Holdings: Chemistry of atomic layer deposition

Chemistry of atomic layer deposition:

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Bibliographic Details
Main Author:	Barry, Seán Thomas (Author)
Format:	Book
Language:	English
Published:	Berlin De Gruyter [2022]
Series:	De Gruyter graduate
Subjects:	Atomlagenabscheidung Atomic Layer Deposition Beschichtungen Materials Fabrication. Materialwissenschaften Oberflächen TB: Textbook Thin Film Deposition Wekstoffwissenschaften
Online Access:	Kurzbeschreibung Inhaltsverzeichnis
Physical Description:	X, 105 Seiten Illustrationen, Diagramme
ISBN:	3110712512 9783110712513

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MARC


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Record in the Search Index

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adam_text	CONTENTS FOREWORD ---- VII CHAPTER 1 INTRODUCTION - 1 1.1 ATOMIC LAYER DEPOSITION - 1 1.2 PRECURSOR ---- 2 1.3 ADSORPTION - 2 1.4 SURFACE VS. SUBSTRATE ---- 2 1.5 MONOLAYER ---- 3 1.6 SELF-LIMITING ---- 3 1.7 LAYER-BY-LAYER GROWTH ---- 3 1.8 ATOMIC LAYER DEPOSITION HISTORY - 5 1.9 TRIMETHYL ALUMINUM AND WATER ----- 8 1.10 HELPFUL RESOURCES ---- 11 CHAPTER 2 SATURATION ---- 13 2.1 THE SATURATION CURVE ---- 18 2.2 SELECTIVITY AND SATURATION ----- 23 2.3 STERIC BULK AND SATURATION ----- 23 2.4 SELECTIVITY ---- 24 CHAPTER 3 LIGANDS ---- 27 3.1 LIGAND BONDING ---- 27 CHAPTER 4 PRECURSORS ---- 37 4.1 ATMOSPHERIC SENSITIVITY - 38 4.2 HALIDE PRECURSORS ---- 40 4.3 ALKYL PRECURSORS ---- 41 4.4 GENERAL SYNTHETIC REACTIONS ----- 41 4.5 DESIGNING PRECURSORS ---- 43 4.6 VOLATILITY ---- 43 4.7 THERMAL STABILITY ----- 45 4.8 REACTIVITY ---- 50 X - CONTENTS ALUMINA DEPOSITION ---- 73 TITANIUM NITRIDE DEPOSITION ---- 77 COPPER METAL DEPOSITION ---- 79 GOLD METAL DEPOSITION ---- 81 TIN OXIDE DEPOSITION ---- 82 PROTONATED SURFACE NUCLEATION SITES ---- 66 METAL SURFACE NUCLEATION SITES - 68 HYDRIDE SURFACES ---- 69 SURFACE BLOCKING GROUPS AND SELECTIVE AREA DEPOSITION ---- 70 DEFINITIONS OF THERMAL ONSET TEMPERATURES ---- 53 THERMOGRAVIMETRY ---- 54 DIFFERENTIAL SCANNING CALORIMETRY ---- 58 THERMAL RANGE AND FIGURE OF MERIT ---- 60 DECOMPOSITION TESTING ---- 61 VOLATILITY CONTROL ---- 63 IMPURITY CONTROL ---- 64 CHAPTER 9 ALE PROCESSES ---- 95 9.1 ETCHING OXIDES -----96 9.2 ETCHING METALS ---- 98 CHAPTER 6 NUCLEATION ---- 65 6.1 6.2 6.3 6.4 8.1 8.1.1 8.2 8.3 8.4 8.5 CHAPTER 5 THERMOLYSIS ---- 53 5.1 5.2 5.3 5.4 5.5 5.6 5.7 CHAPTER 7 ALD PROCESSES ---- 73 7.1 7.2 7.3 7.4 7.5 CHAPTER 8 MLD PROCESSES ---- 85 ALUCONE DEPOSITION ---- 85 BIFUNCTIONAL MONOMERS ---- 86 TETRACYANOETHYLENE DEPOSITION ---- 88 ALQ 3 DEPOSITION ---- 89 KEVLAR DEPOSITION ---- 90 PEDOT DEPOSITION --- 92 INDEX - 103
adam_txt	CONTENTS FOREWORD ---- VII CHAPTER 1 INTRODUCTION - 1 1.1 ATOMIC LAYER DEPOSITION - 1 1.2 PRECURSOR ---- 2 1.3 ADSORPTION - 2 1.4 SURFACE VS. SUBSTRATE ---- 2 1.5 MONOLAYER ---- 3 1.6 SELF-LIMITING ---- 3 1.7 LAYER-BY-LAYER GROWTH ---- 3 1.8 ATOMIC LAYER DEPOSITION HISTORY - 5 1.9 TRIMETHYL ALUMINUM AND WATER ----- 8 1.10 HELPFUL RESOURCES ---- 11 CHAPTER 2 SATURATION ---- 13 2.1 THE SATURATION CURVE ---- 18 2.2 SELECTIVITY AND SATURATION ----- 23 2.3 STERIC BULK AND SATURATION ----- 23 2.4 SELECTIVITY ---- 24 CHAPTER 3 LIGANDS ---- 27 3.1 LIGAND BONDING ---- 27 CHAPTER 4 PRECURSORS ---- 37 4.1 ATMOSPHERIC SENSITIVITY - 