Verfügbarkeit: Chemistry of atomic layer deposition

Chemistry of atomic layer deposition:

Gespeichert in:

Bibliographische Detailangaben
1. Verfasser:	Barry, Seán Thomas (VerfasserIn)
Format:	Buch
Sprache:	English
Veröffentlicht:	Berlin De Gruyter [2022]
Schriftenreihe:	De Gruyter graduate
Schlagworte:	Atomlagenabscheidung Atomic Layer Deposition Beschichtungen Materials Fabrication. Materialwissenschaften Oberflächen TB: Textbook Thin Film Deposition Wekstoffwissenschaften
Online-Zugang:	Kurzbeschreibung Inhaltsverzeichnis
Beschreibung:	X, 105 Seiten Illustrationen, Diagramme
ISBN:	3110712512 9783110712513

Internformat

MARC


LEADER	00000nam a2200000 c 4500
001	BV047560637
003	DE-604
005	20220607
007	t
008	211026s2022 gw a\|\|\| \|\|\|\| 00\|\|\| eng d
015			\|a 21,N31 \|2 dnb
016	7		\|a 1237722985 \|2 DE-101
020			\|a 3110712512 \|9 3-11-071251-2
020			\|a 9783110712513 \|c pbk. \|9 978-3-11-071251-3
035			\|a (OCoLC)1286868364
035			\|a (DE-599)DNB1237722985
040			\|a DE-604 \|b ger \|e rda
041	0		\|a eng
044			\|a gw \|c XA-DE-BE
049			\|a DE-29T \|a DE-11 \|a DE-83
084			\|a UP 7550 \|0 (DE-625)146434: \|2 rvk
084			\|a ZM 7685 \|0 (DE-625)160563: \|2 rvk
084			\|a VE 7000 \|0 (DE-625)147134:253 \|2 rvk
084			\|8 1\p \|a 660 \|2 23sdnb
100	1		\|a Barry, Seán Thomas \|e Verfasser \|0 (DE-588)1252624247 \|4 aut
245	1	0	\|a Chemistry of atomic layer deposition \|c Seán Thomas Barry
264		1	\|a Berlin \|b De Gruyter \|c [2022]
264		4	\|c © 2022
300			\|a X, 105 Seiten \|b Illustrationen, Diagramme
336			\|b txt \|2 rdacontent
337			\|b n \|2 rdamedia
338			\|b nc \|2 rdacarrier
490	0		\|a De Gruyter graduate
650	0	7	\|a Atomlagenabscheidung \|0 (DE-588)7712127-2 \|2 gnd \|9 rswk-swf
653			\|a Atomic Layer Deposition
653			\|a Beschichtungen
653			\|a Materials Fabrication.
653			\|a Materialwissenschaften
653			\|a Oberflächen
653			\|a TB: Textbook
653			\|a Thin Film Deposition
653			\|a Wekstoffwissenschaften
689	0	0	\|a Atomlagenabscheidung \|0 (DE-588)7712127-2 \|D s
689	0		\|5 DE-604
710	2		\|a Walter de Gruyter GmbH & Co. KG \|0 (DE-588)10095502-2 \|4 pbl
776	0	8	\|i Erscheint auch als \|n Online-Ausgabe, PDF \|z 978-3-11-071253-7
776	0	8	\|i Erscheint auch als \|n Online-Ausgabe, EPUB \|z 978-3-11-071259-9
856	4	2	\|m X:MVB \|u https://www.degruyter.com/isbn/9783110712513 \|3 Kurzbeschreibung
856	4	2	\|m DNB Datenaustausch \|q application/pdf \|u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=032936080&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA \|3 Inhaltsverzeichnis
999			\|a oai:aleph.bib-bvb.de:BVB01-032936080
883	1		\|8 1\p \|a vlb \|d 20210727 \|q DE-101 \|u https://d-nb.info/provenance/plan#vlb

