |
| 655 | 7 | |a Conference papers and proceedings |2 fast | |
| 700 | 1 | |a Wang, Xiaohao. | |
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| 830 | 0 | |a Key engineering materials ; |v v. 503. |0 http://id.loc.gov/authorities/names/no99072054 | |
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| contents | Micro-Nano Technology XIII; Preface; Table of Contents; Chapter 1: Micro/Nano Transducer/Actuator/Robot; The Out-Rotator of Spin Traveling Wave Pump on Magnetic Fluid; A Monolithic Integrated Pressure Sensor; A High-Order Curvature-Compensated Bandgap Voltage Reference for Micro-Gyroscope; Pull-In Voltage of Parallel-Plate Capacitor Fixed to Double Elastic Supports; Research on Two-Dimensional Scanning Characteristics of MEMS Resonant Mirror; Design and Fabrication of a MEMS Flexural Plate Wave Device Based on LTO/ZnO/LTO/Si3N4 Multilayered Composite Membrane. New Isolation Optimization Method of RF MEMS Capacitive SwitchesDesign, Fabrication and Characterization of a 5x5 Array of Piezoresistive Stress and Temperature Sensors; MEMS Grating with Interdigitated-Comb Structure; Low Temperature Wafer Level Adhesive Bonding Using BCB for Resonant Pressure Sensor; Micro-Machined Electrochemical Seismic Sensors with Interdigital Electrodes; Optimal Design of Micro Plastic Heat Radiator; A Miniaturized Piezoelectric Wind Flutter Generator; Low Frequency Electrochemical Accelerometer with Low Noise Based on MEMS. A Flush-Mounted Resonant Ice Detection Sensor with High SensitivitySimulation and Analysis of Cantilever-Membrane Structure for Piezoresistive Micro-Accelerometers; Simulation of Characteristic of a Thermoelectric Power Sensor Based on MEMS Technology; Phase Transition Characterization Dependent on Temperature and DC Electric Field for (Pb, La) (Zr, Ti)O3 Antiferroelectric Thick Films; Heating Carve Technique for Polymer Microfluidic Microchannel; Structure Design of a Novel Micromachinined Tuning Fork Gyroscope with High Robustness; MEMS Bionic Vector Hydrophone. Vibration Characteristic Analysis of V-Shaped Electrothermal MicroactuatorDesign and Analysis of a Monolithic 3-Axis Micro-Accelerometer; An Interface for Low-Q Micromachined Gyroscope; A High-Performance Closed-Loop Fourth-Order Sigma-Delta Micro-Machined Accelerometer; Research of Coupling Structure between Photonic Crystal Waveguide and Dielectric Taper Waveguide; A Simple Method for Depositing DNA on the Mica; A Silicon Micro-Accelerometer with Triangle Cross-Section Beam by Anisotropic Wet Etching in TMAH Solution. Analysis of Polarization-Maintaining Waveguide Used in Resonance Integrated Optical GyroAnalysis and Improvement of a 3 Axis Accelerometer; A 19 Element Hexagonal Actuator Arrangement Continuous Face-Sheet MEMS Deformable Mirror; Quadrature Error and Offset Error Suppression Methods for Micro-Gyroscopes; Closed-Loop Driving Circuit Based on Frequency Modulation Method for Capacitive Micromachined Gyroscope; Design and Simulation of Multi-Microchannel for Thermal Wind Sensor; Study of High Sensitivity Sensor Based on the Principle of Photoionization. |
| ctrlnum | (OCoLC)828105902 |
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| genre_facet | Conference papers and proceedings |
| id | ZDB-4-EBA-ocn828105902 |
| illustrated | Illustrated |
| indexdate | 2024-11-27T13:25:11Z |
| institution | BVB |
| isbn | 9783038136897 3038136891 |
| issn | 1013-9826 ; |
| language | English |
| oclc_num | 828105902 |
| open_access_boolean | |
| owner | MAIN DE-863 DE-BY-FWS |
