APA (7th ed.) Citation

Barry, S. T. (2022). Chemistry of atomic layer deposition. De Gruyter.

Chicago Style (17th ed.) Citation

Barry, Seán Thomas. Chemistry of Atomic Layer Deposition. Berlin: De Gruyter, 2022.

MLA (9th ed.) Citation

Barry, Seán Thomas. Chemistry of Atomic Layer Deposition. De Gruyter, 2022.

Warning: These citations may not always be 100% accurate.