NEMS/MEMS technology and devices :: selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G, June 26 - July 1, 2011, Suntec, Singapore /
The emphasis of this special collection of 55 peer-reviewed papers was on NEMS/MEMS and microTAS. Particular attention was paid to applications that involve MEMS design, modelling, fabrication processes, lab-on-a-chip and biophotonic medical devices. The volume also explores new devices and processe...
Gespeichert in:
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| Weitere Verfasser: | , |
| Format: | Elektronisch Tagungsbericht E-Book |
| Sprache: | English |
| Veröffentlicht: |
Durnten-Zurich ; Enfield, NH :
Trans Tech,
©2011.
©2011 |
| Schriftenreihe: | Advanced materials research ;
v. 254. |
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Zusammenfassung: | The emphasis of this special collection of 55 peer-reviewed papers was on NEMS/MEMS and microTAS. Particular attention was paid to applications that involve MEMS design, modelling, fabrication processes, lab-on-a-chip and biophotonic medical devices. The volume also explores new devices and processes, innovations and engineering applications; especially those related to NEMS/MEMS technologies and devices. A very useful guide to this highly specialized topic. Review from Book News Inc.: Papers from a summer 2011 symposium shed light on new devices, process innovations, and engineering applicati. |
| Beschreibung: | 1 online resource (x, 229 pages) : illustrations (some color) |
| Bibliographie: | Includes bibliographical references and indexes. |
| ISBN: | 9783038136095 3038136093 9781621986850 1621986853 |
| ISSN: | 1022-6680 ; |
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| 111 | 2 | |a International Conference on Materials for Advanced Technologies |d (2011 : |c Singapore) |0 http://id.loc.gov/authorities/names/nb2012025385 | |
| 245 | 1 | 0 | |a NEMS/MEMS technology and devices : |b selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G, June 26 - July 1, 2011, Suntec, Singapore / |c edited by Lynn Khine and Julius M. Tsai. |
| 260 | |a Durnten-Zurich ; |a Enfield, NH : |b Trans Tech, |c ©2011. | ||
| 264 | 4 | |c ©2011 | |
| 300 | |a 1 online resource (x, 229 pages) : |b illustrations (some color) | ||
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| 490 | 1 | |a Advanced materials research, |x 1022-6680 ; |v v. 254 | |
| 504 | |a Includes bibliographical references and indexes. | ||
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| 505 | 0 | |a NEMS/MEMS Technology and Devices, ICMAT2011; Preface; Table of Contents; Challenges and Solutions for Fabricating Isolation Trenches for High Aspect Ratio Sensors; Thick-Film Deposition of High-Viscous Liquid Photopolymer; Design and Modeling of Platinum Thin Film Microheater for High Temperature Microtensile Test Application; Optimization of On-Chip Interface Circuit for MEMS Sensor Based on Micro-Cantilever; Microfabrication of a Planar Helix with Straight-Edge Connections Slow-Wave Structure; Separation Gap Estimation in Dynamic Systems Actuated by Casimir Force. | |
| 505 | 8 | |a A Static Micromixer Inspired from Fractal-Like Natural Flow SystemsAlN Actuator for Tunable RFMEMS Capacitor; GEMS: A MEMS-Based Way for the Innervation of Materials; On the Way to the Bionic Man: A Novel Approach to MEMS Based on Biological Sensory Systems; Design Consideration of Membrane Structure for Thermal Actuated Micropump; Developing High Sensitivity Biomass Sensor Using Lamé Mode Square Resonator; Fabrication of a Peltier Device Based on InSb and SbTe Thin Films; Gapfill Study of Polyimides for MEMS Applications. | |
| 505 | 8 | |a A Simple Method for Quantification of Beta-Amyloid Using the Photo-Sensitive Thin Film TransistorWireless Imaging Module Assembly and Integration for Capsule Endoscopic Applications; Low Cost and High Resolution X-Ray Lithography for Fabrication of Microactuator; FBAR Resonators with Sufficient High Q for RF Filter Implementation; Evaluation of Piezoelectric Properties of AlN Using MEMS Resonators; Discrete 3D T-Shaped Electrode Arrays for Moving Liquid by AC Electro-Osmosis; Silicon Probes for Cochlear Auditory Nerve Stimulation and Measurement. | |
