Ultra clean processing of semiconductor surfaces XV: selected, peer-reviewed papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), April 12-15, 2021, Mechelen, Belgium
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| Weitere Verfasser: | , , , |
| Format: | Elektronisch Tagungsbericht E-Book |
| Sprache: | English |
| Veröffentlicht: |
Baech, Switzerland
Trans Tech Publications Ltd.
[2021]
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| Schriftenreihe: | Solid state phenomena
Volume 314 |
| Schlagworte: | |
| Online-Zugang: | TUM01 |
| Beschreibung: | 1 Online-Ressource Illustrationen |
| ISBN: | 9781523145348 |
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| isbn | 9781523145348 |
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| spelling | International Symposium on Ultra Clean Processing of Semiconductor Surfaces 15. 2021 Mecheln Verfasser (DE-588)1234108836 aut Ultra clean processing of semiconductor surfaces XV selected, peer-reviewed papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), April 12-15, 2021, Mechelen, Belgium Edited by Paul W. Mertens, Kurt Wostyn, Marc Meuris and Marc Heyns UCPSS Baech, Switzerland Trans Tech Publications Ltd. [2021] 1 Online-Ressource Illustrationen txt rdacontent c rdamedia cr rdacarrier Solid state phenomena Volume 314 (DE-588)1071861417 Konferenzschrift gnd-content Mertens, Paul W. edt Wostyn, Kurt edt Meuris, Marc edt Heyns, Marc edt Erscheint auch als Druck-Ausgabe 978-3-0357-1801-0 Solid state phenomena Volume 314 (DE-604)BV013789715 314 |
| spellingShingle | Ultra clean processing of semiconductor surfaces XV selected, peer-reviewed papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), April 12-15, 2021, Mechelen, Belgium Solid state phenomena |
| subject_GND | (DE-588)1071861417 |
| title | Ultra clean processing of semiconductor surfaces XV selected, peer-reviewed papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), April 12-15, 2021, Mechelen, Belgium |
| title_alt | UCPSS |
| title_auth | Ultra clean processing of semiconductor surfaces XV selected, peer-reviewed papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), April 12-15, 2021, Mechelen, Belgium |
| title_exact_search | Ultra clean processing of semiconductor surfaces XV selected, peer-reviewed papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), April 12-15, 2021, Mechelen, Belgium |
| title_exact_search_txtP | Ultra clean processing of semiconductor surfaces XV selected, peer-reviewed papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), April 12-15, 2021, Mechelen, Belgium |
| title_full | Ultra clean processing of semiconductor surfaces XV selected, peer-reviewed papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), April 12-15, 2021, Mechelen, Belgium Edited by Paul W. Mertens, Kurt Wostyn, Marc Meuris and Marc Heyns |
| title_fullStr | Ultra clean processing of semiconductor surfaces XV selected, peer-reviewed papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), April 12-15, 2021, Mechelen, Belgium Edited by Paul W. Mertens, Kurt Wostyn, Marc Meuris and Marc Heyns |
| title_full_unstemmed | Ultra clean processing of semiconductor surfaces XV selected, peer-reviewed papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), April 12-15, 2021, Mechelen, Belgium Edited by Paul W. Mertens, Kurt Wostyn, Marc Meuris and Marc Heyns |
| title_short | Ultra clean processing of semiconductor surfaces XV |
| title_sort | ultra clean processing of semiconductor surfaces xv selected peer reviewed papers from the 15th international symposium on ultra clean processing of semiconductor surfaces ucpss april 12 15 2021 mechelen belgium |
| title_sub | selected, peer-reviewed papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), April 12-15, 2021, Mechelen, Belgium |
| topic_facet | Konferenzschrift |
| volume_link | (DE-604)BV013789715 |
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