Datensatz im Suchindex

_version_	1804182887380025344
adam_text	CONTENTS FOREWORD ---- VII CHAPTER 1 INTRODUCTION - 1 1.1 ATOMIC LAYER DEPOSITION - 1 1.2 PRECURSOR ---- 2 1.3 ADSORPTION - 2 1.4 SURFACE VS. SUBSTRATE ---- 2 1.5 MONOLAYER ---- 3 1.6 SELF-LIMITING ---- 3 1.7 LAYER-BY-LAYER GROWTH ---- 3 1.8 ATOMIC LAYER DEPOSITION HISTORY - 5 1.9 TRIMETHYL ALUMINUM AND WATER ----- 8 1.10 HELPFUL RESOURCES ---- 11 CHAPTER 2 SATURATION ---- 13 2.1 THE SATURATION CURVE ---- 18 2.2 SELECTIVITY AND SATURATION ----- 23 2.3 STERIC BULK AND SATURATION ----- 23 2.4 SELECTIVITY ---- 24 CHAPTER 3 LIGANDS ---- 27 3.1 LIGAND BONDING ---- 27 CHAPTER 4 PRECURSORS ---- 37 4.1 ATMOSPHERIC SENSITIVITY - 38 4.2 HALIDE PRECURSORS ---- 40 4.3 ALKYL PRECURSORS ---- 41 4.4 GENERAL SYNTHETIC REACTIONS ----- 41 4.5 DESIGNING PRECURSORS ---- 43 4.6 VOLATILITY ---- 43 4.7 THERMAL STABILITY ----- 45 4.8 REACTIVITY ---- 50 X - CONTENTS ALUMINA DEPOSITION ---- 73 TITANIUM NITRIDE DEPOSITION ---- 77 COPPER METAL DEPOSITION ---- 79 GOLD METAL DEPOSITION ---- 81 TIN OXIDE DEPOSITION ---- 82 PROTONATED SURFACE NUCLEATION SITES ---- 66 METAL SURFACE NUCLEATION SITES - 68 HYDRIDE SURFACES ---- 69 SURFACE BLOCKING GROUPS AND SELECTIVE AREA DEPOSITION ---- 70 DEFINITIONS OF THERMAL ONSET TEMPERATURES ---- 53 THERMOGRAVIMETRY ---- 54 DIFFERENTIAL SCANNING CALORIMETRY ---- 58 THERMAL RANGE AND FIGURE OF MERIT ---- 60 DECOMPOSITION TESTING ---- 61 VOLATILITY CONTROL ---- 63 IMPURITY CONTROL ---- 64 CHAPTER 9 ALE PROCESSES ---- 95 9.1 ETCHING OXIDES -----96 9.2 ETCHING METALS ---- 98 CHAPTER 6 NUCLEATION ---- 65 6.1 6.2 6.3 6.4 8.1 8.1.1 8.2 8.3 8.4 8.5 CHAPTER 5 THERMOLYSIS ---- 53 5.1 5.2 5.3 5.4 5.5 5.6 5.7 CHAPTER 7 ALD PROCESSES ---- 73 7.1 7.2 7.3 7.4 7.5 CHAPTER 8 MLD PROCESSES ---- 85 ALUCONE DEPOSITION ---- 85 BIFUNCTIONAL MONOMERS ---- 86 TETRACYANOETHYLENE DEPOSITION ---- 88 ALQ 3 DEPOSITION ---- 89 KEVLAR DEPOSITION ---- 90 PEDOT DEPOSITION --- 92 INDEX - 103
adam_txt	CONTENTS FOREWORD ---- VII CHAPTER 1 INTRODUCTION - 1 1.1 ATOMIC LAYER DEPOSITION - 1 1.2 PRECURSOR ---- 2 1.3 ADSORPTION - 2 1.4 SURFACE VS. SUBSTRATE ---- 2 1.5 MONOLAYER ---- 3 1.6 SELF-LIMITING ---- 3 1.7 LAYER-BY-LAYER GROWTH ---- 3 1.8 ATOMIC LAYER DEPOSITION HISTORY - 5 1.9 TRIMETHYL ALUMINUM AND WATER ----- 8 1.10 HELPFUL RESOURCES ---- 11 CHAPTER 2 SATURATION ---- 13 2.1 THE SATURATION CURVE ---- 18 2.2 SELECTIVITY AND SATURATION ----- 23 2.3 STERIC BULK AND SATURATION ----- 23 2.4 SELECTIVITY ---- 24 CHAPTER 3 LIGANDS ---- 27 3.1 LIGAND BONDING ---- 27 CHAPTER 4 PRECURSORS ---- 37 4.1 ATMOSPHERIC SENSITIVITY - 38 4.2 HALIDE PRECURSORS ---- 40 4.3 ALKYL PRECURSORS ---- 41 4.4 GENERAL SYNTHETIC REACTIONS ----- 41 4.5 DESIGNING PRECURSORS ---- 43 4.6 VOLATILITY ---- 43 4.7 THERMAL STABILITY ----- 45 4.8 REACTIVITY ---- 50 X - CONTENTS ALUMINA DEPOSITION ---- 73 TITANIUM NITRIDE DEPOSITION ---- 77 COPPER METAL DEPOSITION ---- 79 GOLD METAL DEPOSITION ---- 81 TIN OXIDE DEPOSITION ---- 82 PROTONATED SURFACE NUCLEATION SITES ---- 66 METAL SURFACE NUCLEATION SITES - 68 HYDRIDE SURFACES ---- 69 SURFACE BLOCKING GROUPS AND SELECTIVE AREA DEPOSITION ---- 70 DEFINITIONS OF THERMAL ONSET TEMPERATURES ---- 53 THERMOGRAVIMETRY ---- 54 DIFFERENTIAL SCANNING CALORIMETRY ---- 58 THERMAL RANGE AND FIGURE OF MERIT ---- 60 DECOMPOSITION TESTING ---- 61 VOLATILITY CONTROL ---- 63 IMPURITY CONTROL ---- 64 CHAPTER 9 ALE PROCESSES ---- 95 9.1 ETCHING OXIDES -----96 9.2 ETCHING METALS ---- 98 CHAPTER 6 NUCLEATION ---- 65 6.1 6.2 6.3 6.4 8.1 8.1.1 8.2 8.3 8.4 8.5 CHAPTER 5 THERMOLYSIS ---- 53 5.1 5.2 5.3 5.4 5.5 5.6 5.7 CHAPTER 7 ALD PROCESSES ---- 73 7.1 7.2 7.3 7.4 7.5 CHAPTER 8 MLD PROCESSES ---- 85 ALUCONE DEPOSITION ---- 85 BIFUNCTIONAL MONOMERS ---- 86 TETRACYANOETHYLENE DEPOSITION ---- 88 ALQ 3 DEPOSITION ---- 89 KEVLAR DEPOSITION ---- 90 PEDOT DEPOSITION --- 92 INDEX - 103
