Handbook of physical vapor deposition (PVD) processing /:
Annotation
Saved in:
| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Oxford, UK :
William Andrew,
2010.
|
| Edition: | 2nd ed. |
| Subjects: | |
| Online Access: | DE-862 DE-863 |
| Summary: | Annotation |
| Physical Description: | 1 online resource (xlvi, 746 pages) : illustrations |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9780080946580 0080946585 9780815520375 0815520379 |
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MARC
| LEADER | 00000cam a2200000 a 4500 | ||
|---|---|---|---|
| 001 | ZDB-4-EBA-ocn664573138 | ||
| 003 | OCoLC | ||
| 005 | 20250103110447.0 | ||
| 006 | m o d | ||
| 007 | cr cnu---unuuu | ||
| 008 | 100920s2010 enka obf 001 0 eng d | ||
| 040 | |a N$T |b eng |e pn |c N$T |d YDXCP |d OCLCQ |d OCLCF |d OCL |d OCLCQ |d ICA |d AGLDB |d OCLCQ |d VTS |d UWO |d OCLCQ |d STF |d M8D |d UX1 |d AJS |d OCLCQ |d OCLCO |d OCLCQ |d YDX |d OCLCO |d OCLCL |d OCLCQ | ||
| 019 | |a 1069605348 | ||
| 020 | |a 9780080946580 |q (electronic bk.) | ||
| 020 | |a 0080946585 |q (electronic bk.) | ||
| 020 | |a 9780815520375 |q (hbk.) | ||
| 020 | |a 0815520379 |q (hbk.) | ||
| 024 | 8 | |a 9786612737695 | |
| 035 | |a (OCoLC)664573138 |z (OCoLC)1069605348 | ||
| 037 | |a 273769 |b MIL | ||
| 050 | 4 | |a TS695 |b .M38 2010eb | |
| 072 | 7 | |a TEC |x 040000 |2 bisacsh | |
| 082 | 7 | |a 671.735 |2 22 | |
| 049 | |a MAIN | ||
| 100 | 1 | |a Mattox, D. M. | |
| 245 | 1 | 0 | |a Handbook of physical vapor deposition (PVD) processing / |c Donald M. Mattox. |
| 250 | |a 2nd ed. | ||
| 260 | |a Oxford, UK : |b William Andrew, |c 2010. | ||
| 300 | |a 1 online resource (xlvi, 746 pages) : |b illustrations | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 504 | |a Includes bibliographical references and index. | ||
| 588 | 0 | |a Print version record. | |
| 520 | 8 | |a Annotation |b This updated version of the popular handbook further explains all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the new edition remains on the aspects of the process flow that are critical to economical deposition of films that can meet the required performance specifications, with additional information to support the original material.<br /><br />The book covers subjects seldom treated in the literature: substrate characterization, adhesion, cleaning and the processing. The book also covers the widely discussed subjects of vacuum technology and the fundamentals of individual deposition processes. However, the author uniquely relates these topics to the practical issues that arise in PVD processing, such as contamination control and film growth effects, which are also rarely discussed in the literature. In bringing these subjects together in one book, the reader can understand the interrelationship between various aspects of the film deposition processing and the resulting film properties. The author draws upon his long experience with developing PVD processes and troubleshooting the processes in the manufacturing environment, to provide useful hints for not only avoiding problems, but also for solving problems when they arise. He uses actual experiences, called "war stories", to emphasize certain points. Special formatting of the text allows a reader who is already knowledgeable in the subject to scan through a section and find discussions that are of particular interest. The author has tried to make the subject index as useful as possible so that the reader can rapidly go to sections of particular interest. Extensive references allow the reader to pursue subjects in greater detail if desired.<br /><br />The book is intended to be both an introduction for those who are new to the field and a valuable resource to those already in the field. The discussion of transferring technology between R & D and manufacturing provided in Appendix 1, will be of special interest to the manager or engineer responsible for moving a PVD product and process from R & D into production. Appendix 2 has an extensive listing of periodical publications and professional societies that relate to PVD processing. The extensive Glossary of Terms and Acronyms provided in Appendix 3 will be of particular use to students and to those not fully conversant with the terminology of PVD processing or with the English language.<br /><br /><ul><li>Fully revised and updated to include the latest developments in PVD process technology</li><li style="list-style: none"><br /></li><li>'War stories' drawn from the author's extensive experience emphasize important points in development and manufacturing</li><li style="list-style: none"><br /></li><li>Appendices include listings of periodicals and professional societies, terms and acronyms, and material on transferring technology between R & D and manufacturing</li></ul> | |
