Verfügbarkeit: Handbook of vacuum science and technology /

Handbook of vacuum science and technology /:

The Handbook of Vacuum Technology consists of the latest innovations in vacuum science and technology with a strong orientation towards the vacuum practitioner. It covers many of the new vacuum pumps, materials, equipment, and applications. It also details the design and maintenance of modern vacuum...

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Bibliographische Detailangaben
Weitere Verfasser:	Hoffman, Dorothy M., -1996, Singh, Bawa, Thomas, John H., III
Format:	Elektronisch E-Book
Sprache:	English
Veröffentlicht:	San Diego, CA : Academic Press, ©1998.
Schlagworte:	Vacuum technology > Handbooks, manuals, etc. Mechanical engineering. Vide (Technologie) > Guides, manuels, etc. Génie mécanique. mechanical engineering. TECHNOLOGY & ENGINEERING > Mechanical. Vacuum technology handbooks. Handbooks and manuals Handbooks and manuals. Guides et manuels.
Online-Zugang:	Volltext Volltext
Zusammenfassung:	The Handbook of Vacuum Technology consists of the latest innovations in vacuum science and technology with a strong orientation towards the vacuum practitioner. It covers many of the new vacuum pumps, materials, equipment, and applications. It also details the design and maintenance of modern vacuum systems. The authors are well known experts in their individual fields with the emphasis on performance, limitations, and applications rather than theory. There aremany useful tables, charts, and figures that will be of use to the practitioner. Key Features * User oriented with many useful tables, charts, and figures of use to the practitioner * Reviews new vacuum materials and equipment * Illustrates the design and maintenance of modern vacuum systems * Includes well referenced chapters.
Beschreibung:	1 online resource (xxii, 835 pages) : illustrations
Format:	Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002.
Bibliographie:	Includes bibliographical references and index.
ISBN:	9780080533759 0080533752 1281059358 9781281059352 9786611059354 6611059350

Internformat

MARC


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520			\|a The Handbook of Vacuum Technology consists of the latest innovations in vacuum science and technology with a strong orientation towards the vacuum practitioner. It covers many of the new vacuum pumps, materials, equipment, and applications. It also details the design and maintenance of modern vacuum systems. The authors are well known experts in their individual fields with the emphasis on performance, limitations, and applications rather than theory. There aremany useful tables, charts, and figures that will be of use to the practitioner. Key Features * User oriented with many useful tables, charts, and figures of use to the practitioner * Reviews new vacuum materials and equipment * Illustrates the design and maintenance of modern vacuum systems * Includes well referenced chapters.
505	0		\|a Preface. Fundamentals of Vacuum Technology and Surface Physics: B. Singh and J.H. Thomas, III, Vacuum Nomenclature and Definitions. Gas Properties. Molecular Processes and Kinetic Theory. Throughput, Pumping Speed, Evacuation Rate, Outgassing Rate, and Leak Rate. Gas Flow. Conductance. Flow Calculations. Surface Physics and Its Relation to Vacuum Science. Creation of Vacuum: M. Hablanian, The Technology of Vacuum Pumps--An Overview. F.J. Eckle, Diaphragm Pumps. J. Richman, Blowers. Vapor Jet Pumps: M. Hablanian, Diffusion Pumps. G. Ash, Cryogenic Pumps. H. Henning, Turbomolecular Pumps. J. Singleton, UHV Pumps. Vacuum Measurements: H.M. Brady, R.H. Goehner, E. Drubetsky, and W.H. Bayles, Jr., Measurements of Pressure. L. Lieszkovszky, Mass Analysis and Partial Pressure Measurement. R. Outlaw, Analysis of Partial Pressure Information. L. Hinkle, Gas Flow Measurements. Systems Design and Components: Components for Vacuum Equipment and Systems: N.T. Peacock, Valves. N.T. Peacock, Flanges. W. Helgeland, Feedthroughs. C. Kraft, Ports. J. Panitz, Construction Materials: Properties Defining Material Performance. Vacuum Chamber Materials. Special Purpose Materials. R.N. Peacock, Seal Materials and Design. B. Dayton, Outgassing of Materials. J. Garner, Aluminum Based Vacuum Systems. D. Mattox, Preparation and Cleaning of Vacuum Surfaces. Vacuum Applications: High Vacuum Based Processes: S. Rossnagel, Sputtering. V. Patel, Plasma Etching. M. Powers, Ion Beam Based Processes. J. Cheung, Laser Ablation. F. Jansen, CVD and PECVD. J. Thomas, UHV Based Processes. Large-Scale Vacuum Based Processes: W. Robbins, Large Area Coatings. H.F. Dylla, The Development of Ultrahigh Vacuum Technology for Particle Accelerators and Magnetic Fusion Devices.
