Materials science of thin films :: deposition and structure /
This is the first book that can be considered a textbook on thin film science, complete with exercises at the end of each chapter. Ohring has contributed many highly regarded reference books to the AP list, including Reliability and Failure of Electronic Materials and the Engineering Science of Thin...
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
San Diego, CA :
Academic Press,
2002.
|
| Ausgabe: | 2nd ed. |
| Schlagworte: | |
| Online-Zugang: | Volltext Volltext |
| Zusammenfassung: | This is the first book that can be considered a textbook on thin film science, complete with exercises at the end of each chapter. Ohring has contributed many highly regarded reference books to the AP list, including Reliability and Failure of Electronic Materials and the Engineering Science of Thin Films. The knowledge base is intended for science and engineering students in advanced undergraduate or first-year graduate level courses on thin films and scientists and engineers who are entering or require an overview of the field. Since 1992, when the book was first published, the field of thin films has expanded tremendously, especially with regard to technological applications. The second edition will bring the book up-to-date with regard to these advances. Most chapters have been greatly updated, and several new chapters have been added. |
| Beschreibung: | 1 online resource (xxi, 794 pages) : illustrations |
| Bibliographie: | Includes bibliographical references and index. |
| ISBN: | 0585470979 9780585470979 9780080491783 0080491782 |
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| 245 | 1 | 0 | |a Materials science of thin films : |b deposition and structure / |c Milton Ohring. |
| 250 | |a 2nd ed. | ||
| 260 | |a San Diego, CA : |b Academic Press, |c 2002. | ||
| 300 | |a 1 online resource (xxi, 794 pages) : |b illustrations | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 520 | |a This is the first book that can be considered a textbook on thin film science, complete with exercises at the end of each chapter. Ohring has contributed many highly regarded reference books to the AP list, including Reliability and Failure of Electronic Materials and the Engineering Science of Thin Films. The knowledge base is intended for science and engineering students in advanced undergraduate or first-year graduate level courses on thin films and scientists and engineers who are entering or require an overview of the field. Since 1992, when the book was first published, the field of thin films has expanded tremendously, especially with regard to technological applications. The second edition will bring the book up-to-date with regard to these advances. Most chapters have been greatly updated, and several new chapters have been added. | ||
| 505 | 0 | |a Foreword to First Edition -- Preface -- Acknowledgments -- A Historical Perspective -- Chapter 1 A Review of Materials Science -- 1.1. Introduction -- 1.2. Structure -- 1.3. Defects in Solids -- 1.4. Bonds and Bands in Materials -- 1.5. Thermodynamics of Materials -- 1.6. Kinetics -- 1.7. Nucleation -- 1.8. An Introduction to Mechanical Behavior -- 1.9. Conclusion -- Exercises -- References -- Chapter 2 Vacuum Science and Technology -- 2.1. Introduction -- 2.2. Kinetic Theory of Gases -- 2.3. Gas Transport and Pumping -- 2.4. Vacuum Pumps -- 2.5. Vacuum Systems -- 2.6. Conclusion -- Exercises -- References -- Chapter 3 Thin-Film Evaporation Processes -- 3.1. Introduction -- 3.2. The Physics and Chemistry of Evaporation -- 3.3. Film Thickness Uniformity and Purity -- 3.4. Evaporation Hardware -- 3.5. Evaporation Processes and Applications -- 3.6. Conclusion -- Exercises -- References -- Chapter 4 Discharges, Plasmas, and Ion-Surface Interactions -- 4.1. Introduction -- 4.2. Plasmas, Discharges, and Arcs -- 4.3. Fundamentals of Plasma Physics -- 4.4. Reactions in Plasmas -- 4.5. Physics of