Silicon semiconductor technology: processing and integration of microelectronic devices
Saved in:
| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Wiesbaden
Springer
[2023]
|
| Edition: | 1st ed. 2023 |
| Subjects: | |
| Online Access: | DE-634 DE-1043 DE-1046 DE-858 DE-Aug4 DE-1050 DE-573 DE-M347 DE-92 DE-898 DE-859 DE-860 DE-861 DE-863 DE-862 DE-523 DE-91 DE-706 DE-29 Volltext |
| Physical Description: | 1 Online-Ressource (XI, 264 Seiten) Illustrationen |
| ISBN: | 9783658410414 |
| DOI: | 10.1007/978-3-658-41041-4 |
Staff View
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| author | Hilleringmann, Ulrich |
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| dewey-ones | 621 - Applied physics |
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| dewey-search | 621.381 |
| dewey-sort | 3621.381 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik Maschinenbau |
| discipline_str_mv | Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik Maschinenbau |
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| illustrated | Illustrated |
| index_date | 2024-07-03T22:43:18Z |
| indexdate | 2025-04-05T04:00:23Z |
| institution | BVB |
| isbn | 9783658410414 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-034582432 |
| oclc_num | 1401198202 |
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| owner | DE-1043 DE-860 DE-91 DE-BY-TUM DE-858 DE-1046 DE-Aug4 DE-898 DE-BY-UBR DE-861 DE-523 DE-859 DE-29 DE-863 DE-BY-FWS DE-1050 DE-862 DE-BY-FWS DE-92 DE-573 DE-M347 DE-706 DE-634 DE-83 |
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| physical | 1 Online-Ressource (XI, 264 Seiten) Illustrationen |
| psigel | ZDB-2-ENG ZDB-2-ENG_2023 |
| publishDate | 2023 |
| publishDateSearch | 2023 |
| publishDateSort | 2023 |
| publisher | Springer |
| record_format | marc |
| spellingShingle | Hilleringmann, Ulrich Silicon semiconductor technology processing and integration of microelectronic devices Electronics and Microelectronics, Instrumentation Electronic Circuits and Systems Semiconductors Electronics Electronic circuits Silicium (DE-588)4077445-4 gnd Halbleitertechnologie (DE-588)4158814-9 gnd |
| subject_GND | (DE-588)4077445-4 (DE-588)4158814-9 (DE-588)4123623-3 |
| title | Silicon semiconductor technology processing and integration of microelectronic devices |
| title_auth | Silicon semiconductor technology processing and integration of microelectronic devices |
| title_exact_search | Silicon semiconductor technology processing and integration of microelectronic devices |
| title_exact_search_txtP | Silicon Semiconductor Technology Processing and Integration of Microelectronic Devices |
| title_full | Silicon semiconductor technology processing and integration of microelectronic devices Ulrich Hilleringmann |
| title_fullStr | Silicon semiconductor technology processing and integration of microelectronic devices Ulrich Hilleringmann |
| title_full_unstemmed | Silicon semiconductor technology processing and integration of microelectronic devices Ulrich Hilleringmann |
| title_short | Silicon semiconductor technology |
| title_sort | silicon semiconductor technology processing and integration of microelectronic devices |
| title_sub | processing and integration of microelectronic devices |
| topic | Electronics and Microelectronics, Instrumentation Electronic Circuits and Systems Semiconductors Electronics Electronic circuits Silicium (DE-588)4077445-4 gnd Halbleitertechnologie (DE-588)4158814-9 gnd |
| topic_facet | Electronics and Microelectronics, Instrumentation Electronic Circuits and Systems Semiconductors Electronics Electronic circuits Silicium Halbleitertechnologie Lehrbuch |
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