Laser Heat-Mode Lithography: Principle and Methods
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Singapore
Springer Singapore
2019
Singapore Springer |
| Ausgabe: | 1st ed. 2019 |
| Schriftenreihe: | Springer Series in Materials Science
291 |
| Schlagworte: | |
| Online-Zugang: | TUM01 UBM01 UBT01 Volltext |
| Beschreibung: | 1 Online-Ressource (XIII, 208 p. 182 illus., 160 illus. in color) |
| ISBN: | 9789811509438 |
| ISSN: | 0933-033X |
| DOI: | 10.1007/978-981-15-0943-8 |
Internformat
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| 650 | 4 | |a Surfaces (Physics) | |
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Datensatz im Suchindex
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| author | Wei, Jingsong |
| author_facet | Wei, Jingsong |
| author_role | aut |
| author_sort | Wei, Jingsong |
| author_variant | j w jw |
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| bvnumber | BV046283842 |
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| ctrlnum | (ZDB-2-PHA)9789811509438 (OCoLC)1130286299 (DE-599)BVBBV046283842 |
| dewey-full | 530.417 |
| dewey-hundreds | 500 - Natural sciences and mathematics |
| dewey-ones | 530 - Physics |
| dewey-raw | 530.417 |
| dewey-search | 530.417 |
| dewey-sort | 3530.417 |
| dewey-tens | 530 - Physics |
| discipline | Physik |
| doi_str_mv | 10.1007/978-981-15-0943-8 |
| edition | 1st ed. 2019 |
| format | Electronic eBook |
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| illustrated | Not Illustrated |
| indexdate | 2024-07-10T08:40:31Z |
| institution | BVB |
| isbn | 9789811509438 |
| issn | 0933-033X |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-031661422 |
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| physical | 1 Online-Ressource (XIII, 208 p. 182 illus., 160 illus. in color) |
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| publishDate | 2019 |
| publishDateSearch | 2019 |
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| publisher | Springer Singapore Springer |
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| series2 | Springer Series in Materials Science |
| spelling | Wei, Jingsong Verfasser aut Laser Heat-Mode Lithography Principle and Methods by Jingsong Wei 1st ed. 2019 Singapore Springer Singapore 2019 Singapore Springer 1 Online-Ressource (XIII, 208 p. 182 illus., 160 illus. in color) txt rdacontent c rdamedia cr rdacarrier Springer Series in Materials Science 291 0933-033X Surface and Interface Science, Thin Films Optics, Lasers, Photonics, Optical Devices Microwaves, RF and Optical Engineering Optical and Electronic Materials Surfaces (Physics) Interfaces (Physical sciences) Thin films Lasers Photonics Microwaves Optical engineering Optical materials Electronic materials Erscheint auch als Druck-Ausgabe 978-981-150-942-1 Erscheint auch als Druck-Ausgabe 978-981-150-944-5 Erscheint auch als Druck-Ausgabe 978-981-150-945-2 https://doi.org/10.1007/978-981-15-0943-8 Verlag URL des Erstveröffentlichers Volltext |
| spellingShingle | Wei, Jingsong Laser Heat-Mode Lithography Principle and Methods Surface and Interface Science, Thin Films Optics, Lasers, Photonics, Optical Devices Microwaves, RF and Optical Engineering Optical and Electronic Materials Surfaces (Physics) Interfaces (Physical sciences) Thin films Lasers Photonics Microwaves Optical engineering Optical materials Electronic materials |
| title | Laser Heat-Mode Lithography Principle and Methods |
| title_auth | Laser Heat-Mode Lithography Principle and Methods |
| title_exact_search | Laser Heat-Mode Lithography Principle and Methods |
| title_full | Laser Heat-Mode Lithography Principle and Methods by Jingsong Wei |
| title_fullStr | Laser Heat-Mode Lithography Principle and Methods by Jingsong Wei |
| title_full_unstemmed | Laser Heat-Mode Lithography Principle and Methods by Jingsong Wei |
| title_short | Laser Heat-Mode Lithography |
| title_sort | laser heat mode lithography principle and methods |
| title_sub | Principle and Methods |
| topic | Surface and Interface Science, Thin Films Optics, Lasers, Photonics, Optical Devices Microwaves, RF and Optical Engineering Optical and Electronic Materials Surfaces (Physics) Interfaces (Physical sciences) Thin films Lasers Photonics Microwaves Optical engineering Optical materials Electronic materials |
| topic_facet | Surface and Interface Science, Thin Films Optics, Lasers, Photonics, Optical Devices Microwaves, RF and Optical Engineering Optical and Electronic Materials Surfaces (Physics) Interfaces (Physical sciences) Thin films Lasers Photonics Microwaves Optical engineering Optical materials Electronic materials |
| url | https://doi.org/10.1007/978-981-15-0943-8 |
| work_keys_str_mv | AT weijingsong laserheatmodelithographyprincipleandmethods |