Extreme ultraviolet lithography:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Bellingham, Washington, USA
SPIE Press
[2020]
|
| Online-Zugang: | FHD01 Volltext |
| Beschreibung: | 1 Online-Ressource |
| ISBN: | 9781510639409 |
| DOI: | 10.1117/3.2581446 |
Internformat
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Datensatz im Suchindex
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| illustrated | Not Illustrated |
| index_date | 2024-07-03T15:39:19Z |
| indexdate | 2024-07-10T08:58:14Z |
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| isbn | 9781510639409 |
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| spelling | Levinson, Harry J. Verfasser aut Extreme ultraviolet lithography Harry J. Levinson Bellingham, Washington, USA SPIE Press [2020] 1 Online-Ressource txt rdacontent c rdamedia cr rdacarrier Erscheint auch als Druck-Ausgabe 978-1-5106-3939-3 https://doi.org/10.1117/3.2581446 Verlag URL des Erstveröffentlichers Volltext |
| spellingShingle | Levinson, Harry J. Extreme ultraviolet lithography |
| title | Extreme ultraviolet lithography |
| title_auth | Extreme ultraviolet lithography |
| title_exact_search | Extreme ultraviolet lithography |
| title_exact_search_txtP | Extreme ultraviolet lithography |
| title_full | Extreme ultraviolet lithography Harry J. Levinson |
| title_fullStr | Extreme ultraviolet lithography Harry J. Levinson |
| title_full_unstemmed | Extreme ultraviolet lithography Harry J. Levinson |
| title_short | Extreme ultraviolet lithography |
| title_sort | extreme ultraviolet lithography |
| url | https://doi.org/10.1117/3.2581446 |
| work_keys_str_mv | AT levinsonharryj extremeultravioletlithography |