Analysis and design principles of MEMS devices:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Amsterdam
Elsevier
2005
|
| Schlagworte: | |
| Beschreibung: | Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field. * Presents the analysis and design principles of MEMS devices more systematically than ever before. * Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures * A problem section is included at the end of each chapter with answers provided at the end of the book Chapter 1. Introduction to MEMS devices -- -- Chapter 2. Basic mechanics of beam and diaphragm structures -- -- Chapter 3. Air Damping -- -- Chapter 4. Electrostatic Actuation -- -- Chapter 5. Capacitive Sensing and Effects of Electrical Excitation -- -- Chapter 6. Piezoresistive Sensing Includes bibliographical references and index |
| Beschreibung: | xii, 312 Seiten |
| ISBN: | 9780444516169 |
Internformat
MARC
| LEADER | 00000nam a2200000zc 4500 | ||
|---|---|---|---|
| 001 | BV048503032 | ||
| 003 | DE-604 | ||
| 005 | 20221117 | ||
| 007 | t | ||
| 008 | 221010s2005 |||| 00||| eng d | ||
| 020 | |a 9780444516169 |9 978-0-444-51616-9 | ||
| 035 | |a (OCoLC)254583926 | ||
| 035 | |a (DE-599)BVBBV048503032 | ||
| 040 | |a DE-604 |b ger |e aacr | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-91 | ||
| 082 | 0 | |a 621.381 |2 22 | |
| 084 | |a ELT 710 |2 stub | ||
| 100 | 1 | |a Bao, Min-Hang |e Verfasser |0 (DE-588)1089372612 |4 aut | |
| 245 | 1 | 0 | |a Analysis and design principles of MEMS devices |c by Minhang Bao, Department of Electronic Engineering, fudan University, Shanghai, China |
| 264 | 1 | |a Amsterdam |b Elsevier |c 2005 | |
| 300 | |a xii, 312 Seiten | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 500 | |a Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field. * Presents the analysis and design principles of MEMS devices more systematically than ever before. * Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures * A problem section is included at the end of each chapter with answers provided at the end of the book | ||
| 500 | |a Chapter 1. Introduction to MEMS devices -- -- Chapter 2. Basic mechanics of beam and diaphragm structures -- -- Chapter 3. Air Damping -- -- Chapter 4. Electrostatic Actuation -- -- Chapter 5. Capacitive Sensing and Effects of Electrical Excitation -- -- Chapter 6. Piezoresistive Sensing | ||
| 500 | |a Includes bibliographical references and index | ||
| 650 | 7 | |a TECHNOLOGY & ENGINEERING / Electronics / Microelectronics |2 bisacsh | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING / Electronics / Digital |2 bisacsh | |
| 650 | 7 | |a Microelectromechanical systems |2 fast | |
| 650 | 4 | |a Microelectromechanical systems | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-033880270 | ||
Datensatz im Suchindex
| _version_ | 1804184473456082944 |
|---|---|
| adam_txt | |
| any_adam_object | |
| any_adam_object_boolean | |
| author | Bao, Min-Hang |
| author_GND | (DE-588)1089372612 |
| author_facet | Bao, Min-Hang |
| author_role | aut |
| author_sort | Bao, Min-Hang |
| author_variant | m h b mhb |
| building | Verbundindex |
| bvnumber | BV048503032 |
| classification_tum | ELT 710 |
| ctrlnum | (OCoLC)254583926 (DE-599)BVBBV048503032 |
| dewey-full | 621.381 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381 |
| dewey-search | 621.381 |
| dewey-sort | 3621.381 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| discipline_str_mv | Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02813nam a2200361zc 4500</leader><controlfield tag="001">BV048503032</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20221117 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">221010s2005 |||| 00||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780444516169</subfield><subfield code="9">978-0-444-51616-9</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)254583926</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV048503032</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-91</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.381</subfield><subfield code="2">22</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ELT 710</subfield><subfield code="2">stub</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Bao, Min-Hang</subfield><subfield code="e">Verfasser</subfield><subfield code="0">(DE-588)1089372612</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Analysis and design principles of MEMS devices</subfield><subfield code="c">by Minhang Bao, Department of