| 650 | 0 | |a Physical vapor deposition |v Handbooks, manuals, etc. | |
| 650 | 6 | |a Dépôt physique en phase vapeur |v Guides, manuels, etc. | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING |x Technical & Manufacturing Industries & Trades. |2 bisacsh | |
| 650 | 7 | |a Physical vapor deposition |2 fast | |
| 655 | 7 | |a Handbooks and manuals |2 fast | |
| 776 | 0 | 8 | |i Print version: |a Mattox, D.M. |t Handbook of physical vapor deposition (PVD) processing. |b 2nd ed. |d Oxford, UK : William Andrew, 2010 |z 9780815520375 |w (OCoLC)320494770 |
| 966 | 4 | 0 | |l DE-862 |p ZDB-4-EBA |q FWS_PDA_EBA |u https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=334594 |3 Volltext |
| 966 | 4 | 0 | |l DE-863 |p ZDB-4-EBA |q FWS_PDA_EBA |u https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=334594 |3 Volltext |
| 938 | |a YBP Library Services |b YANK |n 20212604 | ||
| 938 | |a EBSCOhost |b EBSC |n 334594 | ||
| 938 | |a YBP Library Services |b YANK |n 7638341 | ||
| 938 | |a YBP Library Services |b YANK |n 3414213 | ||
| 994 | |a 92 |b GEBAY | ||
| 912 | |a ZDB-4-EBA | ||
| 049 | |a DE-862 | ||
| 049 | |a DE-863 | ||
Record in the Search Index
| DE-BY-FWS_katkey | ZDB-4-EBA-ocn664573138 |
|---|---|
| _version_ | 1829094679218487296 |
| adam_text | |
| any_adam_object | |
| author | Mattox, D. M. |
| author_facet | Mattox, D. M. |
| author_role | |
| author_sort | Mattox, D. M. |
| author_variant | d m m dm dmm |
| building | Verbundindex |
| bvnumber | localFWS |
| callnumber-first | T - Technology |
| callnumber-label | TS695 |
| callnumber-raw | TS695 .M38 2010eb |
| callnumber-search | TS695 .M38 2010eb |
| callnumber-sort | TS 3695 M38 42010EB |
| callnumber-subject | TS - Manufactures |
| collection | ZDB-4-EBA |
| ctrlnum | (OCoLC)664573138 |
| dewey-full | 671.735 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 671 - Metalworking & primary metal products |
| dewey-raw | 671.735 |
| dewey-search | 671.735 |
| dewey-sort | 3671.735 |
| dewey-tens | 670 - Manufacturing |
| discipline | Werkstoffwissenschaften / Fertigungstechnik |
| edition | 2nd ed. |
| format | Electronic eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>05266cam a2200529 a 4500</leader><controlfield tag="001">ZDB-4-EBA-ocn664573138</controlfield><controlfield tag="003">OCoLC</controlfield><controlfield tag="005">20250103110447.0</controlfield><controlfield tag="006">m o d </controlfield><controlfield tag="007">cr cnu---unuuu</controlfield><controlfield tag="008">100920s2010 enka obf 001 0 eng d</controlfield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">N$T</subfield><subfield code="b">eng</subfield><subfield code="e">pn</subfield><subfield code="c">N$T</subfield><subfield code="d">YDXCP</subfield><subfield code="d">OCLCQ</subfield><subfield code="d">OCLCF</subfield><subfield code="d">OCL</subfield><subfield code="d">OCLCQ</subfield><subfield code="d">ICA</subfield><subfield code="d">AGLDB</subfield><subfield code="d">OCLCQ</subfield><subfield code="d">VTS</subfield><subfield code="d">UWO</subfield><subfield code="d">OCLCQ</subfield><subfield code="d">STF</subfield><subfield code="d">M8D</subfield><subfield code="d">UX1</subfield><subfield code="d">AJS</subfield><subfield code="d">OCLCQ</subfield><subfield code="d">OCLCO</subfield><subfield code="d">OCLCQ</subfield><subfield code="d">YDX</subfield><subfield code="d">OCLCO</subfield><subfield code="d">OCLCL</subfield><subfield code="d">OCLCQ</subfield></datafield><datafield tag="019" ind1=" " ind2=" "><subfield code="a">1069605348</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780080946580</subfield><subfield code="q">(electronic bk.)</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0080946585</subfield><subfield code="q">(electronic bk.)</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780815520375</subfield><subfield code="q">(hbk.)</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0815520379</subfield><subfield code="q">(hbk.)