| owner_facet | MAIN DE-863 DE-BY-FWS |
| physical | 1 online resource : illustrations |
| psigel | ZDB-4-EBA |
| publishDate | 2012 |
| publishDateSearch | 2012 |
| publishDateSort | 2012 |
| publisher | Trans Tech Publications, |
| record_format | marc |
| series | Key engineering materials ; |
| series2 | Key engineering materials, |
| spelling | Zhongguo wei mi na mi ji shu xue hui. Conference (13th : 2011 : Changzhou (Jiangsu Sheng, China)) Micro-nano technology XIII : selected, peer reviewed papers from the13th Annual Conference of Chinese Society of Micro-Nano Technology, September 28-30, 2011, Changchow, China / edited by Xiaohao Wang. Stafa-Zurich ; Enfield, NH : Trans Tech Publications, 2012. 1 online resource : illustrations text txt rdacontent computer c rdamedia online resource cr rdacarrier Key engineering materials, 1013-9826 ; v. 503 Includes bibliographical references and indexes. Print version record. Micro-Nano Technology XIII; Preface; Table of Contents; Chapter 1: Micro/Nano Transducer/Actuator/Robot; The Out-Rotator of Spin Traveling Wave Pump on Magnetic Fluid; A Monolithic Integrated Pressure Sensor; A High-Order Curvature-Compensated Bandgap Voltage Reference for Micro-Gyroscope; Pull-In Voltage of Parallel-Plate Capacitor Fixed to Double Elastic Supports; Research on Two-Dimensional Scanning Characteristics of MEMS Resonant Mirror; Design and Fabrication of a MEMS Flexural Plate Wave Device Based on LTO/ZnO/LTO/Si3N4 Multilayered Composite Membrane. New Isolation Optimization Method of RF MEMS Capacitive SwitchesDesign, Fabrication and Characterization of a 5x5 Array of Piezoresistive Stress and Temperature Sensors; MEMS Grating with Interdigitated-Comb Structure; Low Temperature Wafer Level Adhesive Bonding Using BCB for Resonant Pressure Sensor; Micro-Machined Electrochemical Seismic Sensors with Interdigital Electrodes; Optimal Design of Micro Plastic Heat Radiator; A Miniaturized Piezoelectric Wind Flutter Generator; Low Frequency Electrochemical Accelerometer with Low Noise Based on MEMS. A Flush-Mounted Resonant Ice Detection Sensor with High SensitivitySimulation and Analysis of Cantilever-Membrane Structure for Piezoresistive Micro-Accelerometers; Simulation of Characteristic of a Thermoelectric Power Sensor Based on MEMS Technology; Phase Transition Characterization Dependent on Temperature and DC Electric Field for (Pb, La) (Zr, Ti)O3 Antiferroelectric Thick Films; Heating Carve Technique for Polymer Microfluidic Microchannel; Structure Design of a Novel Micromachinined Tuning Fork Gyroscope with High Robustness; MEMS Bionic Vector Hydrophone. Vibration Characteristic Analysis of V-Shaped Electrothermal MicroactuatorDesign and Analysis of a Monolithic 3-Axis Micro-Accelerometer; An Interface for Low-Q Micromachined Gyroscope; A High-Performance Closed-Loop Fourth-Order Sigma-Delta Micro-Machined Accelerometer; Research of Coupling Structure between Photonic Crystal Waveguide and Dielectric Taper Waveguide; A Simple Method for Depositing DNA on the Mica; A Silicon Micro-Accelerometer with Triangle Cross-Section Beam by Anisotropic Wet Etching in TMAH Solution. Analysis of Polarization-Maintaining Waveguide Used in Resonance Integrated Optical GyroAnalysis and Improvement of a 3 Axis Accelerometer; A 19 Element Hexagonal Actuator Arrangement Continuous Face-Sheet MEMS Deformable Mirror; Quadrature Error and Offset Error Suppression Methods for Micro-Gyroscopes; Closed-Loop Driving Circuit Based on Frequency Modulation Method for Capacitive Micromachined