Sputtering -- 4.6. Ion Bombardment Modification of Growing Films -- 4.7. Conclusion -- Exercises -- References -- Chapter 5 Plasma and Ion Beam Processing of Thin Films -- 5.1. Introduction -- 5.2. DC, AC, and Reactive Sputtering Processes -- 5.3. Magnetron Sputtering -- 5.4. Plasma Etching -- 5.5. Hybrid and Modified PVD Processes -- 5.6. Conclusion -- Exercises -- References -- Chapter 6 Chemical Vapor Deposition -- 6.1. Introduction -- 6.2. Reaction Types -- 6.3. Thermodynamics of CVD -- 6.4. Gas Transport -- 6.5. Film Growth Kinetics -- 6.6. Thermal CVD Processes -- 6.7. Plasma-Enhanced CVD Processes -- 6.8. Some CVD Materials Issues -- 6.9. Safety -- 6.10. Conclusion -- Exercises -- References -- Chapter 7 Substrate Surfaces and Thin-Film Nucleation -- 7.1. Introduction -- 7.2. An Atomic View of Substrate Surfaces -- 7.3. Thermodynamic Aspects of Nucleation -- 7.4. Kinetic Processes in Nucleation and Growth -- 7.5. Experimental Studies of Nucleation and Growth -- 7.6. Conclusion -- Exercises -- References -- Chapter 8 Epitaxy -- 8.1. Introduction -- 8.2. Manifestations of Epitaxy -- 8.3. Lattice Misfit and Defects in Epitaxial Films -- 8.4. Epitaxy of Compound Semiconductors -- 8.5. High-Temperature Methods for Depositing Epitaxial Semiconductor Films -- 8.6. Low-Temperature Methods for Depositing Epitaxial Semiconductor Films -- 8.7. Mechanisms and Characterization of Epitaxial Film Growth -- 8.8. Conclusion -- Exercises -- References -- Chapter 9 Film Structure -- 9.1. Introduction -- 9.2. Structural Morphology of Deposited Films and Coatings -- 9.3. Computational Simulations of Film Structure -- 9.4. Grain Growth, Texture, and Microstructure Control in Thin Films -- 9.5. Constrained Film Structures -- 9.6. Amorphous Thin Films -- 9.7. Conclusion -- Exercises -- References -- Chapter 10 Characterization of Thin Films and Surfaces -- 10.1. Introduction -- 10.2. Film Thickness -- 10.3. Structural Characterization of Films and Surfaces -- 10.4. Chemical Characterization of Surfaces and Films -- 10.5. Conclusion -- Exercises -- References -- Chapter 11 Interdiffusion, Reactions, and Transformations in Thin Films -- 11.1. Introduction -- 11.2. Fundamentals of Diffusion -- 11.3. Interdiffusion in Thin Metal Films -- 11.4. Compound Formation and Phase Transformations in Thin Films -- 11.5. Metal-Semiconductor Reactions -- 11.6. Mass Transport in Thin Films under Large Driving Forces -- 11.7. Conclusion -- Exercises -- References -- Chapter 12 Mechanical Properties of Thin Films -- 12.1. Introduction -- 12.2. Mechanical Testing and Strength of Thin Films -- 12.3. Analysis of Internal Stress -- 12.4. Techniques for Measuring Internal Stress in Films -- 12.5. Internal Stresses in Thin Films and Their Causes -- 12.6. Mechanical Relaxation Effects in Stressed Films -- 12.7. Adhesion -- 12.8. Conclusion -- Exercises -- References -- Index. | |
| 504 | |a Includes bibliographical references and index. | ||
| 505 | 0 | |a A review of materials science -- Vacuum science and technology -- Thin-film evaporation processes -- Discharges, plasmas, and ion-surface interactions -- Plasma and ion beam processing of thin films -- Chamical vapor deposition -- Substrate surfaces and thin-film nucleation -- Epitaxy -- Film structure -- Characterixation of thin films and surfaces -- Interdiffusion, reactions, and transformations in thin films -- Mechanical properties of thin films. | |
| 588 | 0 | |a Print version record. | |
| 650 | 0 | |a Thin films. |0 http://id.loc.gov/authorities/subjects/sh85134864 | |
| 650 | 6 | |a Couches minces. | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING |x Electronics |x Solid State. |2 bisacsh | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING |x Electronics |x Semiconductors. |2 bisacsh | |
| 650 | 7 | |a Thin films |2 fast | |
| 655 | 7 | |a dissertations. |2 aat | |
| 655 | 7 | |a Academic theses |2 fast | |
| 655 | 7 | |a Academic theses. |2 lcgft |0 http://id.loc.gov/authorities/genreForms/gf2014026039 | |