</subfield></datafield><datafield tag="024" ind1="8" ind2=" "><subfield code="a">9786612737695</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)664573138</subfield><subfield code="z">(OCoLC)1069605348</subfield></datafield><datafield tag="037" ind1=" " ind2=" "><subfield code="a">273769</subfield><subfield code="b">MIL</subfield></datafield><datafield tag="050" ind1=" " ind2="4"><subfield code="a">TS695</subfield><subfield code="b">.M38 2010eb</subfield></datafield><datafield tag="072" ind1=" " ind2="7"><subfield code="a">TEC</subfield><subfield code="x">040000</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="082" ind1="7" ind2=" "><subfield code="a">671.735</subfield><subfield code="2">22</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">MAIN</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Mattox, D. M.</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Handbook of physical vapor deposition (PVD) processing /</subfield><subfield code="c">Donald M. Mattox.</subfield></datafield><datafield tag="250" ind1=" " ind2=" "><subfield code="a">2nd ed.</subfield></datafield><datafield tag="260" ind1=" " ind2=" "><subfield code="a">Oxford, UK :</subfield><subfield code="b">William Andrew,</subfield><subfield code="c">2010.</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 online resource (xlvi, 746 pages) :</subfield><subfield code="b">illustrations</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">computer</subfield><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">online resource</subfield><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="504" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references and index.</subfield></datafield><datafield tag="588" ind1="0" ind2=" "><subfield code="a">Print version record.</subfield></datafield><datafield tag="520" ind1="8" ind2=" "><subfield code="a">Annotation</subfield><subfield code="b">This updated version of the popular handbook further explains all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the new edition remains on the aspects of the process flow that are critical to economical deposition of films that can meet the required performance specifications, with additional information to support the original material.<br /><br />The book covers subjects seldom treated in the literature: substrate characterization, adhesion, cleaning and the processing. The book also covers the widely discussed subjects of vacuum technology and the fundamentals of individual deposition processes. However, the author uniquely relates these topics to the practical issues that arise in PVD processing, such as contamination control and film growth effects, which are also rarely discussed in the literature. In bringing these subjects together in one book, the reader can understand the interrelationship between various aspects of the film deposition processing and the resulting film properties. The author draws upon his long experience with developing PVD processes and troubleshooting the processes in the manufacturing environment, to provide useful hints for not only avoiding problems, but also for solving problems when they arise. He uses actual experiences, called "war stories", to emphasize certain points. Special formatting of the text allows a reader who is already knowledgeable in the subject to scan through a section and find discussions that are of particular interest. The author has tried to make the subject index as useful as possible so that the reader can rapidly go to sections of particular interest. Extensive references allow the reader to pursue subjects in greater detail if desired.<br /><br />The book is intended to be both an introduction for those who are new to the field and a valuable resource to those already in the field. The discussion of transferring technology between R & D and manufacturing provided in Appendix 1, will be of special interest to the manager or engineer responsible for moving a PVD product and process from R & D into production. Appendix 2 has an extensive listing of periodical publications and professional societies that relate to PVD processing. The extensive Glossary of Terms and Acronyms provided in Appendix 3 will be of particular use to students and to those not fully conversant with the terminology of PVD processing or with the English language.