38 4.2 HALIDE PRECURSORS ---- 40 4.3 ALKYL PRECURSORS ---- 41 4.4 GENERAL SYNTHETIC REACTIONS ----- 41 4.5 DESIGNING PRECURSORS ---- 43 4.6 VOLATILITY ---- 43 4.7 THERMAL STABILITY ----- 45 4.8 REACTIVITY ---- 50 X - CONTENTS ALUMINA DEPOSITION ---- 73 TITANIUM NITRIDE DEPOSITION ---- 77 COPPER METAL DEPOSITION ---- 79 GOLD METAL DEPOSITION ---- 81 TIN OXIDE DEPOSITION ---- 82 PROTONATED SURFACE NUCLEATION SITES ---- 66 METAL SURFACE NUCLEATION SITES - 68 HYDRIDE SURFACES ---- 69 SURFACE BLOCKING GROUPS AND SELECTIVE AREA DEPOSITION ---- 70 DEFINITIONS OF THERMAL ONSET TEMPERATURES ---- 53 THERMOGRAVIMETRY ---- 54 DIFFERENTIAL SCANNING CALORIMETRY ---- 58 THERMAL RANGE AND FIGURE OF MERIT ---- 60 DECOMPOSITION TESTING ---- 61 VOLATILITY CONTROL ---- 63 IMPURITY CONTROL ---- 64 CHAPTER 9 ALE PROCESSES ---- 95 9.1 ETCHING OXIDES -----96 9.2 ETCHING METALS ---- 98 CHAPTER 6 NUCLEATION ---- 65 6.1 6.2 6.3 6.4 8.1 8.1.1 8.2 8.3 8.4 8.5 CHAPTER 5 THERMOLYSIS ---- 53 5.1 5.2 5.3 5.4 5.5 5.6 5.7 CHAPTER 7 ALD PROCESSES ---- 73 7.1 7.2 7.3 7.4 7.5 CHAPTER 8 MLD PROCESSES ---- 85 ALUCONE DEPOSITION ---- 85 BIFUNCTIONAL MONOMERS ---- 86 TETRACYANOETHYLENE DEPOSITION ---- 88 ALQ 3 DEPOSITION ---- 89 KEVLAR DEPOSITION ---- 90 PEDOT DEPOSITION --- 92 INDEX - 103
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discipline_str_mv	Chemie / Pharmazie Physik Werkstoffwissenschaften / Fertigungstechnik
format	Book
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spelling	Barry, Seán Thomas Verfasser (DE-588)1252624247 aut Chemistry of atomic layer deposition Seán Thomas Barry Berlin De Gruyter [2022] © 2022 X, 105 Seiten Illustrationen, Diagramme txt rdacontent n rdamedia nc rdacarrier De Gruyter graduate Atomlagenabscheidung (DE-588)7712127-2 gnd rswk-swf Atomic Layer Deposition Beschichtungen Materials Fabrication. Materialwissenschaften Oberflächen TB: Textbook Thin Film Deposition Wekstoffwissenschaften Atomlagenabscheidung (DE-588)7712127-2 s DE-604 Walter de Gruyter GmbH & Co. KG (DE-588)10095502-2 pbl Erscheint auch als Online-Ausgabe, PDF 978-3-11-071253-7 Erscheint auch als Online-Ausgabe, EPUB 978-3-11-071259-9 X:MVB https://www.degruyter.com/isbn/9783110712513 Kurzbeschreibung DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=032936080&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis 1\p vlb 20210727 DE-101 https://d-nb.info/provenance/plan#vlb
spellingShingle	Barry, Seán Thomas Chemistry of atomic layer deposition Atomlagenabscheidung (DE-588)7712127-2 gnd
subject_GND	(DE-588)7712127-2
title	Chemistry of atomic layer deposition
title_auth	Chemistry of atomic layer deposition
title_exact_search	Chemistry of atomic layer deposition
title_exact_search_txtP	Chemistry of atomic layer deposition
title_full	Chemistry of atomic layer deposition Seán Thomas Barry
title_fullStr	Chemistry of atomic layer deposition Seán Thomas Barry
title_full_unstemmed	Chemistry of atomic layer deposition Seán Thomas Barry
title_short	Chemistry of atomic layer deposition
title_sort	chemistry of atomic layer deposition
topic	Atomlagenabscheidung (DE-588)7712127-2 gnd
topic_facet	Atomlagenabscheidung
url	https://www.degruyter.com/isbn/9783110712513 http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=032936080&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA
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