| 655 | 7 | |a Thèses et écrits académiques. |2 rvmgf | |
| 758 | |i has work: |a Materials science of thin films (Text) |1 https://id.oclc.org/worldcat/entity/E39PCG3pp98Dqt9Q9GRKPWfqjP |4 https://id.oclc.org/worldcat/ontology/hasWork | ||
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| contents | Foreword to First Edition -- Preface -- Acknowledgments -- A Historical Perspective -- Chapter 1 A Review of Materials Science -- 1.1. Introduction -- 1.2. Structure -- 1.3. Defects in Solids -- 1.4. Bonds and Bands in Materials -- 1.5. Thermodynamics of Materials -- 1.6. Kinetics -- 1.7. Nucleation -- 1.8. An Introduction to Mechanical Behavior -- 1.9. Conclusion -- Exercises -- References -- Chapter 2 Vacuum Science and Technology -- 2.1. Introduction -- 2.2. Kinetic Theory of Gases -- 2.3. Gas Transport and Pumping -- 2.4. Vacuum Pumps -- 2.5. Vacuum Systems -- 2.6. Conclusion -- Exercises -- References -- Chapter 3 Thin-Film Evaporation Processes -- 3.1. Introduction -- 3.2. The Physics and Chemistry of Evaporation -- 3.3. Film Thickness Uniformity and Purity -- 3.4. Evaporation Hardware -- 3.5. Evaporation Processes and Applications -- 3.6. Conclusion -- Exercises -- References -- Chapter 4 Discharges, Plasmas, and Ion-Surface Interactions -- 4.1. Introduction -- 4.2. Plasmas, Discharges, and Arcs -- 4.3. Fundamentals of Plasma Physics -- 4.4. Reactions in Plasmas -- 4.5. Physics of Sputtering -- 4.6. Ion Bombardment Modification of Growing Films -- 4.7. Conclusion -- Exercises -- References -- Chapter 5 Plasma and Ion Beam Processing of Thin Films -- 5.1. Introduction -- 5.2. DC, AC, and Reactive Sputtering Processes -- 5.3. Magnetron Sputtering -- 5.4. Plasma Etching -- 5.5. Hybrid and Modified PVD Processes -- 5.6. Conclusion -- Exercises -- References -- Chapter 6 Chemical Vapor Deposition -- 6.1. Introduction -- 6.2. Reaction Types -- 6.3. Thermodynamics of CVD -- 6.4. Gas Transport -- 6.5. Film Growth Kinetics -- 6.6. Thermal CVD Processes -- 6.7. Plasma-Enhanced CVD Processes -- 6.8. Some CVD Materials Issues -- 6.9. Safety -- 6.10. Conclusion -- Exercises -- References -- Chapter 7 Substrate Surfaces and Thin-Film Nucleation -- 7.1. Introduction -- 7.2. An Atomic View of Substrate Surfaces -- 7.3. Thermodynamic Aspects of Nucleation -- 7.4. Kinetic Processes in Nucleation and Growth -- 7.5. Experimental Studies of Nucleation and Growth -- 7.6. Conclusion -- Exercises -- References -- Chapter 8 Epitaxy -- 8.1. Introduction -- 8.2. Manifestations of Epitaxy -- 8.3. Lattice Misfit and Defects in Epitaxial Films -- 8.4. Epitaxy of Compound Semiconductors -- 8.5. High-Temperature Methods for Depositing Epitaxial Semiconductor Films -- 8.6. Low-Temperature Methods for Depositing Epitaxial Semiconductor Films -- 8.7. Mechanisms and Characterization of Epitaxial Film Growth -- 8.8. Conclusion -- Exercises -- References -- Chapter 9 Film Structure -- 9.1. Introduction -- 9.2. Structural Morphology of Deposited Films and Coatings -- 9.3. Computational Simulations of Film Structure -- 9.4. Grain Growth, Texture, and Microstructure Control in Thin Films -- 9.5. Constrained Film Structures -- 9.6. Amorphous Thin Films -- 9.7. Conclusion -- Exercises -- References -- Chapter 10 Characterization of Thin Films and Surfaces -- 10.1. Introduction -- 10.2. Film Thickness -- 10.3. Structural Characterization of Films and Surfaces -- 10.4. Chemical Characterization of Surfaces and Films -- 10.5. Conclusion -- Exercises -- References -- Chapter 11 Interdiffusion, Reactions, and Transformations in Thin Films -- 11.1. Introduction -- 11.2. Fundamentals of Diffusion -- 11.3. Interdiffusion in Thin Metal Films -- 11.4. Compound Formation and Phase Transformations in Thin Films -- 11.5. Metal-Semiconductor Reactions -- 11.6. Mass Transport in Thin Films under Large Driving Forces -- 11.7. Conclusion -- Exercises -- References -- Chapter 12 Mechanical Properties of