Process Variations in Microsystems Manufacturing:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Cham
Springer International Publishing
2020
Cham Springer |
| Ausgabe: | 1st ed. 2020 |
| Schriftenreihe: | Microsystems and Nanosystems
|
| Schlagworte: | |
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| Beschreibung: | 1 Online-Ressource (XIX, 521 p. 236 illus., 24 illus. in color) |
| ISBN: | 9783030405601 |
| ISSN: | 2198-0063 |
| DOI: | 10.1007/978-3-030-40560-1 |
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| discipline | Elektrotechnik Maschinenbau |
| discipline_str_mv | Elektrotechnik Maschinenbau |
| doi_str_mv | 10.1007/978-3-030-40560-1 |
| edition | 1st ed. 2020 |
| format | Electronic eBook |
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| illustrated | Not Illustrated |
| index_date | 2024-07-03T14:29:45Z |
| indexdate | 2025-02-20T06:59:58Z |
| institution | BVB |
| isbn | 9783030405601 |
| issn | 2198-0063 |
| language | English |
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| physical | 1 Online-Ressource (XIX, 521 p. 236 illus., 24 illus. in color) |
| psigel | ZDB-2-ENG ZDB-2-ENG_2020_Fremddaten |
| publishDate | 2020 |
| publishDateSearch | 2020 |
| publishDateSort | 2020 |
| publisher | Springer International Publishing Springer |
| record_format | marc |
| series2 | Microsystems and Nanosystems |
| spellingShingle | Huff, Michael Process Variations in Microsystems Manufacturing Nanotechnology and Microengineering Manufacturing, Machines, Tools, Processes Nanotechnology Circuits and Systems Manufactures Electronic circuits |
| title | Process Variations in Microsystems Manufacturing |
| title_auth | Process Variations in Microsystems Manufacturing |
| title_exact_search | Process Variations in Microsystems Manufacturing |
| title_exact_search_txtP | Process Variations in Microsystems Manufacturing |
| title_full | Process Variations in Microsystems Manufacturing by Michael Huff |
| title_fullStr | Process Variations in Microsystems Manufacturing by Michael Huff |
| title_full_unstemmed | Process Variations in Microsystems Manufacturing by Michael Huff |
| title_short | Process Variations in Microsystems Manufacturing |
| title_sort | process variations in microsystems manufacturing |
| topic | Nanotechnology and Microengineering Manufacturing, Machines, Tools, Processes Nanotechnology Circuits and Systems Manufactures Electronic circuits |
| topic_facet | Nanotechnology and Microengineering Manufacturing, Machines, Tools, Processes Nanotechnology Circuits and Systems Manufactures Electronic circuits |
| url | https://doi.org/10.1007/978-3-030-40560-1 |
| work_keys_str_mv | AT huffmichael processvariationsinmicrosystemsmanufacturing |