Plasma processing of materials :: scientific opportunities and technological challenges /
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Washington, D.C. :
National Academy Press,
1991.
|
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Beschreibung: | 1 online resource (xii, 75 pages) : illustrations |
| Format: | Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. |
| ISBN: | 0585084637 9780585084633 1280203366 9781280203367 9786610203369 6610203369 0309583756 9780309583756 |
Internformat
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| publisher | National Academy Press, |
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| spelling | National Research Council (U.S.). Panel on Plasma Processing of Materials. http://id.loc.gov/authorities/names/n92043473 Plasma processing of materials : scientific opportunities and technological challenges / Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council. Washington, D.C. : National Academy Press, 1991. 1 online resource (xii, 75 pages) : illustrations text txt rdacontent computer c rdamedia online resource cr rdacarrier data file rda Print version record. Use copy Restrictions unspecified star MiAaHDL Electronic reproduction. [S.l.] : HathiTrust Digital Library, 2010. MiAaHDL Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. http://purl.oclc.org/DLF/benchrepro0212 MiAaHDL digitized 2010 HathiTrust Digital Library committed to preserve pda MiAaHDL English. Plasma engineering. http://id.loc.gov/authorities/subjects/sh85103069 Microelectronics Materials Effect of radiation on. Surfaces (Technology) http://id.loc.gov/authorities/subjects/sh85130750 Technique des plasmas. Microélectronique Matériaux Effets du rayonnement sur. Surfaces (Technologie) TECHNOLOGY & ENGINEERING Mechanical. bisacsh Microelectronics Materials Effect of radiation on fast Plasma engineering fast Surfaces (Technology) fast Print version: National Research Council (U.S.). Panel on Plasma Processing of Materials. Plasma processing of materials. Washington, D.C. : National Academy Press, 1991 0309045975 (DLC) 91066812 (OCoLC)24832731 FWS01 ZDB-4-EBA FWS_PDA_EBA https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=14049 Volltext |
| spellingShingle | Plasma processing of materials : scientific opportunities and technological challenges / Plasma engineering. http://id.loc.gov/authorities/subjects/sh85103069 Microelectronics Materials Effect of radiation on. Surfaces (Technology) http://id.loc.gov/authorities/subjects/sh85130750 Technique des plasmas. Microélectronique Matériaux Effets du rayonnement sur. Surfaces (Technologie) TECHNOLOGY & ENGINEERING Mechanical. bisacsh Microelectronics Materials Effect of radiation on fast Plasma engineering fast Surfaces (Technology) fast |
| subject_GND | http://id.loc.gov/authorities/subjects/sh85103069 http://id.loc.gov/authorities/subjects/sh85130750 |
| title | Plasma processing of materials : scientific opportunities and technological challenges / |
| title_auth | Plasma processing of materials : scientific opportunities and technological challenges / |
| title_exact_search | Plasma processing of materials : scientific opportunities and technological challenges / |
| title_full | Plasma processing of materials : scientific opportunities and technological challenges / Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council. |
| title_fullStr | Plasma processing of materials : scientific opportunities and technological challenges / Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council. |
| title_full_unstemmed | Plasma processing of materials : scientific opportunities and technological challenges / Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council. |
| title_short | Plasma processing of materials : |
| title_sort | plasma processing of materials scientific opportunities and technological challenges |
| title_sub | scientific opportunities and technological challenges / |
| topic | Plasma engineering. http://id.loc.gov/authorities/subjects/sh85103069 Microelectronics Materials Effect of radiation on. Surfaces (Technology) http://id.loc.gov/authorities/subjects/sh85130750 Technique des plasmas. Microélectronique Matériaux Effets du rayonnement sur. Surfaces (Technologie) TECHNOLOGY & ENGINEERING Mechanical. bisacsh Microelectronics Materials Effect of radiation on fast Plasma engineering fast Surfaces (Technology) fast |
| topic_facet | Plasma engineering. Microelectronics Materials Effect of radiation on. Surfaces (Technology) Technique des plasmas. Microélectronique Matériaux Effets du rayonnement sur. Surfaces (Technologie) TECHNOLOGY & ENGINEERING Mechanical. Microelectronics Materials Effect of radiation on Plasma engineering |
| url | https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=14049 |
| work_keys_str_mv | AT nationalresearchcounciluspanelonplasmaprocessingofmaterials plasmaprocessingofmaterialsscientificopportunitiesandtechnologicalchallenges |