| 505 | 8 | |a Area-Selective Polymer Deposition on Micro-Area Framed by Trenches with Falling Liquid FilmA New Peltier Device with a Coaxial Thermocouple; A Portable Thermal Cycler Using a PN Sandwich-Structure Peltier Device; Direct Writing of Channels for Microfluidics in Silica by MeV Ion Beam Lithography; Studies on Quasi-Static Au-to-Au Ohmic Contact for MEMS Switches; Double-Step Plasma Etching for SiO2 Microcantilever Release; Design, Fabrication and Characterization of ZnO Based Thin Film Bulk Acoustic Resonators. | |
| 520 | |a The emphasis of this special collection of 55 peer-reviewed papers was on NEMS/MEMS and microTAS. Particular attention was paid to applications that involve MEMS design, modelling, fabrication processes, lab-on-a-chip and biophotonic medical devices. The volume also explores new devices and processes, innovations and engineering applications; especially those related to NEMS/MEMS technologies and devices. A very useful guide to this highly specialized topic. Review from Book News Inc.: Papers from a summer 2011 symposium shed light on new devices, process innovations, and engineering applicati. | ||
| 546 | |a English. | ||
| 650 | 0 | |a Nanoelectromechanical systems |v Congresses. | |
| 650 | 0 | |a Microelectromechanical systems |v Congresses. | |
| 650 | 6 | |a Nanosystèmes électromécaniques |v Congrès. | |
| 650 | 6 | |a Microsystèmes électromécaniques |v Congrès. | |
| 650 | 7 | |a SCIENCE |x Nanoscience. |2 bisacsh | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING |x Nanotechnology & MEMS. |2 bisacsh | |
| 650 | 7 | |a Microelectromechanical systems |2 fast | |
| 650 | 7 | |a Nanoelectromechanical systems |2 fast | |
| 653 | 1 | |a NEMS/MEMS technology | |
| 653 | 1 | |a Materials | |
| 653 | 1 | |a Advanced technologies | |
| 653 | 1 | |a ICMAT | |
| 655 | 7 | |a Conference papers and proceedings |2 fast | |
| 700 | 1 | |a Khine, Lynn, |e editor. | |
| 700 | 1 | |a Tsai, Julius M., |e editor. | |
| 758 | |i has work: |a NEMS/MEMS technology and devices (Text) |1 https://id.oclc.org/worldcat/entity/E39PCFHJHBWWGkMcxy6pRj6btX |4 https://id.oclc.org/worldcat/ontology/hasWork | ||
| 776 | 0 | 8 | |i Print version: |a International Conference on Materials for Advanced Technologies (2011 : Singapore). |t NEMS/MEMS technology and devices. |d Durnten-Zurich ; Enfield, NH : Trans Tech, ©2011 |z 9783037851456 |w (OCoLC)751790683 |
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| author_corporate | International Conference on Materials for Advanced Technologies Singapore |
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| author_sort | International Conference on Materials for Advanced Technologies Singapore |
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| contents | NEMS/MEMS Technology and Devices, ICMAT2011; Preface; Table of Contents; Challenges and Solutions for Fabricating Isolation Trenches for High Aspect Ratio Sensors; Thick-Film Deposition of High-Viscous Liquid Photopolymer; Design and Modeling of Platinum Thin Film Microheater for High Temperature Microtensile Test Application; Optimization of On-Chip Interface Circuit for MEMS Sensor Based on Micro-Cantilever; Microfabrication of a Planar Helix with Straight-Edge Connections Slow-Wave Structure; Separation Gap Estimation in Dynamic Systems Actuated by Casimir Force. A Static Micromixer Inspired from Fractal-Like Natural Flow SystemsAlN Actuator for Tunable RFMEMS Capacitor; GEMS: A MEMS-Based Way for the Innervation of Materials; On the Way to the Bionic Man: A Novel Approach to MEMS Based on Biological Sensory Systems; Design Consideration of Membrane Structure for Thermal Actuated Micropump; Developing High