DIY MEMS: fabricating microelectromechanical systems in open use labs
This book describes the future of microscopically small medical devices and how to locate a lab to start conducting your own do-it-yourself microelectromechanical systems (MEMS) research in one of the many national, international, government, and other regional open use facilities, where you can qui...
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Cham
Springer
[2019]
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| Schlagworte: | |
| Zusammenfassung: | This book describes the future of microscopically small medical devices and how to locate a lab to start conducting your own do-it-yourself microelectromechanical systems (MEMS) research in one of the many national, international, government, and other regional open use facilities, where you can quickly begin designing and fabricating devices for your applications. You will learn specific, tangible information on what MEMS are and how a device is fabricated, including what the main types of equipment are in these facilities. The book provides advice on working in a cleanroom, soft materials, collaboration, intellectual property and privacy issues, regulatory compliance, and how to navigate other issues that may arise. This book is primarily aimed at researchers and students who work at universities without MEMS facilities, and small companies who need access to MEMS resources. |
| Beschreibung: | xvi, 188 Seiten Illustrationen |
| ISBN: | 9783030330750 |
Internformat
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| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 505 | 8 | |a Introduction.- National Nanotechnology Coordinated Infrastructure (NNCI).- Working in a Cleanroom.- MEMS Fabrication Process.- Equipment.- Tools and Supplies.- Designing for MEMS.- Soft Materials.- Imaging & Metrology.- Testing.- Transporting.- Regulatory Approval Pathways.- Locations of the Facilities.- Meet the Lab Directors.- Collaborating with a Facility.- International Options.- Intellectual Property.- Getting Project Assistance.- Costs.- Taking the First Steps | |
| 520 | 3 | |a This book describes the future of microscopically small medical devices and how to locate a lab to start conducting your own do-it-yourself microelectromechanical systems (MEMS) research in one of the many national, international, government, and other regional open use facilities, where you can quickly begin designing and fabricating devices for your applications. You will learn specific, tangible information on what MEMS are and how a device is fabricated, including what the main types of equipment are in these facilities. The book provides advice on working in a cleanroom, soft materials, collaboration, intellectual property and privacy issues, regulatory compliance, and how to navigate other issues that may arise. This book is primarily aimed at researchers and students who work at universities without MEMS facilities, and small companies who need access to MEMS resources. | |
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| 653 | |a Physics and Astronomy | ||
| 653 | |a Electronics and Microelectronics, Instrumentation | ||
| 653 | |a Medizintechnik, Biomedizintechnik, Medizinische Werkstoffe | ||
| 653 | |a Medizintechnik, Biomedizintechnik | ||
| 653 | |a Biomedical Engineering/Biotechnology | ||
| 653 | |a Nanotechnology and Microengineering | ||
| 653 | |a Nanotechnologie | ||
| 653 | |a Produktionstechnik | ||
| 653 | |a Industrial and Production Engineering | ||
| 653 | |a Hardcover, Softcover / Technik/Elektronik, Elektrotechnik, Nachrichtentechnik | ||
| 653 | 0 | |a Electronic circuits | |
| 653 | 0 | |a Electronics | |
| 653 | 0 | |a Microelectronics | |
| 653 | 0 | |a Biomedical engineering | |
| 653 | 0 | |a Nanotechnology | |
| 653 | 0 | |a Industrial engineering | |
| 653 | 0 | |a Production engineering | |
| 653 | 0 | |a Physics | |
| 653 | 0 | |a Actuators;Cleanrooms;DIY;Fabrication;Lithography;MEMS;MEMS Packaging;Microelectromechanical systems;Microfabrication;Nanotechnology;National Nanotechnology Infrastructure Network;NNCI;Open use labs;Soft materials;Biomedical Engineering | |
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| 999 | |a oai:aleph.bib-bvb.de:BVB01-032552433 | ||
Datensatz im Suchindex
| _version_ | 1804182210544140288 |
|---|---|
| adam_txt | |
| any_adam_object | |
| any_adam_object_boolean | |
| author | Munro, Deborah |
| author_facet | Munro, Deborah |
| author_role | aut |
| author_sort | Munro, Deborah |
| author_variant | d m dm |
| building | Verbundindex |
| bvnumber | BV047146604 |
| classification_rvk | ZN 3750 |
| contents | Introduction.- National Nanotechnology Coordinated Infrastructure (NNCI).- Working in a Cleanroom.- MEMS Fabrication Process.- Equipment.- Tools and Supplies.- Designing for MEMS.- Soft Materials.- Imaging & Metrology.- Testing.- Transporting.- Regulatory Approval Pathways.- Locations of the Facilities.- Meet the Lab Directors.- Collaborating with a Facility.- International Options.- Intellectual Property.- Getting Project Assistance.- Costs.- Taking the First Steps |