504			\|a Includes bibliographical references and index.
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546			\|a English.
650		0	\|a Vacuum technology \|v Handbooks, manuals, etc.
650		0	\|a Mechanical engineering. \|0 http://id.loc.gov/authorities/subjects/sh85082757
650		6	\|a Vide (Technologie) \|v Guides, manuels, etc.
650		6	\|a Génie mécanique.
650		7	\|a mechanical engineering. \|2 aat
650		7	\|a TECHNOLOGY & ENGINEERING \|x Mechanical. \|2 bisacsh
650		7	\|a Vacuum technology \|2 fast
655		7	\|a handbooks. \|2 aat
655		7	\|a Handbooks and manuals \|2 fast
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700	1		\|a Singh, Bawa.
700	1		\|a Thomas, John H., \|c III.
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DE-BY-FWS_katkey	ZDB-4-EBA-ocn162128757
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contents	Preface. Fundamentals of Vacuum Technology and Surface Physics: B. Singh and J.H. Thomas, III, Vacuum Nomenclature and Definitions. Gas Properties. Molecular Processes and Kinetic Theory. Throughput, Pumping Speed, Evacuation Rate, Outgassing Rate, and Leak Rate. Gas Flow. Conductance. Flow Calculations. Surface Physics and Its Relation to Vacuum Science. Creation of Vacuum: M. Hablanian, The Technology of Vacuum Pumps--An Overview. F.J. Eckle, Diaphragm Pumps. J. Richman, Blowers. Vapor Jet Pumps: M. Hablanian, Diffusion Pumps. G. Ash, Cryogenic Pumps. H. Henning, Turbomolecular Pumps. J. Singleton, UHV Pumps. Vacuum Measurements: H.M. Brady, R.H. Goehner, E. Drubetsky, and W.H. Bayles, Jr., Measurements of Pressure. L. Lieszkovszky, Mass Analysis and Partial Pressure Measurement. R. Outlaw, Analysis of Partial Pressure Information. L. Hinkle, Gas Flow Measurements. Systems Design and Components: Components for Vacuum Equipment and Systems: N.T. Peacock, Valves. N.T. Peacock, Flanges. W. Helgeland, Feedthroughs. C. Kraft, Ports. J. Panitz, Construction Materials: Properties Defining Material Performance. Vacuum Chamber Materials. Special Purpose Materials. R.N. Peacock, Seal Materials and Design. B. Dayton, Outgassing of Materials. J. Garner, Aluminum Based Vacuum Systems. D. Mattox, Preparation and Cleaning of Vacuum Surfaces. Vacuum Applications: High Vacuum Based Processes: S. Rossnagel, Sputtering. V. Patel, Plasma Etching. M. Powers, Ion Beam Based Processes. J. Cheung, Laser Ablation. F. Jansen, CVD and PECVD. J. Thomas, UHV Based Processes. Large-Scale Vacuum Based Processes: W. Robbins, Large Area Coatings. H.F. Dylla, The Development of Ultrahigh Vacuum Technology for Particle Accelerators and Magnetic Fusion Devices.
ctrlnum	(OCoLC)162128757
dewey-full	621.5/5
dewey-hundreds	600 - Technology (Applied sciences)
dewey-ones	621 - Applied physics
dewey-raw	621.5/5
dewey-search	621.5/5
dewey-sort	3621.5 15
dewey-tens	620 - Engineering and allied operations
discipline	Maschinenbau / Maschinenwesen
format	Electronic eBook
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genre	handbooks. aat Handbooks and manuals fast Handbooks and manuals. lcgft http://id.loc.gov/authorities/genreForms/gf2014026109 Guides et manuels. rvmgf
genre_facet	handbooks. Handbooks and manuals Handbooks and manuals. Guides et manuels.