Thin Films -- 12.1. Introduction -- 12.2. Mechanical Testing and Strength of Thin Films -- 12.3. Analysis of Internal Stress -- 12.4. Techniques for Measuring Internal Stress in Films -- 12.5. Internal Stresses in Thin Films and Their Causes -- 12.6. Mechanical Relaxation Effects in Stressed Films -- 12.7. Adhesion -- 12.8. Conclusion -- Exercises -- References -- Index. A review of materials science -- Vacuum science and technology -- Thin-film evaporation processes -- Discharges, plasmas, and ion-surface interactions -- Plasma and ion beam processing of thin films -- Chamical vapor deposition -- Substrate surfaces and thin-film nucleation -- Epitaxy -- Film structure -- Characterixation of thin films and surfaces -- Interdiffusion, reactions, and transformations in thin films -- Mechanical properties of thin films. |
| ctrlnum | (OCoLC)162575935 |
| dewey-full | 621.3815/2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/2 |
| dewey-search | 621.3815/2 |
| dewey-sort | 3621.3815 12 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | 2nd ed. |
| format | Electronic eBook |
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thin films :</subfield><subfield code="b">deposition and structure /</subfield><subfield code="c">Milton Ohring.</subfield></datafield><datafield tag="250" ind1=" " ind2=" "><subfield code="a">2nd ed.</subfield></datafield><datafield tag="260" ind1=" " ind2=" "><subfield code="a">San Diego, CA :</subfield><subfield code="b">Academic Press,</subfield><subfield code="c">2002.</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 online resource (xxi, 794 pages) :</subfield><subfield code="b">illustrations</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">computer</subfield><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">online resource</subfield><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">This is the first book that can be considered a textbook on thin film science, complete with exercises at the end of each chapter. Ohring has contributed many highly regarded reference books to the AP list, including Reliability and Failure of Electronic Materials and the Engineering Science of Thin Films. The knowledge base is intended for science and engineering students in advanced undergraduate or first-year graduate level courses on thin films and scientists and engineers who are entering or require an overview of the field. Since 1992, when the book was first published, the field of thin films has expanded tremendously, especially with regard to technological applications. The second edition will bring the book up-to-date with regard to these advances. Most chapters have been greatly updated, and several new chapters have been added.</subfield></datafield><datafield tag="505" ind1="0" ind2=" "><subfield code="a">Foreword to First Edition -- Preface -- Acknowledgments -- A Historical Perspective -- Chapter 1 A Review of Materials Science -- 1.1. Introduction -- 1.2. Structure -- 1.3. Defects in Solids -- 1.4. Bonds and Bands in Materials -- 1.5. Thermodynamics of Materials -- 1.6. Kinetics -- 1.7. Nucleation -- 1.8. An Introduction to Mechanical Behavior -- 1.9. Conclusion -- Exercises -- References -- Chapter 2 Vacuum Science and Technology -- 2.1. Introduction -- 2.2. Kinetic Theory of Gases -- 2.3. Gas Transport and Pumping -- 2.4. Vacuum Pumps -- 2.5. Vacuum Systems -- 2.6. Conclusion -- Exercises -- References -- Chapter 3 Thin-Film Evaporation Processes -- 3.1. Introduction -- 3.2. The Physics and Chemistry of Evaporation -- 3.3. Film Thickness Uniformity and Purity -- 3.4. Evaporation Hardware -- 3.5. Evaporation Processes and Applications -- 3.6. Conclusion -- Exercises -- References -- Chapter 4 Discharges, Plasmas, and Ion-Surface Interactions -- 4.1. Introduction -- 4.2. Plasmas, Discharges, and Arcs -- 4.3. Fundamentals of Plasma Physics -- 4.4. Reactions in Plasmas -- 4.5. Physics of Sputtering -- 4.6. Ion Bombardment Modification of Growing