Fabrication of Micro/Nano Structures via Precision Machining: Modelling, Processing and Evaluation
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Bibliographic Details
Other Authors: Zhang, Guoqing (Editor), Xu, Bin (Editor), Lu, Yanjun (Editor), To, Suet (Editor)
Format: Electronic eBook
Language:English
Published: Singapore Springer Nature Singapore 2023
Singapore Springer
Edition:1st ed. 2023
Subjects:
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Physical Description:1 Online-Ressource (XII, 398 p. 276 illus., 221 illus. in color)
ISBN:9789819913381
DOI:10.1007/978-981-99-1338-1