<br /><br /><ul><li>Fully revised and updated to include the latest developments in PVD process technology</li><li style="list-style: none"><br /></li><li>'War stories' drawn from the author's extensive experience emphasize important points in development and manufacturing</li><li style="list-style: none"><br /></li><li>Appendices include listings of periodicals and professional societies, terms and acronyms, and material on transferring technology between R & D and manufacturing</li></ul></subfield></datafield><datafield tag="650" ind1=" " ind2="0"><subfield code="a">Physical vapor deposition</subfield><subfield code="v">Handbooks, manuals, etc.</subfield></datafield><datafield tag="650" ind1=" " ind2="6"><subfield code="a">Dépôt physique en phase vapeur</subfield><subfield code="v">Guides, manuels, etc.</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">TECHNOLOGY & ENGINEERING</subfield><subfield code="x">Technical & Manufacturing Industries & Trades.</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Physical vapor deposition</subfield><subfield code="2">fast</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="a">Handbooks and manuals</subfield><subfield code="2">fast</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Print version:</subfield><subfield code="a">Mattox, D.M.</subfield><subfield code="t">Handbook of physical vapor deposition (PVD) processing.</subfield><subfield code="b">2nd ed.</subfield><subfield code="d">Oxford, UK : William Andrew, 2010</subfield><subfield code="z">9780815520375</subfield><subfield code="w">(OCoLC)320494770</subfield></datafield><datafield tag="966" ind1="4" ind2="0"><subfield code="l">DE-862</subfield><subfield code="p">ZDB-4-EBA</subfield><subfield code="q">FWS_PDA_EBA</subfield><subfield code="u">https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=334594</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="4" ind2="0"><subfield code="l">DE-863</subfield><subfield code="p">ZDB-4-EBA</subfield><subfield code="q">FWS_PDA_EBA</subfield><subfield code="u">https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=334594</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="938" ind1=" " ind2=" "><subfield code="a">YBP Library Services</subfield><subfield code="b">YANK</subfield><subfield code="n">20212604</subfield></datafield><datafield tag="938" ind1=" " ind2=" "><subfield code="a">EBSCOhost</subfield><subfield code="b">EBSC</subfield><subfield code="n">334594</subfield></datafield><datafield tag="938" ind1=" " ind2=" "><subfield code="a">YBP Library Services</subfield><subfield code="b">YANK</subfield><subfield code="n">7638341</subfield></datafield><datafield tag="938" ind1=" " ind2=" "><subfield code="a">YBP Library Services</subfield><subfield code="b">YANK</subfield><subfield code="n">3414213</subfield></datafield><datafield tag="994" ind1=" " ind2=" "><subfield code="a">92</subfield><subfield code="b">GEBAY</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-4-EBA</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-862</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-863</subfield></datafield></record></collection> |
| genre | Handbooks and manuals fast |
| genre_facet | Handbooks and manuals |
| id | ZDB-4-EBA-ocn664573138 |
| illustrated | Illustrated |
| indexdate | 2025-04-11T08:36:57Z |
| institution | BVB |
| isbn | 9780080946580 0080946585 9780815520375 0815520379 |
| language | English |
| oclc_num | 664573138 |
| open_access_boolean | |
| owner | MAIN DE-862 DE-BY-FWS DE-863 DE-BY-FWS |
| owner_facet | MAIN DE-862 DE-BY-FWS DE-863 DE-BY-FWS |
| physical | 1 online resource (xlvi, 746 pages) : illustrations |
| psigel | ZDB-4-EBA FWS_PDA_EBA ZDB-4-EBA |
| publishDate | 2010 |
| publishDateSearch | 2010 |
| publishDateSort | 2010 |
| publisher | William Andrew, |
| record_format | marc |
| spelling | Mattox, D. M. Handbook of physical vapor deposition (PVD) processing / Donald M. Mattox. 2nd ed. Oxford, UK : William Andrew, 2010. 1 online resource (xlvi, 746 pages) : illustrations text txt rdacontent computer c rdamedia online resource cr rdacarrier Includes bibliographical references and index. Print version record. Annotation This updated version of the popular handbook further explains all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the new edition remains on the aspects of the process flow that are critical to economical deposition of films that can meet the required performance specifications, with additional information to support the original material.