APA (7th ed.) Citation

Iyer, S. S. (2002). Silicon Wafer Bonding Technology for VLSI and MEMS Applications. IET. https://doi.org/10.1049/PBEP001E

Chicago Style (17th ed.) Citation

Iyer, Subramanian S. Silicon Wafer Bonding Technology for VLSI and MEMS Applications. Stevenage: IET, 2002. https://doi.org/10.1049/PBEP001E.

MLA (9th ed.) Citation

Iyer, Subramanian S. Silicon Wafer Bonding Technology for VLSI and MEMS Applications. IET, 2002. https://doi.org/10.1049/PBEP001E.