Microelectromechanical systems :: advanced materials and fabrication methods /
Gespeichert in:
| Körperschaften: | , , |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Washington, DC :
National Academy Press,
1997.
|
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Beschreibung: | 1 online resource (xiv, 61 pages :) |
| Bibliographie: | Includes bibliographical references (pages 51-55). |
| ISBN: | 0309059801 9780309059800 0585002509 9780585002507 9786610187096 6610187096 |
Internformat
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| 260 | |a Washington, DC : |b National Academy Press, |c 1997. | ||
| 300 | |a 1 online resource (xiv, 61 pages :) | ||
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| 504 | |a Includes bibliographical references (pages 51-55). | ||
| 588 | 0 | |a Print version record. | |
| 650 | 0 | |a Microelectronics |x Materials. | |
| 650 | 0 | |a Microelectromechanical systems |x Design and construction. | |
| 650 | 6 | |a Microélectronique |x Matériaux. | |
| 650 | 6 | |a Microsystèmes électromécaniques |x Conception et construction. | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING |x Electronics |x Microelectronics. |2 bisacsh | |
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| 653 | |a Andre fag (naturvidenskab og teknik) |a Andre fag | ||
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| author_corporate | National Research Council (U.S.). Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems National Research Council (U.S.). National Materials Advisory Board National Research Council (U.S.). Commission on Engineering and Technical Systems |
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| author_facet | National Research Council (U.S.). Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems National Research Council (U.S.). National Materials Advisory Board National Research Council (U.S.). Commission on Engineering and Technical Systems |
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
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| id | ZDB-4-EBA-ocm53011051 |
| illustrated | Illustrated |
| indexdate | 2024-10-25T16:15:59Z |
| institution | BVB |
| institution_GND | http://id.loc.gov/authorities/names/n98009568 http://id.loc.gov/authorities/names/n79089105 http://id.loc.gov/authorities/names/n83056600 |
| isbn | 0309059801 9780309059800 0585002509 9780585002507 9786610187096 6610187096 |
| language | English |
| oclc_num | 53011051 |
| open_access_boolean | |
| owner | MAIN |
| owner_facet | MAIN |
| physical | 1 online resource (xiv, 61 pages :) |
| psigel | ZDB-4-EBA |
| publishDate | 1997 |
| publishDateSearch | 1997 |
| publishDateSort | 1997 |
| publisher | National Academy Press, |
| record_format | marc |
| spelling | Microelectromechanical systems : advanced materials and fabrication methods / Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council. Washington, DC : National Academy Press, 1997. 1 online resource (xiv, 61 pages :) text txt rdacontent computer c rdamedia online resource cr rdacarrier data file Includes bibliographical references (pages 51-55). Print version record. Microelectronics Materials. Microelectromechanical systems Design and construction. Microélectronique Matériaux. Microsystèmes électromécaniques Conception et construction. TECHNOLOGY & ENGINEERING Electronics Microelectronics. bisacsh TECHNOLOGY & ENGINEERING Electronics Digital. bisacsh Microelectromechanical systems Design and construction fast Microelectronics Materials fast Andre fag (naturvidenskab og teknik) Andre fag National Research Council (U.S.). Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems. http://id.loc.gov/authorities/names/n98009568 National Research Council (U.S.). National Materials Advisory Board. http://id.loc.gov/authorities/names/n79089105 National Research Council (U.S.). Commission on Engineering and Technical Systems. http://id.loc.gov/authorities/names/n83056600 has work: Microelectromechanical Systems: Advanced Materials and Fabrication Methods (Text) https://id.oclc.org/worldcat/entity/E39PCYvMd4RxwcbqCWFGWYhVwd https://id.oclc.org/worldcat/ontology/hasWork Print version: Microelectromechanical systems. Washington, DC : National Academy Press, 1997 0309058856 (DLC) 97080865 (OCoLC)38297267 FWS01 ZDB-4-EBA FWS_PDA_EBA https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=1507 Volltext CBO01 ZDB-4-EBA FWS_PDA_EBA https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=1507 Volltext |
| spellingShingle | Microelectromechanical systems : advanced materials and fabrication methods / Microelectronics Materials. Microelectromechanical systems Design and construction. Microélectronique Matériaux. Microsystèmes électromécaniques Conception et construction. TECHNOLOGY & ENGINEERING Electronics Microelectronics. bisacsh TECHNOLOGY & ENGINEERING Electronics Digital. bisacsh Microelectromechanical systems Design and construction fast Microelectronics Materials fast |
| title | Microelectromechanical systems : advanced materials and fabrication methods / |
| title_auth | Microelectromechanical systems : advanced materials and fabrication methods / |
| title_exact_search | Microelectromechanical systems : advanced materials and fabrication methods / |
| title_full | Microelectromechanical systems : advanced materials and fabrication methods / Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council. |
| title_fullStr | Microelectromechanical systems : advanced materials and fabrication methods / Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council. |
| title_full_unstemmed | Microelectromechanical systems : advanced materials and fabrication methods / Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council. |
| title_short | Microelectromechanical systems : |
| title_sort | microelectromechanical systems advanced materials and fabrication methods |
| title_sub | advanced materials and fabrication methods / |
| topic | Microelectronics Materials. Microelectromechanical systems Design and construction. Microélectronique Matériaux. Microsystèmes électromécaniques Conception et construction. TECHNOLOGY & ENGINEERING Electronics Microelectronics. bisacsh TECHNOLOGY & ENGINEERING Electronics Digital. bisacsh Microelectromechanical systems Design and construction fast Microelectronics Materials fast |
| topic_facet | Microelectronics Materials. Microelectromechanical systems Design and construction. Microélectronique Matériaux. Microsystèmes électromécaniques Conception et construction. TECHNOLOGY & ENGINEERING Electronics Microelectronics. TECHNOLOGY & ENGINEERING Electronics Digital. Microelectromechanical systems Design and construction Microelectronics Materials |
| url | https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=1507 |
| work_keys_str_mv | AT nationalresearchcounciluscommitteeonadvancedmaterialsandfabricationmethodsformicroelectromechanicalsystems microelectromechanicalsystemsadvancedmaterialsandfabricationmethods AT nationalresearchcouncilusnationalmaterialsadvisoryboard microelectromechanicalsystemsadvancedmaterialsandfabricationmethods AT nationalresearchcounciluscommissiononengineeringandtechnicalsystems microelectromechanicalsystemsadvancedmaterialsandfabricationmethods |