Gyroscope; Design and Simulation of Multi-Microchannel for Thermal Wind Sensor; Study of High Sensitivity Sensor Based on the Principle of Photoionization. These 81 papers, all written by Chinese researchers, are grouped into 8 chapters: Micro/Nano Transducer/Acutar/Robot, Microfluidic Devices and Systems, Micro/ Nano Fabrication and Measurement Technologies, Microfluidics and nano fluids, Nano Material Research/Nanotube/Nanowire Devices, MEMS/NENS and Applications, Nanometer Biological / Nano Medicine and Packaging Technology. This work offers an excellent overview of current research on MEMS and nano-technology in China. It will be invaluable to researchers, graduate students and engineers who work in the fields of MEMS and nano technology. Re. Nanotechnology Congresses. Microtechnology Congresses. Microtechnologie Congrès. Nanotechnologie Congrès. SCIENCE Nanoscience. bisacsh TECHNOLOGY & ENGINEERING Nanotechnology & MEMS. bisacsh Microtechnology fast Nanotechnology fast Conference papers and proceedings fast Wang, Xiaohao. has work: Micro-Nano Technology XIII (Text) https://id.oclc.org/worldcat/entity/E39PCXGRPtjXJ9kvR3VKqrmVj3 https://id.oclc.org/worldcat/ontology/hasWork Print version: Chinese Society of Micro/Nano Technology. Conference (13th : 2011 : Changzhou (Jiangsu Sheng, China)). Micro-nano technology XIII. Stafa-Zurich ; Enfield, NH : Trans Tech Publications, 2012 9783037853641 (DLC) 2012418417 (OCoLC)794588644 Key engineering materials ; v. 503. http://id.loc.gov/authorities/names/no99072054 FWS01 ZDB-4-EBA FWS_PDA_EBA https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=517147 Volltext |
| spellingShingle | Micro-nano technology XIII : selected, peer reviewed papers from the13th Annual Conference of Chinese Society of Micro-Nano Technology, September 28-30, 2011, Changchow, China / Key engineering materials ; Micro-Nano Technology XIII; Preface; Table of Contents; Chapter 1: Micro/Nano Transducer/Actuator/Robot; The Out-Rotator of Spin Traveling Wave Pump on Magnetic Fluid; A Monolithic Integrated Pressure Sensor; A High-Order Curvature-Compensated Bandgap Voltage Reference for Micro-Gyroscope; Pull-In Voltage of Parallel-Plate Capacitor Fixed to Double Elastic Supports; Research on Two-Dimensional Scanning Characteristics of MEMS Resonant Mirror; Design and Fabrication of a MEMS Flexural Plate Wave Device Based on LTO/ZnO/LTO/Si3N4 Multilayered Composite Membrane. New Isolation Optimization Method of RF MEMS Capacitive SwitchesDesign, Fabrication and Characterization of a 5x5 Array of Piezoresistive Stress and Temperature Sensors; MEMS Grating with Interdigitated-Comb Structure; Low Temperature Wafer Level Adhesive Bonding Using BCB for Resonant Pressure Sensor; Micro-Machined Electrochemical Seismic Sensors with Interdigital Electrodes; Optimal Design of Micro Plastic Heat Radiator; A Miniaturized Piezoelectric Wind Flutter Generator; Low Frequency Electrochemical Accelerometer with Low Noise Based on MEMS. A Flush-Mounted Resonant Ice Detection Sensor with High SensitivitySimulation and Analysis of Cantilever-Membrane Structure for Piezoresistive Micro-Accelerometers; Simulation of Characteristic of a Thermoelectric Power Sensor Based on MEMS Technology; Phase Transition Characterization Dependent on Temperature and DC Electric Field for (Pb, La) (Zr, Ti)O3 Antiferroelectric Thick Films; Heating Carve Technique for Polymer Microfluidic Microchannel; Structure Design of a Novel Micromachinined Tuning Fork Gyroscope with High Robustness; MEMS Bionic Vector