Silicon semiconductor technology: processing and integration of microelectronic devices
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Wiesbaden
Springer
[2023]
|
| Ausgabe: | 1st ed. 2023 |
| Schlagworte: | |
| Online-Zugang: | DE-634 DE-1043 DE-1046 DE-858 DE-Aug4 DE-1050 DE-573 DE-M347 DE-92 DE-898 DE-859 DE-860 DE-861 DE-863 DE-862 DE-523 DE-91 DE-706 DE-29 Volltext |
| Beschreibung: | 1 Online-Ressource (XI, 264 Seiten) Illustrationen |
| ISBN: | 9783658410414 |
| DOI: | 10.1007/978-3-658-41041-4 |
Internformat
MARC
| LEADER | 00000nam a2200000zc 4500 | ||
|---|---|---|---|
| 001 | BV049321495 | ||
| 003 | DE-604 | ||
| 005 | 20250404 | ||
| 007 | cr|uuu---uuuuu | ||
| 008 | 230911s2023 xx a||| o|||| 00||| eng d | ||
| 020 | |a 9783658410414 |c Online |9 978-3-658-41041-4 | ||
| 024 | 7 | |a 10.1007/978-3-658-41041-4 |2 doi | |
| 035 | |a (ZDB-2-ENG)9783658410414 | ||
| 035 | |a (OCoLC)1401198202 | ||
| 035 | |a (DE-599)BVBBV049321495 | ||
| 040 | |a DE-604 |b ger |e rda | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-1043 |a DE-860 |a DE-91 |a DE-858 |a DE-1046 |a DE-Aug4 |a DE-898 |a DE-861 |a DE-523 |a DE-859 |a DE-29 |a DE-863 |a DE-1050 |a DE-862 |a DE-92 |a DE-573 |a DE-M347 |a DE-706 |a DE-634 |a DE-83 | ||
| 082 | 0 | |a 621.381 |2 23 | |
| 084 | |a ELT 000 |2 stub | ||
| 084 | |a MAS 000 |2 stub | ||
| 100 | 1 | |a Hilleringmann, Ulrich |e Verfasser |0 (DE-588)136888992 |4 aut | |
| 245 | 1 | 0 | |a Silicon semiconductor technology |b processing and integration of microelectronic devices |c Ulrich Hilleringmann |
| 264 | 1 | |a Wiesbaden |b Springer |c [2023] | |
| 300 | |a 1 Online-Ressource (XI, 264 Seiten) |b Illustrationen | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 650 | 4 | |a Electronics and Microelectronics, Instrumentation | |
| 650 | 4 | |a Electronic Circuits and Systems | |
| 650 | 4 | |a Semiconductors | |
| 650 | 4 | |a Electronics | |
| 650 | 4 | |a Electronic circuits | |
| 650 | 4 | |a Semiconductors | |
| 650 | 0 | 7 | |a Silicium |0 (DE-588)4077445-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Halbleitertechnologie |0 (DE-588)4158814-9 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4123623-3 |a Lehrbuch |2 gnd-content | |
| 689 | 0 | 0 | |a Silicium |0 (DE-588)4077445-4 |D s |
| 689 | 0 | 1 | |a Halbleitertechnologie |0 (DE-588)4158814-9 |D s |
| 689 | 0 | |5 DE-604 | |
| 776 | 0 | 8 | |i Erscheint auch als |n Druck-Ausgabe |z 978-3-658-41040-7 |
| 776 | 0 | 8 | |i Erscheint auch als |n Druck-Ausgabe |z 978-3-658-41042-1 |
| 856 | 4 | 0 | |u https://doi.org/10.1007/978-3-658-41041-4 |x Verlag |z URL des Erstveröffentlichers |3 Volltext |
| 912 | |a ZDB-2-ENG | ||
| 940 | 1 | |q ZDB-2-ENG_2023 | |
| 943 | 1 | |a oai:aleph.bib-bvb.de:BVB01-034582432 | |
| 966 | e | |u https://doi.org/10.1007/978-3-658-41041-4 |l DE-634 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-658-41041-4 |l DE-1043 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-658-41041-4 |l DE-1046 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-658-41041-4 |l DE-858 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-658-41041-4 |l DE-Aug4 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-658-41041-4 |l DE-1050 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-658-41041-4 |l DE-573 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-658-41041-4 |l DE-M347 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-658-41041-4 |l DE-92 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-658-41041-4 |l DE-898 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-658-41041-4 |l DE-859 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-658-41041-4 |l DE-860 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-658-41041-4 |l DE-861 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-658-41041-4 |l DE-863 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-658-41041-4 |l DE-862 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-658-41041-4 |l DE-523 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-658-41041-4 |l DE-91 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-658-41041-4 |l DE-706 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-658-41041-4 |l DE-29 |p ZDB-2-ENG |x Verlag |3 Volltext | |
Datensatz im Suchindex
| DE-BY-FWS_katkey | 1052607 |
|---|---|
| _version_ | 1828526146872934400 |
| adam_text | |
| adam_txt | |
| any_adam_object | |
| any_adam_object_boolean | |
| author | Hilleringmann, Ulrich |
| author_GND | (DE-588)136888992 |
| author_facet | Hilleringmann, Ulrich |
| author_role | aut |
| author_sort | Hilleringmann, Ulrich |
| author_variant | u h uh |
| building | Verbundindex |
| bvnumber | BV049321495 |
| classification_tum | ELT 000 MAS 000 |
| collection | ZDB-2-ENG |
