Analysis and design principles of MEMS devices /:
Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS dev...
Gespeichert in:
| 1. Verfasser: | |
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| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Amsterdam ; Boston ; London :
Elsevier,
2005.
|
| Schlagworte: | |
| Online-Zugang: | Volltext Volltext |
| Zusammenfassung: | Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field. * Presents the analysis and design principles of MEMS devices more systematically than ever before. * Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures * A problem section is included at the end of each chapter with answers provided at the end of the book. |
| Beschreibung: | 1 online resource (xii, 312 pages) : illustrations |
| Bibliographie: | Includes bibliographical references and index. |
| ISBN: | 9780444516169 0444516166 008045562X 9780080455624 1280630922 9781280630927 9786610630929 6610630925 |
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| 520 | |a Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field. * Presents the analysis and design principles of MEMS devices more systematically than ever before. * Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures * A problem section is included at the end of each chapter with answers provided at the end of the book. | ||
| 505 | 0 | |a Chapter 1. Introduction to MEMS devices -- -- Chapter 2. Basic mechanics of beam and diaphragm structures -- -- Chapter 3. Air Damping -- -- Chapter 4. Electrostatic Actuation -- -- Chapter 5. Capacitive Sensing and Effects of Electrical Excitation -- -- Chapter 6. Piezoresistive Sensing. | |
| 504 | |a Includes bibliographical references and index. | ||
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| contents | Chapter 1. Introduction to MEMS devices -- -- Chapter 2. Basic mechanics of beam and diaphragm structures -- -- Chapter 3. Air Damping -- -- Chapter 4. Electrostatic Actuation -- -- Chapter 5. Capacitive Sensing and Effects of Electrical Excitation -- -- Chapter 6. Piezoresistive Sensing. |
| ctrlnum | (OCoLC)162130017 |
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| dewey-raw | 621.381 |
| dewey-search | 621.381 |
| dewey-sort | 3621.381 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
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"><subfield code="a">621.381</subfield><subfield code="2">22</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">MAIN</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Bao, Min-Hang.</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Analysis and design principles of MEMS devices /</subfield><subfield code="c">by Minhang Bao.</subfield></datafield><datafield tag="260" ind1=" " ind2=" "><subfield code="a">Amsterdam ;</subfield><subfield code="a">Boston ;</subfield><subfield code="a">London :</subfield><subfield code="b">Elsevier,</subfield><subfield code="c">2005.</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 online resource (xii, 312 pages) :</subfield><subfield code="b">illustrations</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">computer</subfield><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">online resource</subfield><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="347" ind1=" " ind2=" "><subfield code="a">text file</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field. * Presents the analysis and design principles of MEMS devices more systematically than ever before. * Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures * A problem section is included at the end of each chapter with answers provided at the end of the book.</subfield></datafield><datafield tag="505" ind1="0" ind2=" "><subfield code="a">Chapter 1. Introduction to MEMS devices -- -- Chapter 2. Basic mechanics of beam and diaphragm structures -- -- Chapter 3. Air Damping -- -- Chapter 4. Electrostatic Actuation -- -- Chapter 5. Capacitive Sensing and Effects of Electrical Excitation -- -- Chapter 6. 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| genre_facet | dissertations. Academic theses Academic theses. Thèses et écrits académiques. |
| id | ZDB-4-EBA-ocn162130017 |
| illustrated | Illustrated |
| indexdate | 2024-11-27T13:16:06Z |
| institution | BVB |
| isbn | 9780444516169 0444516166 008045562X 9780080455624 1280630922 9781280630927 9786610630929 6610630925 |
| language | English |
| oclc_num | 162130017 |
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| physical | 1 online resource (xii, 312 pages) : illustrations |