Hydrophone. Vibration Characteristic Analysis of V-Shaped Electrothermal MicroactuatorDesign and Analysis of a Monolithic 3-Axis Micro-Accelerometer; An Interface for Low-Q Micromachined Gyroscope; A High-Performance Closed-Loop Fourth-Order Sigma-Delta Micro-Machined Accelerometer; Research of Coupling Structure between Photonic Crystal Waveguide and Dielectric Taper Waveguide; A Simple Method for Depositing DNA on the Mica; A Silicon Micro-Accelerometer with Triangle Cross-Section Beam by Anisotropic Wet Etching in TMAH Solution. Analysis of Polarization-Maintaining Waveguide Used in Resonance Integrated Optical GyroAnalysis and Improvement of a 3 Axis Accelerometer; A 19 Element Hexagonal Actuator Arrangement Continuous Face-Sheet MEMS Deformable Mirror; Quadrature Error and Offset Error Suppression Methods for Micro-Gyroscopes; Closed-Loop Driving Circuit Based on Frequency Modulation Method for Capacitive Micromachined Gyroscope; Design and Simulation of Multi-Microchannel for Thermal Wind Sensor; Study of High Sensitivity Sensor Based on the Principle of Photoionization. Nanotechnology Congresses. Microtechnology Congresses. Microtechnologie Congrès. Nanotechnologie Congrès. SCIENCE Nanoscience. bisacsh TECHNOLOGY & ENGINEERING Nanotechnology & MEMS. bisacsh Microtechnology fast Nanotechnology fast |
| title | Micro-nano technology XIII : selected, peer reviewed papers from the13th Annual Conference of Chinese Society of Micro-Nano Technology, September 28-30, 2011, Changchow, China / |
| title_auth | Micro-nano technology XIII : selected, peer reviewed papers from the13th Annual Conference of Chinese Society of Micro-Nano Technology, September 28-30, 2011, Changchow, China / |
| title_exact_search | Micro-nano technology XIII : selected, peer reviewed papers from the13th Annual Conference of Chinese Society of Micro-Nano Technology, September 28-30, 2011, Changchow, China / |
| title_full | Micro-nano technology XIII : selected, peer reviewed papers from the13th Annual Conference of Chinese Society of Micro-Nano Technology, September 28-30, 2011, Changchow, China / edited by Xiaohao Wang. |
| title_fullStr | Micro-nano technology XIII : selected, peer reviewed papers from the13th Annual Conference of Chinese Society of Micro-Nano Technology, September 28-30, 2011, Changchow, China / edited by Xiaohao Wang. |
| title_full_unstemmed | Micro-nano technology XIII : selected, peer reviewed papers from the13th Annual Conference of Chinese Society of Micro-Nano Technology, September 28-30, 2011, Changchow, China / edited by Xiaohao Wang. |
| title_short | Micro-nano technology XIII : |
| title_sort | micro nano technology xiii selected peer reviewed papers from the13th annual conference of chinese society of micro nano technology september 28 30 2011 changchow china |
| title_sub | selected, peer reviewed papers from the13th Annual Conference of Chinese Society of Micro-Nano Technology, September 28-30, 2011, Changchow, China / |
| topic | Nanotechnology Congresses. Microtechnology Congresses. Microtechnologie Congrès. Nanotechnologie Congrès. SCIENCE Nanoscience. bisacsh TECHNOLOGY & ENGINEERING Nanotechnology & MEMS. bisacsh Microtechnology fast Nanotechnology fast |
| topic_facet | Nanotechnology Congresses. Microtechnology Congresses. Microtechnologie Congrès. Nanotechnologie Congrès. SCIENCE Nanoscience. TECHNOLOGY & ENGINEERING Nanotechnology & MEMS. Microtechnology Nanotechnology Conference papers and proceedings |
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