| ctrlnum | (ZDB-2-ENG)9783658410414 (OCoLC)1401198202 (DE-599)BVBBV049321495 |
| dewey-full | 621.381 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381 |
| dewey-search | 621.381 |
| dewey-sort | 3621.381 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik Maschinenbau |
| discipline_str_mv | Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik Maschinenbau |
| doi_str_mv | 10.1007/978-3-658-41041-4 |
| edition | 1st ed. 2023 |
| format | Electronic eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>00000nam a2200000zc 4500</leader><controlfield tag="001">BV049321495</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20250404</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">230911s2023 xx a||| o|||| 00||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783658410414</subfield><subfield code="c">Online</subfield><subfield code="9">978-3-658-41041-4</subfield></datafield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1007/978-3-658-41041-4</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ZDB-2-ENG)9783658410414</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)1401198202</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV049321495</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rda</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-1043</subfield><subfield code="a">DE-860</subfield><subfield code="a">DE-91</subfield><subfield code="a">DE-858</subfield><subfield code="a">DE-1046</subfield><subfield code="a">DE-Aug4</subfield><subfield code="a">DE-898</subfield><subfield code="a">DE-861</subfield><subfield code="a">DE-523</subfield><subfield code="a">DE-859</subfield><subfield code="a">DE-29</subfield><subfield code="a">DE-863</subfield><subfield code="a">DE-1050</subfield><subfield code="a">DE-862</subfield><subfield code="a">DE-92</subfield><subfield code="a">DE-573</subfield><subfield code="a">DE-M347</subfield><subfield code="a">DE-706</subfield><subfield code="a">DE-634</subfield><subfield code="a">DE-83</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.381</subfield><subfield code="2">23</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ELT 000</subfield><subfield code="2">stub</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">MAS 000</subfield><subfield code="2">stub</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Hilleringmann, Ulrich</subfield><subfield code="e">Verfasser</subfield><subfield code="0">(DE-588)136888992</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Silicon semiconductor technology</subfield><subfield code="b">processing and integration of microelectronic devices</subfield><subfield code="c">Ulrich Hilleringmann</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Wiesbaden</subfield><subfield code="b">Springer</subfield><subfield code="c">[2023]</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource (XI, 264 Seiten)</subfield><subfield code="b">Illustrationen</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Electronics and Microelectronics, Instrumentation</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Electronic Circuits and Systems</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductors</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Electronics</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Electronic circuits</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductors</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Silicium</subfield><subfield code="0">(DE-588)4077445-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4158814-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4123623-3</subfield><subfield code="a">Lehrbuch</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Silicium</subfield><subfield code="0">(DE-588)4077445-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4158814-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Druck-Ausgabe</subfield><subfield code="z">978-3-658-41040-7</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Druck-Ausgabe</subfield><subfield code="z">978-3-658-41042-1</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doi.org/10.1007/978-3-658-41041-4</subfield><subfield code="x">Verlag</subfield><subfield code="z">URL des Erstveröffentlichers</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-2-ENG</subfield></datafield><datafield tag="940" ind1="1" ind2=" "><subfield code="q">ZDB-2-ENG_2023</subfield></datafield><datafield tag="943" ind1="1" ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-034582432</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-658-41041-4</subfield><subfield code="l">DE-634</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-658-41041-4</subfield><subfield code="l">DE-1043</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-658-41041-4</subfield><subfield