Films -- 4.7. Conclusion -- Exercises -- References -- Chapter 5 Plasma and Ion Beam Processing of Thin Films -- 5.1. Introduction -- 5.2. DC, AC, and Reactive Sputtering Processes -- 5.3. Magnetron Sputtering -- 5.4. Plasma Etching -- 5.5. Hybrid and Modified PVD Processes -- 5.6. Conclusion -- Exercises -- References -- Chapter 6 Chemical Vapor Deposition -- 6.1. Introduction -- 6.2. Reaction Types -- 6.3. Thermodynamics of CVD -- 6.4. Gas Transport -- 6.5. Film Growth Kinetics -- 6.6. Thermal CVD Processes -- 6.7. Plasma-Enhanced CVD Processes -- 6.8. Some CVD Materials Issues -- 6.9. Safety -- 6.10. Conclusion -- Exercises -- References -- Chapter 7 Substrate Surfaces and Thin-Film Nucleation -- 7.1. Introduction -- 7.2. An Atomic View of Substrate Surfaces -- 7.3. Thermodynamic Aspects of Nucleation -- 7.4. Kinetic Processes in Nucleation and Growth -- 7.5. Experimental Studies of Nucleation and Growth -- 7.6. Conclusion -- Exercises -- References -- Chapter 8 Epitaxy -- 8.1. Introduction -- 8.2. Manifestations of Epitaxy -- 8.3. Lattice Misfit and Defects in Epitaxial Films -- 8.4. Epitaxy of Compound Semiconductors -- 8.5. High-Temperature Methods for Depositing Epitaxial Semiconductor Films -- 8.6. Low-Temperature Methods for Depositing Epitaxial Semiconductor Films -- 8.7. Mechanisms and Characterization of Epitaxial Film Growth -- 8.8. Conclusion -- Exercises -- References -- Chapter 9 Film Structure -- 9.1. Introduction -- 9.2. Structural Morphology of Deposited Films and Coatings -- 9.3. Computational Simulations of Film Structure -- 9.4. Grain Growth, Texture, and Microstructure Control in Thin Films -- 9.5. Constrained Film Structures -- 9.6. Amorphous Thin Films -- 9.7. Conclusion -- Exercises -- References -- Chapter 10 Characterization of Thin Films and Surfaces -- 10.1. Introduction -- 10.2. Film Thickness -- 10.3. Structural Characterization of Films and Surfaces -- 10.4. Chemical Characterization of Surfaces and Films -- 10.5. Conclusion -- Exercises -- References -- Chapter 11 Interdiffusion, Reactions, and Transformations in Thin Films -- 11.1. Introduction -- 11.2. Fundamentals of Diffusion -- 11.3. Interdiffusion in Thin Metal Films -- 11.4. Compound Formation and Phase Transformations in Thin Films -- 11.5. Metal-Semiconductor Reactions -- 11.6. Mass Transport in Thin Films under Large Driving Forces -- 11.7. Conclusion -- Exercises -- References -- Chapter 12 Mechanical Properties of Thin Films -- 12.1. Introduction -- 12.2. Mechanical Testing and Strength of Thin Films -- 12.3. Analysis of Internal Stress -- 12.4. Techniques for Measuring Internal Stress in Films -- 12.5. Internal Stresses in Thin Films and Their Causes -- 12.6. Mechanical Relaxation Effects in Stressed Films -- 12.7. Adhesion -- 12.8. 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| illustrated | Illustrated |
| indexdate | 2024-11-27T13:16:06Z |
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| spelling | Ohring, Milton, 1936- https://id.oclc.org/worldcat/entity/E39PBJhxrwxptqGktB3my4WxDq http://id.loc.gov/authorities/names/n91018108 Materials science of thin films : deposition and structure / Milton Ohring. 2nd ed. San Diego, CA : Academic Press, 2002. 1 online resource (xxi, 794 pages) : illustrations text txt rdacontent computer c rdamedia online resource cr rdacarrier This is the first book that can be considered a textbook on thin film science, complete with exercises at the end of each chapter. Ohring has contributed many highly regarded reference books to the AP list, including Reliability and Failure of Electronic Materials and the Engineering Science of Thin Films. The knowledge base is intended for science and engineering students in advanced undergraduate or first-year graduate level courses on thin films and scientists and engineers who are entering or require an overview of the field. Since 1992, when the book was first published, the field of thin films has expanded