any_adam_object	1
any_adam_object_boolean	1
author	Barry, Seán Thomas
author_GND	(DE-588)1252624247
author_facet	Barry, Seán Thomas
author_role	aut
author_sort	Barry, Seán Thomas
author_variant	s t b st stb
building	Verbundindex
bvnumber	BV047560637
classification_rvk	UP 7550 ZM 7685 VE 7000
ctrlnum	(OCoLC)1286868364 (DE-599)DNB1237722985
discipline	Chemie / Pharmazie Physik Werkstoffwissenschaften / Fertigungstechnik
discipline_str_mv	Chemie / Pharmazie Physik Werkstoffwissenschaften / Fertigungstechnik
format	Book
fullrecord	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02212nam a2200577 c 4500</leader><controlfield tag="001">BV047560637</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20220607 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">211026s2022 gw a\|\|\| \|\|\|\| 00\|\|\| eng d</controlfield><datafield tag="015" ind1=" " ind2=" "><subfield code="a">21,N31</subfield><subfield code="2">dnb</subfield></datafield><datafield tag="016" ind1="7" ind2=" "><subfield code="a">1237722985</subfield><subfield code="2">DE-101</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">3110712512</subfield><subfield code="9">3-11-071251-2</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783110712513</subfield><subfield code="c">pbk.</subfield><subfield code="9">978-3-11-071251-3</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)1286868364</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)DNB1237722985</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rda</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="a">gw</subfield><subfield code="c">XA-DE-BE</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-29T</subfield><subfield code="a">DE-11</subfield><subfield code="a">DE-83</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UP 7550</subfield><subfield code="0">(DE-625)146434:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZM 7685</subfield><subfield code="0">(DE-625)160563:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">VE 7000</subfield><subfield code="0">(DE-625)147134:253</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="8">1\p</subfield><subfield code="a">660</subfield><subfield code="2">23sdnb</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Barry, Seán Thomas</subfield><subfield code="e">Verfasser</subfield><subfield code="0">(DE-588)1252624247</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Chemistry of atomic layer deposition</subfield><subfield code="c">Seán Thomas Barry</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Berlin</subfield><subfield code="b">De Gruyter</subfield><subfield code="c">[2022]</subfield></datafield><datafield tag="264" ind1=" " ind2="4"><subfield code="c">© 2022</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">X, 105 Seiten</subfield><subfield code="b">Illustrationen, Diagramme</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">De Gruyter graduate</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Atomlagenabscheidung</subfield><subfield code="0">(DE-588)7712127-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="653" ind1=" " ind2=" "><subfield code="a">Atomic Layer Deposition</subfield></datafield><datafield tag="653" ind1=" " ind2=" "><subfield code="a">Beschichtungen</subfield></datafield><datafield tag="653" ind1=" " ind2=" "><subfield code="a">Materials Fabrication.