Sensitivity Biomass Sensor Using Lamé Mode Square Resonator; Fabrication of a Peltier Device Based on InSb and SbTe Thin Films; Gapfill Study of Polyimides for MEMS Applications. A Simple Method for Quantification of Beta-Amyloid Using the Photo-Sensitive Thin Film TransistorWireless Imaging Module Assembly and Integration for Capsule Endoscopic Applications; Low Cost and High Resolution X-Ray Lithography for Fabrication of Microactuator; FBAR Resonators with Sufficient High Q for RF Filter Implementation; Evaluation of Piezoelectric Properties of AlN Using MEMS Resonators; Discrete 3D T-Shaped Electrode Arrays for Moving Liquid by AC Electro-Osmosis; Silicon Probes for Cochlear Auditory Nerve Stimulation and Measurement. Area-Selective Polymer Deposition on Micro-Area Framed by Trenches with Falling Liquid FilmA New Peltier Device with a Coaxial Thermocouple; A Portable Thermal Cycler Using a PN Sandwich-Structure Peltier Device; Direct Writing of Channels for Microfluidics in Silica by MeV Ion Beam Lithography; Studies on Quasi-Static Au-to-Au Ohmic Contact for MEMS Switches; Double-Step Plasma Etching for SiO2 Microcantilever Release; Design, Fabrication and Characterization of ZnO Based Thin Film Bulk Acoustic Resonators. |
| ctrlnum | (OCoLC)811787329 |
| dewey-full | 620.5 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 620 - Engineering and allied operations |
| dewey-raw | 620.5 |
| dewey-search | 620.5 |
| dewey-sort | 3620.5 |
| dewey-tens | 620 - Engineering and allied operations |
| format | Electronic Conference Proceeding eBook |
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| genre | Conference papers and proceedings fast |
| genre_facet | Conference papers and proceedings |
| id | ZDB-4-EBA-ocn811787329 |
| illustrated | Illustrated |
| indexdate | 2024-11-27T13:24:59Z |
| institution | BVB |
| institution_GND | http://id.loc.gov/authorities/names/nb2012025385 |
| isbn | 9783038136095 3038136093 9781621986850 1621986853 |
| issn | 1022-6680 ; |
| language | English |
| lccn | 2011377926 |
| oclc_num | 811787329 |
| open_access_boolean | |
| owner | MAIN DE-863 DE-BY-FWS |
| owner_facet | MAIN DE-863 DE-BY-FWS |
| physical | 1 online resource (x, 229 pages) : illustrations (some color) |
| psigel | ZDB-4-EBA |
| publishDate | 2011 |
| publishDateSearch | 2011 |
| publishDateSort | 2011 |
| publisher | Trans Tech, |
| record_format | marc |
| series | Advanced materials research ; |
| series2 | Advanced materials research, |
| spelling | International Conference on Materials for Advanced Technologies (2011 : Singapore) http://id.loc.gov/authorities/names/nb2012025385 NEMS/MEMS technology and devices : selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G, June 26 - July 1, 2011, Suntec, Singapore / edited by Lynn Khine and Julius M. Tsai. Durnten-Zurich ; Enfield, NH : Trans Tech, ©2011. ©2011 1 online resource (x, 229 pages) : illustrations (some color) text txt rdacontent computer c rdamedia online resource cr rdacarrier Advanced materials research, 1022-6680 ; v. 254 Includes bibliographical references and indexes. Print version record. NEMS/MEMS Technology and Devices, ICMAT2011; Preface; Table of Contents; Challenges and Solutions for Fabricating Isolation Trenches for High Aspect Ratio Sensors; Thick-Film Deposition of High-Viscous Liquid Photopolymer; Design and Modeling of Platinum Thin Film Microheater for High Temperature Microtensile Test Application; Optimization of On-Chip Interface Circuit for MEMS Sensor Based on Micro-Cantilever; Microfabrication of a Planar Helix with Straight-Edge Connections Slow-Wave Structure; Separation Gap Estimation in Dynamic Systems Actuated by Casimir Force. A Static Micromixer Inspired from Fractal-Like Natural Flow SystemsAlN Actuator for Tunable RFMEMS Capacitor; GEMS: A MEMS-Based Way for the Innervation of Materials; On the Way to the Bionic Man: A Novel Approach to MEMS Based on Biological Sensory Systems; Design