code="l">DE-1046</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-658-41041-4</subfield><subfield code="l">DE-858</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-658-41041-4</subfield><subfield code="l">DE-Aug4</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-658-41041-4</subfield><subfield code="l">DE-1050</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-658-41041-4</subfield><subfield code="l">DE-573</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-658-41041-4</subfield><subfield code="l">DE-M347</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-658-41041-4</subfield><subfield code="l">DE-92</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-658-41041-4</subfield><subfield code="l">DE-898</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-658-41041-4</subfield><subfield code="l">DE-859</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-658-41041-4</subfield><subfield code="l">DE-860</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-658-41041-4</subfield><subfield code="l">DE-861</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-658-41041-4</subfield><subfield code="l">DE-863</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-658-41041-4</subfield><subfield code="l">DE-862</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-658-41041-4</subfield><subfield code="l">DE-523</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-658-41041-4</subfield><subfield code="l">DE-91</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-658-41041-4</subfield><subfield code="l">DE-706</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-658-41041-4</subfield><subfield code="l">DE-29</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield></record></collection> |
| genre | (DE-588)4123623-3 Lehrbuch gnd-content |
| genre_facet | Lehrbuch |
| id | DE-604.BV049321495 |
| illustrated | Illustrated |
| index_date | 2024-07-03T22:43:18Z |
| indexdate | 2025-04-05T04:00:23Z |
| institution | BVB |
| isbn | 9783658410414 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-034582432 |
| oclc_num | 1401198202 |
| open_access_boolean | |
| owner | DE-1043 DE-860 DE-91 DE-BY-TUM DE-858 DE-1046 DE-Aug4 DE-898 DE-BY-UBR DE-861 DE-523 DE-859 DE-29 DE-863 DE-BY-FWS DE-1050 DE-862 DE-BY-FWS DE-92 DE-573 DE-M347 DE-706 DE-634 DE-83 |
| owner_facet | DE-1043 DE-860 DE-91 DE-BY-TUM DE-858 DE-1046 DE-Aug4 DE-898 DE-BY-UBR DE-861 DE-523 DE-859 DE-29 DE-863 DE-BY-FWS DE-1050 DE-862 DE-BY-FWS DE-92 DE-573 DE-M347 DE-706 DE-634 DE-83 |
| physical | 1 Online-Ressource (XI, 264 Seiten) Illustrationen |
| psigel | ZDB-2-ENG ZDB-2-ENG_2023 |
| publishDate | 2023 |
| publishDateSearch | 2023 |
| publishDateSort | 2023 |
| publisher | Springer |
| record_format | marc |
| spellingShingle | Hilleringmann, Ulrich Silicon semiconductor technology processing and integration of microelectronic devices Electronics and Microelectronics, Instrumentation Electronic Circuits and Systems Semiconductors Electronics Electronic circuits Silicium (DE-588)4077445-4 gnd Halbleitertechnologie (DE-588)4158814-9 gnd |
| subject_GND | (DE-588)4077445-4 (DE-588)4158814-9 (DE-588)4123623-3 |
| title | Silicon semiconductor technology processing and integration of microelectronic devices |
| title_auth | Silicon semiconductor technology processing and integration of microelectronic devices |
| title_exact_search | Silicon semiconductor technology processing and integration of microelectronic devices |
| title_exact_search_txtP | Silicon Semiconductor Technology Processing and Integration of Microelectronic Devices |
| title_full | Silicon semiconductor technology processing and integration of microelectronic devices Ulrich Hilleringmann |
| title_fullStr | Silicon semiconductor technology processing and integration of microelectronic devices Ulrich Hilleringmann |
| title_full_unstemmed | Silicon semiconductor technology processing and integration of microelectronic devices Ulrich Hilleringmann |
| title_short | Silicon semiconductor technology |
| title_sort | silicon semiconductor technology processing and integration of microelectronic devices |
| title_sub | processing and integration of microelectronic devices |
| topic | Electronics and Microelectronics, Instrumentation Electronic Circuits and Systems Semiconductors Electronics Electronic circuits Silicium (DE-588)4077445-4 gnd Halbleitertechnologie (DE-588)4158814-9 gnd |
| topic_facet | Electronics and Microelectronics, Instrumentation Electronic Circuits and Systems Semiconductors Electronics Electronic circuits Silicium Halbleitertechnologie Lehrbuch |
| url | https://doi.org/10.1007/978-3-658-41041-4 |
| work_keys_str_mv | AT hilleringmannulrich siliconsemiconductortechnologyprocessingandintegrationofmicroelectronicdevices |