Silicon semiconductor technology: processing and integration of microelectronic devices
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Wiesbaden, Germany
Springer Vieweg
[2023]
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| Subjects: | |
| Online Access: | Inhaltstext Auszug |
| Physical Description: | XI, 264 Seiten Illustrationen, Diagramme 24 cm x 16.8 cm |
| ISBN: | 365841040X 9783658410407 |
Staff View
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| 653 | |a Dry Etching | ||
| 653 | |a Ion Implantation | ||
| 653 | |a Local Oxidation of Silicon | ||
| 653 | |a Nano Technology | ||
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| 653 | |a Processing of Silicon | ||
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| isbn | 365841040X 9783658410407 |
| language | English |
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| physical | XI, 264 Seiten Illustrationen, Diagramme 24 cm x 16.8 cm |
| publishDate | 2023 |
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| publisher | Springer Vieweg |
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| spelling | Hilleringmann, Ulrich Verfasser aut Silicon semiconductor technology processing and integration of microelectronic devices Ulrich Hilleringmann Wiesbaden, Germany Springer Vieweg [2023] XI, 264 Seiten Illustrationen, Diagramme 24 cm x 16.8 cm txt rdacontent n rdamedia nc rdacarrier Silicium (DE-588)4077445-4 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf CMOS CMOS Circuit Integration Chemical Vapor Deposition Dry Etching Ion Implantation Local Oxidation of Silicon Nano Technology Oxidation Packaging Processing of Silicon Semiconductor Silicon Silicon on Insulator Technology (DE-588)4123623-3 Lehrbuch gnd-content Silicium (DE-588)4077445-4 s Halbleitertechnologie (DE-588)4158814-9 s DE-604 Springer Fachmedien Wiesbaden (DE-588)1043386068 pbl Erscheint auch als Druck-Ausgabe, Hardcover 978-3-658-41042-1 Erscheint auch als Online-Ausgabe 978-3-658-41041-4 X:MVB text/html http://deposit.dnb.de/cgi-bin/dokserv?id=9022ecacb6824ac4b43c2830c328046f&prov=M&dok_var=1&dok_ext=htm Inhaltstext X:MVB https://link.springer.com/978-3-658-41040-7 Auszug 1\p vlb 20230223 DE-101 https://d-nb.info/provenance/plan#vlb |
| spellingShingle | Hilleringmann, Ulrich Silicon semiconductor technology processing and integration of microelectronic devices Silicium (DE-588)4077445-4 gnd Halbleitertechnologie (DE-588)4158814-9 gnd |
| subject_GND | (DE-588)4077445-4 (DE-588)4158814-9 (DE-588)4123623-3 |
| title | Silicon semiconductor technology processing and integration of microelectronic devices |
| title_auth | Silicon semiconductor technology processing and integration of microelectronic devices |
| title_exact_search | Silicon semiconductor technology processing and integration of microelectronic devices |
| title_exact_search_txtP | Silicon semiconductor technology processing and integration of microelectronic devices |
| title_full | Silicon semiconductor technology processing and integration of microelectronic devices Ulrich Hilleringmann |
| title_fullStr | Silicon semiconductor technology processing and integration of microelectronic devices Ulrich Hilleringmann |
| title_full_unstemmed | Silicon semiconductor technology processing and integration of microelectronic devices Ulrich Hilleringmann |
| title_short | Silicon semiconductor technology |
| title_sort | silicon semiconductor technology processing and integration of microelectronic devices |
| title_sub | processing and integration of microelectronic devices |
| topic | Silicium (DE-588)4077445-4 gnd Halbleitertechnologie (DE-588)4158814-9 gnd |
| topic_facet | Silicium Halbleitertechnologie Lehrbuch |
| url | http://deposit.dnb.de/cgi-bin/dokserv?id=9022ecacb6824ac4b43c2830c328046f&prov=M&dok_var=1&dok_ext=htm https://link.springer.com/978-3-658-41040-7 |
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