Soft x-rays and extreme ultraviolet radiation :: principles and applications /
"This self-contained, comprehensive book describes the fundamental properties of soft x-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft x-ray biomicroscopy."--BO...
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Cambridge ; New York :
Cambridge University Press,
2000.
|
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Zusammenfassung: | "This self-contained, comprehensive book describes the fundamental properties of soft x-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft x-ray biomicroscopy."--BOOK JACKET. "The book will be of interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practicing engineers involved in semiconductor fabrication and materials science."--Jacket |
| Beschreibung: | 1 online resource (xvi, 470 pages) : illustrations (some color) |
| Bibliographie: | Includes bibliographical references and index. |
| ISBN: | 9781139164429 1139164422 9781139648936 1139648934 9781139638487 1139638483 |
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| contents | Introduction -- Radiation and scattering at EUV and soft x-ray wavelengths -- Wave propagation and refractive index at EUV and soft x-ray wavelengths -- Multilayer interference coatings -- Synchrotron radiation -- Physics of hot dense plasmas -- Extreme ultraviolet and soft x-ray lasers -- Coherence at short wavelengths -- Soft x-ray microscopy with diffractive optics -- Extreme ultraviolet and x-ray lithography. |
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| dewey-ones | 539 - Modern physics |
| dewey-raw | 539.7/222 |
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| discipline | Physik |
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| id | ZDB-4-EBA-ocn818666348 |
| illustrated | Illustrated |
| indexdate | 2024-11-27T13:25:03Z |
| institution | BVB |
| isbn | 9781139164429 1139164422 9781139648936 1139648934 9781139638487 1139638483 |
| language | English |
| oclc_num | 818666348 |
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| physical | 1 online resource (xvi, 470 pages) : illustrations (some color) |
| psigel | ZDB-4-EBA |
| publishDate | 2000 |
| publishDateSearch | 2000 |
| publishDateSort | 2000 |
| publisher | Cambridge University Press, |
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| spelling | Attwood, David T. http://id.loc.gov/authorities/names/n81152316 Soft x-rays and extreme ultraviolet radiation : principles and applications / David Attwood. Cambridge ; New York : Cambridge University Press, 2000. 1 online resource (xvi, 470 pages) : illustrations (some color) text txt rdacontent computer c rdamedia online resource cr rdacarrier Includes bibliographical references and index. Ch. 1. Introduction -- Ch. 2. Radiation and scattering at EUV and soft x-ray wavelengths -- Ch. 3. Wave propagation and refractive index at EUV and soft x-ray wavelengths -- Ch. 4. Multilayer interference coatings -- Ch. 5. Synchrotron radiation -- Ch. 6. Physics of hot dense plasmas -- Ch. 7. Extreme ultraviolet and soft x-ray lasers -- Ch. 8. Coherence at short wavelengths -- Ch. 9. Soft x-ray microscopy with diffractive optics -- Ch. 10. Extreme ultraviolet and x-ray lithography. "This self-contained, comprehensive book describes the fundamental properties of soft x-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft x-ray biomicroscopy."--BOOK JACKET. "The book will be of interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practicing engineers involved in semiconductor fabrication and materials science."--Jacket Print version record. Grenz rays. http://id.loc.gov/authorities/subjects/sh85057312 Ultraviolet radiation. http://id.loc.gov/authorities/subjects/sh85139506 Ultraviolet Rays https://id.nlm.nih.gov/mesh/D014466 Rayons limite. Rayonnement ultraviolet. ultraviolet radiation. aat SCIENCE Physics Nuclear. bisacsh Grenz rays fast Ultraviolet radiation fast Extremes Ultraviolett gnd http://d-nb.info/gnd/4264163-9 Weiche Röntgenstrahlung gnd http://d-nb.info/gnd/4189406-6 Rayonnement ultraviolet. ram Rayons X. ram has work: Soft x-rays and extreme ultraviolet radiation (Text) https://id.oclc.org/worldcat/entity/E39PCFPFGhfpJfxpdp3CJT3c8y https://id.oclc.org/worldcat/ontology/hasWork Print version: Attwood, David T. Soft x-rays and extreme ultraviolet radiation. Cambridge ; New York : Cambridge University Press, 2000 0521652146 (DLC) 99021078 (OCoLC)40964814 FWS01 ZDB-4-EBA FWS_PDA_EBA https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=510939 Volltext |