Consideration of Membrane Structure for Thermal Actuated Micropump; Developing High Sensitivity Biomass Sensor Using Lamé Mode Square Resonator; Fabrication of a Peltier Device Based on InSb and SbTe Thin Films; Gapfill Study of Polyimides for MEMS Applications. A Simple Method for Quantification of Beta-Amyloid Using the Photo-Sensitive Thin Film TransistorWireless Imaging Module Assembly and Integration for Capsule Endoscopic Applications; Low Cost and High Resolution X-Ray Lithography for Fabrication of Microactuator; FBAR Resonators with Sufficient High Q for RF Filter Implementation; Evaluation of Piezoelectric Properties of AlN Using MEMS Resonators; Discrete 3D T-Shaped Electrode Arrays for Moving Liquid by AC Electro-Osmosis; Silicon Probes for Cochlear Auditory Nerve Stimulation and Measurement. Area-Selective Polymer Deposition on Micro-Area Framed by Trenches with Falling Liquid FilmA New Peltier Device with a Coaxial Thermocouple; A Portable Thermal Cycler Using a PN Sandwich-Structure Peltier Device; Direct Writing of Channels for Microfluidics in Silica by MeV Ion Beam Lithography; Studies on Quasi-Static Au-to-Au Ohmic Contact for MEMS Switches; Double-Step Plasma Etching for SiO2 Microcantilever Release; Design, Fabrication and Characterization of ZnO Based Thin Film Bulk Acoustic Resonators. The emphasis of this special collection of 55 peer-reviewed papers was on NEMS/MEMS and microTAS. Particular attention was paid to applications that involve MEMS design, modelling, fabrication processes, lab-on-a-chip and biophotonic medical devices. The volume also explores new devices and processes, innovations and engineering applications; especially those related to NEMS/MEMS technologies and devices. A very useful guide to this highly specialized topic. Review from Book News Inc.: Papers from a summer 2011 symposium shed light on new devices, process innovations, and engineering applicati. English. Nanoelectromechanical systems Congresses. Microelectromechanical systems Congresses. Nanosystèmes électromécaniques Congrès. Microsystèmes électromécaniques Congrès. SCIENCE Nanoscience. bisacsh TECHNOLOGY & ENGINEERING Nanotechnology & MEMS. bisacsh Microelectromechanical systems fast Nanoelectromechanical systems fast NEMS/MEMS technology Materials Advanced technologies ICMAT Conference papers and proceedings fast Khine, Lynn, editor. Tsai, Julius M., editor. has work: NEMS/MEMS technology and devices (Text) https://id.oclc.org/worldcat/entity/E39PCFHJHBWWGkMcxy6pRj6btX https://id.oclc.org/worldcat/ontology/hasWork Print version: International Conference on Materials for Advanced Technologies (2011 : Singapore). NEMS/MEMS technology and devices. Durnten-Zurich ; Enfield, NH : Trans Tech, ©2011 9783037851456 (OCoLC)751790683 Advanced materials research ; v. 254. http://id.loc.gov/authorities/names/n99255722 FWS01 ZDB-4-EBA FWS_PDA_EBA https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=553175 Volltext |
| spellingShingle | NEMS/MEMS technology and devices : selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G, June 26 - July 1, 2011, Suntec, Singapore / Advanced materials research ; NEMS/MEMS Technology and Devices, ICMAT2011; Preface; Table of Contents; Challenges and Solutions for Fabricating Isolation Trenches for High Aspect Ratio Sensors; Thick-Film Deposition of High-Viscous Liquid Photopolymer; Design and Modeling of Platinum Thin Film Microheater for High Temperature Microtensile Test Application; Optimization of On-Chip Interface Circuit for MEMS Sensor Based on Micro-Cantilever; Microfabrication of a Planar Helix with Straight-Edge Connections Slow-Wave Structure; Separation Gap Estimation in Dynamic Systems Actuated by Casimir Force. A Static Micromixer Inspired from Fractal-Like Natural Flow SystemsAlN Actuator for Tunable RFMEMS Capacitor; GEMS: A MEMS-Based Way for the Innervation of Materials; On the Way to the Bionic Man: A Novel Approach to MEMS Based