Acoustic wave and electromechanical resonators :: concept to key applications /
This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the te...
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Norwood, MA. :
Artech House,
©2010.
|
| Schriftenreihe: | Artech House integrated microsystems series.
|
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Zusammenfassung: | This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensin. |
| Beschreibung: | 1 online resource (xv, 345 pages) : illustrations |
| Bibliographie: | Includes bibliographical references and index. |
| ISBN: | 9781607839781 1607839784 9781607839774 1607839776 |
Internformat
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| 246 | 3 | |a Acoustic wave & electromechanical resonators | |
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| 588 | 0 | |a Print version record. | |
| 520 | |a This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensin. | ||
| 650 | 0 | |a Acoustic surface wave devices. |0 http://id.loc.gov/authorities/subjects/sh85000591 | |
| 650 | 0 | |a Electric resonators. |0 http://id.loc.gov/authorities/subjects/sh85041993 | |
| 650 | 6 | |a Dispositifs à ondes acoustiques de surface. | |
| 650 | 6 | |a Résonateurs électriques. | |
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| author | Campanella, Humberto |
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| contents | 1. MEMs and NEMs resonator technologies -- 2. Acoustic microresonator technologies -- 3. Design and modeling of micro- and nanoresonators -- 4. Fabrication techniques -- 5. Characterization techniques -- 6. Performance optimization -- 7. Integration of resonator to CMOS technologies -- 8. Sensor applications -- 9. Radio frequency applications -- 10. Case studies. |
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
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| id | ZDB-4-EBA-ocn659579814 |
| illustrated | Illustrated |
| indexdate | 2024-11-27T13:17:29Z |
| institution | BVB |
| isbn | 9781607839781 1607839784 9781607839774 1607839776 |
| language | English |
| lccn | 2010278239 |
| oclc_num | 659579814 |
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| physical | 1 online resource (xv, 345 pages) : illustrations |
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| spelling | Campanella, Humberto. Acoustic wave and electromechanical resonators : concept to key applications / Humberto Campanella. Acoustic wave & electromechanical resonators Norwood, MA. : Artech House, ©2010. 1 online resource (xv, 345 pages) : illustrations text txt rdacontent computer c rdamedia online resource cr rdacarrier Integrated microsystems series Includes bibliographical references and index. 1. MEMs and NEMs resonator technologies -- 2. Acoustic microresonator technologies -- 3. Design and modeling of micro- and nanoresonators -- 4. Fabrication techniques -- 5. Characterization techniques -- 6. Performance optimization -- 7. Integration of resonator to CMOS technologies -- 8. Sensor applications -- 9. Radio frequency applications -- 10. Case studies. Print version record. This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensin. Acoustic surface wave devices. http://id.loc.gov/authorities/subjects/sh85000591 Electric resonators. http://id.loc.gov/authorities/subjects/sh85041993 Dispositifs à ondes acoustiques de surface. Résonateurs électriques. TECHNOLOGY & ENGINEERING Electronics Microelectronics. bisacsh TECHNOLOGY & ENGINEERING Electronics Digital. bisacsh Acoustic surface wave devices fast Electric resonators fast has work: Acoustic wave and electromechanical resonators (Text) https://id.oclc.org/worldcat/entity/E39PCH4gTMJ8Bw9qPRxYr7dqgq https://id.oclc.org/worldcat/ontology/hasWork Print version: Campanella, Humberto. Acoustic wave and electromechanical resonators. Norwood, MA. : Artech House, ©2010 9781607839774 (OCoLC)557312553 Artech House integrated microsystems series. http://id.loc.gov/authorities/names/nr2006021495 FWS01 ZDB-4-EBA FWS_PDA_EBA https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=324514 Volltext |
| spellingShingle | Campanella, Humberto Acoustic wave and electromechanical resonators : concept to key applications / Artech House integrated microsystems series. 1. MEMs and NEMs resonator technologies -- 2. Acoustic microresonator technologies -- 3. Design and modeling of micro- and nanoresonators -- 4. Fabrication techniques -- 5. Characterization techniques -- 6. Performance optimization -- 7. Integration of resonator to CMOS technologies -- 8. Sensor applications -- 9. Radio frequency applications -- 10. Case studies. Acoustic surface wave devices. http://id.loc.gov/authorities/subjects/sh85000591 Electric resonators. http://id.loc.gov/authorities/subjects/sh85041993 Dispositifs à ondes acoustiques de surface. Résonateurs électriques. TECHNOLOGY & ENGINEERING Electronics Microelectronics. bisacsh TECHNOLOGY & ENGINEERING Electronics Digital. bisacsh Acoustic surface wave devices fast Electric resonators fast |
| subject_GND | http://id.loc.gov/authorities/subjects/sh85000591 http://id.loc.gov/authorities/subjects/sh85041993 |
| title | Acoustic wave and electromechanical resonators : concept to key applications / |
| title_alt | Acoustic wave & electromechanical resonators |
| title_auth | Acoustic wave and electromechanical resonators : concept to key applications / |
| title_exact_search | Acoustic wave and electromechanical resonators : concept to key applications / |
| title_full | Acoustic wave and electromechanical resonators : concept to key applications / Humberto Campanella. |
| title_fullStr | Acoustic wave and electromechanical resonators : concept to key applications / Humberto Campanella. |
| title_full_unstemmed | Acoustic wave and electromechanical resonators : concept to key applications / Humberto Campanella. |
| title_short | Acoustic wave and electromechanical resonators : |
| title_sort | acoustic wave and electromechanical resonators concept to key applications |
| title_sub | concept to key applications / |
| topic | Acoustic surface wave devices. http://id.loc.gov/authorities/subjects/sh85000591 Electric resonators. http://id.loc.gov/authorities/subjects/sh85041993 Dispositifs à ondes acoustiques de surface. Résonateurs électriques. TECHNOLOGY & ENGINEERING Electronics Microelectronics. bisacsh TECHNOLOGY & ENGINEERING Electronics Digital. bisacsh Acoustic surface wave devices fast Electric resonators fast |
| topic_facet | Acoustic surface wave devices. Electric resonators. Dispositifs à ondes acoustiques de surface. Résonateurs électriques. TECHNOLOGY & ENGINEERING Electronics Microelectronics. TECHNOLOGY & ENGINEERING Electronics Digital. Acoustic surface wave devices Electric resonators |
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