id	ZDB-4-EBA-ocn162128757
illustrated	Illustrated
indexdate	2024-11-27T13:16:05Z
institution	BVB
isbn	9780080533759 0080533752 1281059358 9781281059352 9786611059354 6611059350
language	English
oclc_num	162128757
open_access_boolean
owner	MAIN DE-863 DE-BY-FWS
owner_facet	MAIN DE-863 DE-BY-FWS
physical	1 online resource (xxii, 835 pages) : illustrations
psigel	ZDB-4-EBA
publishDate	1998
publishDateSearch	1998
publishDateSort	1998
publisher	Academic Press,
record_format	marc
spelling	Handbook of vacuum science and technology / edited by Dorothy M. Hoffman, Bawa Singh, John H. Thomas, III. San Diego, CA : Academic Press, ©1998. 1 online resource (xxii, 835 pages) : illustrations text txt rdacontent computer c rdamedia online resource cr rdacarrier The Handbook of Vacuum Technology consists of the latest innovations in vacuum science and technology with a strong orientation towards the vacuum practitioner. It covers many of the new vacuum pumps, materials, equipment, and applications. It also details the design and maintenance of modern vacuum systems. The authors are well known experts in their individual fields with the emphasis on performance, limitations, and applications rather than theory. There aremany useful tables, charts, and figures that will be of use to the practitioner. Key Features * User oriented with many useful tables, charts, and figures of use to the practitioner * Reviews new vacuum materials and equipment * Illustrates the design and maintenance of modern vacuum systems * Includes well referenced chapters. Preface. Fundamentals of Vacuum Technology and Surface Physics: B. Singh and J.H. Thomas, III, Vacuum Nomenclature and Definitions. Gas Properties. Molecular Processes and Kinetic Theory. Throughput, Pumping Speed, Evacuation Rate, Outgassing Rate, and Leak Rate. Gas Flow. Conductance. Flow Calculations. Surface Physics and Its Relation to Vacuum Science. Creation of Vacuum: M. Hablanian, The Technology of Vacuum Pumps--An Overview. F.J. Eckle, Diaphragm Pumps. J. Richman, Blowers. Vapor Jet Pumps: M. Hablanian, Diffusion Pumps. G. Ash, Cryogenic Pumps. H. Henning, Turbomolecular Pumps. J. Singleton, UHV Pumps. Vacuum Measurements: H.M. Brady, R.H. Goehner, E. Drubetsky, and W.H. Bayles, Jr., Measurements of Pressure. L. Lieszkovszky, Mass Analysis and Partial Pressure Measurement. R. Outlaw, Analysis of Partial Pressure Information. L. Hinkle, Gas Flow Measurements. Systems Design and Components: Components for Vacuum Equipment and Systems: N.T. Peacock, Valves. N.T. Peacock, Flanges. W. Helgeland, Feedthroughs. C. Kraft, Ports. J. Panitz, Construction Materials: Properties Defining Material Performance. Vacuum Chamber Materials. Special Purpose Materials. R.N. Peacock, Seal Materials and Design. B. Dayton, Outgassing of Materials. J. Garner, Aluminum Based Vacuum Systems. D. Mattox, Preparation and Cleaning of Vacuum Surfaces. Vacuum Applications: High Vacuum Based Processes: S. Rossnagel, Sputtering. V. Patel, Plasma Etching. M. Powers, Ion Beam Based Processes. J. Cheung, Laser Ablation. F. Jansen, CVD and PECVD. J. Thomas, UHV Based Processes. Large-Scale Vacuum Based Processes: W. Robbins, Large Area Coatings. H.F. Dylla, The Development of Ultrahigh Vacuum Technology for Particle Accelerators and Magnetic Fusion Devices. Includes bibliographical references and index. Print version record. Use copy Restrictions unspecified star MiAaHDL Electronic reproduction. [Place of publication not identified] : HathiTrust Digital Library, 2010. MiAaHDL Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. http://purl.oclc.org/DLF/benchrepro0212 MiAaHDL digitized 2010 HathiTrust Digital Library committed to preserve pda MiAaHDL English. Vacuum technology Handbooks, manuals, etc. Mechanical engineering. http://id.loc.gov/authorities/subjects/sh85082757 Vide (Technologie) Guides, manuels, etc. Génie mécanique. mechanical engineering. aat TECHNOLOGY & ENGINEERING Mechanical. bisacsh Vacuum technology fast handbooks. aat Handbooks and manuals fast Handbooks and manuals. lcgft http://id.loc.gov/authorities/genreForms/gf2014026109 Guides et manuels. rvmgf Hoffman, Dorothy