APA (7th ed.) Citation

Hilleringmann, U. (2023). Silicon semiconductor technology: Processing and integration of microelectronic devices (1st ed. 2023.). Springer. https://doi.org/10.1007/978-3-658-41041-4

Chicago Style (17th ed.) Citation

Hilleringmann, Ulrich. Silicon Semiconductor Technology: Processing and Integration of Microelectronic Devices. 1st ed. 2023. Wiesbaden: Springer, 2023. https://doi.org/10.1007/978-3-658-41041-4.

MLA (9th ed.) Citation

Hilleringmann, Ulrich. Silicon Semiconductor Technology: Processing and Integration of Microelectronic Devices. 1st ed. 2023. Springer, 2023. https://doi.org/10.1007/978-3-658-41041-4.