Nanofabrication: Principles, Capabilities and Limits
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Cham
Springer International Publishing
2024
Cham Springer |
| Ausgabe: | 3rd ed. 2024 |
| Schlagworte: | |
| Online-Zugang: | DE-B768 DE-634 DE-1043 DE-1046 DE-Aug4 DE-1050 DE-573 DE-M347 DE-92 DE-898 DE-859 DE-860 DE-861 DE-863 DE-862 DE-523 DE-91 DE-706 DE-29 Volltext |
| Beschreibung: | 1 Online-Ressource (XI, 413 p. 302 illus., 81 illus. in color) |
| ISBN: | 9783031625466 |
| DOI: | 10.1007/978-3-031-62546-6 |
Internformat
MARC
| LEADER | 00000nmm a2200000zc 4500 | ||
|---|---|---|---|
| 001 | BV049819011 | ||
| 003 | DE-604 | ||
| 007 | cr|uuu---uuuuu | ||
| 008 | 240813s2024 |||| o||u| ||||||eng d | ||
| 020 | |a 9783031625466 |c Online |9 978-3-031-62546-6 | ||
| 024 | 7 | |a 10.1007/978-3-031-62546-6 |2 doi | |
| 035 | |a (ZDB-2-ENG)9783031625466 | ||
| 035 | |a (OCoLC)1454743794 | ||
| 035 | |a (DE-599)BVBBV049819011 | ||
| 040 | |a DE-604 |b ger |e rda | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-706 |a DE-Aug4 |a DE-860 |a DE-1050 |a DE-898 |a DE-91 |a DE-B768 |a DE-861 |a DE-M347 |a DE-1043 |a DE-523 |a DE-1046 |a DE-863 |a DE-92 |a DE-573 |a DE-634 |a DE-29 |a DE-859 |a DE-862 | ||
| 082 | 0 | |a 621.381 |2 23 | |
| 084 | |a ELT 000 |2 stub | ||
| 084 | |a MAS 000 |2 stub | ||
| 100 | 1 | |a Cui, Zheng |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Nanofabrication |b Principles, Capabilities and Limits |c by Zheng Cui |
| 250 | |a 3rd ed. 2024 | ||
| 264 | 1 | |a Cham |b Springer International Publishing |c 2024 | |
| 264 | 1 | |a Cham |b Springer | |
| 300 | |a 1 Online-Ressource (XI, 413 p. 302 illus., 81 illus. in color) | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 650 | 4 | |a Microsystems and MEMS. | |
| 650 | 4 | |a Nanotechnology | |
| 650 | 4 | |a Electronic Circuits and Systems | |
| 650 | 4 | |a Electronics and Microelectronics, Instrumentation | |
| 650 | 4 | |a Microtechnology | |
| 650 | 4 | |a Microelectromechanical systems | |
| 650 | 4 | |a Nanotechnology | |
| 650 | 4 | |a Electronic circuits | |
| 650 | 4 | |a Electronics | |
| 776 | 0 | 8 | |i Erscheint auch als |n Druck-Ausgabe |z 978-3-031-62545-9 |
| 776 | 0 | 8 | |i Erscheint auch als |n Druck-Ausgabe |z 978-3-031-62547-3 |
| 776 | 0 | 8 | |i Erscheint auch als |n Druck-Ausgabe |z 978-3-031-62548-0 |
| 856 | 4 | 0 | |u https://doi.org/10.1007/978-3-031-62546-6 |x Verlag |z URL des Erstveröffentlichers |3 Volltext |
| 912 | |a ZDB-2-ENG | ||
| 940 | 1 | |q ZDB-2-ENG_2024 | |
| 943 | 1 | |a oai:aleph.bib-bvb.de:BVB01-035159249 | |
| 966 | e | |u https://doi.org/10.1007/978-3-031-62546-6 |l DE-B768 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-031-62546-6 |l DE-634 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-031-62546-6 |l DE-1043 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-031-62546-6 |l DE-1046 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-031-62546-6 |l DE-Aug4 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-031-62546-6 |l DE-1050 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-031-62546-6 |l DE-573 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-031-62546-6 |l DE-M347 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-031-62546-6 |l DE-92 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-031-62546-6 |l DE-898 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-031-62546-6 |l DE-859 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-031-62546-6 |l DE-860 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-031-62546-6 |l DE-861 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-031-62546-6 |l DE-863 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-031-62546-6 |l DE-862 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-031-62546-6 |l DE-523 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-031-62546-6 |l DE-91 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-031-62546-6 |l DE-706 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-031-62546-6 |l DE-29 |p ZDB-2-ENG |x Verlag |3 Volltext | |
Datensatz im Suchindex
| _version_ | 1809773987408904192 |
|---|---|
| adam_text | |
| any_adam_object | |
| author | Cui, Zheng |
| author_facet | Cui, Zheng |
| author_role | aut |
| author_sort | Cui, Zheng |
| author_variant | z c zc |
| building | Verbundindex |
| bvnumber | BV049819011 |