on Biological Sensory Systems; Design Consideration of Membrane Structure for Thermal Actuated Micropump; Developing High Sensitivity Biomass Sensor Using Lamé Mode Square Resonator; Fabrication of a Peltier Device Based on InSb and SbTe Thin Films; Gapfill Study of Polyimides for MEMS Applications. A Simple Method for Quantification of Beta-Amyloid Using the Photo-Sensitive Thin Film TransistorWireless Imaging Module Assembly and Integration for Capsule Endoscopic Applications; Low Cost and High Resolution X-Ray Lithography for Fabrication of Microactuator; FBAR Resonators with Sufficient High Q for RF Filter Implementation; Evaluation of Piezoelectric Properties of AlN Using MEMS Resonators; Discrete 3D T-Shaped Electrode Arrays for Moving Liquid by AC Electro-Osmosis; Silicon Probes for Cochlear Auditory Nerve Stimulation and Measurement. Area-Selective Polymer Deposition on Micro-Area Framed by Trenches with Falling Liquid FilmA New Peltier Device with a Coaxial Thermocouple; A Portable Thermal Cycler Using a PN Sandwich-Structure Peltier Device; Direct Writing of Channels for Microfluidics in Silica by MeV Ion Beam Lithography; Studies on Quasi-Static Au-to-Au Ohmic Contact for MEMS Switches; Double-Step Plasma Etching for SiO2 Microcantilever Release; Design, Fabrication and Characterization of ZnO Based Thin Film Bulk Acoustic Resonators. Nanoelectromechanical systems Congresses. Microelectromechanical systems Congresses. Nanosystèmes électromécaniques Congrès. Microsystèmes électromécaniques Congrès. SCIENCE Nanoscience. bisacsh TECHNOLOGY & ENGINEERING Nanotechnology & MEMS. bisacsh Microelectromechanical systems fast Nanoelectromechanical systems fast |
| title | NEMS/MEMS technology and devices : selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G, June 26 - July 1, 2011, Suntec, Singapore / |
| title_auth | NEMS/MEMS technology and devices : selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G, June 26 - July 1, 2011, Suntec, Singapore / |
| title_exact_search | NEMS/MEMS technology and devices : selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G, June 26 - July 1, 2011, Suntec, Singapore / |
| title_full | NEMS/MEMS technology and devices : selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G, June 26 - July 1, 2011, Suntec, Singapore / edited by Lynn Khine and Julius M. Tsai. |
| title_fullStr | NEMS/MEMS technology and devices : selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G, June 26 - July 1, 2011, Suntec, Singapore / edited by Lynn Khine and Julius M. Tsai. |
| title_full_unstemmed | NEMS/MEMS technology and devices : selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G, June 26 - July 1, 2011, Suntec, Singapore / edited by Lynn Khine and Julius M. Tsai. |
| title_short | NEMS/MEMS technology and devices : |
| title_sort | nems mems technology and devices selected peer reviewed papers from the international conference on materials for advanced technologies icmat 2011 symposium g june 26 july 1 2011 suntec singapore |
| title_sub | selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G, June 26 - July 1, 2011, Suntec, Singapore / |
| topic | Nanoelectromechanical systems Congresses. Microelectromechanical systems Congresses. Nanosystèmes électromécaniques Congrès. Microsystèmes électromécaniques Congrès. SCIENCE Nanoscience. bisacsh TECHNOLOGY & ENGINEERING Nanotechnology & MEMS. bisacsh Microelectromechanical systems fast Nanoelectromechanical systems fast |
| topic_facet | Nanoelectromechanical systems Congresses. Microelectromechanical systems Congresses. Nanosystèmes électromécaniques Congrès. Microsystèmes électromécaniques Congrès. SCIENCE Nanoscience. TECHNOLOGY & ENGINEERING Nanotechnology & MEMS. Microelectromechanical systems Nanoelectromechanical systems Conference papers and proceedings |
| url | https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=553175 |
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