| ctrlnum | (ELiSA)ELiSA-9783030330729 (OCoLC)1143781300 (DE-599)BVBBV047146604 |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| discipline_str_mv | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| id | DE-604.BV047146604 |
| illustrated | Illustrated |
| index_date | 2024-07-03T16:37:00Z |
| indexdate | 2024-07-10T09:03:56Z |
| institution | BVB |
| isbn | 9783030330750 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-032552433 |
| oclc_num | 1143781300 |
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| owner | DE-92 |
| owner_facet | DE-92 |
| physical | xvi, 188 Seiten Illustrationen |
| publishDate | 2019 |
| publishDateSearch | 2019 |
| publishDateSort | 2019 |
| publisher | Springer |
| record_format | marc |
| spelling | Munro, Deborah Verfasser aut DIY MEMS fabricating microelectromechanical systems in open use labs Cham Springer [2019] xvi, 188 Seiten Illustrationen txt rdacontent n rdamedia nc rdacarrier Introduction.- National Nanotechnology Coordinated Infrastructure (NNCI).- Working in a Cleanroom.- MEMS Fabrication Process.- Equipment.- Tools and Supplies.- Designing for MEMS.- Soft Materials.- Imaging & Metrology.- Testing.- Transporting.- Regulatory Approval Pathways.- Locations of the Facilities.- Meet the Lab Directors.- Collaborating with a Facility.- International Options.- Intellectual Property.- Getting Project Assistance.- Costs.- Taking the First Steps This book describes the future of microscopically small medical devices and how to locate a lab to start conducting your own do-it-yourself microelectromechanical systems (MEMS) research in one of the many national, international, government, and other regional open use facilities, where you can quickly begin designing and fabricating devices for your applications. You will learn specific, tangible information on what MEMS are and how a device is fabricated, including what the main types of equipment are in these facilities. The book provides advice on working in a cleanroom, soft materials, collaboration, intellectual property and privacy issues, regulatory compliance, and how to navigate other issues that may arise. This book is primarily aimed at researchers and students who work at universities without MEMS facilities, and small companies who need access to MEMS resources. MEMS (DE-588)4824724-8 gnd rswk-swf Elektronik B Electronic Circuits and Devices Physics and Astronomy Electronics and Microelectronics, Instrumentation Medizintechnik, Biomedizintechnik, Medizinische Werkstoffe Medizintechnik, Biomedizintechnik Biomedical Engineering/Biotechnology Nanotechnology and Microengineering Nanotechnologie Produktionstechnik Industrial and Production Engineering Hardcover, Softcover / Technik/Elektronik, Elektrotechnik, Nachrichtentechnik Electronic circuits Electronics Microelectronics Biomedical engineering Nanotechnology Industrial engineering Production engineering Physics Actuators;Cleanrooms;DIY;Fabrication;Lithography;MEMS;MEMS Packaging;Microelectromechanical systems;Microfabrication;Nanotechnology;National Nanotechnology Infrastructure Network;NNCI;Open use labs;Soft materials;Biomedical Engineering MEMS (DE-588)4824724-8 s DE-604 Erscheint auch als 978-3-030-33073-6 Online-Ausgabe |
| spellingShingle | Munro, Deborah DIY MEMS fabricating microelectromechanical systems in open use labs Introduction.- National Nanotechnology Coordinated Infrastructure (NNCI).- Working in a Cleanroom.- MEMS Fabrication Process.- Equipment.- Tools and Supplies.- Designing for MEMS.- Soft Materials.- Imaging & Metrology.- Testing.- Transporting.- Regulatory Approval Pathways.- Locations of the Facilities.- Meet the Lab Directors.- Collaborating with a Facility.- International Options.- Intellectual Property.- Getting Project Assistance.- Costs.- Taking the First Steps MEMS (DE-588)4824724-8 gnd |
| subject_GND | (DE-588)4824724-8 |
| title | DIY MEMS fabricating microelectromechanical systems in open use labs |
| title_auth | DIY MEMS fabricating microelectromechanical systems in open use labs |
| title_exact_search | DIY MEMS fabricating microelectromechanical systems in open use labs |
| title_exact_search_txtP | DIY MEMS fabricating microelectromechanical systems in open use labs |
| title_full | DIY MEMS fabricating microelectromechanical systems in open use labs |
| title_fullStr | DIY MEMS fabricating microelectromechanical systems in open use labs |
| title_full_unstemmed | DIY MEMS fabricating microelectromechanical systems in open use labs |
| title_short | DIY MEMS |
| title_sort | diy mems fabricating microelectromechanical systems in open use labs |
| title_sub | fabricating microelectromechanical systems in open use labs |
| topic | MEMS (DE-588)4824724-8 gnd |
| topic_facet | MEMS |
| work_keys_str_mv | AT munrodeborah diymemsfabricatingmicroelectromechanicalsystemsinopenuselabs |