Metal impurities in silicon- and germanium-based technologies: origin, characterization, control and device impact
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Cham
Springer
[2018]
|
| Schriftenreihe: | Springer series in materials science
volume 270 |
| Schlagworte: | |
| Online-Zugang: | Inhaltstext http://www.springer.com Inhaltsverzeichnis |
| Beschreibung: | xxxiii, 438 Seiten Illustrationen, Diagramme 23.5 cm x 15.5 cm |
| ISBN: | 9783319939247 3319939246 |
Internformat
MARC
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| 245 | 1 | 0 | |a Metal impurities in silicon- and germanium-based technologies |b origin, characterization, control and device impact |c Cor Claeys, Eddy Simoen |
| 264 | 1 | |a Cham |b Springer |c [2018] | |
| 264 | 4 | |c © 2018 | |
| 300 | |a xxxiii, 438 Seiten |b Illustrationen, Diagramme |c 23.5 cm x 15.5 cm | ||
| 336 | |b txt |2 rdacontent | ||
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| 490 | 1 | |a Springer series in materials science |v volume 270 | |
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| 650 | 0 | 7 | |a Silicium |0 (DE-588)4077445-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Verunreinigung |0 (DE-588)4188107-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Metall |0 (DE-588)4038860-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Halbleiter |0 (DE-588)4022993-2 |2 gnd |9 rswk-swf |
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Datensatz im Suchindex
| _version_ | 1804180560431546368 |
|---|---|
| any_adam_object | |
| author | Claeys, Cor L. 1951- Simoen, Eddy |
| author_GND | (DE-588)1089337477 |
| author_facet | Claeys, Cor L. 1951- Simoen, Eddy |
| author_role | aut aut |
| author_sort | Claeys, Cor L. 1951- |
| author_variant | c l c cl clc e s es |
| building | Verbundindex |
| bvnumber | BV046188907 |
| classification_rvk | ZN 3460 |
| ctrlnum | (OCoLC)1057362575 (DE-599)DNB1159397783 |
| dewey-full | 621.3 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3 |
| dewey-search | 621.3 |
| dewey-sort | 3621.3 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| id | DE-604.BV046188907 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T08:37:42Z |
| institution | BVB |
| isbn | 9783319939247 3319939246 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-031568296 |
| oclc_num | 1057362575 |
| open_access_boolean | |
| owner | DE-83 |
| owner_facet | DE-83 |
| physical | xxxiii, 438 Seiten Illustrationen, Diagramme 23.5 cm x 15.5 cm |
| publishDate | 2018 |
| publishDateSearch | 2018 |
| publishDateSort | 2018 |
| publisher | Springer |
| record_format | marc |
| series | Springer series in materials science |
| series2 | Springer series in materials science |
| spelling | Claeys, Cor L. 1951- Verfasser (DE-588)1089337477 aut Metal impurities in silicon- and germanium-based technologies origin, characterization, control and device impact Cor Claeys, Eddy Simoen Cham Springer [2018] © 2018 xxxiii, 438 Seiten Illustrationen, Diagramme 23.5 cm x 15.5 cm txt rdacontent n rdamedia nc rdacarrier Springer series in materials science volume 270 Germanium (DE-588)4135644-5 gnd rswk-swf Silicium (DE-588)4077445-4 gnd rswk-swf Verunreinigung (DE-588)4188107-2 gnd rswk-swf Metall (DE-588)4038860-8 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf Silicium (DE-588)4077445-4 s Germanium (DE-588)4135644-5 s Halbleiter (DE-588)4022993-2 s Verunreinigung (DE-588)4188107-2 s Metall (DE-588)4038860-8 s DE-604 Simoen, Eddy Verfasser aut Springer series in materials science volume 270 (DE-604)BV000683335 270 X: MVB text/html http://deposit.dnb.de/cgi-bin/dokserv?id=64f72f730f37487d8ee6c2125c698a43&prov=M&dok_var=1&dok_ext=htm Verlag Inhaltstext X: MVB http://www.springer.com Verlag B:DE-89 V:DE-601 application/pdf http://www.gbv.de/dms/tib-ub-hannover/103085596x.pdf 2019-01-25 Verlag Inhaltsverzeichnis Inhaltsverzeichnis |
| spellingShingle | Claeys, Cor L. 1951- Simoen, Eddy Metal impurities in silicon- and germanium-based technologies origin, characterization, control and device impact Springer series in materials science Germanium (DE-588)4135644-5 gnd Silicium (DE-588)4077445-4 gnd Verunreinigung (DE-588)4188107-2 gnd Metall (DE-588)4038860-8 gnd Halbleiter (DE-588)4022993-2 gnd |
| subject_GND | (DE-588)4135644-5 (DE-588)4077445-4 (DE-588)4188107-2 (DE-588)4038860-8 (DE-588)4022993-2 |
| title | Metal impurities in silicon- and germanium-based technologies origin, characterization, control and device impact |
| title_auth | Metal impurities in silicon- and germanium-based technologies origin, characterization, control and device impact |
| title_exact_search | Metal impurities in silicon- and germanium-based technologies origin, characterization, control and device impact |
| title_full | Metal impurities in silicon- and germanium-based technologies origin, characterization, control and device impact Cor Claeys, Eddy Simoen |
| title_fullStr | Metal impurities in silicon- and germanium-based technologies origin, characterization, control and device impact Cor Claeys, Eddy Simoen |
| title_full_unstemmed | Metal impurities in silicon- and germanium-based technologies origin, characterization, control and device impact Cor Claeys, Eddy Simoen |
| title_short | Metal impurities in silicon- and germanium-based technologies |
| title_sort | metal impurities in silicon and germanium based technologies origin characterization control and device impact |
| title_sub | origin, characterization, control and device impact |
| topic | Germanium (DE-588)4135644-5 gnd Silicium (DE-588)4077445-4 gnd Verunreinigung (DE-588)4188107-2 gnd Metall (DE-588)4038860-8 gnd Halbleiter (DE-588)4022993-2 gnd |
| topic_facet | Germanium Silicium Verunreinigung Metall Halbleiter |
| url | http://deposit.dnb.de/cgi-bin/dokserv?id=64f72f730f37487d8ee6c2125c698a43&prov=M&dok_var=1&dok_ext=htm http://www.springer.com http://www.gbv.de/dms/tib-ub-hannover/103085596x.pdf |
| volume_link | (DE-604)BV000683335 |
| work_keys_str_mv | AT claeyscorl metalimpuritiesinsiliconandgermaniumbasedtechnologiesorigincharacterizationcontrolanddeviceimpact AT simoeneddy metalimpuritiesinsiliconandgermaniumbasedtechnologiesorigincharacterizationcontrolanddeviceimpact |