Indentation testing of silicon micropillars from cryogenic dry etching:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Abschlussarbeit Buch |
| Sprache: | English |
| Veröffentlicht: |
München
Verlag Dr. Hut
2024
|
| Ausgabe: | 1. Auflage |
| Schriftenreihe: | Elektrotechnik
|
| Schlagworte: | |
| Beschreibung: | xxii, 174 Seiten Illustrationen, Diagramme 21 cm x 14.8 cm, 268 g |
| ISBN: | 9783843954075 3843954070 |
Internformat
MARC
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| 245 | 1 | 0 | |a Indentation testing of silicon micropillars from cryogenic dry etching |c Prabowo Puranto |
| 250 | |a 1. Auflage | ||
| 264 | 1 | |a München |b Verlag Dr. Hut |c 2024 | |
| 300 | |a xxii, 174 Seiten |b Illustrationen, Diagramme |c 21 cm x 14.8 cm, 268 g | ||
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| 490 | 0 | |a Elektrotechnik | |
| 502 | |b Dissertation |c Technische Universität Carolo-Wilhelmina zu Braunschweig |d 2022 | ||
| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
| 710 | 2 | |a Verlag Dr. Hut (München) |0 (DE-588)10174118-2 |4 pbl | |
| 751 | |a Braunschweig |0 (DE-588)4008065-1 |2 gnd |4 uvp | ||
Datensatz im Suchindex
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| author | Puranto, Prabowo |
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| physical | xxii, 174 Seiten Illustrationen, Diagramme 21 cm x 14.8 cm, 268 g |
| publishDate | 2024 |
| publishDateSearch | 2024 |
| publishDateSort | 2024 |
| publisher | Verlag Dr. Hut |
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| series2 | Elektrotechnik |
| spelling | Puranto, Prabowo aut Indentation testing of silicon micropillars from cryogenic dry etching Prabowo Puranto 1. Auflage München Verlag Dr. Hut 2024 xxii, 174 Seiten Illustrationen, Diagramme 21 cm x 14.8 cm, 268 g txt rdacontent n rdamedia nc rdacarrier Elektrotechnik Dissertation Technische Universität Carolo-Wilhelmina zu Braunschweig 2022 (DE-588)4113937-9 Hochschulschrift gnd-content Verlag Dr. Hut (München) (DE-588)10174118-2 pbl Braunschweig (DE-588)4008065-1 gnd uvp |
| spellingShingle | Puranto, Prabowo Indentation testing of silicon micropillars from cryogenic dry etching |
| subject_GND | (DE-588)4113937-9 |
| title | Indentation testing of silicon micropillars from cryogenic dry etching |
| title_auth | Indentation testing of silicon micropillars from cryogenic dry etching |
| title_exact_search | Indentation testing of silicon micropillars from cryogenic dry etching |
| title_full | Indentation testing of silicon micropillars from cryogenic dry etching Prabowo Puranto |
| title_fullStr | Indentation testing of silicon micropillars from cryogenic dry etching Prabowo Puranto |
| title_full_unstemmed | Indentation testing of silicon micropillars from cryogenic dry etching Prabowo Puranto |
| title_short | Indentation testing of silicon micropillars from cryogenic dry etching |
| title_sort | indentation testing of silicon micropillars from cryogenic dry etching |
| topic_facet | Hochschulschrift |
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