<br /><br />The book covers subjects seldom treated in the literature: substrate characterization, adhesion, cleaning and the processing. The book also covers the widely discussed subjects of vacuum technology and the fundamentals of individual deposition processes. However, the author uniquely relates these topics to the practical issues that arise in PVD processing, such as contamination control and film growth effects, which are also rarely discussed in the literature. In bringing these subjects together in one book, the reader can understand the interrelationship between various aspects of the film deposition processing and the resulting film properties. The author draws upon his long experience with developing PVD processes and troubleshooting the processes in the manufacturing environment, to provide useful hints for not only avoiding problems, but also for solving problems when they arise. He uses actual experiences, called "war stories", to emphasize certain points. Special formatting of the text allows a reader who is already knowledgeable in the subject to scan through a section and find discussions that are of particular interest. The author has tried to make the subject index as useful as possible so that the reader can rapidly go to sections of particular interest. Extensive references allow the reader to pursue subjects in greater detail if desired.<br /><br />The book is intended to be both an introduction for those who are new to the field and a valuable resource to those already in the field. The discussion of transferring technology between R & D and manufacturing provided in Appendix 1, will be of special interest to the manager or engineer responsible for moving a PVD product and process from R & D into production. Appendix 2 has an extensive listing of periodical publications and professional societies that relate to PVD processing. The extensive Glossary of Terms and Acronyms provided in Appendix 3 will be of particular use to students and to those not fully conversant with the terminology of PVD processing or with the English language.<br /><br /><ul><li>Fully revised and updated to include the latest developments in PVD process technology</li><li style="list-style: none"><br /></li><li>'War stories' drawn from the author's extensive experience emphasize important points in development and manufacturing</li><li style="list-style: none"><br /></li><li>Appendices include listings of periodicals and professional societies, terms and acronyms, and material on transferring technology between R & D and manufacturing</li></ul> Physical vapor deposition Handbooks, manuals, etc. Dépôt physique en phase vapeur Guides, manuels, etc. TECHNOLOGY & ENGINEERING Technical & Manufacturing Industries & Trades. bisacsh Physical vapor deposition fast Handbooks and manuals fast Print version: Mattox, D.M. Handbook of physical vapor deposition (PVD) processing. 2nd ed. Oxford, UK : William Andrew, 2010 9780815520375 (OCoLC)320494770 |
| spellingShingle | Mattox, D. M. Handbook of physical vapor deposition (PVD) processing / Physical vapor deposition Handbooks, manuals, etc. Dépôt physique en phase vapeur Guides, manuels, etc. TECHNOLOGY & ENGINEERING Technical & Manufacturing Industries & Trades. bisacsh Physical vapor deposition fast |
| title | Handbook of physical vapor deposition (PVD) processing / |
| title_auth | Handbook of physical vapor deposition (PVD) processing / |
| title_exact_search | Handbook of physical vapor deposition (PVD) processing / |
| title_full | Handbook of physical vapor deposition (PVD) processing / Donald M. Mattox. |
| title_fullStr | Handbook of physical vapor deposition (PVD) processing / Donald M. Mattox. |
| title_full_unstemmed | Handbook of physical vapor deposition (PVD) processing / Donald M. Mattox. |
| title_short | Handbook of physical vapor deposition (PVD) processing / |
| title_sort | handbook of physical vapor deposition pvd processing |
| topic | Physical vapor deposition Handbooks, manuals, etc. Dépôt physique en phase vapeur Guides, manuels, etc. TECHNOLOGY & ENGINEERING Technical & Manufacturing Industries & Trades. bisacsh Physical vapor deposition fast |
| topic_facet | Physical vapor deposition Handbooks, manuals, etc. Dépôt physique en phase vapeur Guides, manuels, etc. TECHNOLOGY & ENGINEERING Technical & Manufacturing Industries & Trades. Physical vapor deposition Handbooks and manuals |
| work_keys_str_mv | AT mattoxdm handbookofphysicalvapordepositionpvdprocessing |