Metal oxide semiconductors: synthesis, properties, and devices
Gespeichert in:
Hauptverfasser: | , , |
---|---|
Format: | Buch |
Sprache: | English |
Veröffentlicht: |
Weinheim
Wiley-VCH
[2024]
|
Schlagworte: | |
Online-Zugang: | http://www.wiley-vch.de/publish/dt/books/ISBN978-3-527-35225-8/ Inhaltsverzeichnis Inhaltsverzeichnis |
Beschreibung: | x, 277 Seiten Illustrationen, Diagramme 25 cm, 686 g |
ISBN: | 9783527352258 3527352252 |
Internformat
MARC
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264 | 1 | |a Weinheim |b Wiley-VCH |c [2024] | |
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650 | 0 | 7 | |a MOS |0 (DE-588)4130209-6 |2 gnd |9 rswk-swf |
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653 | |a Elektrotechnik u. Elektronik | ||
653 | |a Halbleiterphysik | ||
653 | |a Komponenten u. Bauelemente | ||
653 | |a Materials Science | ||
653 | |a Materialwissenschaften | ||
653 | |a Physics | ||
653 | |a Physik | ||
653 | |a Semiconductor Physics | ||
653 | |a EE60: Komponenten u. Bauelemente | ||
653 | |a MS40: Elektronische Materialien | ||
653 | |a PH62: Halbleiterphysik | ||
653 | |a Metalloxide | ||
653 | |a Halbleiter | ||
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Datensatz im Suchindex
_version_ | 1816865584716972032 |
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adam_text |
CONTENTS
PREFACE
IX
1
METAL
OXIDE
SEMICONDUCTORS:
STATE-OF-THE-ART
AND
NEW
CHALLENGES
1
1.1
1.2
1.2.1
1.2.2
1.2.3
1.2.4
1.2.5
1.3
1.3.1
1.3.2
1.3.3
INTRODUCTION
1
N-TYPE
METAL
OXIDE
SEMICONDUCTORS
1
ZNO
1
SNO
2
3
IN
2
O
3
3
TIO2
4
GA
2
0
3
5
P-TYPE
METAL
OXIDE
SEMICONDUCTORS
5
COPPER
OXIDES
(CUO/CU
2
O)
5
SNO
6
NIOX
7
REFERENCES
8
2
2.1
2.2
2.2.1
2.2.2
2.2.3
2.3
2.3.1
2.3.2
2.3.3
2.3.4
FABRICATION
TECHNIQUES
AND
PRINCIPLES
15
INTRODUCTION
15
VACUUM-BASED
METHODS
15
SPUTTERING
16
ATOMIC
LAYER
DEPOSITION
(ALD)
18
EVAPORATION
21
SOLUTION-BASED
METHODS
23
OD
OXIDE
SEMICONDUCTORS
23
ID
OXIDE
SEMICONDUCTORS
26
2D
OXIDE
SEMICONDUCTORS
29
3D
OXIDE
SEMICONDUCTORS
31
REFERENCES
34
3
3.1
3.2
METAL
OXIDE
SEMICONDUCTORS
FOR
DIODES
39
INTRODUCTION
39
P-N
HETEROJUNCTION
DIODES
39
VI
CONTENTS
3.2.1
3.2.2
3.3
3.3.1
3.3.2
3.3.3
3.3.4
3.4
3.4.1
3.4.2
3.4.3
3.5
REPRESENTATIVE
DEVICES
40
APPLICATIONS
42
SCHOTTKY
DIODES
44
WORKING
MECHANISMS
45
ZNO
SCHOTTKY
DIODES
46
IGZO
SCHOTTKY
DIODES
49
GA
2
O
3
SCHOTTKY
DIODES
51
METAL-INSULATOR-SEMICONDUCTOR
DIODES
52
MIS
SCHOTTKY
DIODES
53
MIS
TUNNELING
DIODES
56
APPLICATIONS
57
SELF-SWITCHING DIODES
59
REFERENCES
60
4
4.1
4.2
4.3
4.3.1
4.3.2
4.3.3
4.3.4
4.3.5
4.4
4.4.1
4.4.2
4.4.3
4.5
4.5.1
4.5.2
METAL
OXIDE
SEMICONDUCTORS
FOR
TRANSISTORS
67
INTRODUCTION
67
DEVICE
STRUCTURES
AND
MECHANISMS
68
N-TYPE
TFTS
72
HISTORY
OVERVIEW
72
COMPOSITION
74
LOW
POWER
CONSUMPTION
76
STABILITY
81
SOLUTION-BASED
TFTS
84
P-TYPE
TFTS
89
COPPER
OXIDES
89
TIN
MONOXIDE
92
NICKEL
OXIDE
96
CIRCUIT
APPLICATIONS
98
OXIDE
NMOS/PMOS
98
OXIDE
CMOS
101
REFERENCES
103
5
5.1
5.2
5.2.1
5.2.2
5.2.3
5.2.4
5.2.5
5.2.6
5.3
5.3.1
5.3.2
5.3.3
5.4
METAL
OXIDE
SEMICONDUCTORS
FOR
SENSORS
115
INTRODUCTION
115
METAL
OXIDE-BASED
GAS
SENSORS
115
MECHANISMS
OF
GAS
SENSORS
116
VOCS
DETECTION
125
ENVIRONMENTAL
POLLUTION
GAS
DETECTION
131
