Piezoelectric aluminium scandium nitride (AlScN) thin films: material development and applications in microdevices
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Basel
MDPI
[2023]
|
| Schlagworte: | |
| Online-Zugang: | 20.500.12854/101366 Volltext Volltext |
| Beschreibung: | Special issue reprint "Micromachines" |
| Beschreibung: | 1 Online-Ressource (IX, 173 Seiten) Illustrationen |
| ISBN: | 9783036563664 |
| DOI: | 10.3390/books978-3-0365-6366-4 |
Internformat
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| 245 | 1 | 0 | |a Piezoelectric aluminium scandium nitride (AlScN) thin films |b material development and applications in microdevices |c editor Agnė Žukauskaitė |
| 246 | 1 | 3 | |a Piezoelectric aluminium scandium nitride (AlScN) thin films: material development and applications in microdevices |
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| indexdate | 2024-10-19T04:06:35Z |
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| isbn | 9783036563664 |
| language | English |
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| physical | 1 Online-Ressource (IX, 173 Seiten) Illustrationen |
| psigel | ZDB-94-OAB |
| publishDate | 2023 |
| publishDateSearch | 2023 |
| publishDateSort | 2023 |
| publisher | MDPI |
| record_format | marc |
| spellingShingle | Piezoelectric aluminium scandium nitride (AlScN) thin films material development and applications in microdevices Werkstoff (DE-588)4065579-9 gnd Entwicklung (DE-588)4113450-3 gnd Aluminium (DE-588)4001573-7 gnd Anwendung (DE-588)4196864-5 gnd |
| subject_GND | (DE-588)4065579-9 (DE-588)4113450-3 (DE-588)4001573-7 (DE-588)4196864-5 (DE-588)4143413-4 |
| title | Piezoelectric aluminium scandium nitride (AlScN) thin films material development and applications in microdevices |
| title_alt | Piezoelectric aluminium scandium nitride (AlScN) thin films: material development and applications in microdevices |
| title_auth | Piezoelectric aluminium scandium nitride (AlScN) thin films material development and applications in microdevices |
| title_exact_search | Piezoelectric aluminium scandium nitride (AlScN) thin films material development and applications in microdevices |
| title_exact_search_txtP | Piezoelectric aluminium scandium nitride (AlScN) thin films material development and applications in microdevices |
| title_full | Piezoelectric aluminium scandium nitride (AlScN) thin films material development and applications in microdevices editor Agnė Žukauskaitė |
| title_fullStr | Piezoelectric aluminium scandium nitride (AlScN) thin films material development and applications in microdevices editor Agnė Žukauskaitė |
| title_full_unstemmed | Piezoelectric aluminium scandium nitride (AlScN) thin films material development and applications in microdevices editor Agnė Žukauskaitė |
| title_short | Piezoelectric aluminium scandium nitride (AlScN) thin films |
| title_sort | piezoelectric aluminium scandium nitride alscn thin films material development and applications in microdevices |
| title_sub | material development and applications in microdevices |
| topic | Werkstoff (DE-588)4065579-9 gnd Entwicklung (DE-588)4113450-3 gnd Aluminium (DE-588)4001573-7 gnd Anwendung (DE-588)4196864-5 gnd |
| topic_facet | Werkstoff Entwicklung Aluminium Anwendung Aufsatzsammlung |
| url | 20.500.12854/101366 https://doi.org/10.3390/books978-3-0365-6366-4 https://directory.doabooks.org/handle/20.500.12854/101366 |
| work_keys_str_mv | AT zukauskaiteagne piezoelectricaluminiumscandiumnitridealscnthinfilmsmaterialdevelopmentandapplicationsinmicrodevices |