MEMS resonator filters:
This book explores the challenges and opportunities of developing circuits with MEMS resonator filters. The replacement of classical electrical components with electromechanical components is explored in this book, and the specific properties of MEMS resonators required in various frequency ranges a...
Gespeichert in:
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| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
London, United Kingdom
The Institution of Engineering and Technology
2020
|
| Schriftenreihe: | IET materials, circuits and devices series
65 |
| Schlagworte: | |
| Online-Zugang: | TUM01 UBY01 UER01 Volltext |
| Zusammenfassung: | This book explores the challenges and opportunities of developing circuits with MEMS resonator filters. The replacement of classical electrical components with electromechanical components is explored in this book, and the specific properties of MEMS resonators required in various frequency ranges are discussed Intro -- Contents -- 1. Introduction | Rajendra M. Patrikar -- 1.1 Low power issues -- 1.2 Miniaturization -- 1.3 Tunable filters -- 1.4 Integration with CMOS -- 1.5 Inside the book -- References -- 2. Filter design | Rajesh Junghare, Raghvendra Deshmukh and Rajendra Patrikar -- 2.1 Brief history of filters -- 2.1.1 Active filters -- 2.1.2 Electromechanical components -- 2.2 MEMS resonator filter design -- 2.2.1 RF MEMS filter -- 2.2.2 Advancement (evolution) of MEMS resonator -- 2.3 Theory of resonator -- 2.3.1 Mass damper model and electrical equivalent model -- 2.3.2 Actuation -- 2.3.3 Detection -- 2.4 Case study: disk resonator -- 2.4.1 Design and operation -- 2.4.2 In-plane bulk mode resonance and modal shape estimation -- 2.4.3 Electromechanical model of disk resonator -- 2.4.4 Electrical model -- 2.4.5 FEM simulation of disk resonator -- 2.4.6 FEM simulation of disk resonator with proposed fabrication flow -- 2.5 Coupled resonator -- 2.5.1 Coupling beam design -- 2.5.2 Case study: disk resonator-based filter -- 2.5.3 Case study: ring resonator-based filter -- 2.6 Summary -- References -- 3. Microelectromechanical resonators design: low-frequency resonators | Amol Morankar -- 3.1 Introduction -- 3.2 Low-frequency RF MEMS resonators -- 3.3 Actuation mechanism -- 3.3.1 Electrostatic actuation -- 3.3.2 Piezoelectric actuation -- 3.3.3 Magnetic actuation -- 3.4 Design of low-frequency MEMS resonator -- 3.4.1 Clamped-clamped beam design -- 3.4.2 Mechanical coupler design -- 3.4.3 Electrical coupling scheme -- 3.4.4 Suppression of spurious responses -- 3.5 Summary -- References -- 4. Microelectromechanical resonator design for high frequency | Prasanna Deshpande and Rajesh Pande -- 4.1 Introduction -- 4.2 Motivation and challenges -- 4.3 High frequency resonators -- 4.4 Literature survey -- 4.4.1 Introduction -- 4.5 Fundamentals of MEMS resonator |
| Beschreibung: | 1 Online-Ressource (xiii, 424 Seiten) Illustrationen, Diagramme |
| ISBN: | 9781785618970 |
Internformat
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| 520 | 3 | |a This book explores the challenges and opportunities of developing circuits with MEMS resonator filters. The replacement of classical electrical components with electromechanical components is explored in this book, and the specific properties of MEMS resonators required in various frequency ranges are discussed | |
| 520 | 3 | |a Intro -- Contents -- 1. Introduction | Rajendra M. Patrikar -- 1.1 Low power issues -- 1.2 Miniaturization -- 1.3 Tunable filters -- 1.4 Integration with CMOS -- 1.5 Inside the book -- References -- 2. Filter design | Rajesh Junghare, Raghvendra Deshmukh and Rajendra Patrikar -- 2.1 Brief history of filters -- 2.1.1 Active filters -- 2.1.2 Electromechanical components -- 2.2 MEMS resonator filter design -- 2.2.1 RF MEMS filter -- 2.2.2 Advancement (evolution) of MEMS resonator -- 2.3 Theory of resonator -- 2.3.1 Mass damper model and electrical equivalent model -- 2.3.2 Actuation -- 2.3.3 Detection -- 2.4 Case study: disk resonator -- 2.4.1 Design and operation -- 2.4.2 In-plane bulk mode resonance and modal shape estimation -- 2.4.3 Electromechanical model of disk resonator -- 2.4.4 Electrical model -- 2.4.5 FEM simulation of disk resonator -- 2.4.6 FEM simulation of disk resonator with proposed fabrication flow -- 2.5 Coupled resonator -- 2.5.1 Coupling beam design -- 2.5.2 Case study: disk resonator-based filter -- 2.5.3 Case study: ring resonator-based filter -- 2.6 Summary -- References -- 3. Microelectromechanical resonators design: low-frequency resonators | Amol Morankar -- 3.1 Introduction -- 3.2 Low-frequency RF MEMS resonators -- 3.3 Actuation mechanism -- 3.3.1 Electrostatic actuation -- 3.3.2 Piezoelectric actuation -- 3.3.3 Magnetic actuation -- 3.4 Design of low-frequency MEMS resonator -- 3.4.1 Clamped-clamped beam design -- 3.4.2 Mechanical coupler design -- 3.4.3 Electrical coupling scheme -- 3.4.4 Suppression of spurious responses -- 3.5 Summary -- References -- 4. Microelectromechanical resonator design for high frequency | Prasanna Deshpande and Rajesh Pande -- 4.1 Introduction -- 4.2 Motivation and challenges -- 4.3 High frequency resonators -- 4.4 Literature survey -- 4.4.1 Introduction -- 4.5 Fundamentals of MEMS resonator | |