Electronic Engineering, fudan University, Shanghai, China</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Amsterdam</subfield><subfield code="b">Elsevier</subfield><subfield code="c">2005</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">xii, 312 Seiten</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field. * Presents the analysis and design principles of MEMS devices more systematically than ever before. * Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures * A problem section is included at the end of each chapter with answers provided at the end of the book</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Chapter 1. Introduction to MEMS devices -- -- Chapter 2. Basic mechanics of beam and diaphragm structures -- -- Chapter 3. Air Damping -- -- Chapter 4. Electrostatic Actuation -- -- Chapter 5. Capacitive Sensing and Effects of Electrical Excitation -- -- Chapter 6. Piezoresistive Sensing</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references and index</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">TECHNOLOGY & ENGINEERING / Electronics / Microelectronics</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">TECHNOLOGY & ENGINEERING / Electronics / Digital</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Microelectromechanical systems</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microelectromechanical systems</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-033880270</subfield></datafield></record></collection> |
| id | DE-604.BV048503032 |
| illustrated | Not Illustrated |
| index_date | 2024-07-03T20:45:10Z |
| indexdate | 2024-07-10T09:39:54Z |
| institution | BVB |
| isbn | 9780444516169 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-033880270 |
| oclc_num | 254583926 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM |
| owner_facet | DE-91 DE-BY-TUM |
| physical | xii, 312 Seiten |
| publishDate | 2005 |
| publishDateSearch | 2005 |
| publishDateSort | 2005 |
| publisher | Elsevier |
| record_format | marc |
| spelling | Bao, Min-Hang Verfasser (DE-588)1089372612 aut Analysis and design principles of MEMS devices by Minhang Bao, Department of Electronic Engineering, fudan University, Shanghai, China Amsterdam Elsevier 2005 xii, 312 Seiten txt rdacontent n rdamedia nc rdacarrier Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field. * Presents the analysis and design principles of MEMS devices more systematically than ever before. * Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures * A problem section is included at the end of each chapter with answers provided at the end of the book Chapter 1. Introduction to MEMS devices -- -- Chapter 2. Basic mechanics of beam and diaphragm structures -- -- Chapter 3. Air Damping -- -- Chapter 4. Electrostatic Actuation -- -- Chapter 5. Capacitive Sensing and Effects of Electrical Excitation -- -- Chapter 6. Piezoresistive Sensing Includes bibliographical references and index TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh Microelectromechanical systems fast Microelectromechanical systems |
| spellingShingle | Bao, Min-Hang Analysis and design principles of MEMS devices TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh Microelectromechanical systems fast Microelectromechanical systems |
| title | Analysis and design principles of MEMS devices |
| title_auth | Analysis and design principles of MEMS devices |
| title_exact_search | Analysis and design principles of MEMS devices |
| title_exact_search_txtP | Analysis and design principles of MEMS devices |
| title_full | Analysis and design principles of MEMS devices by Minhang Bao, Department of Electronic Engineering, fudan University, Shanghai, China |
| title_fullStr | Analysis and design principles of MEMS devices by Minhang Bao, Department of Electronic Engineering, fudan University, Shanghai, China |
| title_full_unstemmed | Analysis and design principles of MEMS devices by Minhang Bao, Department of Electronic Engineering, fudan University, Shanghai, China |
| title_short | Analysis and design principles of MEMS devices |
| title_sort | analysis and design principles of mems devices |
| topic | TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh Microelectromechanical systems fast Microelectromechanical systems |
| topic_facet | TECHNOLOGY & ENGINEERING / Electronics / Microelectronics TECHNOLOGY & ENGINEERING / Electronics / Digital Microelectromechanical systems |
| work_keys_str_mv | AT baominhang analysisanddesignprinciplesofmemsdevices |