Microlithography: science and technology
Gespeichert in:
| Weitere Verfasser: | , |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Boca Raton ; London ; New York
CRC Press, Taylor & Francis Group
2020
|
| Ausgabe: | Third edition |
| Schlagworte: | |
| Online-Zugang: | UBT01 UBW01 Volltext |
| Beschreibung: | 1 Online-Ressource (xi, 837 Seiten) Illustrationen, Diagramme |
| ISBN: | 9781315117171 |
| DOI: | 10.1201/9781315117171 |
Internformat
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| 245 | 1 | 0 | |a Microlithography |b science and technology |c edited by Bruce W. Smith and Kazuaki Suzuki |
| 250 | |a Third edition | ||
| 264 | 1 | |a Boca Raton ; London ; New York |b CRC Press, Taylor & Francis Group |c 2020 | |
| 300 | |a 1 Online-Ressource (xi, 837 Seiten) |b Illustrationen, Diagramme | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
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| 650 | 0 | 7 | |a Maskentechnik |0 (DE-588)4125845-9 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Lithografie |g Halbleitertechnologie |0 (DE-588)4191584-7 |2 gnd |9 rswk-swf |
| 653 | 0 | |a Microlithography / Industrial applications | |
| 653 | 0 | |a Integrated circuits / Masks | |
| 653 | 0 | |a Metal oxide semiconductors, Complementary / Design and construction | |
| 653 | 0 | |a Manufacturing processes | |
| 653 | 0 | |a Integrated circuits / Masks | |
| 653 | 0 | |a Manufacturing processes | |
| 653 | 0 | |a Metal oxide semiconductors, Complementary / Design and construction | |
| 653 | 0 | |a Microlithography / Industrial applications | |
| 689 | 0 | 0 | |a Lithografie |g Halbleitertechnologie |0 (DE-588)4191584-7 |D s |
| 689 | 0 | 1 | |a Maskentechnik |0 (DE-588)4125845-9 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Smith, Bruce W. |0 (DE-588)170523225 |4 edt | |
| 700 | 1 | |a Suzuki, Kazuaki |4 edt | |
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Datensatz im Suchindex
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| building | Verbundindex |
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| discipline_str_mv | Elektrotechnik / Elektronik / Nachrichtentechnik |
| doi_str_mv | 10.1201/9781315117171 |
| edition | Third edition |
| format | Electronic eBook |
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| illustrated | Not Illustrated |
| index_date | 2024-07-03T15:27:16Z |
| indexdate | 2024-07-10T08:57:12Z |
| institution | BVB |
| isbn | 9781315117171 |
| language | English |
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| owner_facet | DE-703 DE-20 |
| physical | 1 Online-Ressource (xi, 837 Seiten) Illustrationen, Diagramme |
| psigel | ebook ZDB-7-TFC ZDB-7-TFC UBT_P&C_2020_09_T&F(Technik) ZDB-7-TFC UBW_Einzelkauf |
| publishDate | 2020 |
| publishDateSearch | 2020 |
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| publisher | CRC Press, Taylor & Francis Group |
| record_format | marc |
| spelling | Microlithography science and technology edited by Bruce W. Smith and Kazuaki Suzuki Third edition Boca Raton ; London ; New York CRC Press, Taylor & Francis Group 2020 1 Online-Ressource (xi, 837 Seiten) Illustrationen, Diagramme txt rdacontent c rdamedia cr rdacarrier Maskentechnik (DE-588)4125845-9 gnd rswk-swf Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf Microlithography / Industrial applications Integrated circuits / Masks Metal oxide semiconductors, Complementary / Design and construction Manufacturing processes Lithografie Halbleitertechnologie (DE-588)4191584-7 s Maskentechnik (DE-588)4125845-9 s DE-604 Smith, Bruce W. (DE-588)170523225 edt Suzuki, Kazuaki edt Erscheint auch als Druck-Ausgabe 978-1-4398-7675-6 https://doi.org/10.1201/9781315117171 Verlag URL des Erstveröffentlichers Volltext |
| spellingShingle | Microlithography science and technology Maskentechnik (DE-588)4125845-9 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| subject_GND | (DE-588)4125845-9 (DE-588)4191584-7 |
| title | Microlithography science and technology |
| title_auth | Microlithography science and technology |
| title_exact_search | Microlithography science and technology |
| title_exact_search_txtP | Microlithography science and technology |
| title_full | Microlithography science and technology edited by Bruce W. Smith and Kazuaki Suzuki |
| title_fullStr | Microlithography science and technology edited by Bruce W. Smith and Kazuaki Suzuki |
| title_full_unstemmed | Microlithography science and technology edited by Bruce W. Smith and Kazuaki Suzuki |
| title_short | Microlithography |
| title_sort | microlithography science and technology |
| title_sub | science and technology |
| topic | Maskentechnik (DE-588)4125845-9 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| topic_facet | Maskentechnik Lithografie Halbleitertechnologie |
| url | https://doi.org/10.1201/9781315117171 |
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