| spellingShingle | Attwood, David T. Soft x-rays and extreme ultraviolet radiation : principles and applications / Introduction -- Radiation and scattering at EUV and soft x-ray wavelengths -- Wave propagation and refractive index at EUV and soft x-ray wavelengths -- Multilayer interference coatings -- Synchrotron radiation -- Physics of hot dense plasmas -- Extreme ultraviolet and soft x-ray lasers -- Coherence at short wavelengths -- Soft x-ray microscopy with diffractive optics -- Extreme ultraviolet and x-ray lithography. Grenz rays. http://id.loc.gov/authorities/subjects/sh85057312 Ultraviolet radiation. http://id.loc.gov/authorities/subjects/sh85139506 Ultraviolet Rays https://id.nlm.nih.gov/mesh/D014466 Rayons limite. Rayonnement ultraviolet. ultraviolet radiation. aat SCIENCE Physics Nuclear. bisacsh Grenz rays fast Ultraviolet radiation fast Extremes Ultraviolett gnd http://d-nb.info/gnd/4264163-9 Weiche Röntgenstrahlung gnd http://d-nb.info/gnd/4189406-6 Rayonnement ultraviolet. ram Rayons X. ram |
| subject_GND | http://id.loc.gov/authorities/subjects/sh85057312 http://id.loc.gov/authorities/subjects/sh85139506 https://id.nlm.nih.gov/mesh/D014466 http://d-nb.info/gnd/4264163-9 http://d-nb.info/gnd/4189406-6 |
| title | Soft x-rays and extreme ultraviolet radiation : principles and applications / |
| title_alt | Introduction -- Radiation and scattering at EUV and soft x-ray wavelengths -- Wave propagation and refractive index at EUV and soft x-ray wavelengths -- Multilayer interference coatings -- Synchrotron radiation -- Physics of hot dense plasmas -- Extreme ultraviolet and soft x-ray lasers -- Coherence at short wavelengths -- Soft x-ray microscopy with diffractive optics -- Extreme ultraviolet and x-ray lithography. |
| title_auth | Soft x-rays and extreme ultraviolet radiation : principles and applications / |
| title_exact_search | Soft x-rays and extreme ultraviolet radiation : principles and applications / |
| title_full | Soft x-rays and extreme ultraviolet radiation : principles and applications / David Attwood. |
| title_fullStr | Soft x-rays and extreme ultraviolet radiation : principles and applications / David Attwood. |
| title_full_unstemmed | Soft x-rays and extreme ultraviolet radiation : principles and applications / David Attwood. |
| title_short | Soft x-rays and extreme ultraviolet radiation : |
| title_sort | soft x rays and extreme ultraviolet radiation principles and applications |
| title_sub | principles and applications / |
| topic | Grenz rays. http://id.loc.gov/authorities/subjects/sh85057312 Ultraviolet radiation. http://id.loc.gov/authorities/subjects/sh85139506 Ultraviolet Rays https://id.nlm.nih.gov/mesh/D014466 Rayons limite. Rayonnement ultraviolet. ultraviolet radiation. aat SCIENCE Physics Nuclear. bisacsh Grenz rays fast Ultraviolet radiation fast Extremes Ultraviolett gnd http://d-nb.info/gnd/4264163-9 Weiche Röntgenstrahlung gnd http://d-nb.info/gnd/4189406-6 Rayonnement ultraviolet. ram Rayons X. ram |
| topic_facet | Grenz rays. Ultraviolet radiation. Ultraviolet Rays Rayons limite. Rayonnement ultraviolet. ultraviolet radiation. SCIENCE Physics Nuclear. Grenz rays Ultraviolet radiation Extremes Ultraviolett Weiche Röntgenstrahlung Rayons X. |
| url | https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=510939 |
| work_keys_str_mv | AT attwooddavidt softxraysandextremeultravioletradiationprinciplesandapplications |