</subfield></datafield><datafield tag="653" ind1=" " ind2=" "><subfield code="a">Materialwissenschaften</subfield></datafield><datafield tag="653" ind1=" " ind2=" "><subfield code="a">Oberflächen</subfield></datafield><datafield tag="653" ind1=" " ind2=" "><subfield code="a">TB: Textbook</subfield></datafield><datafield tag="653" ind1=" " ind2=" "><subfield code="a">Thin Film Deposition</subfield></datafield><datafield tag="653" ind1=" " ind2=" "><subfield code="a">Wekstoffwissenschaften</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Atomlagenabscheidung</subfield><subfield code="0">(DE-588)7712127-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="710" ind1="2" ind2=" "><subfield code="a">Walter de Gruyter GmbH & Co. KG</subfield><subfield code="0">(DE-588)10095502-2</subfield><subfield code="4">pbl</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Online-Ausgabe, PDF</subfield><subfield code="z">978-3-11-071253-7</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Online-Ausgabe, EPUB</subfield><subfield code="z">978-3-11-071259-9</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">X:MVB</subfield><subfield code="u">https://www.degruyter.com/isbn/9783110712513</subfield><subfield code="3">Kurzbeschreibung</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">DNB Datenaustausch</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=032936080&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-032936080</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="a">vlb</subfield><subfield code="d">20210727</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#vlb</subfield></datafield></record></collection>
id	DE-604.BV047560637
illustrated	Illustrated
index_date	2024-07-03T18:27:21Z
indexdate	2024-07-10T09:14:41Z
institution	BVB
institution_GND	(DE-588)10095502-2
isbn	3110712512 9783110712513
language	English
oai_aleph_id	oai:aleph.bib-bvb.de:BVB01-032936080
oclc_num	1286868364
open_access_boolean
owner	DE-29T DE-11 DE-83
owner_facet	DE-29T DE-11 DE-83
physical	X, 105 Seiten Illustrationen, Diagramme
publishDate	2022
publishDateSearch	2022
publishDateSort	2022
publisher	De Gruyter
record_format	marc
series2	De Gruyter graduate
spelling	Barry, Seán Thomas Verfasser (DE-588)1252624247 aut Chemistry of atomic layer deposition Seán Thomas Barry Berlin De Gruyter [2022] © 2022 X, 105 Seiten Illustrationen, Diagramme txt rdacontent n rdamedia nc rdacarrier De Gruyter graduate Atomlagenabscheidung (DE-588)7712127-2 gnd rswk-swf Atomic Layer Deposition Beschichtungen Materials Fabrication. Materialwissenschaften Oberflächen TB: Textbook Thin Film Deposition Wekstoffwissenschaften Atomlagenabscheidung (DE-588)7712127-2 s DE-604 Walter de Gruyter GmbH & Co. KG (DE-588)10095502-2 pbl Erscheint auch als Online-Ausgabe, PDF 978-3-11-071253-7 Erscheint auch als Online-Ausgabe, EPUB 978-3-11-071259-9 X:MVB https://www.degruyter.com/isbn/9783110712513 Kurzbeschreibung DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=032936080&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis 1\p vlb 20210727 DE-101 https://d-nb.info/provenance/plan#vlb
spellingShingle	Barry, Seán Thomas Chemistry of atomic layer deposition Atomlagenabscheidung (DE-588)7712127-2 gnd
subject_GND	(DE-588)7712127-2
title	Chemistry of atomic layer deposition
title_auth	Chemistry of atomic layer deposition
title_exact_search	Chemistry of atomic layer deposition
title_exact_search_txtP	Chemistry of atomic layer deposition
title_full	Chemistry of atomic layer deposition Seán Thomas Barry
title_fullStr	Chemistry of atomic layer deposition Seán Thomas Barry
title_full_unstemmed	Chemistry of atomic layer deposition Seán Thomas Barry
title_short	Chemistry of atomic layer deposition
title_sort	chemistry of atomic layer deposition
topic	Atomlagenabscheidung (DE-588)7712127-2 gnd
topic_facet	Atomlagenabscheidung
url	https://www.degruyter.com/isbn/9783110712513 http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=032936080&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA
work_keys_str_mv	AT barryseanthomas chemistryofatomiclayerdeposition AT walterdegruytergmbhcokg chemistryofatomiclayerdeposition

Verfügbarkeit

Es ist kein Print-Exemplar vorhanden.

Fernleihe Bestellen Achtung: Nicht im THWS-Bestand! Inhaltsverzeichnis

MARC

Datensatz im Suchindex

Es ist kein Print-Exemplar vorhanden.

Ähnliche Einträge