tremendously, especially with regard to technological applications. The second edition will bring the book up-to-date with regard to these advances. Most chapters have been greatly updated, and several new chapters have been added. Foreword to First Edition -- Preface -- Acknowledgments -- A Historical Perspective -- Chapter 1 A Review of Materials Science -- 1.1. Introduction -- 1.2. Structure -- 1.3. Defects in Solids -- 1.4. Bonds and Bands in Materials -- 1.5. Thermodynamics of Materials -- 1.6. Kinetics -- 1.7. Nucleation -- 1.8. An Introduction to Mechanical Behavior -- 1.9. Conclusion -- Exercises -- References -- Chapter 2 Vacuum Science and Technology -- 2.1. Introduction -- 2.2. Kinetic Theory of Gases -- 2.3. Gas Transport and Pumping -- 2.4. Vacuum Pumps -- 2.5. Vacuum Systems -- 2.6. Conclusion -- Exercises -- References -- Chapter 3 Thin-Film Evaporation Processes -- 3.1. Introduction -- 3.2. The Physics and Chemistry of Evaporation -- 3.3. Film Thickness Uniformity and Purity -- 3.4. Evaporation Hardware -- 3.5. Evaporation Processes and Applications -- 3.6. Conclusion -- Exercises -- References -- Chapter 4 Discharges, Plasmas, and Ion-Surface Interactions -- 4.1. Introduction -- 4.2. Plasmas, Discharges, and Arcs -- 4.3. Fundamentals of Plasma Physics -- 4.4. Reactions in Plasmas -- 4.5. Physics of Sputtering -- 4.6. Ion Bombardment Modification of Growing Films -- 4.7. Conclusion -- Exercises -- References -- Chapter 5 Plasma and Ion Beam Processing of Thin Films -- 5.1. Introduction -- 5.2. DC, AC, and Reactive Sputtering Processes -- 5.3. Magnetron Sputtering -- 5.4. Plasma Etching -- 5.5. Hybrid and Modified PVD Processes -- 5.6. Conclusion -- Exercises -- References -- Chapter 6 Chemical Vapor Deposition -- 6.1. Introduction -- 6.2. Reaction Types -- 6.3. Thermodynamics of CVD -- 6.4. Gas Transport -- 6.5. Film Growth Kinetics -- 6.6. Thermal CVD Processes -- 6.7. Plasma-Enhanced CVD Processes -- 6.8. Some CVD Materials Issues -- 6.9. Safety -- 6.10. Conclusion -- Exercises -- References -- Chapter 7 Substrate Surfaces and Thin-Film Nucleation -- 7.1. Introduction -- 7.2. An Atomic View of Substrate Surfaces -- 7.3. Thermodynamic Aspects of Nucleation -- 7.4. Kinetic Processes in Nucleation and Growth -- 7.5. Experimental Studies of Nucleation and Growth -- 7.6. Conclusion -- Exercises -- References -- Chapter 8 Epitaxy -- 8.1. Introduction -- 8.2. Manifestations of Epitaxy -- 8.3. Lattice Misfit and Defects in Epitaxial Films -- 8.4. Epitaxy of Compound Semiconductors -- 8.5. High-Temperature Methods for Depositing Epitaxial Semiconductor Films -- 8.6. Low-Temperature Methods for Depositing Epitaxial Semiconductor Films -- 8.7. Mechanisms and Characterization of Epitaxial Film Growth -- 8.8. Conclusion -- Exercises -- References -- Chapter 9 Film Structure -- 9.1. Introduction -- 9.2. Structural Morphology of Deposited Films and Coatings -- 9.3. Computational Simulations of Film Structure -- 9.4. Grain Growth, Texture, and Microstructure Control in Thin Films -- 9.5. Constrained Film Structures -- 9.6. Amorphous Thin Films -- 9.7. Conclusion -- Exercises -- References -- Chapter 10 Characterization of Thin Films and Surfaces -- 10.1. Introduction -- 10.2. Film Thickness -- 10.3. Structural Characterization of Films and Surfaces -- 10.4. Chemical Characterization of Surfaces and Films -- 10.5. Conclusion -- Exercises -- References -- Chapter 11 Interdiffusion, Reactions, and Transformations in Thin Films -- 11.1. Introduction -- 11.2. Fundamentals of Diffusion -- 11.3. Interdiffusion in Thin Metal Films -- 11.4. Compound Formation and Phase Transformations in Thin Films -- 11.5. Metal-Semiconductor Reactions -- 11.6. Mass Transport in Thin Films under Large Driving Forces -- 11.7. Conclusion -- Exercises -- References -- Chapter 12 Mechanical Properties of Thin Films -- 12.1. Introduction -- 12.2. Mechanical Testing and Strength of Thin Films -- 12.3. Analysis of Internal Stress -- 12.4. Techniques for Measuring Internal Stress in Films -- 12.5. Internal Stresses in Thin Films and Their Causes -- 12.6. Mechanical Relaxation Effects in Stressed Films -- 12.7. Adhesion -- 12.8. Conclusion -- Exercises -- References -- Index. Includes bibliographical references and index. A review of materials science -- Vacuum science and technology -- Thin-film evaporation processes -- Discharges, plasmas, and ion-surface interactions -- Plasma and ion beam processing of thin films -- Chamical vapor deposition -- Substrate surfaces and thin-film nucleation -- Epitaxy -- Film structure -- Characterixation of thin films and surfaces -- Interdiffusion, reactions, and transformations in thin films -- Mechanical properties of thin films. Print version record. Thin films. http://id.loc.gov/authorities/subjects/sh85134864 Couches minces. TECHNOLOGY & ENGINEERING Electronics Solid State. bisacsh TECHNOLOGY & ENGINEERING Electronics Semiconductors. bisacsh Thin films fast dissertations. aat Academic theses fast Academic theses. lcgft http://id.loc.gov/authorities/genreForms/gf2014026039 Thèses et écrits académiques. rvmgf has work: Materials science of thin films (Text) https://id.oclc.org/worldcat/entity/E39PCG3pp98Dqt9Q9GRKPWfqjP https://id.oclc.org/worldcat/ontology/hasWork Print version: Ohring, Milton, 1936- Materials science of thin films. 2nd ed. San Diego, CA : Academic Press, 2002 0125249756 9780125249751 (DLC) 2001089414 (OCoLC)48463437 FWS01 ZDB-4-EBA FWS_PDA_EBA https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=92177 Volltext FWS01 ZDB-4-EBA FWS_PDA_EBA https://www.sciencedirect.com/science/book/9780125249751 Volltext |
| spellingShingle | Ohring, Milton, 1936- Materials science of thin films : deposition and structure / Foreword to First Edition -- Preface -- Acknowledgments -- A Historical Perspective -- Chapter 1 A Review of Materials Science -- 1.1. Introduction -- 1.2. Structure -- 1.3. Defects in Solids -- 1.4. Bonds and Bands in Materials -- 1.5. Thermodynamics of Materials -- 1.6. Kinetics -- 1.7. Nucleation -- 1.8. An Introduction to Mechanical Behavior -- 1.9. Conclusion -- Exercises -- References -- Chapter 2 Vacuum Science and Technology -- 2.1. Introduction -- 2.2. Kinetic Theory of Gases -- 2.3. Gas Transport and Pumping -- 2.4. Vacuum Pumps -- 2.5. Vacuum Systems -- 2.6. Conclusion -- Exercises -- References -- Chapter 3 Thin-Film Evaporation Processes -- 3.1. Introduction -- 3.2. The Physics and Chemistry of Evaporation -- 3.3. Film Thickness Uniformity and Purity -- 3.4. Evaporation Hardware -- 3.5. Evaporation Processes and Applications -- 3.6. Conclusion -- Exercises -- References -- Chapter 4 Discharges, Plasmas, and Ion-Surface Interactions -- 4.1. Introduction -- 4.2. Plasmas, Discharges, and Arcs -- 4.3. Fundamentals of Plasma Physics -- 4.4. Reactions in Plasmas -- 4.5. Physics of Sputtering -- 4.6. Ion Bombardment Modification of Growing Films -- 4.7. Conclusion -- Exercises -- References -- Chapter 5 Plasma and Ion Beam Processing of Thin Films -- 5.1. Introduction -- 5.2. DC, AC, and Reactive Sputtering Processes -- 5.3. Magnetron Sputtering -- 5.4. Plasma Etching -- 5.5. Hybrid and Modified PVD Processes -- 5.6. Conclusion -- Exercises -- References -- Chapter 6 Chemical Vapor Deposition -- 6.1. Introduction -- 6.2. Reaction Types -- 6.3. Thermodynamics of CVD -- 6.4. Gas Transport -- 6.5. Film Growth Kinetics -- 6.6. Thermal CVD Processes -- 6.7. Plasma-Enhanced CVD Processes -- 6.8. Some CVD Materials Issues -- 6.9. Safety -- 6.10. Conclusion -- Exercises -- References -- Chapter 7 Substrate Surfaces and Thin-Film Nucleation -- 7.1. Introduction -- 7.2. An Atomic View of Substrate Surfaces -- 7.3. Thermodynamic Aspects of Nucleation -- 7.4. Kinetic Processes in Nucleation and Growth -- 7.5. Experimental Studies of Nucleation and Growth -- 7.6. Conclusion -- Exercises -- References -- Chapter 8 Epitaxy -- 8.1. Introduction -- 8.2. Manifestations