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| publishDate | 2005 |
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| publisher | Elsevier, |
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| spelling | Bao, Min-Hang. Analysis and design principles of MEMS devices / by Minhang Bao. Amsterdam ; Boston ; London : Elsevier, 2005. 1 online resource (xii, 312 pages) : illustrations text txt rdacontent computer c rdamedia online resource cr rdacarrier text file Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field. * Presents the analysis and design principles of MEMS devices more systematically than ever before. * Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures * A problem section is included at the end of each chapter with answers provided at the end of the book. Chapter 1. Introduction to MEMS devices -- -- Chapter 2. Basic mechanics of beam and diaphragm structures -- -- Chapter 3. Air Damping -- -- Chapter 4. Electrostatic Actuation -- -- Chapter 5. Capacitive Sensing and Effects of Electrical Excitation -- -- Chapter 6. Piezoresistive Sensing. Includes bibliographical references and index. Print version record. English. Microelectromechanical systems. http://id.loc.gov/authorities/subjects/sh97007351 Micro-Electrical-Mechanical Systems https://id.nlm.nih.gov/mesh/D055617 Microsystèmes électromécaniques. TECHNOLOGY & ENGINEERING Electronics Microelectronics. bisacsh TECHNOLOGY & ENGINEERING Electronics Digital. bisacsh Microelectromechanical systems fast dissertations. aat Academic theses fast Academic theses. lcgft http://id.loc.gov/authorities/genreForms/gf2014026039 Thèses et écrits académiques. rvmgf has work: Analysis and design principles of MEMS devices $c (Text) https://id.oclc.org/worldcat/entity/E39PD34X69P9YXFpqMRYW4Wdgq https://id.oclc.org/worldcat/ontology/hasWork Print version: Bao, Min-Hang. Analysis and design principles of MEMS devices. Amsterdam ; Boston ; London : Elsevier, 2005 0444516166 9780444516169 (OCoLC)57750897 FWS01 ZDB-4-EBA FWS_PDA_EBA https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=166279 Volltext FWS01 ZDB-4-EBA FWS_PDA_EBA https://www.sciencedirect.com/science/book/9780444516169 Volltext |
| spellingShingle | Bao, Min-Hang Analysis and design principles of MEMS devices / Chapter 1. Introduction to MEMS devices -- -- Chapter 2. Basic mechanics of beam and diaphragm structures -- -- Chapter 3. Air Damping -- -- Chapter 4. Electrostatic Actuation -- -- Chapter 5. Capacitive Sensing and Effects of Electrical Excitation -- -- Chapter 6. Piezoresistive Sensing. Microelectromechanical systems. http://id.loc.gov/authorities/subjects/sh97007351 Micro-Electrical-Mechanical Systems https://id.nlm.nih.gov/mesh/D055617 Microsystèmes électromécaniques. TECHNOLOGY & ENGINEERING Electronics Microelectronics. bisacsh TECHNOLOGY & ENGINEERING Electronics Digital. bisacsh Microelectromechanical systems fast |
| subject_GND | http://id.loc.gov/authorities/subjects/sh97007351 https://id.nlm.nih.gov/mesh/D055617 http://id.loc.gov/authorities/genreForms/gf2014026039 |
| title | Analysis and design principles of MEMS devices / |
| title_auth | Analysis and design principles of MEMS devices / |
| title_exact_search | Analysis and design principles of MEMS devices / |
| title_full | Analysis and design principles of MEMS devices / by Minhang Bao. |
| title_fullStr | Analysis and design principles of MEMS devices / by Minhang Bao. |
| title_full_unstemmed | Analysis and design principles of MEMS devices / by Minhang Bao. |
| title_short | Analysis and design principles of MEMS devices / |
| title_sort | analysis and design principles of mems devices |
| topic | Microelectromechanical systems. http://id.loc.gov/authorities/subjects/sh97007351 Micro-Electrical-Mechanical Systems https://id.nlm.nih.gov/mesh/D055617 Microsystèmes électromécaniques. TECHNOLOGY & ENGINEERING Electronics Microelectronics. bisacsh TECHNOLOGY & ENGINEERING Electronics Digital. bisacsh Microelectromechanical systems fast |
| topic_facet | Microelectromechanical systems. Micro-Electrical-Mechanical Systems Microsystèmes électromécaniques. TECHNOLOGY & ENGINEERING Electronics Microelectronics. TECHNOLOGY & ENGINEERING Electronics Digital. Microelectromechanical systems dissertations. Academic theses Academic theses. Thèses et écrits académiques. |
| url | https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=166279 https://www.sciencedirect.com/science/book/9780444516169 |
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