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Datensatz im Suchindex
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| id | DE-604.BV046854263 |
| illustrated | Not Illustrated |
| index_date | 2024-07-03T15:10:51Z |
| indexdate | 2024-07-10T08:55:39Z |
| institution | BVB |
| isbn | 9781785618970 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-032263032 |
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| physical | 1 Online-Ressource (xiii, 424 Seiten) Illustrationen, Diagramme |
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| publishDate | 2020 |
| publishDateSearch | 2020 |
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| publisher | The Institution of Engineering and Technology |
| record_format | marc |
| series | IET materials, circuits and devices series |
| series2 | IET materials, circuits and devices series |
| spelling | MEMS resonator filters edited by Rajendra M. Patrikar London, United Kingdom The Institution of Engineering and Technology 2020 1 Online-Ressource (xiii, 424 Seiten) Illustrationen, Diagramme txt rdacontent c rdamedia cr rdacarrier IET materials, circuits and devices series 65 This book explores the challenges and opportunities of developing circuits with MEMS resonator filters. The replacement of classical electrical components with electromechanical components is explored in this book, and the specific properties of MEMS resonators required in various frequency ranges are discussed Intro -- Contents -- 1. Introduction | Rajendra M. Patrikar -- 1.1 Low power issues -- 1.2 Miniaturization -- 1.3 Tunable filters -- 1.4 Integration with CMOS -- 1.5 Inside the book -- References -- 2. Filter design | Rajesh Junghare, Raghvendra Deshmukh and Rajendra Patrikar -- 2.1 Brief history of filters -- 2.1.1 Active filters -- 2.1.2 Electromechanical components -- 2.2 MEMS resonator filter design -- 2.2.1 RF MEMS filter -- 2.2.2 Advancement (evolution) of MEMS resonator -- 2.3 Theory of resonator -- 2.3.1 Mass damper model and electrical equivalent model -- 2.3.2 Actuation -- 2.3.3 Detection -- 2.4 Case study: disk resonator -- 2.4.1 Design and operation -- 2.4.2 In-plane bulk mode resonance and modal shape estimation -- 2.4.3 Electromechanical model of disk resonator -- 2.4.4 Electrical model -- 2.4.5 FEM simulation of disk resonator -- 2.4.6 FEM simulation of disk resonator with proposed fabrication flow -- 2.5 Coupled resonator -- 2.5.1 Coupling beam design -- 2.5.2 Case study: disk resonator-based filter -- 2.5.3 Case study: ring resonator-based filter -- 2.6 Summary -- References -- 3. Microelectromechanical resonators design: low-frequency resonators | Amol Morankar -- 3.1 Introduction -- 3.2 Low-frequency RF MEMS resonators -- 3.3 Actuation mechanism -- 3.3.1 Electrostatic actuation -- 3.3.2 Piezoelectric actuation -- 3.3.3 Magnetic actuation -- 3.4 Design of low-frequency MEMS resonator -- 3.4.1 Clamped-clamped beam design -- 3.4.2 Mechanical coupler design -- 3.4.3 Electrical coupling scheme -- 3.4.4 Suppression of spurious responses -- 3.5 Summary -- References -- 4. Microelectromechanical resonator design for high frequency | Prasanna Deshpande and Rajesh Pande -- 4.1 Introduction -- 4.2 Motivation and challenges -- 4.3 High frequency resonators -- 4.4 Literature survey -- 4.4.1 Introduction -- 4.5 Fundamentals of MEMS resonator Resonator (DE-588)10340816-2 gnd rswk-swf Filter (DE-588)4017157-7 gnd rswk-swf MEMS (DE-588)4824724-8 gnd rswk-swf MEMS (DE-588)4824724-8 s Resonator (DE-588)10340816-2 b Filter (DE-588)4017157-7 s DE-604 Patrikar, Rajendra M. edt Erscheint auch als Druck-Ausgabe 978-1-78561-896-3 IET materials, circuits and devices series 65 (DE-604)BV044007507 65 X:EBC https://ebookcentral.proquest.com/lib/gbv/detail.action?docID=6219844 Aggregator Volltext |
| spellingShingle | MEMS resonator filters IET materials, circuits and devices series Resonator (DE-588)10340816-2 gnd Filter (DE-588)4017157-7 gnd MEMS (DE-588)4824724-8 gnd |
| subject_GND | (DE-588)10340816-2 (DE-588)4017157-7 (DE-588)4824724-8 |
| title | MEMS resonator filters |
| title_auth | MEMS resonator filters |
| title_exact_search | MEMS resonator filters |
| title_exact_search_txtP | MEMS resonator filters |
| title_full | MEMS resonator filters edited by Rajendra M. Patrikar |
| title_fullStr | MEMS resonator filters edited by Rajendra M. Patrikar |
| title_full_unstemmed | MEMS resonator filters edited by Rajendra M. Patrikar |
| title_short | MEMS resonator filters |
| title_sort | mems resonator filters |
| topic | Resonator (DE-588)10340816-2 gnd Filter (DE-588)4017157-7 gnd MEMS (DE-588)4824724-8 gnd |
| topic_facet | Resonator Filter MEMS |
| url | https://ebookcentral.proquest.com/lib/gbv/detail.action?docID=6219844 |
| volume_link | (DE-604)BV044007507 |
| work_keys_str_mv | AT patrikarrajendram memsresonatorfilters |