| classification_tum | ELT 000 MAS 000 |
| collection | ZDB-2-ENG |
| ctrlnum | (ZDB-2-ENG)9783031625466 (OCoLC)1454743794 (DE-599)BVBBV049819011 |
| dewey-full | 621.381 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381 |
| dewey-search | 621.381 |
| dewey-sort | 3621.381 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik Maschinenbau |
| doi_str_mv | 10.1007/978-3-031-62546-6 |
| edition | 3rd ed. 2024 |
| format | Electronic eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>00000nmm a2200000zc 4500</leader><controlfield tag="001">BV049819011</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">240813s2024 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783031625466</subfield><subfield code="c">Online</subfield><subfield code="9">978-3-031-62546-6</subfield></datafield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1007/978-3-031-62546-6</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ZDB-2-ENG)9783031625466</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)1454743794</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV049819011</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rda</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-706</subfield><subfield code="a">DE-Aug4</subfield><subfield code="a">DE-860</subfield><subfield code="a">DE-1050</subfield><subfield code="a">DE-898</subfield><subfield code="a">DE-91</subfield><subfield code="a">DE-B768</subfield><subfield code="a">DE-861</subfield><subfield code="a">DE-M347</subfield><subfield code="a">DE-1043</subfield><subfield code="a">DE-523</subfield><subfield code="a">DE-1046</subfield><subfield code="a">DE-863</subfield><subfield code="a">DE-92</subfield><subfield code="a">DE-573</subfield><subfield code="a">DE-634</subfield><subfield code="a">DE-29</subfield><subfield code="a">DE-859</subfield><subfield code="a">DE-862</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.381</subfield><subfield code="2">23</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ELT 000</subfield><subfield code="2">stub</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">MAS 000</subfield><subfield code="2">stub</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Cui, Zheng</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Nanofabrication</subfield><subfield code="b">Principles, Capabilities and Limits</subfield><subfield code="c">by Zheng Cui</subfield></datafield><datafield tag="250" ind1=" " ind2=" "><subfield code="a">3rd ed. 2024</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Cham</subfield><subfield code="b">Springer International Publishing</subfield><subfield code="c">2024</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Cham</subfield><subfield code="b">Springer</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource (XI, 413 p. 302 illus., 81 illus. in color)</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microsystems and MEMS.</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Nanotechnology</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Electronic Circuits and Systems</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Electronics and Microelectronics, Instrumentation</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microtechnology</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microelectromechanical systems</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Nanotechnology</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Electronic circuits</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Electronics</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Druck-Ausgabe</subfield><subfield code="z">978-3-031-62545-9</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Druck-Ausgabe</subfield><subfield code="z">978-3-031-62547-3</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Druck-Ausgabe</subfield><subfield code="z">978-3-031-62548-0</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doi.org/10.1007/978-3-031-62546-6</subfield><subfield code="x">Verlag</subfield><subfield code="z">URL des Erstveröffentlichers</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-2-ENG</subfield></datafield><datafield tag="940" ind1="1" ind2=" "><subfield code="q">ZDB-2-ENG_2024</subfield></datafield><datafield tag="943" ind1="1" ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-035159249</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-031-62546-6</subfield><subfield