of Epitaxy -- 8.3. Lattice Misfit and Defects in Epitaxial Films -- 8.4. Epitaxy of Compound Semiconductors -- 8.5. High-Temperature Methods for Depositing Epitaxial Semiconductor Films -- 8.6. Low-Temperature Methods for Depositing Epitaxial Semiconductor Films -- 8.7. Mechanisms and Characterization of Epitaxial Film Growth -- 8.8. Conclusion -- Exercises -- References -- Chapter 9 Film Structure -- 9.1. Introduction -- 9.2. Structural Morphology of Deposited Films and Coatings -- 9.3. Computational Simulations of Film Structure -- 9.4. Grain Growth, Texture, and Microstructure Control in Thin Films -- 9.5. Constrained Film Structures -- 9.6. Amorphous Thin Films -- 9.7. Conclusion -- Exercises -- References -- Chapter 10 Characterization of Thin Films and Surfaces -- 10.1. Introduction -- 10.2. Film Thickness -- 10.3. Structural Characterization of Films and Surfaces -- 10.4. Chemical Characterization of Surfaces and Films -- 10.5. Conclusion -- Exercises -- References -- Chapter 11 Interdiffusion, Reactions, and Transformations in Thin Films -- 11.1. Introduction -- 11.2. Fundamentals of Diffusion -- 11.3. Interdiffusion in Thin Metal Films -- 11.4. Compound Formation and Phase Transformations in Thin Films -- 11.5. Metal-Semiconductor Reactions -- 11.6. Mass Transport in Thin Films under Large Driving Forces -- 11.7. Conclusion -- Exercises -- References -- Chapter 12 Mechanical Properties of Thin Films -- 12.1. Introduction -- 12.2. Mechanical Testing and Strength of Thin Films -- 12.3. Analysis of Internal Stress -- 12.4. Techniques for Measuring Internal Stress in Films -- 12.5. Internal Stresses in Thin Films and Their Causes -- 12.6. Mechanical Relaxation Effects in Stressed Films -- 12.7. Adhesion -- 12.8. Conclusion -- Exercises -- References -- Index. A review of materials science -- Vacuum science and technology -- Thin-film evaporation processes -- Discharges, plasmas, and ion-surface interactions -- Plasma and ion beam processing of thin films -- Chamical vapor deposition -- Substrate surfaces and thin-film nucleation -- Epitaxy -- Film structure -- Characterixation of thin films and surfaces -- Interdiffusion, reactions, and transformations in thin films -- Mechanical properties of thin films. Thin films. http://id.loc.gov/authorities/subjects/sh85134864 Couches minces. TECHNOLOGY & ENGINEERING Electronics Solid State. bisacsh TECHNOLOGY & ENGINEERING Electronics Semiconductors. bisacsh Thin films fast |
| subject_GND | http://id.loc.gov/authorities/subjects/sh85134864 http://id.loc.gov/authorities/genreForms/gf2014026039 |
| title | Materials science of thin films : deposition and structure / |
| title_auth | Materials science of thin films : deposition and structure / |
| title_exact_search | Materials science of thin films : deposition and structure / |
| title_full | Materials science of thin films : deposition and structure / Milton Ohring. |
| title_fullStr | Materials science of thin films : deposition and structure / Milton Ohring. |
| title_full_unstemmed | Materials science of thin films : deposition and structure / Milton Ohring. |
| title_short | Materials science of thin films : |
| title_sort | materials science of thin films deposition and structure |
| title_sub | deposition and structure / |
| topic | Thin films. http://id.loc.gov/authorities/subjects/sh85134864 Couches minces. TECHNOLOGY & ENGINEERING Electronics Solid State. bisacsh TECHNOLOGY & ENGINEERING Electronics Semiconductors. bisacsh Thin films fast |
| topic_facet | Thin films. Couches minces. TECHNOLOGY & ENGINEERING Electronics Solid State. TECHNOLOGY & ENGINEERING Electronics Semiconductors. Thin films dissertations. Academic theses Academic theses. Thèses et écrits académiques. |
| url | https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=92177 https://www.sciencedirect.com/science/book/9780125249751 |
| work_keys_str_mv | AT ohringmilton materialsscienceofthinfilmsdepositionandstructure |