Indentation testing of silicon micropillars from cryogenic dry etching:
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | English |
| Published: |
München
Verlag Dr. Hut
2024
|
| Edition: | 1. Auflage |
| Series: | Elektrotechnik
|
| Subjects: | |
| Physical Description: | xxii, 174 Seiten Illustrationen, Diagramme 21 cm x 14.8 cm, 268 g |
| ISBN: | 9783843954075 3843954070 |
Staff View
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV049736825 | ||
| 003 | DE-604 | ||
| 007 | t | ||
| 008 | 240611s2024 gw a||| m||| 00||| eng d | ||
| 015 | |a 24,N05 |2 dnb | ||
| 020 | |a 9783843954075 |c : Paperback : EUR 72.00 (DE), EUR 74.10 (AT) |9 978-3-8439-5407-5 | ||
| 020 | |a 3843954070 |9 3-8439-5407-0 | ||
| 024 | 3 | |a 9783843954075 | |
| 035 | |a (OCoLC)1443580554 | ||
| 035 | |a (DE-599)DNB1317424522 | ||
| 040 | |a DE-604 |b ger |e rda | ||
| 041 | 0 | |a eng | |
| 044 | |a gw |c XA-DE-BY | ||
| 049 | |a DE-12 |a DE-91 | ||
| 100 | 1 | |a Puranto, Prabowo |4 aut | |
| 245 | 1 | 0 | |a Indentation testing of silicon micropillars from cryogenic dry etching |c Prabowo Puranto |
| 250 | |a 1. Auflage | ||
| 264 | 1 | |a München |b Verlag Dr. Hut |c 2024 | |
| 300 | |a xxii, 174 Seiten |b Illustrationen, Diagramme |c 21 cm x 14.8 cm, 268 g | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Elektrotechnik | |
| 502 | |b Dissertation |c Technische Universität Carolo-Wilhelmina zu Braunschweig |d 2022 | ||
| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
| 710 | 2 | |a Verlag Dr. Hut (München) |0 (DE-588)10174118-2 |4 pbl | |
| 751 | |a Braunschweig |0 (DE-588)4008065-1 |2 gnd |4 uvp | ||
Record in the Search Index
| _version_ | 1805083904046006272 |
|---|---|
| adam_text | |
| any_adam_object | |
| author | Puranto, Prabowo |
| author_facet | Puranto, Prabowo |
| author_role | aut |
| author_sort | Puranto, Prabowo |
| author_variant | p p pp |
| building | Verbundindex |
| bvnumber | BV049736825 |
| ctrlnum | (OCoLC)1443580554 (DE-599)DNB1317424522 |
| edition | 1. Auflage |
| format | Thesis Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>00000nam a2200000 c 4500</leader><controlfield tag="001">BV049736825</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">240611s2024 gw a||| m||| 00||| eng d</controlfield><datafield tag="015" ind1=" " ind2=" "><subfield code="a">24,N05</subfield><subfield code="2">dnb</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783843954075</subfield><subfield code="c">: Paperback : EUR 72.00 (DE), EUR 74.10 (AT)</subfield><subfield code="9">978-3-8439-5407-5</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">3843954070</subfield><subfield code="9">3-8439-5407-0</subfield></datafield><datafield tag="024" ind1="3" ind2=" "><subfield code="a">9783843954075</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)1443580554</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)DNB1317424522</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rda</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="a">gw</subfield><subfield code="c">XA-DE-BY</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-12</subfield><subfield code="a">DE-91</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Puranto, Prabowo</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Indentation testing of silicon micropillars from cryogenic dry etching</subfield><subfield code="c">Prabowo Puranto</subfield></datafield><datafield tag="250" ind1=" " ind2=" "><subfield code="a">1. Auflage</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">München</subfield><subfield code="b">Verlag Dr. Hut</subfield><subfield code="c">2024</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">xxii, 174 Seiten</subfield><subfield code="b">Illustrationen, Diagramme</subfield><subfield code="c">21 cm x 14.8 cm, 268 g</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Elektrotechnik</subfield></datafield><datafield tag="502" ind1=" " ind2=" "><subfield code="b">Dissertation</subfield><subfield code="c">Technische Universität Carolo-Wilhelmina zu Braunschweig</subfield><subfield code="d">2022</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4113937-9</subfield><subfield code="a">Hochschulschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="710" ind1="2" ind2=" "><subfield code="a">Verlag Dr. Hut (München)</subfield><subfield code="0">(DE-588)10174118-2</subfield><subfield code="4">pbl</subfield></datafield><datafield tag="751" ind1=" " ind2=" "><subfield code="a">Braunschweig</subfield><subfield code="0">(DE-588)4008065-1</subfield><subfield code="2">gnd</subfield><subfield code="4">uvp</subfield></datafield></record></collection> |
| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV049736825 |
| illustrated | Illustrated |
| indexdate | 2024-07-20T07:55:58Z |
| institution | BVB |
| institution_GND | (DE-588)10174118-2 |
| isbn | 9783843954075 3843954070 |
| language | English |
| oclc_num | 1443580554 |
| open_access_boolean | |
| owner | DE-12 DE-91 DE-BY-TUM |
| owner_facet | DE-12 DE-91 DE-BY-TUM |
| physical | xxii, 174 Seiten Illustrationen, Diagramme 21 cm x 14.8 cm, 268 g |
| publishDate | 2024 |
| publishDateSearch | 2024 |
| publishDateSort | 2024 |
| publisher | Verlag Dr. Hut |
| record_format | marc |
| series2 | Elektrotechnik |
| spelling | Puranto, Prabowo aut Indentation testing of silicon micropillars from cryogenic dry etching Prabowo Puranto 1. Auflage München Verlag Dr. Hut 2024 xxii, 174 Seiten Illustrationen, Diagramme 21 cm x 14.8 cm, 268 g txt rdacontent n rdamedia nc rdacarrier Elektrotechnik Dissertation Technische Universität Carolo-Wilhelmina zu Braunschweig 2022 (DE-588)4113937-9 Hochschulschrift gnd-content Verlag Dr. Hut (München) (DE-588)10174118-2 pbl Braunschweig (DE-588)4008065-1 gnd uvp |
| spellingShingle | Puranto, Prabowo Indentation testing of silicon micropillars from cryogenic dry etching |
| subject_GND | (DE-588)4113937-9 |
| title | Indentation testing of silicon micropillars from cryogenic dry etching |
| title_auth | Indentation testing of silicon micropillars from cryogenic dry etching |
| title_exact_search | Indentation testing of silicon micropillars from cryogenic dry etching |
| title_full | Indentation testing of silicon micropillars from cryogenic dry etching Prabowo Puranto |
| title_fullStr | Indentation testing of silicon micropillars from cryogenic dry etching Prabowo Puranto |
| title_full_unstemmed | Indentation testing of silicon micropillars from cryogenic dry etching Prabowo Puranto |
| title_short | Indentation testing of silicon micropillars from cryogenic dry etching |
| title_sort | indentation testing of silicon micropillars from cryogenic dry etching |
| topic_facet | Hochschulschrift |
| work_keys_str_mv | AT purantoprabowo indentationtestingofsiliconmicropillarsfromcryogenicdryetching AT verlagdrhutmunchen indentationtestingofsiliconmicropillarsfromcryogenicdryetching |