HUMIDITY
DETECTION
139
EXPLOSIVES
DETECTION
141
CHEMICAL
WARFARE
AGENT
DETECTION
146
METAL
OXIDE-BASED
PRESSURE
SENSORS
148
WORKING
MECHANISMS
AND
PERFORMANCE
CHARACTERIZATIONS
148
ZNO-BASED
PRESSURE
SENSORS
151
OTHER
PRESSURE
SENSORS
152
METAL
OXIDE-BASED
PH
SENSORS
153
CONTENTS
VII
5.4.1
5.4.2
5.4.3
5.4.4
WORKING
MECHANISMS
AND
PERFORMANCE
CHARACTERIZATIONS
153
POTENTIOMETRIC
PH
SENSORS
154
ION-SENSITIVE
FIELD-EFFECT
TRANSISTOR
PH
SENSORS
155
CHEMIRESISTIVE/CONDUCTIMETRIC
PH
SENSORS
156
REFERENCES
157
6
6.1
6.2
6.3
6.3.1
6.3.2
6.3.3
6.4
6.4.1
6.4.1.1
6.4.1.2
6.4.1.3
6.4.2
6.4.2.1
6.4.2.2
6.4.2.3
6.4.2.4
METAL
OXIDE
SEMICONDUCTORS
FOR
SOLAR
CELLS
171
INTRODUCTION
171
SOLAR
CELL
PRINCIPLES
172
METAL
OXIDE
SOLAR
CELLS
173
CU
2
0
SOLAR
CELLS
173
CUO
SOLAR
CELLS
179
CO
3
O
4
SOLAR
CELLS
180
METAL
OXIDE
FUNCTIONAL
LAYERS
IN
SOLAR
CELLS
181
METAL
OXIDE
PHOTOELECTRODES
IN
DSSCS
181
TIO
2
ELECTRODES
183
ZNO
ELECTRODES
186
NB
2
0
5
ELECTRODES
189
METAL
OXIDE
CARRIER
TRANSPORT
LAYERS
IN
PEROVSKITE
SOLAR
CELLS
191
TIO
2
ETLS
193
SNO
2
ETLS
194
ZNO
ETLS
195
MOS
HTLS
197
REFERENCES
201
7
METAL
OXIDE
SEMICONDUCTORS
FOR
ULTRAVIOLET
PHOTODETECTORS
211
7.1
7.2
7.2.1
7.2.2
7.2.3
7.2.4
7.2.5
7.2.6
7.3
7.4
7.4.1
7.4.2
7.4.3
7.4.4
7.4.5
7.4.6
7.5
INTRODUCTION
211
DEVICE
STRUCTURES
OF
UV
PHOTODETECTORS
212
PHOTOCONDUCTORS
212
SCHOTTKY
PHOTODIODES
214
MSM
PHOTODETECTORS
214
P-(I)-N
PHOTODIODES
215
AVALANCHE
PHOTODIODES
216
PHOTOTRANSISTORS
216
IMPORTANT
PARAMETERS
OF
UV
PHOTODETECTORS
217
MATERIALS
AND
PERFORMANCE
OF
UV
PHOTODETECTORS
218
ZNO-BASED
UV
PHOTODETECTORS
218
GA
2
O
3
-BASED
UV
PHOTODETECTORS
222
TIO
2
-BASED
UV
PHOTODETECTORS
228
WO
3
-BASED
UV
PHOTODETECTORS
231
SNO
2
-BASED
UV
PHOTODETECTORS
232
OTHER
METAL-OXIDE
UV
PHOTODETECTORS
234
CONCLUSION
AND
OUTLOOKS
237
REFERENCES
238
VIII
CONTENTS
8
8.1
8.2
8.2.1
8.2.2
8.2.3
8.3
8.3.1
8.3.2
8.4
METAL
OXIDE
SEMICONDUCTORS
FOR
MEMORY
APPLICATIONS
245
INTRODUCTION
245
RESISTIVE
RANDOM-ACCESS
MEMORY
245
RESISTIVE
SWITCHING
MECHANISMS
246
PERFORMANCE
CHARACTERIZATION
248
REPRESENTATIVE
DEVICES
249
TRANSISTOR-STRUCTURED
MEMORY
DEVICES
254
WORKING
MECHANISMS
254
REPRESENTATIVE
DEVICES
256
OTHER
MEMORY
DEVICES
262
REFERENCES
267
INDEX
273 |
any_adam_object | 1 |
author | Zang, Zhigang Cai, Wensi Zhou, Yong |
author_GND | (DE-588)1276038135 (DE-588)1321711433 |
author_facet | Zang, Zhigang Cai, Wensi Zhou, Yong |
author_role | aut aut aut |
author_sort | Zang, Zhigang |
author_variant | z z zz w c wc y z yz |
building | Verbundindex |
bvnumber | BV049940681 |
classification_rvk | UP 3100 |
ctrlnum | (DE-599)DNB1298373891 |
dewey-full | 621.38152 |
dewey-hundreds | 600 - Technology (Applied sciences) |
dewey-ones | 621 - Applied physics |
dewey-raw | 621.38152 |
dewey-search | 621.38152 |
dewey-sort | 3621.38152 |
dewey-tens | 620 - Engineering and allied operations |
discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
format | Book |
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id | DE-604.BV049940681 |
illustrated | Illustrated |
indexdate | 2024-11-27T09:00:43Z |
institution | BVB |
institution_GND | (DE-588)16179388-5 |
isbn | 9783527352258 3527352252 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-035278913 |