code="l">DE-B768</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-031-62546-6</subfield><subfield code="l">DE-634</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-031-62546-6</subfield><subfield code="l">DE-1043</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-031-62546-6</subfield><subfield code="l">DE-1046</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-031-62546-6</subfield><subfield code="l">DE-Aug4</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-031-62546-6</subfield><subfield code="l">DE-1050</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-031-62546-6</subfield><subfield code="l">DE-573</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-031-62546-6</subfield><subfield code="l">DE-M347</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-031-62546-6</subfield><subfield code="l">DE-92</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-031-62546-6</subfield><subfield code="l">DE-898</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-031-62546-6</subfield><subfield code="l">DE-859</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-031-62546-6</subfield><subfield code="l">DE-860</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-031-62546-6</subfield><subfield code="l">DE-861</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-031-62546-6</subfield><subfield code="l">DE-863</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-031-62546-6</subfield><subfield code="l">DE-862</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-031-62546-6</subfield><subfield code="l">DE-523</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-031-62546-6</subfield><subfield code="l">DE-91</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-031-62546-6</subfield><subfield code="l">DE-706</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-031-62546-6</subfield><subfield code="l">DE-29</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield></record></collection> |
| id | DE-604.BV049819011 |
| illustrated | Not Illustrated |
| indexdate | 2024-09-10T04:22:50Z |
| institution | BVB |
| isbn | 9783031625466 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-035159249 |
| oclc_num | 1454743794 |
| open_access_boolean | |
| owner | DE-706 DE-Aug4 DE-860 DE-1050 DE-898 DE-BY-UBR DE-91 DE-BY-TUM DE-B768 DE-861 DE-M347 DE-1043 DE-523 DE-1046 DE-863 DE-BY-FWS DE-92 DE-573 DE-634 DE-29 DE-859 DE-862 DE-BY-FWS |
| owner_facet | DE-706 DE-Aug4 DE-860 DE-1050 DE-898 DE-BY-UBR DE-91 DE-BY-TUM DE-B768 DE-861 DE-M347 DE-1043 DE-523 DE-1046 DE-863 DE-BY-FWS DE-92 DE-573 DE-634 DE-29 DE-859 DE-862 DE-BY-FWS |
| physical | 1 Online-Ressource (XI, 413 p. 302 illus., 81 illus. in color) |
| psigel | ZDB-2-ENG ZDB-2-ENG_2024 |
| publishDate | 2024 |
| publishDateSearch | 2024 |
| publishDateSort | 2024 |
| publisher | Springer International Publishing Springer |
| record_format | marc |
| spellingShingle | Cui, Zheng Nanofabrication Principles, Capabilities and Limits Microsystems and MEMS. Nanotechnology Electronic Circuits and Systems Electronics and Microelectronics, Instrumentation Microtechnology Microelectromechanical systems Electronic circuits Electronics |
| title | Nanofabrication Principles, Capabilities and Limits |
| title_auth | Nanofabrication Principles, Capabilities and Limits |
| title_exact_search | Nanofabrication Principles, Capabilities and Limits |
| title_full | Nanofabrication Principles, Capabilities and Limits by Zheng Cui |
| title_fullStr | Nanofabrication Principles, Capabilities and Limits by Zheng Cui |
| title_full_unstemmed | Nanofabrication Principles, Capabilities and Limits by Zheng Cui |
| title_short | Nanofabrication |
| title_sort | nanofabrication principles capabilities and limits |
| title_sub | Principles, Capabilities and Limits |
| topic | Microsystems and MEMS. Nanotechnology Electronic Circuits and Systems Electronics and Microelectronics, Instrumentation Microtechnology Microelectromechanical systems Electronic circuits Electronics |
| topic_facet | Microsystems and MEMS. Nanotechnology Electronic Circuits and Systems Electronics and Microelectronics, Instrumentation Microtechnology Microelectromechanical systems Electronic circuits Electronics |
| url | https://doi.org/10.1007/978-3-031-62546-6 |
| work_keys_str_mv | AT cuizheng nanofabricationprinciplescapabilitiesandlimits |