M., -1996. https://id.oclc.org/worldcat/entity/E39PCjM9qqmhhB6pjwBMFH9fmb http://id.loc.gov/authorities/names/nb97064941 Singh, Bawa. Thomas, John H., III. has work: Handbook of vacuum science and technology (Text) https://id.oclc.org/worldcat/entity/E39PCGjKgTC6HX4Qgk3W4Kx8T3 https://id.oclc.org/worldcat/ontology/hasWork Print version: Handbook of vacuum science and technology. San Diego, CA : Academic Press, ©1998 0123520657 9780123520654 (DLC) 97026269 (OCoLC)37211296 FWS01 ZDB-4-EBA FWS_PDA_EBA https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=211330 Volltext FWS01 ZDB-4-EBA FWS_PDA_EBA https://www.sciencedirect.com/science/book/9780123520654 Volltext
spellingShingle	Handbook of vacuum science and technology / Preface. Fundamentals of Vacuum Technology and Surface Physics: B. Singh and J.H. Thomas, III, Vacuum Nomenclature and Definitions. Gas Properties. Molecular Processes and Kinetic Theory. Throughput, Pumping Speed, Evacuation Rate, Outgassing Rate, and Leak Rate. Gas Flow. Conductance. Flow Calculations. Surface Physics and Its Relation to Vacuum Science. Creation of Vacuum: M. Hablanian, The Technology of Vacuum Pumps--An Overview. F.J. Eckle, Diaphragm Pumps. J. Richman, Blowers. Vapor Jet Pumps: M. Hablanian, Diffusion Pumps. G. Ash, Cryogenic Pumps. H. Henning, Turbomolecular Pumps. J. Singleton, UHV Pumps. Vacuum Measurements: H.M. Brady, R.H. Goehner, E. Drubetsky, and W.H. Bayles, Jr., Measurements of Pressure. L. Lieszkovszky, Mass Analysis and Partial Pressure Measurement. R. Outlaw, Analysis of Partial Pressure Information. L. Hinkle, Gas Flow Measurements. Systems Design and Components: Components for Vacuum Equipment and Systems: N.T. Peacock, Valves. N.T. Peacock, Flanges. W. Helgeland, Feedthroughs. C. Kraft, Ports. J. Panitz, Construction Materials: Properties Defining Material Performance. Vacuum Chamber Materials. Special Purpose Materials. R.N. Peacock, Seal Materials and Design. B. Dayton, Outgassing of Materials. J. Garner, Aluminum Based Vacuum Systems. D. Mattox, Preparation and Cleaning of Vacuum Surfaces. Vacuum Applications: High Vacuum Based Processes: S. Rossnagel, Sputtering. V. Patel, Plasma Etching. M. Powers, Ion Beam Based Processes. J. Cheung, Laser Ablation. F. Jansen, CVD and PECVD. J. Thomas, UHV Based Processes. Large-Scale Vacuum Based Processes: W. Robbins, Large Area Coatings. H.F. Dylla, The Development of Ultrahigh Vacuum Technology for Particle Accelerators and Magnetic Fusion Devices. Vacuum technology Handbooks, manuals, etc. Mechanical engineering. http://id.loc.gov/authorities/subjects/sh85082757 Vide (Technologie) Guides, manuels, etc. Génie mécanique. mechanical engineering. aat TECHNOLOGY & ENGINEERING Mechanical. bisacsh Vacuum technology fast
subject_GND	http://id.loc.gov/authorities/subjects/sh85082757 http://id.loc.gov/authorities/genreForms/gf2014026109
title	Handbook of vacuum science and technology /
title_auth	Handbook of vacuum science and technology /
title_exact_search	Handbook of vacuum science and technology /
title_full	Handbook of vacuum science and technology / edited by Dorothy M. Hoffman, Bawa Singh, John H. Thomas, III.
title_fullStr	Handbook of vacuum science and technology / edited by Dorothy M. Hoffman, Bawa Singh, John H. Thomas, III.
title_full_unstemmed	Handbook of vacuum science and technology / edited by Dorothy M. Hoffman, Bawa Singh, John H. Thomas, III.
title_short	Handbook of vacuum science and technology /
title_sort	handbook of vacuum science and technology
topic	Vacuum technology Handbooks, manuals, etc. Mechanical engineering. http://id.loc.gov/authorities/subjects/sh85082757 Vide (Technologie) Guides, manuels, etc. Génie mécanique. mechanical engineering. aat TECHNOLOGY & ENGINEERING Mechanical. bisacsh Vacuum technology fast
topic_facet	Vacuum technology Handbooks, manuals, etc. Mechanical engineering. Vide (Technologie) Guides, manuels, etc. Génie mécanique. mechanical engineering. TECHNOLOGY & ENGINEERING Mechanical. Vacuum technology handbooks. Handbooks and manuals Handbooks and manuals. Guides et manuels.
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