open_access_boolean | |
owner | DE-703 |
owner_facet | DE-703 |
physical | x, 277 Seiten Illustrationen, Diagramme 25 cm, 686 g |
publishDate | 2024 |
publishDateSearch | 2024 |
publishDateSort | 2024 |
publisher | Wiley-VCH |
record_format | marc |
spelling | Zang, Zhigang Verfasser (DE-588)1276038135 aut Metal oxide semiconductors synthesis, properties, and devices Zhigang Zang, Wensi Cai, Yong Zhou Weinheim Wiley-VCH [2024] x, 277 Seiten Illustrationen, Diagramme 25 cm, 686 g txt rdacontent n rdamedia nc rdacarrier MOS (DE-588)4130209-6 gnd rswk-swf Components & Devices Electrical & Electronics Engineering Electronic Materials Elektronische Materialien Elektrotechnik u. Elektronik Halbleiterphysik Komponenten u. Bauelemente Materials Science Materialwissenschaften Physics Physik Semiconductor Physics EE60: Komponenten u. Bauelemente MS40: Elektronische Materialien PH62: Halbleiterphysik Metalloxide Halbleiter MOS (DE-588)4130209-6 s DE-604 Cai, Wensi Verfasser (DE-588)1321711433 aut Zhou, Yong Verfasser aut Wiley-VCH (DE-588)16179388-5 pbl Erscheint auch als Online-Ausgabe, PDF 978-3-527-84254-4 Erscheint auch als Online-Ausgabe, EPUB 978-3-527-84256-8 Erscheint auch als Online-Ausgabe 978-3-527-84255-1 X:MVB http://www.wiley-vch.de/publish/dt/books/ISBN978-3-527-35225-8/ B:DE-101 application/pdf https://d-nb.info/1298373891/04 Inhaltsverzeichnis DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=035278913&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis 1\p dnb 20240305 DE-101 https://d-nb.info/provenance/plan#dnb 2\p dnb 20240305 DE-101 https://d-nb.info/provenance/plan#dnb |
spellingShingle | Zang, Zhigang Cai, Wensi Zhou, Yong Metal oxide semiconductors synthesis, properties, and devices MOS (DE-588)4130209-6 gnd |
subject_GND | (DE-588)4130209-6 |
title | Metal oxide semiconductors synthesis, properties, and devices |
title_auth | Metal oxide semiconductors synthesis, properties, and devices |
title_exact_search | Metal oxide semiconductors synthesis, properties, and devices |
title_full | Metal oxide semiconductors synthesis, properties, and devices Zhigang Zang, Wensi Cai, Yong Zhou |
title_fullStr | Metal oxide semiconductors synthesis, properties, and devices Zhigang Zang, Wensi Cai, Yong Zhou |
title_full_unstemmed | Metal oxide semiconductors synthesis, properties, and devices Zhigang Zang, Wensi Cai, Yong Zhou |
title_short | Metal oxide semiconductors |
title_sort | metal oxide semiconductors synthesis properties and devices |
title_sub | synthesis, properties, and devices |
topic | MOS (DE-588)4130209-6 gnd |
topic_facet | MOS |
url | http://www.wiley-vch.de/publish/dt/books/ISBN978-3-527-35225-8/ https://d-nb.info/1298373891/04 http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=035278913&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
work_keys_str_mv | AT zangzhigang metaloxidesemiconductorssynthesispropertiesanddevices AT caiwensi metaloxidesemiconductorssynthesispropertiesanddevices AT zhouyong metaloxidesemiconductorssynthesispropertiesanddevices AT wileyvch metaloxidesemiconductorssynthesispropertiesanddevices |
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